288 results about "Ion energy" patented technology

The invention relates to the technical field of high-energy particle diagnosis, and discloses an ion probe and diagnosis device.According to the scheme, an insulating plate is arranged in a probe, the insulating plate is plated with a plurality of aluminum films (forming conductive parts) arranged at intervals, when high-energy ions bombard the aluminum films at different positions, current signals can be generated in the corresponding conductive parts, and the high-energy ions can be detected through the current signals; the current amplifier amplifies a generated current signal, transmits the current signal to the signal processing system through the isolation amplifier, collects and analyzes the current signal by the signal processing system, and judges whether the conductive part is bombarded by high-energy ions by detecting the current signals formed in different conductive parts; the angle range of the high-energy ions relative to magnetic lines and the energy distribution range of the high-energy ions are obtained; according to the scheme, the aluminum film is bombarded based on the high-energy ions, the current signal is generated, the experiment cost can be effectively reduced, collection is greatly facilitated, interference of other signals is avoided, and the accuracy of high-energy ion diagnosis is improved to a certain extent.

The invention provides an ion energy distribution testing device for immersed plasma injection equipment. The ion energy distribution testing device comprises a Faraday cup, a biasing circuit, a data acquisition unit and an upper computer, the Faraday cup is arranged around the wafer and configured to collect plasma energy around the wafer, and the plasma energy is converted into a current signal at a collector of the Faraday cup; the bias circuit is configured to apply bias voltage to the grid mesh of the Faraday cup under the enabling of the data acquisition unit; and the data acquisition unit is configured to drive the biasing circuit, acquire a current signal of the collector of the Faraday cup and a voltage signal of the grid, and upload the current signal and the voltage signal to an upper computer. According to the invention, through the design of the Faraday cups and the bias circuit, the whole measuring device can realize ion energy distribution measurement under high voltage, and the distribution condition and uniformity of ion energy around the wafer can be tested in cooperation with the arrangement of the plurality of Faraday cups.

Embodiments of the disclosure provided herein include an apparatus and method for the plasma processing of a substrate in a processing chamber. More specifically, embodiments of this disclosure describe a biasing scheme that is configured to provide a pulsed-voltage (PV) waveform delivered from one or more pulsed-voltage (PV) generators to the one or more electrodes within the processing chamber. The plasma process(es) disclosed herein can be used to control the shape of an ion energy distribution function (IEDF) and the interaction of the plasma with a surface of a substrate during plasma processing.

The invention belongs to the technical field of batteries, and particularly relates to a waste oil mediated preparation method of a whole-domain low-defect pseudographite domain-rich hard carbon material and a method and high-rate sodium ion energy storage. The preparation method comprises the following steps: uniformly mixing and stirring dried biomass and waste grease, putting the mixture into a tubular furnace, heating under protective gas, carrying out high-temperature carbonization, washing with a diluted hydrochloric acid solution and deionized water in sequence, and drying to obtain the waste oil mediated whole-domain low-defect pseudo-graphite domain high-rate hard carbon negative electrode material. According to the waste oil mediated global low-defect and pseudo-graphite domain-enriched high-rate hard carbon negative electrode material obtained by the invention, the structural stability of the material in an ion intercalation / deintercalation process is enhanced, the cycle life of an electrode is effectively prolonged, the high-rate performance of the material can be considered while the platform capacity is ensured, and the service life of the material is prolonged. And it is ensured that the electrode can still maintain high capacity output and good cycling stability under the large-current charging and discharging condition.

The present invention belongs to the technical field of energy storage batteries. Disclosed are a low-cost and long-cycle-life sodium-ion energy storage battery, a negative electrode, a preparation method and a preparation device. The preparation method comprises: adding a sodium-ion negative electrode material, a conductive agent and a binder to a high-speed shearing mixer for dry mixing; adding the mixed materials to a double-shaft hot roller, and extruding same into a membrane, wherein the thickness of the membrane is controlled to be 90-350 μm, the temperature of the double-shaft hot roller is controlled to be 100-180°C, and the pressure is controlled to be 18-35 T; attaching the membrane onto aluminum foil having a thickness of 8-20 μm, the surface of which has been subjected to gluing treatment, wherein an adhesive layer of the glued aluminum foil has a thickness of 2-6 μm, and the adhesive layer contains 65 wt% of conductive carbon and 35 wt% of polymer glue; and hot-pressing the complex at 85-130°C, so as to form a sodium-ion battery negative electrode. The sodium-ion energy storage battery comprises an aluminum-plastic film shell, a separator, an electrolyte, a positive electrode and a negative electrode. In the whole manufacturing process of the sodium-ion energy storage battery negative electrode, the energy consumption is reduced, the environment is protected, and the manufacturing cost of the whole battery is reduced.

The invention discloses a graphene / polyaniline composite film with a gradient structure and a preparation method and application thereof, the preparation method comprises the following steps: S1, preparing a coating template, and uniformly coating the coating template with a graphene oxide dispersion liquid to obtain a graphene oxide porous template; s2, performing electrochemical reduction on the graphene oxide porous template to obtain a reduced graphene oxide porous template; and S3, carrying out polyaniline electrodeposition on the reduced graphene oxide porous template to obtain the graphene / polyaniline composite film with a gradient structure. The graphene / polyaniline composite film prepared by the invention has a gradient structure, and can improve various ion energy storage characteristics and conductivity of the material.

A method for operating a plasma chamber to increase ion energy and decrease angular spread of ions during an etch operation is described. Method includes placing a substrate on an electrostatic chuck within the plasma chamber, wherein the electrostatic chuck is electrically coupled to a node. Method further includes forming a plasma in the plasma chamber, where the plasma produces a sheath with a first sheath voltage. The method further includes increasing the first sheath voltage to a second sheath voltage by applying a non-sinusoidal voltage at the electrostatic chuck and by applying a sinusoidal voltage at the electrostatic chuck, where a sum of the non-sinusoidal voltage and the sinusoidal voltage creates a voltage response on the electrostatic chuck that effectuates a change in a spread in ion energy at the wafer.

The invention belongs to the technical field of energy storage system state monitoring, and provides a lithium ion energy storage system abnormal state identification method and system based on impedance spectrum analysis, and the method comprises the steps: carrying out the decoupling of voltage response data and current response data through employing an excitation-response decoupling algorithm under a dynamic working condition, and obtaining an impedance spectrum; obtaining a voltage response component and a current response component; obtaining the total impedance spectrum of the lithium ion energy storage system under the current working condition; constructing a system-level impedance cloud picture; calculating a difference value between the current impedance spectrum and the weighted moving average baseline spectrum based on the system-level impedance cloud atlas to obtain an enhanced difference cloud atlas; and performing non-uniform segmentation and feature extraction on the enhanced difference cloud picture by using a visual Transform model oriented to electrochemical prior to obtain a multi-dimensional abnormal probability vector, and obtaining an abnormal state type of the lithium ion energy storage system based on the multi-dimensional abnormal probability vector. According to the technical scheme, the accuracy, timeliness and reliability of abnormal state recognition of the energy storage system are remarkably improved.

The invention belongs to the technical field of sustainable battery electrolyte design, is applied to an aqueous ammonium ion energy storage system, and particularly relates to a design method and a preparation method of an ammonium ion battery electrolyte additive adaptive to a high-voltage Prussian blue positive electrode material. According to the design method, electrostatic potentials (ESP) of different aprotic solvents are compared through quantum chemistry calculation, and finally acetone (ACE) is selected as an electrolyte additive to construct a weak solvation electrolyte system based on hydrogen bond interaction. The saturated addition amount of acetone in 1.0 mol L <-1 > (NH4) 2SO4 aqueous solution is determined through a pre-experiment, and is marked as 25% ACE. The electrolyte shows high suitability with a high-voltage Prussian blue positive electrode material (N-VHCF). Benefited from the construction of a competitive water-poor solvation structure and the blocking of a hydrogen bond network, the hydrogen evolution reaction and the oxygen evolution reaction in a 25% ACE electrolyte are inhibited, and the excellent performance of the Prussian blue positive electrode material (N-VHCF) under high discharge voltage is realized.

The invention discloses a sodium ion energy storage system dynamic load management method and system based on an intelligent algorithm, and relates to the technical field of battery management. Comprising the following steps: determining an initial thermal risk area through a thermal management model, obtaining a thermal risk score of each single battery at the same time, and determining a final thermal risk area from the initial thermal risk area; adjusting the thermal risk score through the state parameter of each single battery, and generating early warning information according to the adjusted thermal risk score; and according to the final thermal risk area and the early warning information, adjusting the charging and discharging rate and load distribution of each single battery. The state data of the single batteries are obtained through real-time monitoring, the working state of each single battery is accurately controlled, and it is ensured that the single batteries operate in the optimal working interval, so that unnecessary energy loss is reduced, and the energy conversion efficiency of the whole system is improved.

Systems, methods and apparatus for regulating ion energies in a plasma chamber and avoiding excessive and damaging charge buildup on the substrate surface and within capacitive structures being built on the surface. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis, and to maintain surface charge buildup below a threshold.

Embodiments of the present disclosure include apparatuses and methods for controlling plasma uniformity by controlling plasma density in a bulk plasma over a central region and a circumferential edge region of a substrate. Plasma uniformity may be controlled during plasma processing by using an RF tuning circuit coupled to one of a plurality of electrodes positioned relative to a substrate. By adjusting the electrical characteristics of at least one of the RF tuning circuits, the effect of the generated RF fundamental frequency and associated RF harmonic frequency on the plasma processing results can be controlled. Beneficially, one or more of the use of the tuning circuit and methods of using the tuning circuit may be used to provide individual tuning knobs to control reactive neutral concentration, ion energy and angular distribution, ion direction and direction uniformity, as well as to individually control ion flux and reactive neutral uniformity on a substrate surface.

Novel electrolyte compositions for lithium ion energy storage devices with silicon-based electrode materials have improved stability. The electrolyte composition may be used in an energy storage device that includes a first electrode and a second electrode, where at least one of the first electrode and the second electrode is a silicon-based electrode; a separator between the first electrode and the second electrode; and the electrolyte composition.

The present application relates to the technical field of energy storage devices, and particularly relates to a sodium supplement, a positive plate, a preparation method of the positive plate and an electric device. The composite sodium supplement is located in the positive plate of a sodium ion energy storage device, and the composite sodium supplement comprises: a first sodium supplement and a second sodium supplement, the first sodium supplement has a first oxidation potential, the second sodium supplement has a second oxidation potential, the first oxidation potential is less than 3.9V, and the second oxidation potential is 3.9V-4.4V. Since the composite sodium supplement is arranged in the positive plate, the composite sodium supplement has the advantages of easy operation and processing, reduced processing procedures, no harsh processing conditions and the like, and can realize industrial application. In addition, the composite sodium supplement has a relatively comprehensive sodium supplement function, can form a certain oxidation potential gradient, and realizes the effect of gradient sodium supplement. The sodium ion energy storage device can realize full-stage sodium supplement from the initialization stage to the subsequent cycle charging and discharging stage, and then the electrochemical performance of the sodium ion energy storage device is improved from the entire process of formation to cycle charging and discharging.

The invention belongs to the technical field of semiconductor manufacturing equipment, and discloses a DPP type extreme ultraviolet light source chip comprehensive filtering device and a method thereof. The DPP type extreme ultraviolet light source scrap comprehensive filtering device comprises a scrap introducing part, a vacuum difference part, a gas purging part, a foil trap filtering part, an atomic hydrogen part, a delayed field ion energy analyzer part, a quartz crystal microbalance part and a control and monitoring system. According to the device disclosed by the invention, various cleaning mechanisms (vacuum difference, gas purging, foil trap filtering and atomic hydrogen reaction) are combined, and a high-precision monitoring system (an ion energy analyzer and a quartz crystal microbalance) is introduced, so that the pollution of fragments of different types and different particle sizes can be effectively filtered and relieved. Meanwhile, the real-time online monitoring system can adjust the working state of each cleaning mechanism in time according to a monitoring result, so that efficient and accurate debris cleaning is realized, the service life of a photoetching system component is prolonged, and the photoetching efficiency is improved.

The present application relates to the technical field of negative electrode materials of batteries, and in particular relates to a porous composite elastomer and silicon-carbon, and preparation methods therefor and the use thereof. The present application provides a porous composite elastomer, which is of a porous structure, and comprises a flexible body and a rigid body, which are interpenetrating, wherein the raw material of the flexible body comprises carbon nanotubes, and the rigid body comprises hard carbon. In the present application, a silicon-carbon composite material is prepared by using carbon nanotubes and hard carbon as carbon sources and compounding same with silicon; and compared with a conventional silicon-carbon composite material, the carbon nanotubes, serving as a bridge between the silicon and the hard carbon, can effectively improve the conductivity and the ion conducting energy, thereby improving the rate capability of a negative electrode material.

A plasma-enhanced atomic layer deposition method and the associated reactor, the method including a supply of a substrate into a plasma reactor including a reaction chamber, and a plurality of atomic layer deposition cycles on the exposed surface of the substrate, including an injection in the reaction chamber of a precursor based on a first species, a plasma treatment of the exposed surface of the substrate by a plasma by capacity coupling between the plate and the lateral wall of the reaction chamber, by applying a radiofrequency power to the plate. Capacitive coupling makes it possible to create a plasma localised in the vicinity of the substrate, at low and finely adjustable ion energy and density.

A method for applying RF power in a plasma process chamber is provided, including: generating a first RF signal; generating a second RF signal; generating a third RF signal; wherein the first, second, and third RF signals are generated at different frequencies; combining the first, second and third RF signals to generate a combined RF signal, wherein a wave shape of the combined RF signal is configured to approximate a sloped square wave shape; applying the combined RF signal to a chuck in the plasma process chamber.

A sodium-ion energy storage apparatus is provided, including: a positive electrode, a negative electrode, a separator, and an electrolyte; a positive electrode active material of the positive electrode includes Ce1-xMxO2, M is at least one metal and 0.01≤x≤0.25; and a negative electrode active material of the negative electrode includes a sodium source that generates sodium ions. The positive electrode of the present disclosure uses Ce1-xMxO2 obtained by doping CeO2 with the metal M as the positive electrode, and the capacity is increased by two to three times compared to undoping.

The invention discloses lithium ion energy storage battery over-temperature protection and multi-dimensional safety management and control integrated equipment, and belongs to the technical field of battery over-temperature protection. And the multiple sets of buffering mechanisms are arranged, and the multiple sets of buffering mechanisms are all arranged in the protection outer box. According to the lithium ion energy storage battery over-temperature protection and multi-dimensional safety management and control integrated equipment, through the use of the high-temperature pressure relief mechanism, when the battery is in thermal runaway and the internal pressure is suddenly increased, a pure mechanical pressure relief sealing structure is burst open, the response speed is far higher than that of an electric control system needing to be recognized by a sensor, and a high-pressure jet flow generates negative pressure when passing through a throat; the fire extinguishing dry powder is automatically sucked out from the dry powder cavity, no external instruction or power is needed in the process, seamless connection of pressure relief, namely fire extinguishing is achieved, the dry powder is violently mixed with the high-temperature jet flow in the pressure relief channel, a large amount of heat can be instantly absorbed, the temperature of the jet flow can be reduced, open fire can be directly extinguished, and fire is effectively prevented from spreading in the box.

A radiation device comprises at least a vacuum chamber (1), an electromagnetic accelerator (8) for generating a primary energy beam of ions inside the vacuum chamber (1), and a layer of material (S) carried by a support (4) rotating in the vacuum chamber (1) to generate a flow of particles when a series of nuclear fusion reactions are triggered on the material (S) thanks to the energy of said beam, and wherein the support (4) is hollow and sealed defining a rotating three-dimensional surface that surrounds a containment volume for a cooling liquid in heat exchange with the layer of material (S), such rotating three-dimensional surface defining a heat exchange surface wetted by the liquid, and wherein a level of the free surface of the liquid on the heat exchange surface moves upwards in use due to the action of the centrifugal acceleration generated by the rotation of the support (4).

This disclosure describes systems, methods, and apparatus for controlling ion energy in a plasma processing chamber. In particular, a system for plasma processing includes a plasma processing chamber, a plasma source coupled to the plasma processing chamber, a plasma power supply coupled to the plasma source that is configured to apply power to the plasma processing chamber in periodic pulse envelopes to control a density of a plasma in the plasma processing chamber, and a support within the plasma processing chamber to support a substrate. A bias supply is configured to provide a modified periodic voltage function to the substrate support within each of the periodic pulse envelopes to control an energy of ions impacting the substrate support in the plasma processing chamber.

A plasma generator and a method of using the same are proposed. The disclosed relates to a plasma generator and a method of using the same capable of improving the uniformity of plasma used in a semiconductor manufacturing process and forming fine patterns and patterns having a high aspect ratio by precisely controlling ion energy. The plasma generator includes a vacuum chamber, a source electrode provided in the vacuum chamber, a bias electrode provided to correspond to the source electrode in the vacuum chamber and on which a substrate seated thereon, a shower head unit provided on a lower part of the source electrode to supply reaction gas to a plasma space above the substrate, an RF power supply unit for applying RF power to the source electrode, and a bias power supply unit connected to the bias electrode to apply bias power.

The invention relates to the technical field of energy storage fire fighting, in particular to an intelligent lithium ion energy storage cabinet fire fighting system and a multistage early warning method, and the system comprises a thermoelectric anomaly identification module, a risk concentration area verification module, a fire extinguishing path selection module, a target action triggering module and a region state judgment module. According to the method, consistency retrieval is carried out on signal direction changes of a battery core heat release position, a connection bar contact point position and an energy storage cabinet top detector position, abnormal area judgment is completed in combination with coordinate numbers, peripheral numbers are extracted, direction consistency is compared, an aggregation number range is constructed, nozzle path numbers are matched, and paths meeting requirements are screened; a control signal is sent to extract a feedback state comparison instruction and action response, and the closed state is checked in combination with the continuous change trend of a temperature gas signal, so that the abnormal source position judgment is reliable, the number screening is complete, the path coverage matching is sufficient, the action response checking is in place, and the fire-fighting task closed state information is complete.

The invention provides an information model of a sodium ion energy storage power station, which comprises a sodium ion energy storage power station class, and a sodium ion energy storage system class is gathered in the sodium ion energy storage power station class; the sodium ion energy storage power station class is used for describing various attribute information in the sodium ion energy storage power station, and the various attribute information at least comprises attribute information of a sodium ion energy storage battery, control attribute information of a sodium ion energy storage system, thermal management attribute information of the sodium ion energy storage battery and monitoring attribute information of the sodium ion energy storage system; and the sodium ion energy storage system is used for describing attribute information of the ion energy storage battery. According to the invention, a cell-control-sensing-cooling information model construction mode adaptive to a sodium ion energy storage power station is constructed.

The application provides an organic small-molecule electrolyte additive and application, and relates to the technical field of batteries. The organic small molecule is a carbon-containing three-membered ring alcohol small molecule, specifically, cyclopropanol, and the content of the electrolyte additive is 1%-10% v / v. Due to the metastable three-membered ring structure in the molecular structure of cyclopropanol, the ring-opening reaction is easily generated in the charging and discharging process, the electrode / electrolyte interface structure is reshaped, and the electrochemical performance is improved. Compared with conventional isopropyl alcohol, the cyclopropanol of the application can achieve the effect that excellent electrochemical performance can be presented only by adding a small amount of additive. The cyclopropanol has water solubility and organic co-solubility, and can form a uniform solution, and can be used in monovalent to multivalent ion energy storage systems of lithium, sodium, potassium, zinc, calcium, magnesium, cadmium, tin, aluminum, iron and the like, and will not have a negative impact on the solubility of the electrolyte, maintaining the high ionic conductivity of the electrolyte, which is simple, low in cost and good in application prospect.

The application discloses a multi-frequency harmonic injection system and method of a radio frequency power supply, comprising: a signal generating device configured to generate a target fundamental frequency component and at least one target harmonic component synchronized with the target fundamental frequency component, and output a multi-frequency radio frequency signal containing the target fundamental frequency component and the target harmonic component; a sampling device configured to sample the multi-frequency radio frequency signal to obtain a sampling signal; a signal processing device configured to separate an actual fundamental frequency component and an actual harmonic component from the sampling signal; and a control device configured to adjust the amplitude ratio and / or the phase between the target fundamental frequency component and the target harmonic component according to the amplitude and the phase of the actual fundamental frequency component and the actual harmonic component. The application realizes precise adjustment of plasma ion energy, waveform stability, process uniformity and reliability improvement through multi-frequency harmonic synchronous generation, real-time closed-loop regulation and decoupling control of ion energy-flux.

The invention discloses a hybrid energy storage cooperative control method and system for stabilizing new energy fluctuation, and belongs to the technical field of energy storage control, and the method comprises the steps: collecting new energy output data and electric load data on a power supply bus in real time, and calculating a stabilizing error; decomposing the stabilizing error into a high-frequency power instruction, an intermediate-frequency power instruction and a low-frequency power instruction by adopting a variable filtering time constant method; the high-frequency power instruction is sent to a bidirectional converter of a super capacitor, the intermediate-frequency power instruction is sent to a bidirectional converter of lithium ion energy storage, and the low-frequency power instruction is sent to a heat pump electricity storage system; energy storage states of the three hybrid energy storage systems are obtained, and a filtering time constant of a coupling control layer is periodically updated according to a preset safety threshold; through operation strategies of the system super capacitor, the lithium ion energy storage system and the heat pump power storage system, fluctuation stabilization of photovoltaic, wind power and other new energy power stations in different time scales is achieved, and stable output of energy and safe and reliable operation of a power grid are guaranteed.

A method for forming an implant hard mask on a substrate provides a multi-layer hardmask resistant to high processing temperatures and ion energies. In some embodiments, the method may comprise depositing a screen layer of oxide material with a thickness of approximately 20 nm to approximately 100 nm, depositing a first layer of the implant hard mask of amorphous carbon with a second thickness of approximately 100 nm to approximately 3000 nm; depositing a second layer of the implant hard mask of oxide with a third thickness of approximately 100 nm to approximately 3000 nm; depositing a photoresist layer on the second layer of the implant hard mask, and patterning the photoresist layer to expose portions of the second layer of the implant hard mask, etching the second layer of the implant hard mask and then the first layer of the implant hard mask using a hard mask etch process to expose portions of the screen layer.

A method for plasma processing a substrate includes: sustaining a plasma in a plasma processing chamber, the plasma processing chamber including a first electrode and a second electrode, where sustaining the plasma includes: coupling a source signal to the first electrode; and applying a bias signal to the second electrode, the bias signal having a spike waveform including a plurality of bias pulses, each of the bias pulses including a DC base voltage for a base duration and a triangular voltage spike having a rise time from the base voltage to a peak voltage and a fall time from the peak voltage to the base voltage, a sum of the rise time, the fall time, and the base duration including a pulse period, the applying including: independently adjusting the rise time and fall time to obtain a narrow energy spread of a mode at a high modal energy in an ion energy distribution function (IEDF) of an ion flux incident on the substrate, the narrow energy spread including a first width of the high energy mode of the IEDF that is smaller than a second width of the high energy mode of the IEDF obtainable using a rectangular pulse waveform.