919results about How to "Reduce leak rate" patented technology

A substantially oxygen-free and nitrogen-free plasma ashing process for removing photoresist in the presence of a low k material from a semiconductor substrate includes forming reactive species by exposing a plasma gas composition to an energy source to form plasma. The plasma gas composition is substantially free from oxygen-bearing and nitrogen-bearing gases. The plasma selectively removes the photoresist from the underlying substrate containing low k material by exposing the photoresist to substantially oxygen and nitrogen free reactive species. The process can be used with carbon containing low k dielectric materials.

The present invention discloses an isolating material air permeability measuring device which comprises a double vacuum sealing structure permeating gas sampling device and an isolation material air permeability measuring device of the current limiting air extraction pipeline, the device comprises a permeation gas sampling device with double vacuum sealing structure, an ultrahigh vacuum system, a mass spectrograph and a calibrating device, wherein the permeation gas sampling device is connected to the mass spectrograph 3, the current limiting air extraction pipeline 6 and the calibrating device 19-24 through the flange 2 and the vacuum valve 4. The device can overcome the defects of low signal-to-noise ratio when the mass spectrum signal of the permeation air is measured and difficulty for measuring the isolation material with low air permeability existing in the existing technique, and has the characters of quick measuring speed, being able to measure the permeability rate of all gases to the isolation material.

The invention relates to a simple, high-efficiency and reliable cold-warm air-conditioning water heater, which comprises a refrigerant loop, a hot-water condensing heat exchanger, a hot-water storing box and a signal acquisition and circuit control system. A scheme I of the invention is characterized in that: an exhaust opening of a compressor is connected with an air inlet of a three-way valve; a first air outlet of the three-way valve is connected with a refrigerant inlet of the hot-water condensing heat exchanger, and a second air outlet is connected and communicated with a first interfaceof a four-way valve and a refrigerant outlet of the hot-water condensing heat exchanger; a second interface, a third interface and a fourth interface of the four-way valve are respectively connected with the upper ports of an outdoor-wind heat exchanger and an indoor-wind heat exchanger and an air inlet of an air-liquid separator, and a capillary is connected in series between the lower ports of the outdoor-wind heat exchanger and the indoor-wind heat exchanger; an air outlet of the air-liquid separator is connected with an air inlet of the compressor; and an electromagnetic guide-valve low-voltage air-outlet pipe of the three-way valve is communicated with an air-sucking pipe of the compressor, and an electromagnetic guide-valve high-voltage air-inlet pipe of the four-way valve is communicated with an exhaust pipe of the compressor. A scheme II of the invention is characterized in that: the hot-water condensing heat exchanger is added between the exhaust opening of the compressor of a refrigerant-circulating loop of a cold and warm air conditioner and an air inlet of the four-way valve, and the electromagnetic guide-valve high-voltage air-inlet pipe of the four-way valve is communicated with the exhaust pipe of the compressor; and the two technical schemes both have four functions of hot-water making and refrigerating, hot-water making, refrigerating and heating.

A feedthrough connector for an implantable medical device includes a hermetically sealed housing containing an electrical circuit and a tubular barrel with an open end and a closed end defining a tubular channel that protrudes into the sealed housing while maintaining the seal of the housing. The inside of the tubular channel is open to the outside of the sealed housing through the open end and the tubular barrel also has a plurality of circumferentially spaced openings extending between an outer peripheral surface and the tubular channel. An electrical contact assembly electrically in common with the electrical circuit within the housing serves to make electrical contact with an electrical lead axially inserted into the open end of the tubular channel. The electrical contact assembly includes a plurality of contact members received in and projecting radially through a plurality of circumferentially spaced openings and a sleeve member of shape memory alloy freely overlies the contact members when in a first deformed-shape configuration but engage the contact members and the outer peripheral surface of the tubular barrel when in a second memory-shaped configuration, urging the contact members into mechanical, electrical, and hermetically sealed engagement with the electrical lead. The tubular channel may include a plurality of conductive cylindrical portions coaxial with the axis of the tubular barrel, the dimensions of the diameter of the successive cylindrical portions progressively decreasing from the open end to the closed end.

The invention relates to a micro electro mechanical system (MEMS) manufacturing process-based micro atomic cavity air tightness package structure and a method. The structure and the method are characterized in that: a micro atomic cavity which is manufactured by the MEMS process is arranged in a glass or metal seal buffer cavity through a supporting structure, and the air tightness of the micro atomic cavity is improved, so that the service life of devices such as a micro atomic clock and the like based on the micro atomic cavity is prolonged, and the stability of the devices is improved. The structure and the method have a key point that: in the glass or metal buffer cavity structure, the inside of the buffer cavity is vacuumized or filled with buffer gas of which the components and the pressure are approximate to those of gas in the micro atomic cavity, and a leading wire of the micro atomic cavity passes through the buffer cavity to realize air tightness lead. By the package structure and the method, the leakage rate of the micro atomic cavity and outside can be effectively reduced, and the technical problem of short service life of micro atomic cavity devices is solved. The air tightness package structure is particularly suitable for the micro atomic cavity devices such as micro atomic clocks, micro atom magnetometers, micro atom gyroscopes and the like with low power consumption and small volumes.

An improved method and apparatus for cooling the under-car channel of a tunnel kiln while minimizing migration of air between the above-car and under-car channels involves controlling or equalizing the mass flow of cooling air directed through the under-car channel and in particular through individual undercarriage cooling zones which can match individual heating zones of the tunnel kiln.

A connector assembly is disclosed. The connector assembly comprises a connector having an internal conical shaped bore dimensioned so that a capillary column and auxiliary tubing can be press-fit into the bore, and an auxiliary length of cylindrical tubing having an inner diameter dimensioned so that a close fit is created when a capillary column is inserted through the auxiliary tubing and having an outer diameter dimensioned so that a fluid seal is created when the auxiliary tubing is press-fit into the bore.

A plasma processing apparatus includes a mounting table for mounting thereon an object to be processed, an electrode connected to a high frequency power supply, an electrical state setting unit for setting an electrical state of the mounting table to a conducting state or a floating state, and a controller for controlling the high frequency power supply to apply a high frequency power to the electrode and controlling the electrical state setting unit to set an electrical state of the mounting table to a floating state. Further, a radical produced from a cleaning gas by the applied high frequency power is made to have a contact with the mounting table.

The diaphragm valve uses a metal dish-type diaphragm set to control the inflow and outflow of fluid. The metal dish-type diaphragm set is above an air flow channel to control the stem above the metal dish-type diaphragm set, and the air will be blocked by pressing the metal dish-type diaphragm to make it fit the metal valve base in the air flow channel; this non-metal valve base is fixed in the air flow channel by a fixed shrunk ring with a taper cross section, and the in-between metal diaphragm in the metal dish-type diaphragm set is annular in the center to reduce the metallic friction between metal diaphragms, to increase application times and to lower the leakage rate of the diaphragm valve.

The invention relates to a fingertip seal structure and a back baffle plate thereof. The fingertip seal structure comprises a front baffle plate (1), a back baffle plate (2) and a plurality of layers of fingertip sheets (3) arranged between the front baffle plate and the back baffle plate, wherein each fingertip sheet is provided with a finger body (6) being a gap form the inner diameter position, and the finger bodies (6) between adjacent fingertip sheets (3) are mutually staggered. A plurality of arc-shaped pressure balance chambers (4) are arranged in the back baffle plate (2), the shape and the arrange means of the arc-shaped pressure balance chambers are consistent with the finger bodies (6), and the width is not larger than that of the finger bodies (6). Space exists between the arc-shaped pressure balance chambers (4) and the inner diameter of the back baffle plate (2), and at the same time the arc-shaped pressure balance chambers (4) are provided with through holes (5) communicated with the back baffle plate (2). The fingertip seal structure eliminates sealing lag and at the same time still can prevent the high-pressure gas in the arc-shaped pressure balance chambers from directly leaking to a low-pressure chamber, so the fingertip seal structure has good sealing performance.

The invention provides a pressure regulating valve, which comprises a valve body, a flow guide sieve sleeve, a double-piston assembly and a regulating mechanism, wherein a circulation part of the flow guide sieve sleeve is provided with a plurality of through holes extending in the axial direction of the flow guide sieve sleeve, the double-piston assembly comprises a pressure regulating piston and a balance piston and can move in the axial direction along the inner wall surface of the flow guide sieve sleeve, a pressure balance cavity is formed between the pressure regulating piston and the balance piston, and the regulating mechanism is used for controlling the flow rate and the pressure of fluid in the pressure balance cavity so that the double-piston assembly realizes the synergistic effect in the axial direction of the valve body for controlling the engaging position of the pressure regulating piston and the inner wall surface of the flow guide sieve sleeve. The pressure regulating valve provided by the invention can realize the self adaption to the pressure regulation of the pressure regulating valve, in addition, the safety is ensured, and meanwhile, the pressure at the outlet side of the pressure regulating valve is reliably stabilized in a proper range.

The invention provides a modified asphalt waterproof coiled material which comprises an upper surface layer, a modified asphalt layer, a core layer, fiberglass gridding cloth, a self-stick layer and an isolating membrane. The asphalt layer is prepared from the following raw material components: matrix asphalt, a modifying agent, softening oil, a reinforcing agent, regenerated epoxy resin powder, an inorganic filler and elastic granules. The self-stick layer is prepared from the following raw material components: matrix asphalt, a modifying agent, SBR rubber, SIS thermoplastic rubber, regenerated epoxy resin powder, elastic granules, rubber oil, tackifying resin and talcum powder. The waterproof coiled material provided by the invention is low in cost, less in energy consumption, good in mechanical performance and free of fire risk.

A mica based compressive seal has been developed exhibiting superior thermal cycle stability when compared to other compressive seals known in the art. The seal is composed of compliant glass or metal interlayers and a sealing (gasket) member layer composed of mica that is infiltrated with a glass forming material, which effectively reduces leaks within the seal. The compressive seal shows approximately a 100-fold reduction in leak rates compared with previously developed hybrid seals after from 10 to about 40 thermal cycles under a compressive stress of from 50 psi to 100 psi at temperatures in the range from 600° C. to about 850° C.

Provided is an online adjustable closing force gas lubricating mechanical sealing device. The online adjustable closing force gas lubricating mechanical sealing device comprises an axial moving ring positioning ring, a sealing end cover, a moving ring seat, a piston, a working spring, a piston limiting ring, a pushing ring, a static ring, a moving ring and a sealing cavity. The moving ring is fixed to the moving ring seat and rotates along with a shaft. The static ring is arranged on the sealing end cover. A piston cavity is arranged inside the sealing end cover. The sealing end cover is provided with an outer gas supplying channel, and the sealing end cover is communicated with one side of the piston cavity. The working spring is arranged between the other side of the piston and the static ring. The piston moves along the piston cavity in the axial direction to change the compression amount of the working spring. The other side of the piston is exposed inside the sealing cavity. The sealing cavity is communicated with a buffer gas channel. By adjusting the outer gas supplying pressure, the compression amount of the working spring can be adjusted, and therefore online adjusting on the sealing closing force can be achieved.

The invention discloses an electronic expansion valve and a manufacturing method thereof. The electronic expansion valve comprises a shell component and a valve seat assembly. The valve seat assembly comprises a first connecting pipe and a second connecting pipe which are located on the same straight line. A main valve cavity is formed by the valve seat assembly, an included angle of the acute angle is formed by the main valve cavity and the first connecting pipe, the valve seat assembly is of an integral structure and is fixedly connected with the shell component through welding, and the preset distance is reserved between the radial extending line of the welding position of the valve seat assembly and the shell component and the first connecting pipe. According to the electronic expansion valve, due to the fact that the preset distance is reserved between the radial extending line of the welding position and the first connecting pipe, when a valve body rotates relatively to carry out welding, the welding can be smoothly carried out without the obstruction of the first connecting pipe, and the integrated valve body is formed. Compared with a thread connecting mode in the background technology, the electronic expansion valve is of an integral structure, and the leakage rate of products can be obviously reduced; meanwhile, the thickness of materials does not need to be increased, the quality of the materials does not need to be improved, and the production cost of the products can be effectively controlled.

The invention relates to the technical field of computers, and provides a paperless online examination method and system. The method comprises step that a management terminal receives examiner identity identification information sent by a server, acquires identity identification information input by a user, matches the examiner identity identification information and the identity identification information, and if the matching is successful, according to paper identifier information input by the user, downloads the corresponding electronic paper from the server and sends the electronic paper to each examination terminal; the examination terminals receive the corresponding electronic paper sent by the management terminal, display the electronic paper, acquire answers input by the examinees, and send the answers of the examinees to the server. Compared with the prior art, the method and system are characterized in that by use of an examination service server system based on the Internet, examination data can be directly downloaded and examination results can be directly uploaded, so safety of the examination is improved, probability of leakages of topics and answers is reduced, workload of workers is reduced and the whole process of the examination is quite highly efficiently and quickly achieved.