The invention discloses a high-reflectivity deep ultraviolet micro-LED with an inverted structure and a preparation method of the deep ultraviolet micro-LED. P-type ohmic contact metal is etched, thereserved P-type ohmic contact metal is a two-dimensional array composed of a plurality of small pattern units arranged periodically, a micro-grid P-type ohmic contact electrode is formed, Al metal isdeposited on the micro-grid P-type ohmic contact electrode, a reflecting layer is formed to cover a micro-mesa, the Al metal is completely embedded into a gap of the micro-grid P-type ohmic contact electrode, and the inclination angle of the side wall of the micro-mesa is adjusted between 30 degrees and 90 degrees. According to the invention, the micro-grid P-type ohmic contact electrode is adopted, the absorption loss of ultraviolet light in the LED structure is reduced, and the reflection of the ultraviolet light at the electrode is enhanced by the Al metal, so that most of emergent light isemitted from the back surface of the inverted structure, and the light extraction efficiency of the ultraviolet light in the UV LED is greatly improved; and the deep ultraviolet micro-LED is high inflexibility, is compatible with in-plane and vertical-structure inverted micro-LEDs, mini-LEDs and the like, facilitates the improvement of the performance of a device, and achieves the batch production.