Micro-ring resonant cavity electro-optical modulator based on graphene/molybdenum disulfide heterojunction
A technology of microring resonator and electro-optical modulator, which is applied in the field of optoelectronics, can solve the problems of low extinction ratio, poor modulation depth, and environmental temperature sensitivity, and achieve high extinction ratio, small insertion loss, and good modulation depth.
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[0027] Such as figure 1 , figure 2 As shown, the microring resonator electro-optic modulator based on the graphene / molybdenum disulfide heterojunction includes a base layer 1, a straight light waveguide 2, a microring resonator waveguide 3 and a graphene cover layer 4, a straight light waveguide 2 and The microring resonator waveguide 3 is embedded in the base layer 1, and a coupling distance is left between the straight light waveguide 2 and the microring resonator waveguide 3, and the graphene covering layer 4 partially covers the microring resonator waveguide 3 Surface; the graphene cover layer 4 includes a first graphene layer 41, a second graphene layer 42, molybdenum disulfide 43, a first electrode 44 and a second electrode 45, the first graphene layer 41 and the second graphene layer The layers 42 are isolated by molybdenum disulfide 43, the first graphene layer 41 extends outward from the microring resonator waveguide 3 side and connects to the first electrode 44, an...
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[0035] In this embodiment, a light wave with a wavelength of 1.55 μm is used, the material of the base layer 1 is silicon dioxide, the material of the straight light waveguide 2 and the microring resonator waveguide 3 is silicon nitride, and the width and thickness of the straight light waveguide 2 are 1 μm and 0.3 μm respectively. μm, the coupling pitch is 0.5 μm, the outer radius of the microring resonator waveguide 3 is 40 μm; the material of the first electrode 44 and the second electrode 45 is gold.
[0036] image 3It is a schematic diagram of the working principle of the electro-optic modulator in this embodiment, and the applied voltage can dynamically tune the absorption coefficient of graphene to light, thereby controlling the optical loss of the microring resonator waveguide 3; when the optical loss of the microring resonator waveguide 3 is very small, The light is coupled into the microring resonator waveguide 3, the straight light waveguide 2 has no signal output,...
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