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Piezoelectric driving device of functional gradient structure and its preparing method

A technology of piezoelectric actuators and functional gradients, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve Expensive, increase production costs, limit wide application and other issues, to achieve the effect of increased fracture strength, improved mechanical properties and service characteristics, improved working stability and service life

Inactive Publication Date: 2007-04-11
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the overall performance of PZT / Pt functionally graded piezoelectric actuators is superior, the high price of Pt increases the production cost and limits the wide application in practice.

Method used

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  • Piezoelectric driving device of functional gradient structure and its preparing method
  • Piezoelectric driving device of functional gradient structure and its preparing method
  • Piezoelectric driving device of functional gradient structure and its preparing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Commercially available PZT powder (Japan Sakai Chemical Industry Co., Ltd., Zr / Ti molar ratio is 0.516 / 0.484, and the average particle diameter is 0.97 micron) and Ag powder (Japan High Purity Chemical Company, the purity is 99.9wt%, and the average particle diameter is 2.0 microns) as raw materials, sintered at 1200 °C to prepare a PZT / 5%Ag / 15%Ag three-layer composite functionally gradient piezoelectric actuator, the thickness of each layer is about 0.33 mm, and the size of the cantilever beam is 12×2× 1 mm.

Embodiment 2

[0024] Commercially available PZT powder (Japan Sakai Chemical Industry Co., Ltd., Zr / Ti molar ratio is 0.516 / 0.484, and the average particle diameter is 0.97 micron) and Ag powder (Japan High Purity Chemical Company, the purity is 99.9wt%, and the average particle diameter is 2.0 microns) as raw materials, sintered at 1160 ° C to prepare a PZT / 1%Ag / 5%Ag / 10%Ag / 15%Ag five-layer composite functional gradient piezoelectric actuator, each layer thickness is about 0.4 mm, The cantilever beam dimensions are 15 x 3 x 2 mm.

Embodiment 3

[0026] Commercially available PZT powder (Japan Sakai Chemical Industry Co., Ltd., Zr / Ti molar ratio is 0.516 / 0.484, and the average particle diameter is 0.97 micron) and Ag powder (Japan High Purity Chemical Company, the purity is 99.9wt%, and the average particle diameter is 2.0 microns) as raw materials, sintered at 900 ° C to prepare a seven-layer composite functional gradient piezoelectric actuator of 1%Ag / 3%Ag / 5%Ag / 10%Ag / 5%Ag / 3%Ag / 1%Ag , the thickness of each layer is about 0.2 mm, and the size of the cantilever beam is 8×2×1.5 mm.

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Abstract

This invention relates to a piezoelectric drive device and its preparation method for a function grads structure, which applies a powder sinter method to composite PZT piezoelectric ceramics and Ag to form a piezoelectric ceramic compound material with varied Ag composition grads by altering Ag content one layer by one layer, coats Ag electrode on the up and down surfaces of the material and cuts it to molding to get a piezoelectric driver of the PZT / Ag functional grads structure, the sinter temperature of the material is 900-1200deg.C and the maximum content of Ag is 15vol%.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric actuators with cantilever beam structures, and in particular provides a piezoelectric actuator with a functional gradient structure and a preparation method thereof. A piezoelectric actuator with a ceramic / metal functionally graded structure that can be used for micro-displacement or micro-flow control and can work stably for a long time. Background technique [0002] Piezoelectric actuators (also called actuators, motors, actuators, etc.) are used as automatic control and precise positioning components, and are widely used in important fields such as industrial control, medical equipment, home appliances, automobile industry, and aerospace industry. The bimorph piezoelectric actuator connects the two ceramic sheets with the middle metal sheet through an organic adhesive. Due to the existence of the bonded interface, the phenomenon of interface stress concentration and cracking occurs during...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/08H01L41/18H01L41/22H02N2/00H10N30/00H10N30/053H10N30/85
Inventor 张海龙张波萍王丹
Owner UNIV OF SCI & TECH BEIJING
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