Low-loss deep-ultraviolet multilayer film production method
A deep-ultraviolet multi-layer film and low-loss technology, which is applied in the field of deep-ultraviolet optical technology applications, can solve the problems of large absorption loss and large scattering loss of optical thin film systems, and overcome the relatively loose internal structure and avoid absorption loss Great effect of reducing absorption loss
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[0014] Such as figure 1 Shown, the preparation method of low-loss deep ultraviolet multilayer film of the present invention, this preparation method comprises the following steps:
[0015] Step 1. Ultrasonic cleaning, slow dehydration, and N 2 drying;
[0016] Step 2. According to the film system structure in the thin film design, on the optical substrate 1 after the completion of step 1, the oxide film layer stack 2 is prepared by ion-assisted electron beam evaporation process, so as to realize a denser and smoother inner side in the multilayer film system The film system can effectively reduce the scattering loss of the multi-layer film system;
[0017] Step 3. Due to the introduction of process gas in the ion-assisted electron beam evaporation process, the background vacuum degree of the coating chamber will be reduced. The thermal evaporation process needs to be deposited under a relatively high degree of vacuum, so it is necessary to wait for the vacuum degree of the c...
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