Preparation method of selective emitter solar cell

Abstract

The invention discloses a preparation method of a selective emitter solar cell, comprising the following steps: providing a silicon wafer for carrying out surface texturization; printing a diffusion permeable membrane on the silicon wafer by a first silk-screen printing plate; covering a non-electrode region by using the diffusion permeable membrane printed by the first silk-screen printing plate, exposing an electrode region to be printed; forming a light diffusion layer for the silicon wafer in the non-electrode light-affected region with the permeable membrane, and forming a heavy diffusion layer in the electrode region without the permeable membrane to be printed; carrying out corrosion for removing peripheral PN nodes, washing the membrane, and removing phosphosilicate glasses; preparing a passivation layer and an antireflection layer; and printing by the printing screen printing plate and sintering to form a back Ag electrode, a back Al-BSF and a front Ag electrode. The preparation method for the selective emitter solar cell provided by the invention adopts one-time diffusion to form the light and heavy doping required by the selective emitter solar cell, thereby reducing one-time high-temperature diffusion process, simplifying processes of the technology, and lowering the cost.

Description

technical field [0001] The invention relates to a method for manufacturing a semiconductor element, in particular to a method for preparing a selective emitter solar cell, and belongs to the technical field of solar cell production. Background technique [0002] The production requirement of selective emitter solar cells is to form a highly doped deep junction region in the area under the front electrode grid line, so as to form a better ohmic contact; to form a low doped shallow junction region in other regions, that is, the active light-receiving region , thereby reducing the recombination of minority carriers, and a higher short-circuit current can be obtained. Therefore, in two aspects, the battery can obtain higher conversion efficiency. [0003] The realization of ohmic contact and the improvement of current are a pair of contradictions in traditional structural batteries. Therefore, how to realize the production of selective emitter cells in mass production has alwa...

AI Technical Summary

Problems solved by technology

[0005] The cost of using this method to produce SE batteries has been greatly reduced, but this method uses multiple high-temperature heat treatments such as diffusion and oxidation. The process steps are still relatively complicated, and the internal damage and energy consumption of the silicon wafer are large, and the cost remains Much higher than the current conventional process solar cells

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