58 results about "Thermo-optic coefficient" patented technology

An optical element, as well as a metasurface formed by such optical elements, for use in photonic devices, are presented. The optical element is configured and operable as a sub-wavelength resonator having predetermined optical properties defining an optical response to incident light, wherein the optical element is configured as a metal-free multi-material structure of predetermined geometry and dimensions in which each two interfacing materials have positive and negative thermo-optic coefficients, respectively, such that the optical element has a near-zero effective thermo-optic coefficient, thereby providing substantial temperature invariance of said optical properties in predetermined wavelength and temperature ranges.

The invention discloses acousto-optic chalcogenide glass with a high laser damage threshold, the chemical composition formula of the acousto-optic chalcogenide glass is GexSySez, x, y and z respectively represent the mole fractions of Ge, S and Se, x = 10-30, y = 5-40, z = 40-70, x + y + z = 100, and the microscopic network structure of the acousto-optic chalcogenide glass contains a [GeSe4] tetrahedron, a [GeSSe3] tetrahedron, a [GeS2Se2] tetrahedron, a [GeS3Se] tetrahedron, a [GeS4] tetrahedron and a Se ring. The acousto-optic chalcogenide glass provided by the invention has a relatively high laser damage threshold Fth (9.72-15.58 J / cm < 2 > at1550 / 20ns / 5kHz), a relatively low thermo-optic coefficient dn / dT and good acousto-optic characteristics and mechanical properties, is high in near-infrared band transmittance, and has a relatively high laser damage threshold while ensuring a high acousto-optic quality factor. The material can be used as a material basis for developing high-performance and high-stability infrared acousto-optic modulation devices.

The invention discloses a polydimethylsiloxane sensitization optical fiber temperature and strain simultaneous measurement sensor. The sensor comprises an incident optical fiber, an optical fiber coupler, an optical fiber patch cord, a transmission optical fiber, a sensing cavity, a reference cavity and an emergent optical fiber, an optical signal enters the optical fiber coupler through the incident optical fiber and is divided into two beams of equal-intensity light in the coupler, the two beams of light are respectively input into the transmission optical fiber through the optical fiber patch cord and then enter the sensing cavity and the reference cavity which are coated with the polydimethylsiloxane, and the light is reflected by the cavities to form interference; the interference light is transmitted back to the optical fiber coupler through respective transmission optical fibers, so that a vernier spectrum is formed; the emergent optical fiber transmits an optical signal containing temperature strain information to a spectrograph, trough drift is analyzed through a dual-wavelength matrix demodulation method, and simultaneous measurement is achieved. By combining the vernier effect, the structural advantages of the Fabry-Perot interferometer and the advantage of high thermo-optical coefficient of the polydimethylsiloxane, the invention has the advantages of low cost, high sensitivity, high stability and the like.

A temperature measurement device (1) comprises: a light emission unit (10) that generates coherent, continuous measurement-light; a light detection unit (30) that detects reflected light or transmitted light of the continuous measurement-light which is projected onto a sample (50) to be measured; and an analysis unit (42) that calculates a temperature distribution of the sample (50) to be measured on the basis of the intensity of the reflected light or the transmitted light detected by the light detection unit (30). The analysis unit (42) calculates the optical thickness of the sample (50) to be measured from a temporal change in the intensity of the reflected light or the transmitted light and, by using a refractive index distribution model representing the relationship between the optical thickness and a refractive index distribution in the thickness direction of the sample (50) to be measured at the time of a temperature change, calculates the refractive index distribution from the optical thickness, and calculates the temperature distribution of the sample (50) to be measured by converting the refractive index distribution into the temperature distribution on the basis of the thermo-optical coefficient of the sample (50) to be measured.

The application discloses a modulation-insensitive dual-mode waveguide optical switch and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices. The switch is composed of a silicon wafer substrate, a polymer lower cladding layer, a polymer optical waveguide core layer and a polymer upper cladding layer from bottom to top, the polymer optical waveguide core layer is covered in the polymer upper cladding layer, and the refractive index of the polymer optical waveguide core layer is higher than that of the polymer upper cladding layer and the polymer lower cladding layer. The application utilizes the advantages of simple asymmetric directional coupling structure and asymmetric Y branch structure and the large thermal-optical coefficient of organic polymer materials, and realizes the modulation-insensitive switch of two signal optical modes through mode conversion by using the asymmetric Y branch when the heating electrode is modulated. The preparation process of the application is simple, only needs spin coating, photoetching and wet etching, effectively reduces the production cost, improves the production efficiency of the device, is favorable for large-scale batch production, and enables the mode signal optical switch to be applied to actual use.

The present invention provides a thermo-optic phase shifter array including at least one first waveguide and at least one second waveguide, wherein the first waveguide extends along a first direction, the second waveguide extends along a second direction, the first waveguide and the second waveguide are alternately arranged in a third direction, the first waveguide includes a first waveguide segment, the second waveguide includes a second waveguide segment, the first waveguide segment and the second waveguide segment are alternately arranged in the third direction, the first waveguide segment is integrated with a heater, and the thermo-optic coefficient of the second waveguide segment is smaller than the thermo-optic coefficient of the first waveguide segment. The thermo-optic phase shifter array provided by the present invention has lower thermal crosstalk and a compact structure, which is conducive to high-density integration. The present invention also provides an interferometer array and an optical phased array.

Provided in the present application are a rare-earth-doped optical fiber having an adjustable thermo-optical coefficient, and a preparation method therefor and the use thereof. The optical fiber comprises a fiber core and a cladding, wherein the fiber core comprises the following components in molar percentages: 80-95 mol% of SiO2, 0.1-0.3 mol% of a rare earth oxide Re2O3, 0.5-10 mol% of P2O5, 0.5-10 mol% of Al2O3, 0.1-10 mol% of SiF4, and 0.1-10 mol% of a first alkali metal oxide R2O; and the cladding comprises the following components in molar percentages: 95-100 mol% of SiO2, 0.1-5 mol% of GeO2, 0.1-10 mol% of SiF4, 0.1-5 mol% of a second alkali metal oxide R2O and 0.1-5 mol% of Fe2O3. According to the rare-earth-doped optical fiber having an adjustable thermo-optical coefficient of the present application, by means of the components having different effects, the thermo-optical coefficient of the fiber core and the cladding layer is adjusted, and the loss of the cladding in a specific wave band is adjusted; and after the rare-earth-doped optical fiber is applied to an optical fiber laser, the working stability and the output power of the laser can be improved.

A laser amplifier head including plates of a laser active medium which are placed inside a housing which has an inlet port and an outlet port. A cooler includes a cooling circuit connected to the housing and suited to the circulation of a cooling liquid, a cooling duct, inside the housing, in contact with the active medium, in which the cooling liquid flows, allowing an exchange of heat between the latter and the plates, and a regulator able to regulate a temperature of the cooling liquid such that a thermo-optical coefficientdndTof the cooling liquid satisfies the following condition:<semantics definitionURL="">❘<annotation encoding="Mathematica">"\[LeftBracketingBar]"< / annotation>< / semantics>d⁢nd⁢T<semantics definitionURL="">❘<annotation encoding="Mathematica">"\[RightBracketingBar]"< / annotation>< / semantics><6⁢λ0Δ⁢T*∑φH⁢(I)where ΔT represents the difference in temperature between the cooling liquid and the plates of the active medium, ΣφH represents the sum of the hydraulic diameters of the cooling duct and λ0 represents the wavelength of the beam in a vacuum.

A rare-earth doped optical fiber (active optical fiber) is presented that exhibits a thermal coefficient of optical refraction (dn / dT) of the core region that is reduced relative to the thermal coefficient of optical refraction (dn / dT) of the surrounding cladding. The reduction of the dn / dT of the core region has been found to reduce the impact of transverse mode instability (TMI) in the presence of high levels of pump power (or other conditions that can also increase the thermal load present in the core region). Specifically, it has been found that reducing the dn / dT of the core region relative to the dn / dT of the cladding by at least 10% is sufficient to extend the temperature range in which the active optical fiber is maintained in single mode operation. The reduction of the dn / dT can be provided by modifying the dopants introduced into the core region, where, for example, it is known to introduce boron into ytterbium doped optical fibers to reduce the dn / dT of the core region.

The invention relates to chalcogenide glass with a low thermo-optical coefficient as well as a preparation method and application of the chalcogenide glass. The chalcogenide glass with the low thermo-optical coefficient is prepared from the following components in percentage by weight: 78 to 84 percent of Se; 12%-20% of Ge; and 4%-8% of As. Through specific component design, the thermo-optical coefficient is reduced, and the influence of temperature on the optical system is reduced, so that the wavefront distortion control precision of the optical system in an extreme temperature environment is ensured.

The present invention relates to the field of optical waveguide manufacturing technology, specifically disclosing an optical waveguide, a manufacturing method thereof, and an optical waveguide spot adapter. The optical waveguide is manufactured using silicon oxycarbide with a refractive index ranging from 1.457 to 2.7 (inclusive), exhibiting low transmission loss and a good thermo-optical coefficient. The optical waveguide is suitable for optical waveguide devices of various sizes and can be used for optoelectronic monolithic and hybrid integration. Furthermore, the optical waveguide can achieve single-mode transmission even with a large refractive index difference between the core and cladding, resulting in lower loss compared to standard single-mode fiber coupling. Furthermore, the provided optical waveguide manufacturing method utilizes a low process temperature during the manufacturing process, eliminating the need for high-temperature annealing and being compatible with IC manufacturing processes.

The present invention provides a rare earth-doped optical fiber for suppressing mode instability effects and a preparation method thereof, and relates to the technical field of special optical fiber preparation. The preparation method first deposits a channel region with a low refractive index in a quartz tube, and then sequentially prepares a core passive region and a core active region with different doping components to achieve different thermo-optic coefficients in the local region of the core. The present invention reduces the thermo-optic coefficient of the optical fiber and weakens the nonlinear inter-mode coupling effect by introducing a negative thermo-optic coefficient material, thereby effectively suppressing MI; at the same time, the method of rare earth ion center doping is adopted to reduce the high-order mode gain in the case of a large core, and then suppress the generation of high-order modes through a mode competition mechanism, thereby increasing the proportion of the fundamental mode; the low numerical aperture and channel structure design enable the optical fiber to have a higher high-order mode loss, suppress the fundamental mode-high-order mode coupling effect, further increase the MI threshold, and improve the beam quality.

This invention discloses an ultra-low residual amplitude modulation waveguide-optical phase modulator, comprising a first electrode layer and a second electrode layer parallel to each other. An α-phase waveguide channel and a substrate layer are disposed between the first and second electrode layers. The optical axes of the α-phase waveguide channel and the substrate layer are both perpendicular to the plane of the first electrode layer. The difference between the thermo-optical coefficient of the α-phase waveguide channel and the thermo-optical coefficient of the substrate layer is less than a preset thermo-optical coefficient difference threshold. Part of the side of the α-phase waveguide channel is covered by the substrate layer. The electric field between the first and second electrode layers uniformly covers the entire α-phase waveguide channel and the substrate layer. The two ends of the α-phase waveguide channel serve as the input and output ends of the light beam, respectively. This invention, by changing the electric field application method and thermo-optical coefficient matching, fundamentally maintains the consistency of the interference phase, thereby significantly reducing the sensitivity of RAM signals to voltage and ambient temperature fluctuations.

The utility model discloses a polydimethylsiloxane sensitization optical fiber temperature and strain simultaneous measurement sensor. The sensor comprises an incident optical fiber, an optical fiber coupler, an optical fiber patch cord, a transmission optical fiber, a sensing cavity, a reference cavity and an emergent optical fiber, an optical signal enters the optical fiber coupler through the incident optical fiber and is divided into two beams of equal-intensity light in the coupler, the two beams of light are respectively input into the transmission optical fiber through the optical fiber patch cord and then enter the sensing cavity and the reference cavity which are coated with the polydimethylsiloxane, and the light is reflected by the cavities to form interference; the interference light is transmitted back to the optical fiber coupler through respective transmission optical fibers, so that a vernier spectrum is formed; the emergent optical fiber transmits an optical signal containing temperature strain information to a spectrograph, trough drift is analyzed through a dual-wavelength matrix demodulation method, and simultaneous measurement is achieved. According to the utility model, the vernier effect, the structural advantages of the Fabry-Perot interferometer and the advantage of high thermo-optic coefficient of polydimethylsiloxane are combined, and the vernier interferometer has the advantages of low cost, high sensitivity, high stability and the like.

Provided in the present invention is a thermo-optic phase shifter array, including at least one first waveguide and at least one second waveguide, where the first waveguide extends in a first direction, the second waveguide extends in a second direction, the first waveguides and the second waveguides are alternately arranged in a third direction, the first waveguide includes a first waveguide section, the second waveguide includes a second waveguide section, the first waveguide sections and the second waveguide sections are alternately arranged in the third direction, the first waveguide section is integrated with a heater, and a thermo-optic coefficient of the second waveguide section is smaller than that of the first waveguide sections. The thermo-optic phase shifter array provided by the present invention has lower thermal crosstalk, and has a compact structure, facilitating high-density integration. The present invention further provides an interferometer array and an optical phased array.

The present invention provides a thermal compensation birefringent filter and an imaging device. The thermal compensation birefringent filter adopts a four-stage series interference polarization unit design, with the third and fourth stage interference polarization units placed in the middle, and the first and second stage interference polarization units placed on both sides. Each interference polarization unit is based on the principle of interference polarization and is based on two birefringent crystals with different refractive index temperature coefficients. The phase difference change caused by temperature change is compensated by the reasonable placement of the optical axis. The birefringence of crystals of different materials is different, and the thermo-optical coefficient is also different. The problem of spectral line drift caused by temperature change is solved, so that the working wavelength is always stable at 656.3nm (i.e., the Hα line of the sun), and the fluctuation range of the central wavelength of the spectral line does not exceed 0.002nm. The thermal compensation birefringent filter designed by the present invention has no electrical control, temperature control and mechanical devices in the system, which can reduce the physical size of the instrument and improve the stability of the instrument.

The invention provides a chiral coupling ytterbium-doped optical fiber and a high-power optical fiber laser, and relates to the technical field of optical fibers. The ytterbium-doped optical fiber sequentially comprises a central fiber core, a plurality of spiral side cores, an inner cladding and an outer cladding from inside to outside, wherein the spiral side cores are spirally wound on the central fiber core along the axial direction of the central fiber core; wherein the basic mode refractive index of at least one spiral side core in the multiple spiral side cores is different from the refractive index of the central fiber core in a preset high-order mode, and the thermo-optical coefficient of the spiral side core with the refractive index different from the refractive index of the central fiber core in the preset high-order mode is larger than that of the central fiber core. The chiral coupling ytterbium-doped optical fiber provided by the invention can effectively remove a high-order mode in the central fiber core.

The invention relates to the field of integrated optics, and particularly provides an array waveguide grating, and the array waveguide grating comprises a first array waveguide which comprises a group of first transmission waveguides which are arranged at intervals, and each first transmission waveguide comprises a first sub-waveguide and a second sub-waveguide which are arranged at intervals in a signal transmission direction; the second array waveguide comprises a group of second transmission waveguides which are arranged at intervals, the first transmission waveguides and the second transmission waveguides are arranged in a one-to-one correspondence manner, and the thermo-optical coefficient of the second transmission waveguides is greater than that of the first transmission waveguides; the phase shifter array comprises a plurality of phase shifters, and the phase shifters and the second transmission waveguides are arranged in a one-to-one correspondence mode; optical signals are coupled and transmitted to the corresponding second transmission waveguides through the first sub-waveguides, phase modulation is carried out on the optical signals through the phase shifters, and the optical signals subjected to phase modulation are coupled and transmitted to the corresponding second sub-waveguides. The scheme can effectively reduce the insertion loss of the transmission waveguide and effectively improve the modulation efficiency.

The invention discloses CsSnCl3 nanocrystal doped chalcogenide glass and acousto-optic application of the CsSnCl3 nanocrystal doped chalcogenide glass, the molar composition formula of the chalcogenide glass is 97 (0.8 GeS2-0.2 Sb2S3)-3 CsSnCl3, and CsSnCl3 nanocrystals separated out in situ through heat treatment are dispersed in the chalcogenide glass. The chalcogenide glass has the advantages as follows: the chalcogenide glass has excellent thermal mechanical properties and high robustness, the comprehensive characteristics are outstanding, the Vickers hardness, the elastic modulus, the thermo-optical coefficient, the laser damage threshold and other parameters of the chalcogenide glass are remarkably improved compared with those of current mainstream acousto-optic chalcogenide glass, and a guarantee is provided for stable operation of a device in a high-temperature and high-power environment; the CsSnCl3 nanocrystals are packaged by using the stable glass matrix, so that the problems that the Sn-based perovskite material is easy to oxidize in the environment and poor in stability are fundamentally solved; the material has good infrared acousto-optic comprehensive characteristics and an ultra-wide infrared transmission range, can be used as an acousto-optic medium to be applied to acousto-optic devices, and has a wide application prospect in the acousto-optic field.

The invention relates to the technical field of optical communication, and provides a Mach-Zehnder electro-optical modulator, a preparation method thereof and optical communication equipment. The Mach-Zehnder electro-optical modulator comprises a lithium niobate waveguide layer which is used for responding to a direct current bias electric signal so as to adjust a preset optical parameter of an input optical signal; the negative thermo-optical coefficient functional layer is positioned on the surface of the lithium niobate waveguide layer; wherein the lithium niobate waveguide layer and the negative thermo-optical coefficient functional layer form a combined layer, and the equivalent thermo-optical coefficient of the combined layer is smaller than a preset thermo-optical coefficient; and the transmission electrode is positioned on the surface, deviating from the lithium niobate waveguide layer, of the negative thermo-optical coefficient functional layer and is used for introducing a direct-current bias electric signal. According to the Mach-Zehnder electro-optical modulator, the defect that heat dissipation needs to be increased through a temperature control chip or manufacturing of a heat sink in the prior art is overcome, the state of the electro-optical modulator can be kept near the optimal direct-current bias point only by controlling parameters of the negative thermo-optical coefficient functional layer, and the purpose of restraining the heat effect of the electro-optical modulator is achieved.

The invention provides a self-reference optical temperature sensor and a preparation method thereof. The sensor comprises a wafer substrate; the temperature sensitive film is formed on the wafer substrate, and coupling gratings are arranged at the two ends of the temperature sensitive film; an optical waveguide is arranged between the coupling gratings and comprises a temperature-sensitive sensing cavity and a temperature-insensitive reference cavity which are respectively arranged on two sides; the waveguide width of the temperature-insensitive reference cavity is smaller than that of the temperature-sensitive sensing cavity; and the negative thermo-optical coefficient material film covers the temperature-insensitive reference cavity and is used for compensating the positive thermo-optical coefficient of the temperature-sensitive film, so that the temperature-insensitive reference cavity is insensitive to the temperature. According to the invention, the temperature insensitivity of the resonant cavity is realized based on the compensation of the negative thermo-optical coefficient material as the reference of the temperature-sensitive resonant cavity, the resonant wavelength difference between the sensing cavity and the reference cavity is used as the sensing basis, the output wavelength drift noise of the laser is inhibited, and the stability of the optical resonant temperature sensor is effectively improved; the device preparation method is simple and convenient.

The invention discloses a Na5Tb9F32 magneto-optical crystal and a preparation method and application thereof, the chemical formula of the Na5Tb9F32 magneto-optical crystal is Na5Tb9F32, the crystal is of a cubic structure, the space group structure is Fm-3m, and birefringence does not exist; the order of magnitude of the thermo-optical coefficient of the material reaches 10 <-6 > K <-1 >, and the Vierdet constant is 33-34 Rad.m <-1 >. T <-1 > at 1064nm; the uniform melt crystallization characteristic is realized. The Na5Tb9F32 magneto-optical crystal is of a cubic structure, and birefringence does not exist; the thermo-optical coefficient is small, and the system is suitable for a high-power and high-stability optical system; the crystals have consistent melt crystallization characteristics, and large-size crystals are easy to grow. The Na5Tb9F32 magneto-optical crystal can be prepared by adopting a well-known crystal growth method, is a novel magneto-optical material with great potential, and is very suitable for being used as a crystal element of a high-power and high-stability magneto-optical device.

The invention provides an optical switch and a silicon optical chip, the optical switch comprises a first waveguide and a second waveguide, and the first waveguide and the second waveguide are arranged in parallel; the second waveguide comprises a main body and a first slot arranged in the main body; the first waveguide is made of a first material, the main body is made of the first material, and the first gap is filled with a second material; the thermo-optical coefficient of the first material is greater than that of the second material; the optical switch is sequentially provided with an input port area, an input coupling area, a non-coupling phase modulation area, an output coupling area and an output port area in the light propagation direction, and the input port area, the input coupling area, the non-coupling phase modulation area, the output coupling area and the output port area are all arranged on the first waveguide and the second waveguide. The width of the first waveguide in the uncoupled phase modulation area is 450 nanometers, and the width of the second waveguide in the uncoupled phase modulation area is 600 nanometers. The cost is reduced while the optical switch is realized.

An optical sensor system is adapted for a sensing method using fiber segment interferometry. A sensing element with a thermo-optic coefficient larger than the thermo-optic coefficient of an optical fiber is arranged at a distal end of the fiber.

The invention relates to a micro-ring filter based on a polymer cladding. The micro-ring filter comprises an upper cladding, a micro-ring filter and a lower cladding, the upper cladding layer is a PDMS (Polydimethylsiloxane) polymer; the lower cladding is made of silicon dioxide; the micro-ring filter comprises an input grating coupler connected with an input light source, and the input light source sequentially passes through the input grating coupler, an input conical waveguide, a straight-through waveguide and a straight-through end output conical waveguide and is finally output from a straight-through end output grating coupler; and the straight waveguide is matched with an annular waveguide. Through the complementary design of the negative thermo-optical coefficient of the PDMS upper cladding and the positive thermo-optical coefficient of the silicon core layer, the self-shielding of the micro-ring resonant wavelength to the external temperature change is realized.

A thermo-optic coefficient measurement system can include a housing structure (101) configured to retain at least a first plate sample (103a), a second plate sample (103b), and a third plate sample (103c) in a stacked, alternating stagger arrangement such that a gap (105) exists between the first plate sample (103a) and the third plate sample (103c) that is the thickness of the second plate sample (103b). The system also includes a first optical device (107) connected to the housing (102) to output a first laser (107a) configured to be transmitted through the first plate sample (103a) and the third plate sample (103c) without the second plate (103b) in between. The first optical device (107) is configured to receive a first return signal. The system also includes a second optical device (109) connected to the housing (101) to output a second laser (109a) configured to be transmitted through the second plate sample (103b) only, the second optical device (109) is configured to receive a second return signal. The system includes an optical interrogator module (111) configured to be connected to the first optical device (107) to output the first laser (107a) thereto and to receive the first return signal therefrom. The optical interrogator module is configured to be connected to the second optical device (109) to output the second laser (109b) thereto and to receive the second return signal therefrom. The optical interrogator module (111) is configured to determine a thermo-optical coefficient of the second plate sample (103b) as a function of the first return signal and the second return signal at a plurality of temperatures.

A mode-selectable modulated four-mode waveguide optical switch and its manufacturing method belong to the technical field of planar optical waveguide devices. It consists of a silicon wafer substrate, a polymer lower cladding, a strip-shaped polymer optical waveguide core layer, a polymer upper cladding, and a heating electrode. The optical switch of the present invention utilizes the advantages of an asymmetric Y-branch structure and a simple MMI optical waveguide structure, as well as the large thermo-optic coefficient of organic polymer materials, to achieve switching of four optical modes by heating the MMI structure; by heating different heating electrodes, switching functions can be realized for two of the four modes, or for all four modes simultaneously; in addition, the use of polymer materials makes the device manufacturing process simpler, only requiring conventional processes such as spin coating, photolithography, and wet etching, effectively reducing production costs, improving the production efficiency of the device, and facilitating large-scale mass production, enabling this mode optical switch to be applied in practice.

The invention discloses a groove-type micro-ring resonant cavity sensor, and relates to the field of optical waveguide sensors, the sensor comprises a coupling area integrated with an S-shaped bent waveguide and a groove-type micro-ring resonant cavity formed by a groove-type waveguide formed by waveguide ridges, and the groove and the cavity of the groove-type micro-ring resonant cavity are filled with an aqueous solution with a negative thermo-optical coefficient as an upper cladding. According to the invention, the optical coupling efficiency is optimized through the design of the S-shaped bent waveguide, and the energy of an optical field is highly converged in the groove, so that the interaction efficiency of light and a to-be-detected substance is improved, and the sensing sensitivity of the sensor is improved; meanwhile, the negative thermo-optic effect of the aqueous solution is utilized to accurately compensate the positive thermo-optic effect of silicon and silicon dioxide, so that the effect that the change rate of the effective refractive index to the temperature tends to zero is achieved, the sensing sensitivity of the sensor is further improved, and the problem that in a traditional scheme, sensing sensitivity improvement and temperature drift suppression contradict with each other is effectively solved.

The invention relates to the technical field of optical waveguide manufacturing, and particularly discloses an optical waveguide, a manufacturing method thereof and an optical waveguide spot size adapter, for the optical waveguide, silicon oxycarbide with the refractive index range of 1.457-2.7 (including 1.457 and 2.7) is used as a material for manufacturing the optical waveguide, the optical waveguide has the characteristics of low transmission loss and good thermo-optical coefficient, and is suitable for optical waveguide devices with different sizes, and the optical waveguide spot size adapter is suitable for optical waveguide devices with different sizes. The optical waveguide can be used for photoelectric monolithic integration and hybrid integration, meanwhile, the optical waveguide can still achieve single-mode transmission under the condition that the refractive index difference of the core cladding is large, compared with standard single-mode optical fiber coupling, loss is low, and the provided optical waveguide manufacturing method is low in process temperature in the manufacturing process, does not need high-temperature annealing and is compatible with the IC manufacturing process.

To provide a method for solving a problem of a conventional sensing method, and an optical sensor system 100.SOLUTION: According to the present invention, an optical sensor system (100) adapted for a sensing method using fiber segment interferometry is provided, wherein at the distal end of the fiber (73) a sensing element (1. I) is arranged having a thermo-optic coefficient larger than the thermo-optic coefficient of the optical fiber (73. I).SELECTED DRAWING: Figure 4