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49 results about "Central field" patented technology

Query configuration method and system

The invention provides a query configuration method and system, and the method comprises the steps: carrying out the personalized processing of a basic query configuration template based on the context information of a first user, and obtaining a target query configuration template; analyzing the target query configuration template into an executable structure through a strategic rendering engine, and driving a front-end component to render and generate a target query interface according to the executable structure; in response to a query request initiated by the first user on the target query interface, assembling query parameters of a uniform structure and initiating the query request to a target service; and receiving a query result returned by the target service, normalizing the query result according to a result mapping rule of the basic query configuration template, and rendering and displaying the query result on the target query interface. Large-scale multiplexing and refined management and control of configuration are realized through separate design of a configuration warehouse and a central field library, and personalized processing of query configuration is realized by combining static context and dynamic context.
Owner:HAPPY ELEMENTS TECH (BEIJING) CO LTD

Remote operation device and method, remote driving system, and computer readable medium

The present application relates to a remote operation device, a remote driving system, a remote operation method, and a computer-readable medium recording a remote operation program, the remote operation device driving a vehicle by remote operation from outside the vehicle, the remote operation device including: an image acquisition unit acquiring a surrounding image of the vehicle from the vehicle; a first display unit displaying the surrounding image of the vehicle; and a second display unit displaying an object moving from a central field of view area side toward a width direction end portion in a peripheral field of view area other than the central field of view area of the first display unit, disposed on an upper side, or a lower side, or the upper side and the lower side of the first display unit.
Owner:TOYOTA JIDOSHA KK

A method and apparatus for determining the display area of ​​a combination instrument.

This invention relates to the field of vehicle design technology and discloses a method and apparatus for determining the display area of ​​a combination instrument cluster. The method includes: acquiring first simulated data of the steering wheel, second simulated data of the user's eye ellipse, and third simulated data of the combination instrument cluster display surface; determining a central field of view region based on the first simulated data, the third simulated data, and simulated data of the central eye point; translating the central field of view region based on the simulated data of the central eye point, at least one simulated data of an extreme eye point, and the third simulated data to obtain at least one extreme field of view region corresponding to each of the at least one extreme eye point simulated data; and determining the display area of ​​the combination instrument cluster based on the central field of view region and the at least one extreme field of view region. Applying the technical solution of this invention can meet the vision requirements of users of different body types, making the design position of the combination instrument cluster universally applicable.
Owner:AVATR CO LTD

Plasma field uniformity adjusting device

The invention discloses a plasma field uniformity adjusting device which comprises a cavity cover, a coil, a first adjusting piece, an air nozzle and a second adjusting piece, and through the first adjusting piece and the second adjusting piece, when a small-size wafer is processed or the plasma concentration of a central area needs to be increased, the coil can rotate and contract centripetally so as to increase the central field intensity; the gas nozzle can be close to the center of the working cavity to increase central gas concentration; when a large-size wafer is processed or the plasma concentration of a central area needs to be reduced, the coil can be centrifugally rotated and diffused to reduce the central field intensity, and the gas nozzle can be far away from the center of the working cavity to reduce the central gas concentration; the distribution of plasmas can be improved in a targeted manner by winding and unwinding the coil or changing the radial position of the air tap; and through cooperative adjustment of the coil and the gas nozzle, dynamic matching of plasma distribution and reaction gas conveying can be realized, and improvement of process uniformity and equipment adaptability is facilitated.
Owner:WUXI SHANGJI SEMICON TECH CO LTD

Optical fiber arrangement optimization method and device, equipment and storage medium

The invention relates to the technical field of optical fiber design, in particular to an optical fiber arrangement optimization method, device and equipment and a storage medium, according to the method, a deviation angle is calculated by correcting light cone parameters so that angle correction can be conducted on each optical fiber, and accurate matching between an optical fiber array and light cone distribution of all points of an image plane can be achieved; a single optical fiber captures echo signals of a specific view field, the view field range can be expanded without depending on increase of the number of detectors, and therefore the detector array scale is remarkably reduced while the wide view field detection capacity is guaranteed; besides, differentiated correction is carried out on each optical fiber, so that the field curvature and distortion phenomena of the optical system can be systematically compensated, and the optical fiber coupling efficiency of an edge view field is maintained at a relatively high level of a central view field; meanwhile, a fusion correction mechanism of software simulation data and actually measured data is adopted, so that the alignment deviation of the optical fiber central axis and the center of the light cone can be effectively reduced, the optical fiber coupling efficiency is greatly improved, the light energy loss is reduced, and the detection signal-to-noise ratio of weak echo signals is further improved.
Owner:JIHUA LAB

Design method of high-uniformity bitter coil and high-uniformity bitter coil

The application provides a design method of a high-uniformity Bitter coil, belongs to the field of Bitter coils, and calculates the maximum electromagnetic stress of a first Bitter coil; the thickness of a Bitter sheet is gradually increased according to a set increment on the basis of the thickness of the Bitter sheet to obtain the thickness of the Bitter sheet, a second Bitter coil is obtained, the turns of the coil in the central region of the first Bitter coil are replaced by the turns of the second Bitter coil, a new coil is obtained, the number of turns is gradually increased by 1 turn as a step from 1 turn, and the number of turns of the coil with a magnetic field uniformity less than a set value and a coil height less than a set height is obtained; the central field of the coil is calculated, and the number of turns with the highest central field is selected; and the application also provides the Bitter coil; and the workload of processing the annular conductive pad is saved.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

High-efficiency optical lens with high central field-of-view image resolution and light-emitting assembly

The utility model relates to an optical lens with high efficiency and high central field-of-view image resolution and a light-emitting assembly. The optical lens comprises a first lens, a second lens, a third lens, a fourth lens and an image surface which are arranged in sequence, the surfaces of the first lens, the second lens and the third lens are aspheric surfaces, and the Abbe coefficient of the second lens is lower than that of the other three lenses; the first surface and the second surface of the second lens are bent towards one side far away from the image surface; the vignetting diaphragm is arranged on the first surface, far away from the image surface, of the fourth lens; and the aperture diaphragm is arranged on the first surface or the second surface of the first lens, and the distance between the aperture diaphragm and the vignetting diaphragm is 23-50 mm. The lighting efficiency is high; the surfaces of the first lens, the second lens and the third lens are aspheric surfaces, so that the transverse chromatic aberration is optimized, and the abbe coefficients of the other three lenses are higher than that of the second lens, so that the overall transverse chromatic aberration is reduced; by setting the distance between the aperture diaphragm and the vignetting diaphragm, the imaging quality of the central view field can be improved.
Owner:NANNING LIAOWANG AUTOMOTIVE LAMPS CO LTD

Laser communication rapid capturing method, device and equipment and storage medium

The invention discloses a laser communication rapid capturing method, device and equipment and a storage medium, and relates to the technical field of satellite laser communication, and the method comprises the steps: obtaining ground station geographic information, satellite attitude information and satellite orbit information; correcting and compensating a ground offset vector of a target ground station relative to an imaging center point based on the ground station geographic information, the satellite attitude information and the satellite orbit information, and determining a space pointing vector; based on the space pointing vector, mapping an angular offset of a target ground station in a corresponding target coordinate system relative to a camera center view field axis into an initial aiming pointing instruction; and driving an optical axis of the laser communication terminal to directly point to a corresponding initial aiming position according to the initial aiming pointing instruction, so that the laser communication terminal captures beacon light emitted by a ground station by taking the initial aiming position as a center.
Owner:LIANGJIANXINGTONG (SHENZHEN) TECHNOLOGY CO LTD

Method for visualizing optical information

A method is provided for visualizing optical information in the central field of vision of a driver in such a way that a display (5) in the form of a virtual image is superimposed on a real traffic environment. A position of the display (5) is dynamically variable as a function of a vehicle speed, a steering angle, and a road type. Thus a horizontal and / or vertical spread of a display range (8) between a first maximum value (9) and a second maximum value (10) within which the display (5) can be displayed is varied as a function of speed, steering angle and roadway type.
Owner:DR ING H C F PORSCHE AG

System and method for optical detection of the eye

The present disclosure provides a system for optical detection of an eye, comprising: a light emitting assembly configured to form an incident light ray array comprising a plurality of incident light rays parallel to a chief ray; a half mirror configured to reflect the incident light ray array at an angle to an optical axis of the system for forming a plurality of chief rays parallel to the optical axis of the system; a first objective lens having an optical axis coinciding with the optical axis of the system for converging the plurality of chief rays formed via the half mirror reflection onto a pupil plane of a measured eye so as to form a spot array on a retina of the measured eye; and a photodetector configured to acquire a spot array image corresponding to the spot array for detecting optical performance of the retina of the measured eye. The present disclosure can simultaneously measure optical imaging quality of a central field of view of the retina along an optical axis direction and optical imaging quality of a peripheral field of view of the retina to achieve fast detection of optical quality of the eye for a wide field of view on and off the optical axis.
Owner:HANGZHOU AIVX MEDICAL TECH CO LTD

Common-path imaging optical system and method based on visible light and infrared light

PendingCN122063757AEnsure consistencyMeet the needs of large field of view imaging applicationsOptical elementsMaterials scienceOptical imaging
The invention provides a common-light-path imaging optical system and method based on visible light and infrared light, and belongs to the technical field of optical imagines.The system comprises a common-light-path receiving device, a light splitting light path, an infrared detection light path and a visible light detection light path, the light splitting light path is arranged at the light output end of the common-light-path receiving device, and the infrared detection light path is arranged at the light output end of the visible light detection light path; and the infrared detection light path and the visible light detection light path are respectively connected with the light output end of the light splitting light path. A visible light and infrared light common-path design is adopted, a common lens enables dual-band light to be transmitted along the same light path, imaging differences of a central view field, image height, geometric distortion and the like caused by different parameters of an optical axis, a focal length and the like of a traditional dual-light-path system are fundamentally eliminated, and the consistency of dual-band imaging targets is ensured. And the small focal length and large aperture design is realized through simulation matching of the lenses with different materials and curvatures, the field angle of the optical system reaches + / -30 degrees, a larger and wider irradiation and imaging range can be realized under the same optical path, and the application requirement of large-field imaging is met.
Owner:CHINA FAW CO LTD

Remote machine manipulation system, visual presentation apparatus, and visual presentation method

A remote machine manipulation system includes: a shooting unit that shoots an image of a remote machine that is remotely manipulated; and a visual presentation apparatus that receives the image shot by the shooting unit and presents an operator who manipulates the remote machine with the image by displaying the received image, the visual presentation apparatus including: a communication situation monitoring unit that detects a communication situation in the reception of the image; and a presented image control unit that determines a central field-of-view region and a peripheral field-of-view region in a display region in which the image is displayed and determines, on the basis of the communication situation detected by the communication situation monitoring unit, an image parameter related to a transmission rate of a central field-of-view image displayed in the central field-of-view region and a peripheral field-of-view image displayed in the peripheral field-of-view region.
Owner:MITSUBISHI ELECTRIC CORP

A camera stabilization and target tracking system and method based on a robotic fish

The application relates to a camera stabilizing and target tracking system and method based on a robotic fish, which comprises a holder control mechanism, a camera, a fish body control mechanism, a fish head posture sensor, a fish body posture sensor, a first controller and a second controller; the second controller comprises an image processing unit, a heading target angle controller and a feedforward controller; the application calculates the rotating angle of the holder by the horizontal distance between the target and the image point collected by the camera and the shaking angle of the robotic fish, so that the camera is more stable; and the swinging angle of the robotic fish is calculated according to the horizontal distance obtained above and the actual heading angle of the fish body measured by the fish body posture sensor, so that the robotic fish swims towards the target, the field of view of the robotic fish can be adjusted, and the target is always in the central field of view of the robotic fish.
Owner:BEIJING INST OF TECH

Large-breadth flange type telecentric field lens

ActiveCN224190312Uprevent looseningAchieve dust-tight sealing effectMountingsLight beamTelecentric lens
The utility model relates to the technical field of large-breadth infrared telecentric lens scanning, and discloses a large-breadth flange type telecentric field lens, and the main body of the field lens comprises a lens barrel and five lenses which are sequentially arranged along the light beam propagation direction. The first lens is of a biconcave structure, and the focal length is negative. The second lens is of a meniscus structure, and the focal length is positive. The third lens is meniscus-shaped, and the focal length is positive; the fourth lens is in a large-aperture plano-convex shape, and the focal length is positive; the fifth lens is a protective window lens and is in a large-aperture biplane shape, and the focal length of the fifth lens is infinite. And each lens is fixed in the lens cone through a threaded pressing ring. The focal length of the field lens main body is F420, the processing breadth is 200 * 200 mm, the central field angle is less than 0.5 degree, and the edge field angle is less than 3 degrees. Through reasonable optical design, combination of long focal length and large breadth processing is realized, the problems that an existing field lens is short in applicable focal length range and can only be used for small breadth processing are solved, and applicability and flexibility of the field lens in an industrial processing scene are effectively improved.
Owner:苏州华英光电仪器有限公司

Aberration propagation calculation and aberration control method for free-form surface imaging

The present invention discloses a method for calculating the propagation of aberrations and controlling aberrations in free-form surface imaging. Based on a given system optical path, the method calculates the object plane, image plane, entrance pupil, and exit pupil of each optical surface, and calculates the reference wavefront of the central field of view at each entrance pupil and exit pupil. The entrance pupil and field of view of the sampling system are used to generate a set of characteristic rays, and the optical path difference of the characteristic rays of each field of view from the entrance pupil of each surface to its exit pupil relative to the principal ray is calculated. The aberration field of each surface is obtained by fitting the optical path difference of the entire field of view; the contribution of each surface to the dominant aberration is determined based on the current system dominant aberration and the aberration field of each surface, thereby determining the surface to be optimized first; the aberration is reduced by optimizing the surface parameters corresponding to the current dominant aberration of the surface, and the process is repeated until the design meets the requirements. This method can effectively guide the optimization of the free-form surface imaging system, reduce the deviation of the free-form surface while ensuring imaging performance, and effectively reduce the difficulty of surface processing and detection.
Owner:ZHEJIANG UNIV

Laser transceiver system of laser radar and laser radar thereof

The utility model discloses a laser transmit-receive system of a laser radar and the laser radar thereof, and the system comprises a rotating mirror which rotates around a rotating shaft; the emission unit array emits M emission light beams and emits the M emission light beams to the environment through the first mirror surface of the rotating mirror, the emission unit array comprises N emission unit sub-arrays, and the N emission unit sub-arrays are arranged in the extension direction of the rotating shaft; the N groups of transmitting lenses are in one-to-one correspondence with the N transmitting unit sub-arrays, and the N groups of transmitting lenses are arranged along the extension direction of the rotating shaft; the receiving lens is used for receiving M echo light beams of the M emission light beams through the second mirror surface of the rotating mirror; and the receiving unit array is arranged corresponding to the transmitting unit array and is used for receiving the M echo light beams. According to the utility model, aberration can be improved, the size of a laser transmit-receive system is compressed, the adjustment efficiency of transmit-receive laser signal alignment is improved, and the heat dissipation efficiency is improved. The resolution ratio of the central field of view of the laser radar is doubled by means of the arrangement of the photoelectric detection array.
Owner:HEFEI SURESTAR TECH CO LTD

A product and method for expanding the field of view of an optical waveguide

The present application relates to a kind of products and methods for expanding the field of view of optical waveguide, the product includes waveguide sheet, coupling-in prism, array reflection film and optical wedge array;After the incident light enters the waveguide sheet as central field of view light after the coupling-in prism, the array reflection film is arranged in the inside of the waveguide sheet;The angle between the array reflection film and the total reflection surface of the waveguide sheet is θ, by changing the angle of the coupling-in prism, so that the incident angle β of the central field of view light in waveguide sheet is >2θ;The optical wedge array is arranged at the total reflection surface of the waveguide sheet exit;The optical wedge array is used to make the light of central field of view perpendicular to the total reflection surface of the waveguide sheet when entering human eye, in line with the viewing habits of human eye;The optical wedge array is composed of multiple single optical wedges in succession.
Owner:GUANGZHOU GUDONG INTELLIGENT TECHNOLOGY CO LTD

Optical systems and display devices

To provide an optical system with high light utilization efficiency. [Solution] The optical system includes a projection unit (120) that projects light from a display element (190) to form a first pupil (130), and a light guide element (110) that guides light from the projection unit to the eye point. The light guide element has a reflecting unit (150) that forms a second pupil (171) at the eye point. The reflecting unit comprises a plurality of pairs of reflecting surfaces (210), each consisting of a first and a second reflecting surface. In a first cross-section including the normals of the first and second reflecting surfaces, when the angle between the light incident on the first reflecting surface and the second reflecting surface is α(°), and the angle between the light reflected by the second reflecting surface and the first reflecting surface is β(°), with respect to the principal ray of the central field of view, 0 ≤ |α| ≤ 20 0 ≤ |β| ≤ 20 The conditions are met.
Owner:CANON KK

Light cross display device with passive depth extraction

A wearable display system including a plurality of cameras and a processor is disclosed. A grayscale camera and a color camera may be arranged to provide a central field of view associated with the two cameras and a peripheral field of view associated with one of the two cameras. One or more of the two cameras may be plenoptic cameras. The wearable display system may acquire light field information using at least one plenoptic camera and create a world model using the first light field information and first depth information stereoscopically determined from images acquired from a grayscale camera and a color camera. The wearable display system may track a head pose using at least one plenoptic camera and a world model. When an object satisfies a depth criterion, the wearable display system may track the object in the central field of view and the peripheral field of view using one or two plenoptic cameras.
Owner:MAGIC LEAP INC

Irrigation and drainage channel suitable for high-standard farmland in hilly area

The utility model provides an irrigation drainage channel suitable for a high-standard farmland in a hilly area. The irrigation drainage channel comprises a channel bottom, channel surfaces on two sides of the channel bottom and a channel top on the top of the channel surfaces, the channel bottom is a cast-in-place concrete bottom plate, the channel surfaces are composed of multiple layers of prefabricated concrete bricks, the channel top is a prefabricated concrete brick coping, and the prefabricated concrete bricks are arranged on two sides of the cast-in-place concrete bottom plate along side slopes; a middle field ridge is arranged on the side of the irrigation drainage channel, at least one drainage opening is formed in the channel surface of the irrigation drainage channel and located at the upstream of the middle field ridge, and at least one irrigation opening is formed in the channel surface of the irrigation drainage channel and located at the downstream of the middle field ridge; a side ditch is arranged on the outer side of the water pipe of the irrigation opening, and a stilling pool is arranged at the bottom of the side ditch. The channel structure combining the prefabricated concrete bricks and the concrete cast-in-place bottom plate is adopted, the construction technology is optimized, the construction period is shortened, the construction cost is low, the roughness of a water passing section is low, the water conveying and drainage effects are obvious, and good irrigation benefits are achieved; the stilling pool is arranged to prevent water from scouring the outer slope of the field ridge and the downstream field during irrigation.
Owner:POWERCHINA HUADONG ENG CORP LTD +1

A device for applying a blurring stimulus to a user's monocular or binocular vision

The application provides a method and device for applying blur stimulation to a user's monocular or binocular vision, the method comprising: obtaining a gaze point corresponding to the user's monocular or binocular vision, determining a gaze area corresponding to the user's monocular or binocular vision, and determining a central area and a peripheral area in the gaze area; forming a training image set in which the central area is clear and at least part of the peripheral area is blurred in the gaze area, and applying blur stimulation to the user's monocular or binocular vision by at least one training image in the training image set; wherein the central area corresponds to a central field of view determined by the gaze point of the user's monocular or binocular vision, the peripheral area corresponds to a peripheral field of view determined by the gaze point of the user's monocular or binocular vision, and the training image set contains at least one training image. Through the application, blur stimulation can be applied to the user's monocular or binocular vision based on the gaze point corresponding to the user's monocular or binocular vision.
Owner:OLIN OPTICAL TECH (SUZHOU) CO LTD

Large numerical aperture dispersion objective lens considering both temperature adaptability and linearity

PendingCN120871391AOptical elementsIdeal imageImaging quality
The invention discloses a large numerical aperture dispersion objective lens considering both temperature adaptability and linearity, which comprises a doublet lens and a plurality of single lenses which are coaxially arranged, light rays emitted by a continuous spectrum point light source pass through the dispersion objective lens, and then light rays with different wavelengths are converged to different positions of an optical axis, and quadratic function fitting is carried out on the wavelength and the corresponding central view field focusing position by adopting a least square method, so that lens parameters are optimized to obtain relatively ideal imaging quality and dispersion linearity on the premise of ensuring the numerical aperture, the working distance, the axial dispersion range and the temperature adaptability. Therefore, the dispersion objective lens has a larger numerical aperture and better linearity, and can be applied to high-resolution and high-precision non-contact measurement.
Owner:HEFEI UNIV OF TECH

Microscope objective

The present application relates to a kind of microscope objective, which includes sequentially arranged from image side to object side: the first lens group with negative focal power;Second lens group with positive focal power and third lens group with positive focal power;The microscope objective satisfies the relationship formula: 1.5<|H2 / H3|<5;0.05<|H1 / H2|<1;Wherein, wherein, H1 represents the lowest projection height of central field edge light in the third lens group in the lens surface;H2 represents the highest projection height of central field edge light in the lens surface of the second lens group;H3 represents the projection height of central field edge light in the lens surface closest to image side in first lens group.The numerical aperture of the microscope objective can reach 1.25 at most, the field number can reach 32, the range of waveband chromatic aberration correction can reach 380nm-1700nm, and good fluorescence performance can be guaranteed.
Owner:NINGBO SUNNY INSTR

A method, device, equipment and medium for simulating optical imaging of a space target by a space-borne sensor

The application discloses a kind of spaceborne sensor optical imaging simulation method, device, equipment and medium to space target, method includes: constructing field of view model, the visibility screening is carried out to the star and all space targets detected in field of view model, along with the direction of observation satellite central field of view, establish reference plane, field of view model is transferred to reference plane;All visible stars and space target J2000 position is converted to reference plane;According to the star value of space target and star, the equivalent pixel point size and brightness are calculated, and simulation image is drawn.The application is processed by adopting field of view model construction and visibility analysis, the visibility judgment of super large scale star and space target is handled, and the calculation speed is improved, the calculation efficiency is greatly improved, effectively supports the real-time demand of large-scale space situation simulation system.
Owner:ZHONGKE XINGTU MEASUREMENT & CONTROL TECH CO LTD

Optical lens for a video displacement meter

The application relates to the technical field of optical lenses, in particular to an optical lens for a video displacement meter, which comprises a first lens, a second lens, a third lens, a diaphragm, a fourth lens, a fifth lens, a sixth lens and a seventh lens arranged in sequence along the light incidence direction, that is, a six-group seven-piece structure is adopted to meet the use requirements. The central field MTF value of the optical system is greater than 0.2 at 250 lp / mm, the edge field MTF value is greater than 0.2 at 200 lp / mm, the Fno is 2.6, the relative luminance is greater than 50%, the total optical length is less than 15 mm, the use object distance is short, is 20 mm, the horizontal object height is 35 mm, the optical distortion is 15%, and the optical lens is suitable for a 1 / 2.7 chip used by the video displacement meter.
Owner:FOCTEK PHOTONICS INC

Imaging optical system lens, image capturing device and electronic device

An imaging optical system lens, an image capturing device and an electronic device are disclosed. The imaging optical system lens includes six lenses. The six lenses are sequentially arranged from an object side to an image side of an optical path as a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens. Each lens has an object side surface facing the object side and an image side surface facing the image side. The first lens has negative refractive power. The object side surface of the first lens is concave near an optical axis. The image side surface of the first lens is convex near the optical axis. The second lens has positive refractive power. The object side surface of the second lens is convex near the optical axis. The image side surface of the second lens is concave near the optical axis. The fifth lens has positive refractive power. When certain conditions are met, the spherical aberration of the central field of view can be reduced.
Owner:LARGAN PRECISION

Off-axis reflective collimator focal plane assembly position calibration device and method

PendingCN122083883AAchieving Calibration AccuracyEasy to adjustAngle measurementUsing optical meansAutocollimationRay
This invention discloses a device and method for calibrating the focal plane assembly position of an off-axis reflective collimator, solving the problem that existing technologies cannot achieve accurate calibration of the focal plane position of an off-axis reflective collimator. The calibration device includes an autocollimation component, an angle measuring component, a translation stage calibration component, and a digital microscopy system. The autocollimation component and the angle measuring component work together to calibrate the actual central field of view of the off-axis reflective collimator; the translation stage calibration component is used to calibrate the movement direction of the translation stage; the autocollimation component, the angle measuring component, and the digital microscopy system work together to calibrate the position of the target plate, ensuring that it is parallel to the focal plane of the off-axis reflective collimator and that its center coincides with the actual central field of view of the off-axis reflective collimator. This calibration device can quickly and optimally adjust the principal ray direction of the central field of view of the off-axis reflective collimator and the relative position between the focal plane and the target plate and translation stage, thereby improving calibration accuracy.
Owner:XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI

Plasma field uniformity adjustment device

The application discloses a plasma field uniformity adjusting device, which comprises a cavity cover, a coil, a first adjusting part, an air nozzle and a second adjusting part. When processing small-size wafers or increasing the plasma concentration in the central area, the coil can be contracted in the centripetal direction to increase the central field strength, and the air nozzle can be close to the center of the working cavity to increase the central gas concentration. When processing large-size wafers or reducing the plasma concentration in the central area, the coil can be expanded in the centrifugal direction to reduce the central field strength, and the air nozzle can be away from the center of the working cavity to reduce the central gas concentration. By adjusting the radial position of the coil and the air nozzle, the distribution of the plasma can be improved. By the coordinated adjustment of the coil and the air nozzle, the dynamic matching between the plasma distribution and the reaction gas delivery can be realized, and the process uniformity and the equipment adaptability can be improved.
Owner:WUXI SHANGJI SEMICON TECH CO LTD