This application provides a method for increasing winding density using longitudinal slots in a spacer layer, comprising: Step 1, providing a substrate and forming an interlayer
dielectric layer on the substrate; Step 2, performing a first
etching to form a first trench in the interlayer
dielectric layer for filling an M1
metal layer; Step 3, performing a second
etching to form a second trench in the interlayer
dielectric layer for filling a spacer layer that blocks the M1
metal layer and a third trench for achieving
interconnection between portions of the M1
metal layers; Step 4, depositing a spacer layer in the second and third trenches, forming a longitudinal slot in the spacer layer located in the third trench; Step 5, filling the first trench and the longitudinal slot with an M1 metal layer. The longitudinal slots formed by the spacer layer deposition enable
interconnection between metal lines in the same layer, replacing traditional upper metal
layers and vias, saving traces for back-end
layout and wiring, reducing process costs, reducing
parasitic capacitance and resistance, and improving
chip performance.