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138 results about "Bonded interface" patented technology

Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide

The present invention provides a method for removing or reducing the thickness of ultrathin interfacial oxides remaining at Si—Si interfaces after silicon wafer bonding. In particular, the invention provides a method for removing ultrathin interfacial oxides remaining after hydrophilic Si—Si wafer bonding to create bonded Si—Si interfaces having properties comparable to those achieved with hydrophobic bonding. Interfacial oxide layers of order of about 2 to about 3 nm are dissolved away by high temperature annealing, for example, an anneal at 1300°-1330° C. for 1-5 hours. The inventive method is used to best advantage when the Si surfaces at the bonded interface have different surface orientations, for example, when a Si surface having a (100) orientation is bonded to a Si surface having a (110) orientation. In a more general aspect of the invention, the similar annealing processes may be used to remove undesired material disposed at a bonded interface of two silicon-containing semiconductor materials. The two silicon-containing semiconductor materials may be the same or different in surface crystal orientation, microstructure (single-crystal, polycrystalline, or amorphous), and composition.
Owner:GLOBALFOUNDRIES INC

Test method for anti-permeability performance of fluid sealant and substrate bonding sample interface

The invention discloses a method for testing interface impervious strength of the sample bonded by sealant and base material. The method comprises: reserving a seam cavity of a certain size in the middle of the bonded base material sample, filling sealant into the seam cavity to bond the base material and the sealant into an integral body to obtain a impervious sample of the size matching the water pressure chamber; maintaining the impervious sample in the environment with temperature of 20+/-2 degrees centigrade and relative humidity of 65+/-5% for 28 days; fixing the tested cylindrical impervious sample into a steel sample jacket mould; placing upon the water pressure chamber of impervious instrument ensuring that the bonded interface of the sealant and base material is the only channel of the pressure water; increasing the water pressure of the permeability instrument at regular intervals for 0.1MPa each time from 0.1MPa until water seeps from the impervious sample surface; and determining the previous water pressure as the impervious strength of the interface of base material and sealant. The invention has simple operation, need not adding other equipments, it can test the impervious strength of various composite material structure.
Owner:NORTHWEST A & F UNIV
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