The application discloses a
hydrogen concentration detection sensor and a
hydrogen concentration detection method, wherein the sensor comprises a substrate, a
waveguide core layer arranged on the substrate, and a cladding layer covering the
waveguide core layer; a subwavelength
grating structure is formed in the
waveguide core layer, the subwavelength
grating structure supports
modes and
modes and can generate bimode interference, the material of the waveguide core layer has a positive thermal-
optical coefficient, single-mode waveguides are coupled to two ends of the subwavelength
grating structure, an asymmetric
coupling structure is formed between the single-mode waveguides and the subwavelength grating structure, and the asymmetric
coupling structure is used for exciting two
modes of modes and modes; the material of the cladding layer has a negative thermal-
optical coefficient, the surface of the cladding layer is decorated with a
hydrogen-sensitive material layer, and the hydrogen-sensitive material layer can catalyze an exothermic oxidation reaction with hydrogen. The application converts the
hydrogen concentration change into the shift of an interference peak
wavelength, compared with a traditional sensor which only depends on a single physical effect, the sensitivity is greatly improved, the sensor is easy to be integrated on a
chip, does not need external electric driving, and is intrinsically safe and reliable.