The invention discloses a
cell panel with a selective
phosphorus doping structure and a preparation method thereof, and relates to the technical field of solar cells, the
cell panel comprises a substrate, the front surface of the substrate is sequentially provided with a P + emitter layer, an aluminum
oxide passivation layer and a
silicon nitride anti-reflection layer, a tunneling
oxide layer, a
phosphorus-doped
polycrystalline silicon layer, an aluminum
oxide passivation layer and a
silicon nitride anti-reflection layer are sequentially arranged on the reverse side; wherein a selective
phosphorus heavily-doped region is arranged in the phosphorus-doped
polycrystalline silicon layer, and the phosphorus content in the selective phosphorus heavily-doped region is greater than that in the phosphorus-doped
polycrystalline silicon layer, so that a region which needs to form low-resistance
ohmic contact with a
metal electrode has higher carrier concentration; the
contact resistance between the
metal electrode and the phosphorus-doped polycrystalline
silicon layer is reduced, and efficient collection of
photon-generated carriers is facilitated; the main
body region of the phosphorus-doped polycrystalline silicon layer keeps relatively low
phosphorus concentration, thereby effectively preventing excessive phosphorus from diffusing to the aluminum
oxide passivation layer to weaken the
passivation effect, and further reducing the carrier recombination loss.