The invention relates to the technical field of vacuum equipment, in particular to a two-stage low-temperature
vacuum pump which comprises a pump body and a pressurizing
assembly, and a liquid adding cavity is formed in the pump body; the pressurizing
assembly comprises an air cylinder, a movable part and a liquid discharging part, the air cylinder is coaxially located in the liquid adding cavity and is divided into a first-stage
barrel and a second-stage
barrel, one end of the first-stage
barrel is connected to the pump body, the inner
diameter of the second-stage barrel is smaller than that of the first-stage barrel, the movable part comprises a
piston rod, a first-stage
safety valve and a liquid outlet valve, and the
piston rod sequentially penetrates through the pump body, the first-stage barrel and the second-stage barrel; the
piston rod slides back and forth in the axis direction of the pump body, the
piston rod, the primary
safety valve and the primary barrel form a primary compression cavity, an
injection port is formed in the end, close to the secondary barrel, of the primary barrel, the
piston rod, the liquid outlet valve and the secondary barrel form a secondary compression cavity, and a runner hole is formed in the
piston rod. The liquid discharging piece comprises a liquid discharging
pipe and a liquid discharging valve, one end of the liquid discharging
pipe communicates with the second-stage compression cavity, and the other end of the liquid discharging
pipe is located outside the pump body; the device has the effect of conveniently solving the problem that impurities cannot be cleaned.