Embodiments of the systems and methods disclosed herein utilize a brushless
DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping
system for real time, smooth motion, and extremely precise and repeatable
position control over fluid movements and dispense amounts, useful in
semiconductor manufacturing. The BLDCM may employ a
position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce
heat generation without undesirably compromising the precise
position control of the dispense pump by increasing and decreasing, via a custom control scheme, the
operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a
constant velocity, which enables the pumping
system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.