117results about "Vacuum gauge using ionisation effects" patented technology

The invention relates to the field of electrical equipment monitoring, in particular to an intelligent online monitoring method and system for a high-voltage vacuum circuit breaker, and the method comprises the steps: receiving a circuit breaker control signal, and carrying out the electromagnetic pushing operation of a moving contact transmission rod through a started electromagnetic coil, thereby obtaining a motion transmission rod; monitoring the motion transmission rod based on a preset monitoring frequency and a displacement sensor, performing speed analysis on a displacement time sequence to obtain a displacement fluctuation index and an average displacement speed, calculating a displacement failure rate according to the displacement fluctuation index and the average displacement speed, and if the displacement failure rate is smaller than or equal to a displacement failure threshold value, determining that the motion transmission rod does not have the displacement failure. If yes, a piezoelectric sensor, an ionization sensor and a thermal conductivity sensor are used for executing vacuum inspection operation on the vacuum arc extinguish chamber, an arc extinguish vacuum index is obtained, and when the circuit breaker monitoring platform receives a safety signal or an early warning signal, online monitoring of the high-voltage vacuum circuit breaker is completed. The real-time performance and the accuracy of monitoring the high-voltage vacuum circuit breaker can be improved.

The invention relates to a vacuum degree monitoring system and method. The system comprises a sensor module and a data analysis module which are electrically connected with each other, the sensor module is arranged in one sealed chamber and is used for acquiring vacuum degree data in the sealed chamber at regular time; the data analysis module is used for receiving and storing the vacuum degree data sent by the sensor module, carrying out operation processing by utilizing the vacuum degree data and preset vacuum degree data to obtain a processing value, judging whether the processing value is in a range formed by a preset upper limit value and a preset lower limit value, and if not, outputting the vacuum degree data according to a judgment result corresponding to the processing value. And generating alarm information. According to the system, the vacuum degree change of the sealed chamber can be monitored in real time, and the corresponding vacuum degree data is stored, so that the influence of a vacuum process operation link and a semiconductor surface state of semiconductor device manufacturing on the vacuum degree can be greatly reduced, and the vacuum stability of the sealed chamber is stabilized.

The invention relates to a spacecraft orbit vacuum degree in-situ measurement device, a conversion module comprises a module main body and a diffusion grid plate with a plurality of diffusion holes, the interior of the module main body is a cavity, the diffusion grid plate is arranged in the cavity of the module main body, the side surface of the module main body is provided with an air inlet hole plate corresponding to the diffusion grid plate, and the module main body is provided with an air outlet hole; a plurality of vertical air inlet holes are formed in the air inlet hole plate; the diffusion grid plate is used for enabling the high-speed oriented molecular flow gas to enter the conversion module and then be converted into equilibrium-state gas through no less than one time of collision; one end of the detection module is communicated with the conversion module through a fixed flow guide small hole element, and the other end of the detection module is connected with the low-temperature pump through a pneumatic gate valve; and a vacuum measurement module is arranged in the detection module. According to the invention, the influence of a high-speed directional flow field on equilibrium state gas in a detection chamber can be reduced, the collision probability of the high-speed directional molecular flow entering the conversion module is increased, the equilibrium state conversion degree of the high-speed directional molecular flow is improved, and the pressure measurement precision and the measurement range are relatively high.

The invention discloses a cold cathode ionization gauge driving acquisition circuit, relates to the field of vacuum measurement, and solves the problems of signal conversion nonlinearity and large ion flow when a gauge tube works at a lower vacuum degree in the existing cold cathode ionization gauge driving acquisition technology. Comprising an ion current logarithmic acquisition circuit used for converting the ion current of the cold cathode ionization gauge into a voltage signal, a current monitoring circuit used for generating a control signal according to the voltage signal, and a voltage-controlled high-voltage driving circuit used for driving the cold cathode ionization gauge according to the control signal. The nonlinear compensation operation conditioning circuit is used for performing nonlinear compensation on the voltage signal according to the control signal to obtain an operation acquisition voltage, and the operation acquisition voltage is used for being input into an acquisition system; the non-linear problem of signal conversion is solved through the non-linear compensation circuit, negative feedback loop control is carried out through the current monitoring circuit and the voltage-controlled high-voltage driving circuit, the driving voltage of a gauge tube is reduced, and the maximum ion current is limited at a low level.

The invention relates to a method and system for detecting the vacuum degree of a vacuum arc-extinguishing chamber based on high-frequency discharge and spectral analysis, and the method comprises the steps: exciting the interior of the vacuum arc-extinguishing chamber to generate field emission current through a high-frequency electric field, and obtaining a high-frequency current peak value through the spectral analysis of the field emission current; the vacuum degree is determined according to a pre-constructed vacuum degree-high-frequency current peak value standard relation curve, a high-frequency power source is connected to a vacuum arc extinguish chamber, the output voltage of the high-frequency power source is gradually increased until a vacuum gap breaks down, the voltage waveform in the process is recorded, and the total current of a loop is calculated; calculating a capacitive current component by combining the equivalent capacitance of the loop; and selecting a stable current section between two dielectric breakdown events in the total current, intercepting a current peak signal in the section, and subtracting the capacitive current component from the total current corresponding to the peak signal to obtain the field emission current. Compared with the prior art, the method has the advantages of high sensitivity, simplicity and convenience in operation, accurate result and the like.

The invention provides a vacuum gauge tube which comprises a shell, an inner ring electrode and an outer ring electrode, the inner ring electrode is arranged in the shell, one end of the inner ring electrode is closed, the other end of the inner ring electrode is open to form a to-be-detected chamber communicated with a to-be-detected environment, a vacuum chamber is arranged on the outer side of the to-be-detected chamber in the circumferential direction, and the outer ring electrode is arranged in the vacuum chamber. And the outer ring electrode is arranged in the vacuum chamber and is coaxial with the inner ring electrode. According to the vacuum gauge tube, the inner ring electrode and the outer ring electrode are both of an annular structure, the large capacitor directly facing area can be achieved within the limited size, and therefore the precision and sensitivity of the vacuum gauge tube are improved; meanwhile, the inner ring electrode and the outer ring electrode are coaxially arranged, a more uniform and stable electric field can be formed, the vacuum degree of the environment to be measured can be accurately measured, and the measurement precision is improved.

The application discloses a cold cathode ionization gauge driving and collecting circuit, and relates to the field of vacuum measurement, which solves the problems of signal conversion nonlinearity and excessive ion current when the gauge tube works at a lower vacuum degree in the existing cold cathode ionization gauge driving and collecting technology, and comprises the following parts: an ion current logarithmic collecting circuit, which is used for converting the ion current of the cold cathode ionization gauge into a voltage signal; a current monitoring circuit, which is used for generating a control signal according to the voltage signal; a voltage-controlled high-voltage driving circuit, which is used for driving the cold cathode ionization gauge according to the control signal; a nonlinear compensation operation conditioning circuit, which is used for performing nonlinear compensation on the voltage signal according to the control signal to obtain an operation collecting voltage; and the operation collecting voltage is used for inputting into a collecting system; the problem of signal conversion nonlinearity is overcome through the nonlinear compensation circuit, and the negative feedback loop control is performed through the current monitoring circuit and the voltage-controlled high-voltage driving circuit, so that the driving voltage of the gauge tube is reduced, and the maximum ion current is limited at a lower level.

The invention is suitable for the field of hot cathode ionization vacuum gauge filament life prediction and monitoring, and provides a novel ionization vacuum gauge hot cathode filament damage state monitoring device and method, and the device comprises a damage device and a state monitoring device. The damage device comprises a hand-cranking digital display sliding table, a first flange nut, a second flange nut, a third flange nut, a fourth flange nut, a short pressing plate, a first screw rod, a second screw rod, an iridium-yttrium oxide lamp filament, a cross-shaped sliding table, a long pressing plate, a bread board, a nut and a cutter fixing clamp. The state monitoring device comprises a molecular pump set, a vacuum valve, a cold cathode ionization vacuum gauge, a vacuum chamber, a hot cathode ionization vacuum gauge, a controller, an upper computer and a high-speed camera. The operation process of the damage system provided by the invention completely meets the requirement for damage to the coating width and the depth of the lamp filament, and the precision is relatively accurate. Moreover, the change of the surface of the lamp filament in the working process of the lamp filament can be observed, and real-time damage detection can be carried out on the lamp filament on the basis of processing image information in the experiment process.

The invention provides an extremely high vacuum quantum measurement device and a measurement method. The device comprises a magneto-optical trap mechanism and a shell, the magneto-optical trap mechanism is arranged in the shell; the magneto-optical trap mechanism comprises a two-dimensional grating magneto-optical trap system, a three-dimensional grating magneto-optical trap system and a differential tube, and the shell is provided with a plurality of interfaces; the plurality of interfaces comprise an alkali metal distributor interface, an ionization vacuum gauge interface, a background gas interface, a first vacuumizing interface and a second vacuumizing interface; the two-dimensional grating magneto-optical trap system is respectively connected with an alkali metal distributor interface and a first vacuumizing interface; the three-dimensional grating magneto-optical trap system is connected with the ionization vacuum gauge interface, the second vacuumizing interface and the background gas interface, the background gas interface is provided with a variable leakage valve, the extremely high vacuum quantum measurement device and the measurement method are high in measurement accuracy, and the size of the quantum vacuum measurement device is effectively reduced.

The actual concentration, or partial pressure (58), of a target gas species in a partially-evacuated atmosphere (10) containing several gas species can be ascertained by generating a plasma (21) and by measuring (20) the intensity (24) of light emissions from the plasma (21) at characteristic emission wavelengths. The total gas pressure is measured with a total pressure gauge (17), and the relative intensities (24) of the light emissions are dependent on the said actual concentration or partial pressure (58). An equation is used, which compensates for variations in apparent emission intensity (24) arising from interactions between the different gas species. The system (100) can be used at higher pressures than known gas monitoring systems, thus reducing the need for complex vacuum systems (52).

The invention relates to a method for measuring the internal pressure of at least one vacuum interrupter (12), comprising the following steps: applying a voltage (U) between an anode and a cathode of the vacuum interrupter (12), applying a magnetic field (F) to deflect an electron path, measuring a discharge current of gas particles that have been struck and thereby ionized by electrons and have discharged in a vacuum of the vacuum interrupter (12), and measuring the internal pressure by converting the discharge current (I), wherein the measurement of the discharge current (I) is carried out in a defined sub-region (24) of the vacuum interrupter (12). The invention further relates to a measuring system (10) for operating such a method.

The invention relates to the technical field of ionization vacuum sensors, and discloses a miniature ionization vacuum sensor and a vacuum gauge, the sensor comprises at least one sensor unit, each sensor unit comprises a doped semiconductor substrate, one side surface of the doped semiconductor substrate is provided with at least one groove; the insulating dielectric layer is positioned on the surface of one side of the doped semiconductor substrate and in an area outside the groove; the electrode layer is located on the surface of one side, away from the semiconductor substrate, of the insulating dielectric layer; two-dimensional electron gas is distributed on the interface of the doped semiconductor substrate and the insulating dielectric layer and serves as a field emission electron source; a nanometer air channel is formed between the bottom of the groove and the target surface, and the target surface is the surface where the surface of the side, away from the insulating dielectric layer, of the electrode layer is located. By introducing the nano air channel, the interelectrode distance is reduced, so that the working voltage is reduced. In addition, the coulomb repulsive force effect between electrons in the two-dimensional electron gas can further reduce the working voltage.

Disclosed are an online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy. In the system, a laser device generates laser that excites the laser through fiber induced breakdown spectroscopy; a fiber coupler couples and injects the laser; a single fiber is connected to the fiber coupler to transmit the laser; one end of an LIBS probe is connected to the single fiber, and the other end of the LIBS probe extends into a vacuum arc-extinguishing chamber; the laser is induced by the LIBS probe to generate plasma, and the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe; a dichroscope is arranged on the fiber coupler to separate the laser from the plasma; a processor is connected to a camera and a spectrometer.

Aspects of the present invention relate to a power supply unit (31) configured to be integrated into a vacuum pressure gauge, the vacuum pressure gauge (1) comprising an ionization vacuum pressure sensor (3) having an anode (7) and a cathode (9). The power supply unit (31) includes a motherboard (55) and a daughterboard (65). The motherboard (55) has a first surface (57A) and a second surface (57B). A transformer (37) having a primary coil (W1) and a secondary coil (W2) is mounted to the motherboard (55). The daughterboard (65) has one or more first electrical connectors (41-n) for supplying power to the ionization vacuum pressure sensor (3), the one or more first electrical connectors (41-n) including a high voltage (HV) first electrical connector (41-1) which is electrically connected to the secondary coil (W2) of the transformer (37). The high voltage (HV) first electrical connector (41-1) is configured to be connected to the anode (7) of the ionization vacuum pressure sensor (3). The daughterboard (65) is mounted to the first surface of the motherboard (55), the one or more first electrical connectors (41-n) on the daughterboard (65) being spaced apart from the first surface of the motherboard (55). Aspects of the present invention relate to vacuum pressure gauge (1) including a power supply unit (31); a mounting arrangement of a power supply (31) to a vacuum pressure sensor (31); and a method of manufacturing a power supply unit (31).

The present invention provides a triode ionization vacuum gauge capable of accurately measuring the internal pressure of a measurement object. The triode ionization vacuum gauge involved in the present invention comprises a filament, a grid and an ion collector. The grid is arranged around the filament. The ion collector is cylindrical, arranged around the grid, and is composed of a material having a thermal conductivity of 173 W / (m·K) or more at 300 K.

The invention relates to a method for determining a pressure in a vacuum switching tube (1), comprising the steps of: providing the vacuum switching tube, which has a first electrode (3) and a second electrode (4), which have a contact state in which the first electrode and the second electrode are in contact with each other, and a spaced-away state in which the electrodes are spaced apart from each other, and a housing (2) which defines an interior space (26) in which the electrodes are arranged and which maintains a vacuum in the interior space, so that in the spaced-away state the electrodes are electrically isolated from each other by the vacuum; applying an electric field (23) and a magnetic field (24) to the interior space, so that a gas discharge is generated, wherein the orientation of the electric field in the interior space is different from the orientation of the magnetic field; measuring a current (I) of the gas discharge at a plurality of different times (t);Forming a measurement data set (I(t)) from the currents and the times, wherein the measurement data set represents the temporal evolution of the current during the gas discharge; fitting at least a part of the measurement data set with at least one fitting function (43) which has one or more fitting parameters; inferring the pressure from at least one of the fitting parameters.

The invention relates to the technical field of laser spectrum detection, in particular to a vacuum degree detection method, system and equipment based on laser-induced breakdown spectroscopy and a storage medium. A weight coefficient alpha is innovatively introduced to carry out differentiation treatment on laser energy characteristics, and the technical limitation that laser energy is equally treated as a common characteristic in traditional LIBS vacuum degree detection is broken through. Automatic accurate extraction of spectral features is realized through combination of an automatic peak searching algorithm and Savitzky-Golay filtering preprocessing, and a multi-dimensional data matrix containing the spectral features, laser energy values and vacuum degree labels is constructed to realize organic fusion of multi-source information. A partition self-adaptive weight adjustment mechanism is adopted to formulate differential compensation strategies for different vacuum degree intervals, and a weight coefficient alpha, a penalty factor C and a kernel width gamma are synchronously optimized through a grid search algorithm to achieve global optimal configuration of model parameters. And finally, the weighted SVR model is constructed, and compared with a traditional method, the average precision is improved by more than 25% within the full-scale range of 10-3Pa-104Pa on the premise that the hardware architecture is not changed.

The present invention provides a vacuum gauge capable of preventing accumulation of a substance on a sensing mechanism even when the sensing mechanism is exposed to an atmosphere into which various material gases are introduced, and capable of achieving a long life. The vacuum gauge comprises a sensing mechanism which is in contact with atmosphere in a measurement space and outputs an output signal corresponding to pressure in the measurement space; and a heater for adjusting the temperature of the sensing mechanism, the set temperature of the heater being variable.

The invention provides a carbon nanotube cold cathode miniature vacuum sensor and a field emission current response detection method thereof, and relates to the technical field of micro-nano sensing and vacuum metrology, the sensor comprises an insulating substrate, a cold cathode array is arranged on the insulating substrate, an anode electrode is arranged on the insulating substrate through an insulating pillar corresponding to the cold cathode array, and the anode electrode is connected with the cold cathode array. A glass cover plate is arranged on the insulating substrate, the cold cathode array and the anode electrode are covered by the glass cover plate to form a vacuum cavity, and the cold cathode array and the anode electrode are connected with a signal acquisition and processing module; the method comprises the steps of applying pulse voltage, collecting field emission current, carrying out noise reduction processing on the collected field emission current, carrying out temperature compensation on the field emission current after noise reduction processing, and carrying out vacuum degree calculation based on the compensated field emission current. The vertical electric field configuration design and the deep learning algorithm are fused, the performance boundary of a traditional vacuum sensor is broken through, a good technical effect is achieved, and use is convenient.

The invention discloses an MEMS ionization vacuum sensor based on magnetic field assistance and a manufacturing method thereof, and belongs to the technical field of microelectronics. The sensor comprises a glass substrate, an emitter electrode, a lead electrode, an electron emitter, a first insulating spacer layer, a grid electrode, a second insulating spacer layer, top glass, an ion deflection electrode, an ion collector, an annular electrode and a magnetic field generation part, the manufacturing method comprises the steps of preparation of the substrate and the top glass, bonding of the electron emitter, processing of the insulating spacer layer and the grid electrode, anodic bonding, laser bonding, installation of the magnetic field component and scribing. An electric field-magnetic field composite field is used for remarkably expanding the electron motion trail, the problems that an existing sensor is weak in ion flow and poor in anti-interference capacity are solved by combining the physical isolation design of an ionization and collection area, and the sensor has the advantages of being small in size, high in precision, good in consistency and low in cost and is suitable for the fields of semiconductor manufacturing and aerospace.

Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1' with a first pressure measurement range and a second pressure sensor 1'' with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for carrying out the method and to a computer program product.

The radially stacked vacuum feedthrough (10) includes the following elements (from inside to outside): a lens element (11), a first ring of glass (12), a first hollow cylinder of a first dielectric material (13), a first conductive layer (18), a second hollow cylinder of glass (14), a third hollow cylinder of ceramic (15), a second ring of glass (16), and a metal frame (17). The invention also relates to an electrode assembly based on the vacuum feedthrough, an apparatus for generating a DBD plasma discharge, a measurement apparatus for characterizing pressure and / or gas composition, and a method for operating the measurement apparatus.

The invention relates to a vacuum gauge which comprises a tube body with a cavity communicated with the external environment, an electron source and a receiving assembly, the electron source comprises an optical fiber and an electron emission layer, the light emitting end of the optical fiber is located in the cavity, the electron emission layer is arranged at the light emitting end of the optical fiber, and the electron emission layer at least comprises an electron excitation layer. The electron excitation layer is arranged on a light emitting path of laser emitted by the optical fiber, so that the electron emission layer can emit electrons under excitation of the laser, gas molecules in the cavity form gas ions with positive charges under collision of the electrons, and the electron excitation layer comprises at least one of a zero-dimensional material, a one-dimensional material and a two-dimensional material; the receiving assembly is arranged in the cavity, the receiving assembly comprises a receiving part and a signal obtaining part, the receiving part and the light emitting end of the optical fiber are oppositely arranged in a spaced mode, and the receiving part is configured to be capable of receiving gas ions with positive charges; the signal obtaining part is connected with the receiving part so as to obtain a corresponding vacuum degree detection signal according to the gas ions received by the receiving part.

The present invention relates to an ion source 10 for generating ions 16 or an ion beam 16a, comprising an ion generation chamber 11 for generating ions 16. To ensure monitoring, and in particular safety, of the ion source 10, the ion source 10 comprises a pressure measurement device 30 associated with the ion generation chamber 11, the pressure measurement device 30 comprising a first pressure measurement device 31, which is in particular designed in the form of a gas friction manometer or in particular comprises a gas friction manometer. The present invention further relates to a method for handling the ion source 10.

A chamber (11, 12, 13) for delimiting a plasma generation zone (42) in a vacuum pressure sensor (40), where the chamber comprises an electrically conductive housing element (1, 1 ', 1' ') located radially on the outside with respect to a central axis. The chamber comprises electrically conductive wall elements (2, 2 ', 2' ') arranged substantially perpendicular to the central axis and connected to the housing element, at least one of the wall elements having a first opening (3) through which the central axis extends, the housing element comprising at least a first region (B1) and a second region (B2), the first region is positioned closer to the central axis than the second region. The invention also relates to a vacuum pressure sensor comprising a chamber.

The present invention relates to the field of electrical equipment monitoring, and is an intelligent online monitoring method and system for high-voltage vacuum circuit breakers, comprising: receiving a circuit breaker control signal, using a started electromagnetic coil to perform an electromagnetic pushing operation on a moving contact transmission rod to obtain a moving transmission rod, performing a monitoring operation on the moving transmission rod based on a preset monitoring frequency and a displacement sensor, performing a speed analysis on the displacement sequence to obtain a displacement fluctuation index and an average displacement speed, calculating a displacement failure rate based on the displacement fluctuation index and the average displacement speed, and if the displacement failure rate is less than or equal to a displacement failure threshold, performing a vacuum inspection operation on a vacuum interrupter using a piezoelectric sensor, an ionization sensor, and a thermal conductivity sensor to obtain an arc extinguishing vacuum index, and completing online monitoring of the high-voltage vacuum circuit breaker when the circuit breaker monitoring platform receives a safety signal or a warning signal. The present invention can improve the real-time performance and accuracy of monitoring high-voltage vacuum circuit breakers.

The invention relates to the technical field of vacuum measurement, in particular to a wide-range vacuum measurement composite gauge tube, which comprises an ultrahigh vacuum sensing assembly, a middle vacuum sensing assembly, a low vacuum sensing assembly and a shielding assembly, and is characterized in that the shielding assembly comprises a shielding plate, a shielding cylinder and an outer shielding flange cylinder; the shielding plate is arranged in the middle inside the outer shielding flange cylinder, one end of the shielding cylinder is connected with the shielding plate, and the other end of the shielding cylinder is fixed to the bottom face of the outer shielding flange cylinder in a sealed penetrating mode. The ultra-vacuum sensing assembly is fixedly arranged above the shielding plate; the middle vacuum sensing assembly is fixedly arranged below the shielding plate and located on one side of the shielding cylinder. The low-vacuum sensing assembly is fixedly arranged below the shielding plate and located on the other side of the shielding cylinder. According to the invention, the medium-low vacuum sensing assembly and the ultrahigh vacuum assembly are mutually compounded, so that wide-range accurate measurement from the atmospheric pressure to the ultrahigh vacuum range can be realized, and in-situ calibration of the gauge tube can be carried out.

The utility model discloses a vacuum obtaining and measuring device which comprises a base, a supporting frame installed on the base, a pipeline installed on the supporting frame and a rotary-vane vacuum pump connected with the pipeline. The vacuum tube is arranged on the pipeline and is communicated with the pipeline; the electrode is arranged in the vacuum tube; and the pipeline is also connected with an ionization gauge for measuring the vacuum degree. According to the utility model, the vacuum tube and the ionization gauge are arranged on the pipeline, and the vacuum degree can be measured through the ionization gauge after the pipeline and the vacuum tank are vacuumized through the rotary-vane vacuum pump to obtain vacuum; therefore, when the vacuum acquisition and measurement experiment is carried out, the acquired vacuum can be measured through the ionization gauge, the discharge can be directly carried out in the low-vacuum vacuum tube through the electrode, the interest of students in the experiment can be increased through the discharge phenomenon, the experiment is more visual, and the glow discharge experiment can be carried out at the same time.