Quantum cascade laser regular polygonal microcavity laser and manufacturing method thereof

Abstract

The invention discloses a quantum cascade laser regular polygonal microcavity laser, comprising a substrate of a quantum cascade epitaxial layer, a lower limiting layer positioned on the substrate, an active area / an injecting area positioned on the lower limiting layer; an upper limiting layer arranged on the active area / an injecting area, and an upper wrapping layer containing an ohmic contact layer, wherein the side walls of the lower limiting layer, the active area / the injecting area, the upper limiting layer and the upper wrapping layer are wrapped by an insulating layer which is wrapped by a front electrode layer. The invention discloses a manufacturing method of the quantum cascade laser regular polygonal microcavity laser simultaneously. The invention uses a SiO2 insulating layer and a Ti / Ag / Au electrode layer to wrap the etched side wall of the quantum cascade laser regular polygonal microcavity laser, thus enhancing the limitation for the light field in a microcavity, and improving the quality factor of the mode in the microcavity; and the laser has simple structure and convenient manufacturing technique.

Description

technical field [0001] The invention relates to the technical field of semiconductor optoelectronic devices, in particular to a quantum cascade regular polygonal microcavity laser in the mid-to-far infrared band and a manufacturing method thereof. Background technique [0002] Semiconductor lasers in the mid-to-far infrared band are widely used in many fields such as air pollution monitoring, trace gas detection, molecular spectroscopy, and infrared interference. [0003] Quantum cascade lasers use micro-optical resonators, which have two main advantages. On the one hand, the gain of the quantum cascade material is low, while the microcavity laser has a small mode volume and a high mode quality factor, and a high quality factor is beneficial to the lasing of the quantum cascade laser. On the other hand, the inherent TM mode polarization of quantum cascade lasers prevents the loss perpendicular to the plane of the laser, which is especially suitable for whispering gallery mo...

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Problems solved by technology

The disadvantage of this method is that the stripping process with glue has great limitations, and the thickness of the evaporated metal film layer should not be too large, otherwise it will be difficult to peel off; the quality of the evaporated metal electrode film layer is not high

When the cylinder diameter is small, wire bonding becomes difficult, and testing with microprobe contacts also causes process inconvenience

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