The invention provides a packaged echo wall mode
bottle-shaped microcavity
sound pressure sensor based on sound focusing enhancement. The packaged echo wall mode
bottle-shaped microcavity
sound pressure sensor comprises a packaging substrate, an echo wall mode
bottle-shaped microcavity, an
optical fiber pyrometric cone and an acoustic focusing lens, wherein the
optical fiber pyrometric cone and the bottle-shaped microcavity form a
coupling system, and the thinnest part of the cone region of the
optical fiber pyrometric cone is coupled with the equatorial plane of the bottle-shaped microcavity; the bottle-shaped micro-cavity is provided with a micro-cavity body, a long
handle and a short
handle, one end of the long
handle and one end of the short handle are respectively connected with the micro-cavity body, the other end of the long handle and the two ends of the optical
fiber pyrometric cone are fixed on the packaging substrate, and the other end of the short handle is suspended; the acoustic focusing lens is provided with a hollow structure, covers the
coupling system and fixedly covers the upper surface of the packaging substrate, so that a
sound pressure focusing structure is formed. The two ends of the optical
fiber pyrometric cone are fixed, and only one long-handle end of the echo wall mode bottle-shaped microcavity is fixed, so that a
cantilever beam structure is formed. The sound
pressure sensor can realize ultrahigh sensitive sound
pressure sensing.