The invention relates to a
silicon solar cell and a manufacturing method thereof. the method comprises the following steps: (1) carrying out wet-type
chemical cleaning on a
silicon wafer, and
drying; (2) carrying out single-side
phosphorus source
diffusion on the
silicon wafer; (3) placing the silicon
wafer into an
oxide furnace, and forming an
oxide layer; (4) carrying out primary photoetching on the
frontage of the silicon wafer; (5) removing the
oxide layer of the photoetching
graphics part of the silicon wafer; (6) carrying out whirl
coating protection on the
diffusion surface of the silicon wafer, and then corroding the oxide layer at the back surface; (7) carrying out single-side
phosphorus source anew partial
diffusion on the silicon wafer; (8) removing the oxide layer at the back surface of the silicon wafer; (9) evaporating a Ti / Pd /
Ag electrode on the back surface of the silicon wafer, and then annealing; (10) firstly carrying out whirl
coating protection on the back surface of the silicon wafer, and removing an optical
resist at the back surface of the silicon wafer; (11) evaporating an
indium tin film at the
frontage of the silicon wafer by utilizing a magnetic control
sputtering device; (12) carrying out secondary photoetching on the
frontage of the silicon wafer; (13) carrying out
tertiary photoetching on the frontage of the silicon wafer; and (14) removing the optical
resist at the frontage of the silicon wafer, and annealing. According to the invention, the
cell conversion efficiency can be improved effectively; and the
cell and method provided by the invention can be widely used in the field of solar cells.