48results about How to "Securing uniformity" patented technology

A polishing pad includes at least a polishing layer and a cushion layer and is characterized in that the difference in hardness in Shore D hardness between the polishing layer and the cushion layer is 3 or more.

A polishing pad includes a polishing layer having abrasive grains dispersed in a resin and is characterized in that the resin is a resin containing ionic groups in the range of 20 to 1500 eq / ton.

A non-invasive blood glucose measurement method using a magneto-resonance absorption method. A constant magnetic field is applied using a pair of permanent magnets, the magnetic field having a uniform strength. A triangular waveform low frequency modulation magnetic field is applied using a low frequency generator and a pair of low frequency coils, the low frequency modulation magnetic field having a uniform strength. A weak acoustic wave modulation magnetic field is applied using an acoustic wave generator and a pair of acoustic wave coils. Electromagnetic waves are applied to a detector in which a finger is positioned to produce a nuclear magneto-resonance, the electromagnetic waves having a frequency varying in a specific frequency band step by step, the applying being done using a high frequency generator and a sensor coil. A magneto-resonance absorption signal produced by spin-lattice relaxation of protons in a tissue of the finger because of the nuclear magneto-resonance is detected. A magneto-resonance spin-lattice relaxation time of the finger from the magneto-resonance absorption signal is determined. A blood glucose concentration in a human body is determined from a correlation between a pre-determined blood glucose concentration in the human body and the determined magneto-resonance spin-lattice relaxation time.

A method of producing a polishing pad having a polishing layer is characterized in that the polishing layer is produced by a photolithographic method including: forming a sheet molding from a curing composition containing at least an initiator and an energy ray-reactive compound to be cured with energy rays; exposing the sheet molding to energy rays to induce modification thereof, to change the solubility of the sheet molding in a solvent; and developing the sheet molding after irradiation with energy rays, to partially remove the curing composition with a solvent thereby forming a concave and convex pattern at least one surface.

A vehicular lighting fixture can include a shade wherein an end edge of an upper surface of the shade is positioned at or in a vicinity of a focus of a projection lens. A first reflection surface can be provided to condense light from a light source in a vicinity of the end edge and to form a basic light distribution pattern by the projection lens. A second reflection surface which can comprise one planar reflection surface and can reflect light from the first reflection surface to form a first additional light distribution pattern. A third reflection surface can be provided on a higher surface of a step section of the upper surface, and can reflect light from the first reflection surface to form a second additional light distribution pattern. A fourth reflection surface can connect the second and third reflection surface, and can reflect the light from the first reflection surface in a direction not incident on the projection lens.

An ion beam extractor controls a direction and an intensity of ion beams by adjusting a voltage applied to a grid having slits formed therein, thereby enhancing uniformity of an etching rate of a wafer, leading to an increase of productivity of semiconductor diodes. The ion beam extractor comprises an ion source to produce an ion beam and at least one grid located at a rear end of the ion source in a progressing path of the ion beam produced by the ion source to adjust a direction of the ion beam by controlling a voltage applied to the at least one grid.

According to the present invention, there is provided a fluorine-containing sulfonate resin having a repeating unit of the following general formula (3).In order to prevent deficiency such as roughness after pattern formation or failure in pattern formation, the fluorine-containing sulfonate resin incorporates therein a photoacid generating function and serves as a resist resin in which “a moiety capable of changing its developer solubility by the action of an acid” and “a moiety having a photoacid generating function” are arranged with regularity.

To provide a sputtering apparatus and method, and a sputtering control program which are configured simply and can secure the uniformity of the film thickness from the beginning to the end of the use of a target.There are provided: a target 15 disposed so as to face an object to be treated 19; a permanent magnet unit M which generates a high-density plasma by means of a magnetic field and deposits a material of the target 15 on the object to be treated, in the form of a film; a rotational mechanism 9 which rotates the permanent magnet unit M; and a rotation number control apparatus 7 which gradually changes the number of rotations of the permanent magnet unit M rotated by the rotational mechanism 9. The rotation number control apparatus 7 has a rotation number setting section 702b for setting the number of rotations to be switched, a switching time setting section 702a for setting the time for switching, a detection section 703 for detecting the switching time, a selecting section 704 for selecting the number of rotations at the switching time, and a switching section 705 for outputting an instruction of switching to the selected number of rotations.

A heat processing apparatus for heating a mask substrate is disclosed. A mask substrate on which a coating solution has been coated is placed on a heating plate that heats the substrate. A frame member is disposed on the heating plate so that the frame member faces a side surface of the mask substrate placed on the heating plate when the frame member is attached to the heating plate and that a clearance is formed between the frame member and the heating plate when the frame member is attached to the heating plate. The frame member suppresses heat radiated from the side surface of the substrate. As a result, the temperature uniformity of the surface of the substrate can be improved. In addition, since the clearance is formed between the frame member and the heating plate, particles do not accumulate in the region. Thus, adhesion of particles to the substrate can be suppressed.

A plasma processing method performs a desired plasma process on substrates by using a plasma generated in a processing space. A first and a second electrode are disposed in parallel in a processing vessel that is grounded, the substrate is supported on the second electrode to face the first electrode, the processing vessel is vacuum evacuated, a desired processing gas is supplied into the processing space formed between the first electrode, the second electrode and a sidewall of the processing vessel, and a first radio frequency power is supplied to the second electrode. The first electrode is connected to the processing vessel via an insulator or a space, and is electrically coupled to a ground potential via a capacitance varying unit whose electrostatic capacitance is varied based on a process condition of the plasma process performed on the substrate.

Provided are a crystalline alloy having significantly better thermal stability than an amorphous alloy as well as glass-forming ability, and a method of manufacturing the crystalline alloy. The present invention also provides an alloy sputtering target that is manufactured by using the crystalline alloy, and a method of manufacturing the alloy target. According to an aspect of the present invention, provided is a crystalline alloy having glass-forming ability which is formed of three or more elements having glass-forming ability, wherein the average grain size of the alloy is in a range of 0.1 μm to 5 μm and the alloy includes 5 at % to 20 at % of aluminum (Al), 15 at % to 40 at % of any one or more selected from copper (Cu) and nickel (Ni), and the remainder being zirconium (Zr).

Provided is a pouch type lithium secondary battery having a tubular passage structure. The pouch type lithium secondary battery having a tubular passage structure includes: a tubular passage structure having a passage of injecting an electrolyte from an outer portion of a pouch and discharging gas from an inner portion of the pouch by communicating the inner portion of the pouch with the outer portion of the pouch.