23 results about "Leakage rate" patented technology

The application discloses a gas chromatograph leakage monitoring method and response system based on dynamic volume balance, comprising the following steps: obtaining the flow measurement value of the carrier gas on the secondary gas circuit, the total flow measurement value of the carrier gas at the sample inlet end of the gas chromatograph, the flow measurement value of the carrier gas at the detector end of the gas chromatograph, and the second correction value of the carrier gas in the pipeline between the secondary gas circuit and the gas chromatograph; obtaining the secondary volume imbalance term based on the dynamic volume balance method; obtaining the to-be-processed data of a frame of time length T flow signal, calculating the second average value based on the to-be-processed data; calculating the second leakage rate between the secondary gas circuit and the gas chromatograph according to the secondary volume imbalance term and the second average value, and judging the leakage condition between the secondary gas circuit and the gas chromatograph based on the second leakage rate. The application can solve the problem of poor sensitivity and accuracy of the leakage condition monitoring of the gas circuit system.

The application provides a molecular gas chamber leakage rate detection method, an electronic device and a detection system. The method can include: testing spectrum data of a to-be-detected molecular gas chamber; calculating a half-height width of the spectrum data according to the spectrum data; and determining a leakage rate of the to-be-detected molecular gas chamber based on the half-height widths obtained at multiple times. In the method, the leakage rate detection accuracy of the molecular gas chamber can be better ensured without affecting the purity in the molecular gas chamber.

The application discloses a valve inner leakage rate prediction method based on a grey wolf optimization algorithm and a long short-term memory network, and aims to solve the problem of insufficient detection precision of micro leakage in a low signal-to-noise ratio environment in the prior art.The method comprises the following steps: firstly, collecting acoustic emission signals of a valve under different inner leakage rates, and performing feature extraction on the signals through wavelet scattering transformation; then, optimizing key parameters in the long short-term memory network by using the grey wolf optimization algorithm, adopting a root mean square error as an optimization target, and adjusting the key parameters of the long short-term memory network to realize optimal configuration; and finally, using the optimized long short-term memory network to predict the inner leakage rate of the valve.Through the method, high-precision micro leakage detection can be realized under a low signal-to-noise ratio condition, the prediction accuracy is improved, and the method has high practical value.

The application discloses a battery box for immersion direct cooling, and belongs to the technical field of battery thermal management. The battery box comprises a box body and a cover plate, and forms a closed chamber. The bottom plate of the box body is provided with a module support frame, so that the battery module is kept at a gap of 0.5-2.5 cm with the bottom plate and a gap of 1-5 cm with the side wall. At least one wall of the box body is provided with an arc-shaped flow uniforming plate, the included angle between the tangent of the edge of the flow uniforming plate and the reference plane is 5-37 degrees, and the height of the flow uniforming plate is 1 / 3-1 times the height of the battery cell. The angle of the flow uniforming plate is adjustable, the 0-90-degree adjustment is realized through a hinged mechanism with an arc-shaped sliding groove, the bottom spring device makes the inclination angle change automatically with the flow rate, and the angle of the base can be automatically adjusted according to the preset judgment rule based on the temperature rise rate and the temperature difference of the thermocouple transmission. The box body is provided with a safety pressure relief valve. The liquid inlet is provided on the opposite wall of the box body to form liquid hedging, the liquid outlet is provided on the cover plate, and the connecting direction of the liquid inlet is the same as the thickness direction of the battery cell. The box body is subjected to 1.5 times working pressure hydrostatic pressure test and helium mass spectrometry leak detection verification, and the leakage rate is less than or equal to 1*10-3 Pa*m3 / s. The application can significantly improve the battery temperature consistency, reduce the temperature rise, prolong the battery life and improve the system safety under the condition of low pump consumption.

This invention provides a method and system for testing the airtightness of metal-supported solid oxide fuel cells. The method involves placing the battery under test in a main test chamber, connecting a reference chamber to the main test chamber via a differential pressure sensor, and simultaneously applying a vacuum to both chambers. After vacuuming, the temperatures in the main test chamber and the reference chamber are adjusted to the test temperature. Gas at the same temperature is then introduced into the main test chamber until a set pressure is reached. The leakage rate of the battery is calculated using the differential pressure value from the differential pressure sensor. If the leakage rate meets the requirements, the absolute pressure in the main test chamber and the reference chamber is reduced, and the presence of any minute leaks in the battery is determined using the differential pressure value from the differential pressure sensor. This invention also provides a battery airtightness testing system for implementing the above method. This invention is simple to operate, has high testing accuracy and precision, good safety, and can meet the airtightness testing requirements of batteries under various operating conditions, from low-temperature start-up to high-temperature operation.

This invention discloses an online air leakage detection method and system for a sintering system, comprising the following steps: obtaining the exhaust volume flow rate, exhaust gas pressure, exhaust gas temperature, and gas concentration of the target gas in the exhaust gas branch pipe on the first side of the exhaust gas box section i; obtaining the exhaust volume flow rate, exhaust gas pressure, exhaust gas temperature, and gas concentration of the target gas in the exhaust gas branch pipe on the second side of the exhaust gas box section i; marking the gas discharged from the lower end of the grate at the bottom of the sintering trolley corresponding to the exhaust gas box section i as the actual effective intake air, and obtaining the gas concentration of the target gas in the actual effective intake air; and calculating the air leakage rate K of the exhaust gas box section i using a formula. i The online air leakage detection method for the sintering system of the present invention enables online determination of the air leakage rate of the wind box section i.

The application discloses a silicon dioxide deposition coating process of a vertical LPCVD device, and comprises the following steps: S1, checking whether the process pipe leaks; S2, blowing the process pipe with nitrogen gas under low pressure; S3, after the leakage rate detection is qualified, nitrogen gas is blown into the gas path pipeline, so that the pressure and the gas flow of the process pipe are stabilized under the pressure and the gas flow conditions set during film deposition; S4, under the set pressure condition, a reaction gas source is introduced, and a silicon dioxide film is deposited on the surface of a semiconductor substrate; and S5, after the silicon dioxide film deposition is completed, nitrogen gas is blown into the process pipe and the exhaust pipeline, nitrogen gas is introduced to increase the pressure to normal pressure, and the boat is discharged. The application has the advantages of simple operation, good stability, high film uniformity and the like, solves the problems of poor film thickness uniformity, high process granularity, poor repeat stability and extremely harsh requirements on process pressure of the existing LPCVD when depositing a SiO2 film, and realizes high-quality wafer coating.

This invention relates to the field of CFRP leakage detection technology, specifically to an in-situ CFRP leakage rate testing system under extreme thermo-coupling environments. The system comprises an extreme temperature environment simulation and mechanical loading subsystem, consisting of an environmental chamber and a mechanical loading unit; an in-situ helium mass spectrometry leakage detection subsystem, used to construct an independent helium chamber on one side of the sample; a molecular pump and a backing pump connected via stainless steel tubing on the other side of the sample; leakage detection using a helium mass spectrometer leak detector; and a multi-channel synchronous data acquisition and control subsystem, used for unified triggering of acquisition channels and software time correction; and for controlling environmental temperature, strain loading, real-time acquisition of leakage signals, and unified timeline display of multi-channel data. This invention improves the realism of environmental simulation, the continuity of detection, and the integrity of data correlation in CFRP leakage detection.

The application discloses a kind of transformer bushing sealing ring performance dynamic evaluation method and device, and relates to the technical field of sealing performance detection of power equipment.The application simulates the multi-axial vibration environment in actual operation, comprehensively monitors the displacement of sealing ring and the change of sealing ring leakage rate, and calculates dynamic sealing performance parameters based on initial time and displacement and leakage rate after running for a predetermined length of time in the vibration mode in simulated actual operation, and accurately evaluates the performance attenuation degree of sealing ring under dynamic vibration condition using dynamic sealing performance parameters.

The present application relates to the technical field of leakage detection, and discloses a positive pressure suction gun leakage rate detection method, device, equipment, medium and product, comprising: obtaining a measured positive pressure standard leakage rate obtained by detecting a positive pressure standard leak hole by a helium mass spectrometer leak detector and a background leakage rate obtained by detecting ambient air; determining a correction coefficient of the helium mass spectrometer leak detector according to the measured positive pressure standard leakage rate, the background leakage rate and a standard leakage rate of the positive pressure standard leak hole; obtaining a measured leakage rate of a system to be detected, which is obtained by detecting the leakage rate of the system to be detected by the helium mass spectrometer leak detector; and calibrating the measured leakage rate by using the correction coefficient and the background leakage rate to obtain a calibrated leakage rate of the system to be detected. The present application obtains the correction coefficient of the helium mass spectrometer leak detector by obtaining the measured positive pressure standard leakage rate and the background leakage rate, and calibrates the measurement value of the system to be detected by the helium mass spectrometer leak detector according to the correction coefficient, so that the calibrated leakage rate of the system to be detected with quantitative judgment value is obtained.

The utility model provides a kind of atomizing pipe and base fixed structure, including base, main cylinder, upper sleeve, the top of the base is fixedly connected with main cylinder, the main cylinder is used to contain liquid, the top of the main cylinder is fixedly connected with upper sleeve, the top of the main cylinder is fixedly connected with atomizing pipe, the bottom of the atomizing pipe is fixedly connected with connector. The utility model has the advantages that the fixed structure realizes dynamic sealing compensation: the elastic deformation of outer ring can compensate 0.1mm assembly error, and the contact pressure is stable when temperature changes. Anti-loosening protection: the friction damping effect of fastening ring improves the stability of threaded connection by 40%, especially suitable for electronic cigarette environment with high-frequency vibration. The structure realizes high-reliability fixation of electronic cigarette atomizer core component through the mechanical optimization layout of atomizing pipe, sub connector, bridge, tight head, and the composite sealing scheme of outer ring and fastening ring, greatly reduces leakage rate, and greatly prolongs service life.

This invention discloses a precise calibration method and apparatus for pressure sensors, belonging to the field of fluid pressure measurement. The method includes: providing a calibration system comprising a reference tank, on which a reference device and a pressure sensor to be calibrated are mounted; the inlet of the reference tank is connected to a gas source, and the outlet is connected to a standard leak; adjusting the pressure inside the reference tank to the upper or lower limit of the pressure range to be calibrated; opening the channel from the outlet of the reference tank to the standard leak, allowing the pressure to change slowly through the standard leak; during the pressure change process, reading the pressure value of the reference device in real time and writing it correspondingly to the sensor being calibrated, achieving continuous calibration. The pressure change process is controlled according to the formula ΔP=(Q * t) / V, where V is the volume of the reference tank, Q is the leakage rate of the standard leak, t is the leakage time, and ΔP is the pressure change. This invention utilizes the continuity of pressure changes caused by leakage from the standard leak to achieve automatic, continuous, and precise control of the pressure point for pressure sensor calibration. It can perform high-density data acquisition and curve fitting for any range of the sensor, significantly improving calibration accuracy, and the apparatus is simple and low-cost.

The application discloses a precision assembling method of an infrared detector process Dewar, and belongs to the technical field of Dewar assembling of infrared detectors. The method comprises the following steps: cleaning and pretreating materials, and assembling a cold finger and a detector. In the application, the method adopts a nanometer-level thermal interface of the cold finger and the detector chip, can effectively guarantee thermal conductivity, effectively reduce thermal noise, improve a signal-to-noise ratio, and can effectively control a thermal load of the cold finger, so that the detector can stably work at a lower temperature and the performance of the detector is improved. The method adopts electron beam and laser welding, can greatly reduce a leakage rate, and adopts a non-evaporable getter to adsorb residual gas, can improve vacuum maintenance time in the infrared detector, and improve product quality. The method realizes breakthroughs of the infrared detector Dewar in sensitivity, stability, service life and the like through optimization of a whole chain of materials, processes and detection, and is especially suitable for high-precision military and space infrared systems.

The present application relates to the technical field of LED, and discloses a flip high-voltage LED chip and a preparation method thereof.The flip high-voltage LED chip comprises a substrate and an epitaxial layer stacked on the substrate, a bonding layer is arranged between the substrate and the epitaxial layer, a P-type conductive step and an isolation groove are formed on the bonding layer, an ohmic contact layer, a first passivation layer, a bridging metal layer and a second passivation layer are arranged on the bonding layer, and an electrode layer is arranged on the second passivation layer; wherein the isolation groove comprises a first isolation groove and a second isolation groove, a thimble buffer layer is formed on the bonding layer, the thimble buffer layer is arranged in the second isolation groove, the thimble buffer layer comprises a Ti layer and an Al layer arranged in sequence, and an oxide layer is formed on the Al layer. By implementing the present application, cracks caused by thimble impact in the functional layer of the flip high-voltage LED chip can be avoided, the leakage rate is reduced, the reliability is improved, and the service life of the thimble is prolonged.

This invention discloses a method and device for detecting the leakage rate of a reaction chamber in semiconductor process equipment. The method includes: evacuating the reaction chamber of the semiconductor process equipment to bring the gas pressure of the reaction chamber to a preset value; controlling the semiconductor process equipment to a preset operating state; detecting the current gas pressure value inside the reaction chamber when the semiconductor process equipment has been in the preset operating state for a preset time; and calculating the leakage rate of the reaction chamber based on the current gas pressure value and the preset gas pressure value. This invention solves the problem that static testing is used for leakage rate detection of the reaction chamber in semiconductor process equipment, which cannot accurately reflect the airtightness of the reaction chamber and leads to an increase in silicon wafer defect rate.

This invention relates to the field of motor structure design technology, specifically to a magnetic yoke-based pure radial dual-path symmetrical low-resistance ventilation method. By establishing an electro-magnetic-thermal-fluid multiphysics coupled simulation model, the distribution of internal heat sources, areas of concentrated air resistance, and air gap leakage paths of the motor are accurately identified. Subsequently, two circumferentially symmetrical, independent, and radially penetrating ventilation channels are constructed on the magnetic yoke. Gradually expanding / contracting guide sections, streamlined guide ribs, and a labyrinth sealing structure are used to optimize the channels for low air resistance and leak prevention. Furthermore, the channel structure is matched and adjusted with the air source characteristics to ensure the system operates within its high-efficiency range. Finally, based on simulation results, the channel shape, sealing, and rib layout are iteratively optimized until the set targets for airflow, loss, leakage rate, and temperature uniformity are achieved. This method solves the technical problem that traditional ventilation systems in high-power-density motors cannot simultaneously achieve high airflow, low air loss, high utilization rate, and uniform cooling.

This invention relates to the field of relay technology, specifically to a hermetically sealed surface-mount radio frequency relay structure, including a control element and a Kovar alloy frame hermetically welded to a ceramic plate. A cover plate is welded to the top of the Kovar alloy frame to form a sealed cavity. The control element is installed within the sealed cavity. The leakage rate of the sealed cavity is no greater than 10%. ‑7 Pa.m 3 / sec(He); This sealed surface-mount RF relay structure uses a ceramic plate, Kovar alloy frame and cover plate hermetically welded to form a sealed cavity, effectively blocking water vapor, dust, salt spray and other corrosion, avoiding unstable contact resistance and reduced insulation performance, significantly improving long-term reliability and service life in extreme environments; This structure replaces the traditional PCB substrate with a high-temperature co-fired ceramic plate, and is equipped with an integrated RF transmission structure of coplanar waveguide-metal via-stripline, with low high-frequency loss and excellent thermal stability, which can maintain long-term stability of RF indicators such as insertion loss, isolation, and voltage standing wave ratio, and is suitable for the high-frequency application requirements of high-end equipment.

A method for fabricating a capped wafer includes the following steps: S1, providing a silicon substrate completed by photolithography, wherein the surface of the silicon substrate has multiple annular grooves formed by patterned photoresist, each annular groove opening on the side facing the chip wafer and exposing the silicon substrate at its bottom; S2, performing deep silicon etching in the chamber of a deep silicon etching machine, so that the exposed silicon substrate at the bottom of each annular groove is etched to remove a portion of the surface and expose a clean silicon substrate; S3, depositing solder in each annular groove; S4, removing the photoresist on the silicon substrate, so that the solder deposited in each annular groove forms annular solder rings. Through the deep silicon etching in step S2, the solder deposited in each annular groove is tightly bonded to the clean silicon substrate, enhancing the adhesion between the annular solder and the silicon substrate, thereby improving the sealing performance of the solder rings formed by bonding with the bonding material of the chip wafer, and thus reducing the leakage rate of the MEMS devices fabricated from the capped wafer and the chip wafer.

This invention relates to a non-destructive continuous testing method and apparatus for accelerated testing of the airtightness of metal / glass sealed structures, belonging to the field of airtightness measurement technology. This invention addresses three major technical shortcomings of existing helium mass spectrometry backpressure methods: destructive testing leading to microcrack propagation, inability to continuously acquire water vapor data in a single test, and a disconnect between leakage rate criteria and the physical mechanism of airtightness failure. The invention includes: S1, encapsulating a temperature and humidity sensor within a metal / glass insulator sealed structure using an FPC sensor circuit board to construct a test chamber; transmitting the temperature and humidity electrical signals inside the test chamber to an external signal control board via lead posts; S2, placing the test chamber into an accelerated life test chamber, simultaneously applying temperature, humidity, and differential pressure stresses to the test chamber during the accelerated life test; S3, the signal control board calculates the water vapor content (IV) inside the test chamber in real time, determining airtightness failure when IV is ≥5000 ppm for three consecutive tests.

The application relates to the technical field of seal detection, and discloses a sealing ring leakage rate detection device, which comprises a detection table, detection frames are symmetrically and fixedly installed on the detection table, a driving shaft, supporting plates, object placing plates and a sealing detection mechanism are arranged between the two detection frames, the driving shaft is rotationally arranged on the detection table, the two supporting plates are symmetrically and fixedly installed at the two ends of the driving shaft, and the two object placing plates are symmetrically arranged at the two sides of the driving shaft; the sealing ring leakage rate detection device is provided with the driving shaft, the supporting plates and the two object placing plates which can be alternately converted, and is combined with the division of the detection station and the feeding station and the station control mechanism, so that the leakage detection of a batch of sealing rings is realized at the detection station, meanwhile, the feeding preparation of the next batch of sealing rings can be realized at the feeding station, the feeding preparation time and the detection time are overlapped, the idle waiting of the equipment in the detection cycle is avoided, and the average detection period of a single workpiece is shortened.

The present application relates to the technical field of LED, and discloses a flip high-voltage LED chip and a preparation method thereof.The flip high-voltage LED chip comprises a substrate and an epitaxial layer stacked on the substrate, a bonding layer is arranged between the substrate and the epitaxial layer, a P-type conductive step and an isolation groove are formed on the bonding layer, an ohmic contact layer, a first passivation layer, a bridging metal layer and a second passivation layer are arranged on the bonding layer, and an electrode layer is arranged on the second passivation layer; wherein the isolation groove comprises a first isolation groove and a second isolation groove, a thimble buffer layer is formed on the bonding layer, the thimble buffer layer is arranged in the second isolation groove, the thimble buffer layer comprises a Ti layer and an Al layer arranged in sequence, and an oxide layer is formed on the Al layer. By implementing the present application, cracks caused by thimble impact in the functional layer of the flip high-voltage LED chip can be avoided, the leakage rate is reduced, the reliability is improved, and the service life of the thimble is prolonged.

The present application relates to the technical field of leakage detection and compressor operation protection of household air conditioners, and particularly relates to an integrated liquid type identification and independent protection method suitable for air conditioners, a sensor and an air conditioning system. In the method, the sensor is installed at a compressor oil return pipeline or a refrigerant pipeline, fluid characteristics are obtained through dielectric detection, when the detection result is in the dielectric overlapping interval of refrigerant and frozen lubricating oil, heat conduction detection is triggered, and refrigerant leakage, frozen lubricating oil leakage or mixed leakage are determined; at the same time, a graded alarm is output according to the leakage rate, and a hardware protection unit directly disconnects the compressor contactor control loop without passing through the air conditioner mainboard.