39results about "Vacuum gauge using ionisation effects" patented technology

The invention discloses a cold cathode ionization gauge driving acquisition circuit, relates to the field of vacuum measurement, and solves the problems of signal conversion nonlinearity and large ion flow when a gauge tube works at a lower vacuum degree in the existing cold cathode ionization gauge driving acquisition technology. Comprising an ion current logarithmic acquisition circuit used for converting the ion current of the cold cathode ionization gauge into a voltage signal, a current monitoring circuit used for generating a control signal according to the voltage signal, and a voltage-controlled high-voltage driving circuit used for driving the cold cathode ionization gauge according to the control signal. The nonlinear compensation operation conditioning circuit is used for performing nonlinear compensation on the voltage signal according to the control signal to obtain an operation acquisition voltage, and the operation acquisition voltage is used for being input into an acquisition system; the non-linear problem of signal conversion is solved through the non-linear compensation circuit, negative feedback loop control is carried out through the current monitoring circuit and the voltage-controlled high-voltage driving circuit, the driving voltage of a gauge tube is reduced, and the maximum ion current is limited at a low level.

The invention relates to a method and system for detecting the vacuum degree of a vacuum arc-extinguishing chamber based on high-frequency discharge and spectral analysis, and the method comprises the steps: exciting the interior of the vacuum arc-extinguishing chamber to generate field emission current through a high-frequency electric field, and obtaining a high-frequency current peak value through the spectral analysis of the field emission current; the vacuum degree is determined according to a pre-constructed vacuum degree-high-frequency current peak value standard relation curve, a high-frequency power source is connected to a vacuum arc extinguish chamber, the output voltage of the high-frequency power source is gradually increased until a vacuum gap breaks down, the voltage waveform in the process is recorded, and the total current of a loop is calculated; calculating a capacitive current component by combining the equivalent capacitance of the loop; and selecting a stable current section between two dielectric breakdown events in the total current, intercepting a current peak signal in the section, and subtracting the capacitive current component from the total current corresponding to the peak signal to obtain the field emission current. Compared with the prior art, the method has the advantages of high sensitivity, simplicity and convenience in operation, accurate result and the like.

The application discloses a cold cathode ionization gauge driving and collecting circuit, and relates to the field of vacuum measurement, which solves the problems of signal conversion nonlinearity and excessive ion current when the gauge tube works at a lower vacuum degree in the existing cold cathode ionization gauge driving and collecting technology, and comprises the following parts: an ion current logarithmic collecting circuit, which is used for converting the ion current of the cold cathode ionization gauge into a voltage signal; a current monitoring circuit, which is used for generating a control signal according to the voltage signal; a voltage-controlled high-voltage driving circuit, which is used for driving the cold cathode ionization gauge according to the control signal; a nonlinear compensation operation conditioning circuit, which is used for performing nonlinear compensation on the voltage signal according to the control signal to obtain an operation collecting voltage; and the operation collecting voltage is used for inputting into a collecting system; the problem of signal conversion nonlinearity is overcome through the nonlinear compensation circuit, and the negative feedback loop control is performed through the current monitoring circuit and the voltage-controlled high-voltage driving circuit, so that the driving voltage of the gauge tube is reduced, and the maximum ion current is limited at a lower level.

The actual concentration, or partial pressure (58), of a target gas species in a partially-evacuated atmosphere (10) containing several gas species can be ascertained by generating a plasma (21) and by measuring (20) the intensity (24) of light emissions from the plasma (21) at characteristic emission wavelengths. The total gas pressure is measured with a total pressure gauge (17), and the relative intensities (24) of the light emissions are dependent on the said actual concentration or partial pressure (58). An equation is used, which compensates for variations in apparent emission intensity (24) arising from interactions between the different gas species. The system (100) can be used at higher pressures than known gas monitoring systems, thus reducing the need for complex vacuum systems (52).

The invention relates to a method for measuring the internal pressure of at least one vacuum interrupter (12), comprising the following steps: applying a voltage (U) between an anode and a cathode of the vacuum interrupter (12), applying a magnetic field (F) to deflect an electron path, measuring a discharge current of gas particles that have been struck and thereby ionized by electrons and have discharged in a vacuum of the vacuum interrupter (12), and measuring the internal pressure by converting the discharge current (I), wherein the measurement of the discharge current (I) is carried out in a defined sub-region (24) of the vacuum interrupter (12). The invention further relates to a measuring system (10) for operating such a method.

The invention relates to the technical field of ionization vacuum sensors, and discloses a miniature ionization vacuum sensor and a vacuum gauge, the sensor comprises at least one sensor unit, each sensor unit comprises a doped semiconductor substrate, one side surface of the doped semiconductor substrate is provided with at least one groove; the insulating dielectric layer is positioned on the surface of one side of the doped semiconductor substrate and in an area outside the groove; the electrode layer is located on the surface of one side, away from the semiconductor substrate, of the insulating dielectric layer; two-dimensional electron gas is distributed on the interface of the doped semiconductor substrate and the insulating dielectric layer and serves as a field emission electron source; a nanometer air channel is formed between the bottom of the groove and the target surface, and the target surface is the surface where the surface of the side, away from the insulating dielectric layer, of the electrode layer is located. By introducing the nano air channel, the interelectrode distance is reduced, so that the working voltage is reduced. In addition, the coulomb repulsive force effect between electrons in the two-dimensional electron gas can further reduce the working voltage.

The invention relates to a method for determining a pressure in a vacuum switching tube (1), comprising the steps of: providing the vacuum switching tube, which has a first electrode (3) and a second electrode (4), which have a contact state in which the first electrode and the second electrode are in contact with each other, and a spaced-away state in which the electrodes are spaced apart from each other, and a housing (2) which defines an interior space (26) in which the electrodes are arranged and which maintains a vacuum in the interior space, so that in the spaced-away state the electrodes are electrically isolated from each other by the vacuum; applying an electric field (23) and a magnetic field (24) to the interior space, so that a gas discharge is generated, wherein the orientation of the electric field in the interior space is different from the orientation of the magnetic field; measuring a current (I) of the gas discharge at a plurality of different times (t);Forming a measurement data set (I(t)) from the currents and the times, wherein the measurement data set represents the temporal evolution of the current during the gas discharge; fitting at least a part of the measurement data set with at least one fitting function (43) which has one or more fitting parameters; inferring the pressure from at least one of the fitting parameters.

The present invention provides a vacuum gauge capable of preventing accumulation of a substance on a sensing mechanism even when the sensing mechanism is exposed to an atmosphere into which various material gases are introduced, and capable of achieving a long life. The vacuum gauge comprises a sensing mechanism which is in contact with atmosphere in a measurement space and outputs an output signal corresponding to pressure in the measurement space; and a heater for adjusting the temperature of the sensing mechanism, the set temperature of the heater being variable.

The invention provides a carbon nanotube cold cathode miniature vacuum sensor and a field emission current response detection method thereof, and relates to the technical field of micro-nano sensing and vacuum metrology, the sensor comprises an insulating substrate, a cold cathode array is arranged on the insulating substrate, an anode electrode is arranged on the insulating substrate through an insulating pillar corresponding to the cold cathode array, and the anode electrode is connected with the cold cathode array. A glass cover plate is arranged on the insulating substrate, the cold cathode array and the anode electrode are covered by the glass cover plate to form a vacuum cavity, and the cold cathode array and the anode electrode are connected with a signal acquisition and processing module; the method comprises the steps of applying pulse voltage, collecting field emission current, carrying out noise reduction processing on the collected field emission current, carrying out temperature compensation on the field emission current after noise reduction processing, and carrying out vacuum degree calculation based on the compensated field emission current. The vertical electric field configuration design and the deep learning algorithm are fused, the performance boundary of a traditional vacuum sensor is broken through, a good technical effect is achieved, and use is convenient.

The invention discloses an MEMS ionization vacuum sensor based on magnetic field assistance and a manufacturing method thereof, and belongs to the technical field of microelectronics. The sensor comprises a glass substrate, an emitter electrode, a lead electrode, an electron emitter, a first insulating spacer layer, a grid electrode, a second insulating spacer layer, top glass, an ion deflection electrode, an ion collector, an annular electrode and a magnetic field generation part, the manufacturing method comprises the steps of preparation of the substrate and the top glass, bonding of the electron emitter, processing of the insulating spacer layer and the grid electrode, anodic bonding, laser bonding, installation of the magnetic field component and scribing. An electric field-magnetic field composite field is used for remarkably expanding the electron motion trail, the problems that an existing sensor is weak in ion flow and poor in anti-interference capacity are solved by combining the physical isolation design of an ionization and collection area, and the sensor has the advantages of being small in size, high in precision, good in consistency and low in cost and is suitable for the fields of semiconductor manufacturing and aerospace.

The radially stacked vacuum feedthrough (10) includes the following elements (from inside to outside): a lens element (11), a first ring of glass (12), a first hollow cylinder of a first dielectric material (13), a first conductive layer (18), a second hollow cylinder of glass (14), a third hollow cylinder of ceramic (15), a second ring of glass (16), and a metal frame (17). The invention also relates to an electrode assembly based on the vacuum feedthrough, an apparatus for generating a DBD plasma discharge, a measurement apparatus for characterizing pressure and / or gas composition, and a method for operating the measurement apparatus.

This invention proposes a gas testing device and method simulating a low-temperature vacuum environment. The device includes a vacuum pump unit, a cold trap test chamber unit, an inlet unit, a testing unit, and a monitoring unit. The vacuum pump unit first evacuates and maintains a low vacuum to remove water vapor from the cold trap test chamber unit. Then, the cold trap is activated to cool the interior of the cold trap test chamber unit. This process ensures good heat transfer, maintaining a uniform temperature throughout the unit and preventing icing, thus improving testing accuracy. Once the internal temperature reaches a specific level (required for gas testing), the vacuum pump unit evacuates to a specific vacuum level (required for gas testing). Finally, the gas to be tested (such as H2S) is introduced, enabling precise measurement of the gas parameters under low-temperature vacuum conditions.

The invention discloses a dynamic gear shifting processing method and system based on a hot cathode ionization vacuum gauge, and relates to the technical field of vacuum measurement, and the method comprises the steps: obtaining a compensation value based on an improved ion current collection and amplification circuit, and obtaining the current vacuum degree through the calculation of the compensation value; judging the dynamic change condition of the measurement environment according to the obtained gear shifting requirement, and judging whether the gear shifting condition is met or not under the corresponding dynamic change condition; when the gear shifting condition is met, the corresponding gear interval is entered, and the vacuum degree after the preset time under the corresponding dynamic change condition is obtained based on the current vacuum degree; and the phenomena of blockage, repeated values, numerical value loss and the like of the vacuum gauge in the gear shifting process are solved.

A vacuum pressure sensor comprises and ion trap device, or potential well, is connected to a vacuum chamber to trap ions found within the very low-pressure gas from within the vacuum chamber. A coher

The invention discloses an ion flow measurement method and a measurement circuit for an extremely-high thermal cathode ionization gauge, and relates to the technical field of ion flow measurement, and the method comprises the steps: obtaining a demand range of ion flow measurement, and dividing the demand range into a first ion flow range and a second ion flow range; the ion flow measurement in the first ion flow range is completed through a preset first measurement mode, and the ion flow measurement in the second ion flow range is completed through a preset second measurement mode; measurement of electron currents of different measurement sections is achieved through the measurement circuit arranged based on the measurement method, the problem that in high vacuum measurement, a traditional ion current measurement circuit is poor in precision in ultrahigh measurement is solved, and the blank in ultrahigh vacuum measurement is filled.

This invention discloses a method for detecting the vacuum degree of a circuit breaker based on electron collision radiation inversion, belonging to the field of power equipment testing. The method includes the following steps: Step S1, synchronously acquiring X-ray pulse signals from multiple measuring points outside the arc-extinguishing chamber of the vacuum circuit breaker, extracting and parameterizing the pulse events to obtain the temporal distribution characteristics reflecting electron collision behavior; Step S2, establishing a feature enhancement model based on electron collision probability; Step S3, establishing a mapping model between the X-ray generation mechanism and the electron collision process, and then inverting the vacuum degree. This invention provides a method for detecting the vacuum degree of a circuit breaker based on electron collision radiation inversion. By establishing a physical mapping relationship between the statistical characteristics of X-ray pulse events and the electron mean free path and collision probability, it achieves quantitative inversion of the vacuum degree, thereby improving detection accuracy and physical interpretability.

The application discloses a kind of composite vacuum gauge circuit systems based on module multiplexing, the circuit system is configured as drivable vacuum sensor, vacuum sensor is Pirani sensor and hot cathode ionization sensor, circuit system includes: power supply circuit, filament heating circuit, adjustable high voltage circuit, ion current measurement circuit, voltage measurement circuit, analog-digital conversion circuit, wherein, single-chip microcomputer is configured as: starting Pirani sensor, control adjustable high voltage circuit and ion current measurement circuit are not enabled;Current vacuum degree is obtained based on Pirani sensor, if vacuum degree is greater than or equal to preset threshold, then continue to use Pirani sensor to measure vacuum degree;If vacuum degree is less than preset threshold, then enable adjustable high voltage circuit and ion current measurement circuit, and use hot cathode ionization sensor to measure vacuum degree.By the switchable circuit system controlled by single-chip microcomputer, the driving and measurement of two kinds of principle different vacuum sensors by a set of circuit system are realized.

A method for calibrating a pressure measurement in a vacuum switching tube (1), comprising the steps of: providing a calibration device (52) with the vacuum switching tube and a vacuum system (40) comprising a tube (41) and a pressure sensor (42) by means of which the pressure (p) in the tube can be measured, wherein the vacuum switching tube has a through-hole (27) that fluidly connects the interior (26) of the vacuum switching tube to the tube; applying a magnetic field (24) and an electric field (23) to the interior, such that a gas discharge is generated, wherein the magnetic field has an orientation different from the electric field; measuring a time-resolved current (I(t)) of the gas discharge and simultaneously measuring a time-resolved pressure (p(t)) in the tube; Determining a time offset (Δt) between the beginning (t1) of an increase in the time-resolved current and the beginning (t2) of a decrease in the time-resolved pressure;Correcting the offset by shifting the time-resolved current and / or pressure over time; assigning a plurality of values ​​to a maximum in time (I; max ) the time-resolved current strengths to a pressure (p) corrected by the offset (Δt), thereby forming a calibration function (55).

The application belongs to the technical field of vacuum measurement, and specifically discloses an ionization vacuum degree measurement method and device based on light intensity modulation. The light intensity of ultraviolet light is modulated by a modulator, and the measured ion current signal is filtered and demodulated to obtain an optimized ion current signal. The combination of the two greatly improves the signal-to-noise ratio of the system, effectively reduces the interference of environmental noise on the measurement results, and significantly improves the accuracy and reliability of the ionization vacuum gauge in measuring the vacuum degree. In addition, the application can dynamically adjust the light intensity fluctuation frequency according to different vacuum degree measurement scene requirements to obtain appropriate photoelectric current. Whether in a low vacuum or a high vacuum environment, accurate measurement can be achieved, and the application scene range is widened.

The invention relates to a method for measuring a pressure in a vacuum switching tube (1), comprising the steps of: b) providing the vacuum switching tube (1), which has a first electrode (3) and a second electrode (4) having a contact state in which they are in contact with each other and a separation state in which they are separated from each other, and a housing (2) which defines an interior space (26) in which the first electrode and the second electrode are arranged, and which maintains a vacuum in the interior space (26) so that in the separation state the first electrode and the second electrode are electrically isolated from each other by the vacuum; c) applying an electrical ignition voltage between the first electrode and the second electrode, thereby generating a direct current arc between the first electrode and the second electrode in their separation state;d) Applying an electric field and a magnetic field to the interior space so that electrons released in the direct current arc are accelerated, generating a gas discharge that is different from the direct current arc, wherein the electric field in the interior space (26) has a different orientation than the magnetic field; e) Measuring the electric current (I) of the gas discharge. The invention also relates to a pressure measuring device (40) with the vacuum switching tube (1).

The invention relates to the technical field of vacuum measurement, in particular to a thermionic cathode ionization vacuum gauge for extraterrestrial space detection, which comprises a vacuum gauge wrapping cavity, an ionization chamber assembly and an emission chamber assembly, and is characterized in that a first interface of the vacuum gauge wrapping cavity is welded with an ionization chamber fixing flange; a second interface of the vacuum gauge wrapping cavity is welded with an emission cavity fixing flange; a third interface of the vacuum gauge wrapping cavity is a measurement interface and is communicated with the to-be-tested chamber; the ionization chamber assembly comprises an anode column sealing net, an anode column net and a collector; the emission chamber assembly includes an emitter, an emission electron suppression coating sheet, and an electron polymerizer. According to the invention, through physical isolation of the emitter and the ionization electrode, precision deviation caused by thermal deformation in the thermionic cathode emission process of the vacuum gauge is eliminated, and the influence of material deflation and thermal overflow effect caused by thermal effect on the measurement lower limit and the measurement precision in an ultrahigh vacuum state is fundamentally solved.

The invention discloses an X-ray tube vacuum degree real-time detection method, which comprises the following steps: forming an accelerating electric field based on a grid electrode to accelerate electrons emitted by a cathode filament so as to enable the electrons to collide with gas molecules; collecting the ionized electron flow or ion flow by using an anode; pre-fitting a relational expression between the electron flow or the ion flow and the pressure intensity under the detection condition; and determining the pressure intensity in the X-ray tube by combining the relational expression of the electron flow and the pressure intensity with the collected electron flow, or combining the relational expression of the ion flow and the pressure intensity with the collected ion flow. Measurement deviation caused by pipeline conductance and deflation of a traditional exhaust system vacuum gauge can be broken through, a vacuum monitoring blind area after packaging is eliminated, hardware does not need to be newly added, in-situ integration is completed only by reusing an existing electrode through the circuit detection module, and the monitoring precision can be effectively improved.

The utility model discloses a picoampere-level ion current detection device, which belongs to the technical field of ion detection and comprises an ion current amplification circuit, a main operational amplifier circuit, an analog-to-digital conversion circuit and a single chip microcomputer which are sequentially connected. The ion current amplification circuit comprises a detection circuit, a first-stage operational amplifier circuit and a second-stage operational amplifier circuit which are connected in sequence; the analog-to-digital conversion circuit comprises an analog-to-digital converter and an optical coupler which are connected in sequence. The device provides a high-precision operational amplifier which is small in offset, high in gain, strong in common-mode rejection capability, fast in response, low in drift and stable in performance through multi-stage operational amplification, anti-interference and analog-to-digital conversion, outputs real, reliable, stable and easy-to-process electric signals, and realizes a precise detection function of low-power-consumption picoampere-level weak signals.

A wide-range vacuum measurement composite gauge tube, comprising an ultrahigh vacuum sensing assembly (1), a medium vacuum sensing assembly (2), a low vacuum sensing assembly (3), and a shielding assembly. The shielding assembly comprises a shielding plate (4), a shielding cylinder (5), and an outer shielding flange cylinder (6), wherein the shielding plate (4) is disposed at a middle position inside the outer shielding flange cylinder (6); one end of the shielding cylinder (5) is connected to the shielding plate (4), and the other end thereof is fixed to the bottom face of the outer shielding flange cylinder (6) in a sealed and penetrating manner; the ultrahigh vacuum sensing assembly (1) is fixedly disposed above the shielding plate (4); the medium vacuum sensing assembly (2) is fixedly disposed below the shielding plate (4) and is located on one side of the shielding cylinder (5); and the low vacuum sensing assembly (3) is fixedly disposed below the shielding plate (4) and is located on the other side of the shielding cylinder (5).

The invention discloses an infrared detector Dewar assembly and a vacuum fault judgment method. The infrared detector Dewar assembly comprises a frame, a lead ring, a miniature vacuum gauge module and a detector chip. The miniature vacuum gauge module comprises a vacuum gauge, a PCB (Printed Circuit Board) and a shell, the PCB is welded with the shell, and the vacuum gauge is arranged on a first surface of the PCB; a plurality of bonding pads are arranged on the second surface of the PCB, and vent holes are formed in the shell; and the vacuum gauge is used for measuring gas molecules entering from the vent hole to obtain a measurement signal, and electrically leading out the measurement signal through the bonding pad so as to determine vacuum degree information corresponding to the measurement signal through an external test instrument. According to the embodiment of the invention, the miniature vacuum gauge module is packaged in the Dewar, a reasonable electrical lead-out and external test instrument is designed, and the vacuum degree in the Dewar can be evaluated more conveniently and efficiently in a non-decoupling state.