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161 results about "Ion energy" patented technology

Lithium ion energy storage system abnormal state identification method and system based on impedance spectrum analysis

The invention belongs to the technical field of energy storage system state monitoring, and provides a lithium ion energy storage system abnormal state identification method and system based on impedance spectrum analysis, and the method comprises the steps: carrying out the decoupling of voltage response data and current response data through employing an excitation-response decoupling algorithm under a dynamic working condition, and obtaining an impedance spectrum; obtaining a voltage response component and a current response component; obtaining the total impedance spectrum of the lithium ion energy storage system under the current working condition; constructing a system-level impedance cloud picture; calculating a difference value between the current impedance spectrum and the weighted moving average baseline spectrum based on the system-level impedance cloud atlas to obtain an enhanced difference cloud atlas; and performing non-uniform segmentation and feature extraction on the enhanced difference cloud picture by using a visual Transform model oriented to electrochemical prior to obtain a multi-dimensional abnormal probability vector, and obtaining an abnormal state type of the lithium ion energy storage system based on the multi-dimensional abnormal probability vector. According to the technical scheme, the accuracy, timeliness and reliability of abnormal state recognition of the energy storage system are remarkably improved.
Owner:SHENZHEN GUANGQIAN ELECTRIC POWER

Stable electrolyte compositions for electrochemical storage systems

Novel electrolyte compositions for lithium ion energy storage devices with silicon-based electrode materials have improved stability. The electrolyte composition may be used in an energy storage device that includes a first electrode and a second electrode, where at least one of the first electrode and the second electrode is a silicon-based electrode; a separator between the first electrode and the second electrode; and the electrolyte composition.
Owner:ENEVATE CORP

Composite sodium supplement, positive electrode sheet, preparation method thereof, and electric device

The present application relates to the technical field of energy storage devices, and particularly relates to a sodium supplement, a positive plate, a preparation method of the positive plate and an electric device. The composite sodium supplement is located in the positive plate of a sodium ion energy storage device, and the composite sodium supplement comprises: a first sodium supplement and a second sodium supplement, the first sodium supplement has a first oxidation potential, the second sodium supplement has a second oxidation potential, the first oxidation potential is less than 3.9V, and the second oxidation potential is 3.9V-4.4V. Since the composite sodium supplement is arranged in the positive plate, the composite sodium supplement has the advantages of easy operation and processing, reduced processing procedures, no harsh processing conditions and the like, and can realize industrial application. In addition, the composite sodium supplement has a relatively comprehensive sodium supplement function, can form a certain oxidation potential gradient, and realizes the effect of gradient sodium supplement. The sodium ion energy storage device can realize full-stage sodium supplement from the initialization stage to the subsequent cycle charging and discharging stage, and then the electrochemical performance of the sodium ion energy storage device is improved from the entire process of formation to cycle charging and discharging.
Owner:XIAMEN HITHIUM ENERGY STORAGE TECHNOLOGY CO LTD

Capacitively coupled plasma-enhanced atomic layer deposition method

A plasma-enhanced atomic layer deposition method and the associated reactor, the method including a supply of a substrate into a plasma reactor including a reaction chamber, and a plurality of atomic layer deposition cycles on the exposed surface of the substrate, including an injection in the reaction chamber of a precursor based on a first species, a plasma treatment of the exposed surface of the substrate by a plasma by capacity coupling between the plate and the lateral wall of the reaction chamber, by applying a radiofrequency power to the plate. Capacitive coupling makes it possible to create a plasma localised in the vicinity of the substrate, at low and finely adjustable ion energy and density.
Owner:UNIVERSITE GRENOBLE ALPES +1

Sodium-ion energy storage apparatus

A sodium-ion energy storage apparatus is provided, including: a positive electrode, a negative electrode, a separator, and an electrolyte; a positive electrode active material of the positive electrode includes Ce1-xMxO2, M is at least one metal and 0.01≤x≤0.25; and a negative electrode active material of the negative electrode includes a sodium source that generates sodium ions. The positive electrode of the present disclosure uses Ce1-xMxO2 obtained by doping CeO2 with the metal M as the positive electrode, and the capacity is increased by two to three times compared to undoping.
Owner:POWER AHEAD GROUP INC

Lithium ion energy storage battery over-temperature protection and multi-dimensional safety management and control integrated equipment

The invention discloses lithium ion energy storage battery over-temperature protection and multi-dimensional safety management and control integrated equipment, and belongs to the technical field of battery over-temperature protection. And the multiple sets of buffering mechanisms are arranged, and the multiple sets of buffering mechanisms are all arranged in the protection outer box. According to the lithium ion energy storage battery over-temperature protection and multi-dimensional safety management and control integrated equipment, through the use of the high-temperature pressure relief mechanism, when the battery is in thermal runaway and the internal pressure is suddenly increased, a pure mechanical pressure relief sealing structure is burst open, the response speed is far higher than that of an electric control system needing to be recognized by a sensor, and a high-pressure jet flow generates negative pressure when passing through a throat; the fire extinguishing dry powder is automatically sucked out from the dry powder cavity, no external instruction or power is needed in the process, seamless connection of pressure relief, namely fire extinguishing is achieved, the dry powder is violently mixed with the high-temperature jet flow in the pressure relief channel, a large amount of heat can be instantly absorbed, the temperature of the jet flow can be reduced, open fire can be directly extinguished, and fire is effectively prevented from spreading in the box.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Fusion generated particle radiating device and radiating method thereof

A radiation device comprises at least a vacuum chamber (1), an electromagnetic accelerator (8) for generating a primary energy beam of ions inside the vacuum chamber (1), and a layer of material (S) carried by a support (4) rotating in the vacuum chamber (1) to generate a flow of particles when a series of nuclear fusion reactions are triggered on the material (S) thanks to the energy of said beam, and wherein the support (4) is hollow and sealed defining a rotating three-dimensional surface that surrounds a containment volume for a cooling liquid in heat exchange with the layer of material (S), such rotating three-dimensional surface defining a heat exchange surface wetted by the liquid, and wherein a level of the free surface of the liquid on the heat exchange surface moves upwards in use due to the action of the centrifugal acceleration generated by the rotation of the support (4).
Owner:ENTE PER LE NUOVE TECH LENERGIA E LAMBIENTE (ENEA)

Bias power supply and bias power supply control

This disclosure describes systems, methods, and apparatus for controlling ion energy in a plasma processing chamber. In particular, a system for plasma processing includes a plasma processing chamber, a plasma source coupled to the plasma processing chamber, a plasma power supply coupled to the plasma source that is configured to apply power to the plasma processing chamber in periodic pulse envelopes to control a density of a plasma in the plasma processing chamber, and a support within the plasma processing chamber to support a substrate. A bias supply is configured to provide a modified periodic voltage function to the substrate support within each of the periodic pulse envelopes to control an energy of ions impacting the substrate support in the plasma processing chamber.
Owner:ADVANCED ENERGY IND INC

Intelligent lithium ion energy storage cabinet fire extinguishing system and multistage early warning method

The invention relates to the technical field of energy storage fire fighting, in particular to an intelligent lithium ion energy storage cabinet fire fighting system and a multistage early warning method, and the system comprises a thermoelectric anomaly identification module, a risk concentration area verification module, a fire extinguishing path selection module, a target action triggering module and a region state judgment module. According to the method, consistency retrieval is carried out on signal direction changes of a battery core heat release position, a connection bar contact point position and an energy storage cabinet top detector position, abnormal area judgment is completed in combination with coordinate numbers, peripheral numbers are extracted, direction consistency is compared, an aggregation number range is constructed, nozzle path numbers are matched, and paths meeting requirements are screened; a control signal is sent to extract a feedback state comparison instruction and action response, and the closed state is checked in combination with the continuous change trend of a temperature gas signal, so that the abnormal source position judgment is reliable, the number screening is complete, the path coverage matching is sufficient, the action response checking is in place, and the fire-fighting task closed state information is complete.
Owner:HENAN PINGMEI SHENMA ENERGY STORAGE CO LTD

Organic small-molecule electrolyte additive and application thereof

The application provides an organic small-molecule electrolyte additive and application, and relates to the technical field of batteries. The organic small molecule is a carbon-containing three-membered ring alcohol small molecule, specifically, cyclopropanol, and the content of the electrolyte additive is 1%-10% v / v. Due to the metastable three-membered ring structure in the molecular structure of cyclopropanol, the ring-opening reaction is easily generated in the charging and discharging process, the electrode / electrolyte interface structure is reshaped, and the electrochemical performance is improved. Compared with conventional isopropyl alcohol, the cyclopropanol of the application can achieve the effect that excellent electrochemical performance can be presented only by adding a small amount of additive. The cyclopropanol has water solubility and organic co-solubility, and can form a uniform solution, and can be used in monovalent to multivalent ion energy storage systems of lithium, sodium, potassium, zinc, calcium, magnesium, cadmium, tin, aluminum, iron and the like, and will not have a negative impact on the solubility of the electrolyte, maintaining the high ionic conductivity of the electrolyte, which is simple, low in cost and good in application prospect.
Owner:SANYA SCI & EDUCATION INNOVATION PARK WUHAN UNIV OF TECH

A multi-frequency harmonic injection system and method for a radio frequency power supply

The application discloses a multi-frequency harmonic injection system and method of a radio frequency power supply, comprising: a signal generating device configured to generate a target fundamental frequency component and at least one target harmonic component synchronized with the target fundamental frequency component, and output a multi-frequency radio frequency signal containing the target fundamental frequency component and the target harmonic component; a sampling device configured to sample the multi-frequency radio frequency signal to obtain a sampling signal; a signal processing device configured to separate an actual fundamental frequency component and an actual harmonic component from the sampling signal; and a control device configured to adjust the amplitude ratio and / or the phase between the target fundamental frequency component and the target harmonic component according to the amplitude and the phase of the actual fundamental frequency component and the actual harmonic component. The application realizes precise adjustment of plasma ion energy, waveform stability, process uniformity and reliability improvement through multi-frequency harmonic synchronous generation, real-time closed-loop regulation and decoupling control of ion energy-flux.
Owner:江苏神州半导体科技股份有限公司

Hybrid energy storage cooperative control method and system for stabilizing new energy fluctuation

The invention discloses a hybrid energy storage cooperative control method and system for stabilizing new energy fluctuation, and belongs to the technical field of energy storage control, and the method comprises the steps: collecting new energy output data and electric load data on a power supply bus in real time, and calculating a stabilizing error; decomposing the stabilizing error into a high-frequency power instruction, an intermediate-frequency power instruction and a low-frequency power instruction by adopting a variable filtering time constant method; the high-frequency power instruction is sent to a bidirectional converter of a super capacitor, the intermediate-frequency power instruction is sent to a bidirectional converter of lithium ion energy storage, and the low-frequency power instruction is sent to a heat pump electricity storage system; energy storage states of the three hybrid energy storage systems are obtained, and a filtering time constant of a coupling control layer is periodically updated according to a preset safety threshold; through operation strategies of the system super capacitor, the lithium ion energy storage system and the heat pump power storage system, fluctuation stabilization of photovoltaic, wind power and other new energy power stations in different time scales is achieved, and stable output of energy and safe and reliable operation of a power grid are guaranteed.
Owner:STATE GRID JIANGSU ELECTRIC POWER CO LTD RESEARCH INSTITUTE +2

Method of sustaining plasma for plasma processing

PCT designated stageWO2026049920A1Electric discharge tubesVoltage spikeHigh energy
A method for plasma processing a substrate includes: sustaining a plasma in a plasma processing chamber, the plasma processing chamber including a first electrode and a second electrode, where sustaining the plasma includes: coupling a source signal to the first electrode; and applying a bias signal to the second electrode, the bias signal having a spike waveform including a plurality of bias pulses, each of the bias pulses including a DC base voltage for a base duration and a triangular voltage spike having a rise time from the base voltage to a peak voltage and a fall time from the peak voltage to the base voltage, a sum of the rise time, the fall time, and the base duration including a pulse period, the applying including: independently adjusting the rise time and fall time to obtain a narrow energy spread of a mode at a high modal energy in an ion energy distribution function (IEDF) of an ion flux incident on the substrate, the narrow energy spread including a first width of the high energy mode of the IEDF that is smaller than a second width of the high energy mode of the IEDF obtainable using a rectangular pulse waveform.
Owner:TOKYO ELECTRON LTD +1

Chamber impedance management in a processing chamber

Embodiments of the present disclosure include apparatus and methods for controlling plasma uniformity by controlling plasma density in a bulk plasma across the center and peripheral edge regions of a substrate. Plasma uniformity can be controlled by using an RF tuning circuit coupled to one of multiple electrodes positioned relative to the substrate during plasma processing. Adjusting at least one electrical characteristic of the RF tuning circuit can control the effect of the generated RF fundamental frequency and associated RF harmonic frequencies on plasma processing results. Beneficially, one or more of the tuning circuits and methods of using the tuning circuits can be used to control reactive neutral species concentration, ion energy and angular distribution, ion directionality and directional uniformity, providing individual adjustment knobs for individually controlling ion flux and reactive neutral species uniformity across the surface of the substrate.
Owner:APPLIED MATERIALS INC

An online proton imaging ion spectrometer diagnostic system

The application discloses an online proton imaging ion spectrometer diagnosis system, relates to the fields of plasma physics and nuclear detection, and comprises an online proton imaging module, an online Thomson ion spectrometer module and a shielding aiming module; the shielding aiming module comprises a shielding cavity and an aiming laser pen; the online proton imaging module comprises a metal filter, a first scintillator and two proton imaging acquisition assemblies; the proton imaging acquisition assembly comprises a first optical fiber panel attached to the first scintillator and a first CMOS sensor attached to the first optical fiber panel; the online Thomson ion spectrometer module comprises an ion beam deflection mechanism and an ion spectrum diagnosis acquisition assembly; the ion spectrum diagnosis acquisition assembly comprises a light-proof aluminum film, a second scintillator, a second optical fiber panel and a second CMOS sensor which are sequentially and superposedly arranged. The application reduces the size of the whole system, can simultaneously carry out online proton imaging and ion energy spectrum diagnosis, and can effectively prevent radiation damage to the CMOS chip.
Owner:LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS

Plasma processing apparatus and power supply system

To provide a technique for controlling energy of ions supplied from plasma to a substrate.SOLUTION: In the plasma processing apparatus according to an exemplary embodiment, a pulsed negative direct-current voltage is periodically applied to a lower electrode. A frequency defining the period in which the pulsed negative direct-current voltage is applied to the lower electrode is lower than the frequency of high-frequency power supplied to generate plasma. The high-frequency power is supplied during a first partial period within the period. The power level of the high-frequency power in a second partial period within the period is set to a power level reduced from the power level of the high-frequency power in the first partial period.SELECTED DRAWING: Figure 1
Owner:TOKYO ELECTRON LTD

Intelligent power supply method and device for sodium ion energy storage system

The invention relates to the technical field of energy storage and power supply, in particular to an intelligent power supply method and device for a sodium ion energy storage system. The method comprises the following steps: acquiring real-time operation data of the sodium ion energy storage system; performing battery pack state extraction on the real-time operation data to obtain a battery state data set; obtaining battery pack structure data; analyzing the diffusion rate and porosity of the battery pack structure data, and calculating the maximum diffusion rate of sodium ions according to the charge state and the electrode fractal structure characteristic data; pulse charging of the sodium ion energy storage system is dynamically adjusted through the maximum diffusion rate and the voltage fluctuation rate of sodium ions, and pulse charging control parameters are obtained; the power supply precision, the response speed and the operation efficiency of the sodium ion energy storage system are improved by utilizing the technologies of battery state multi-dimensional data extraction, electrode fractal structure analysis, diffusion rate dynamic calculation, self-adaptive pulse charging control and the like.
Owner:GANZHOU KANGJIN ENERGY STORAGE TECHNOLOGY CO LTD

Two-channel ion energy probe based on magnetic deflection effect

The invention relates to the technical field of plasma detection, in particular to a dual-channel ion energy probe based on a magnetic deflection effect. The invention provides a dual-channel ion energy probe based on a magnetic deflection effect. The dual-channel ion energy probe comprises an upper permanent magnet plate, a lower permanent magnet plate, a dual-channel collimator and a dual-channel probe, the dual-channel collimator penetrates into the shell and comprises a scanning channel and a reference channel, the scanning channel and the reference channel are connected with voltages of different values, the dual-channel collimator is used for enabling ions to enter the shell along the channel direction, and the upper permanent magnet plate and the lower permanent magnet plate are respectively fixed at the upper end and the lower end of the shell to form a uniform magnetic field. The dual-channel probe is arranged in the shell and comprises a scanning collection probe coplanar with the scanning channel and a reference collection probe coplanar with the reference channel, and the scanning collection probe and the reference collection probe are connected with voltages of different values respectively. According to the scheme, the ion current probe with a high signal-to-noise ratio can be provided.
Owner:BEIJING INST OF CONTROL ENG

Negative ion energy-saving lamp

The utility model discloses a negative ion energy-saving lamp, which relates to the technical field of energy-saving lamps and is characterized by comprising a lamp holder and a negative ion lamp tube fixedly mounted at the bottom of the lamp holder, a radiating and cooling mechanism is arranged on the lamp holder and comprises an air box fixedly mounted on the outer circular surface of the lamp holder, and a refrigerating sheet is fixedly mounted on the inner wall of the air box. The radiating and cooling mechanism is arranged, the semiconductor chilling plate is used for actively cooling airflow, the directional cold air circulating system driven by the micro air pump is combined, the annular cold air outlets of the inner and outer air rings uniformly cover the inner and outer surfaces of the lamp tube, and the problems of lamp tube aging, deformation and element damage caused by local heat accumulation are solved; the surrounding type three-dimensional cooling air channel formed by flow division of the flow guide pipe covers a core heating area, the dynamic adjustable airflow intensity is combined, the heat dissipation efficiency and energy efficiency are remarkably improved, potential safety hazards caused by insufficient heat dissipation of a traditional lamp are avoided, energy consumption is reduced, and the service life is prolonged.
Owner:HAINING YOULIAN LIGHTING & ELECTRONICS

Rapid charging and discharging method and system based on sodium ion energy storage system

The invention provides a rapid charging and discharging method and system based on a sodium ion energy storage system, and relates to the technical field of energy storage, and the method comprises the steps: determining the instantaneous heat loss of an energy storage module in a scheduling switching process according to the transient change characteristic and current abrupt change component of the electrode heat behavior of the energy storage module in the scheduling switching process; the instantaneous output power of the energy storage modules in the scheduling switching process is extracted, the distribution state of the thermal load between the energy storage modules is analyzed according to the instantaneous output power and the internal resistance change rate in the scheduling switching process, and then the thermal load balance index of the sodium ion energy storage system in the charging and discharging process is determined; and constructing a thermal cost regulation and control model suitable for the rapid charging and discharging process based on the instantaneous thermal loss and the thermal load balancing index, and adjusting thermal compensation power during scheduling switching in the rapid charging and discharging process through the thermal cost regulation and control model. According to the invention, the dynamic adjustment of the thermal compensation power during the scheduling switching of the energy storage module can be realized, so that the stability of the sodium ion energy storage system in the rapid charging and discharging process is improved.
Owner:GANZHOU KANGJIN ENERGY STORAGE TECHNOLOGY CO LTD

Method and apparatus for digital control of ion energy distribution in a plasma

Embodiments provided herein generally include apparatus, plasma processing systems and methods for generation of a waveform for plasma processing of a substrate in a processing chamber. Embodiments of the disclosure include an apparatus and method for generating a pseudo-staircase waveform that includes coupling, during a first phase of generating a waveform, a first voltage supply to an output node; coupling, during a second phase of generating the waveform, a first capacitor between the output node and an electrical ground node; and coupling during a third phase of generating the waveform, the first capacitor and a second capacitor in a series path between the output node and the electrical ground node.
Owner:APPLIED MATERIALS INC

Ion source online detection method and device, electronic equipment and storage medium

PendingCN121366845AElectric discharge tubesParticle physicsBeam density
The embodiment of the invention discloses an ion source online detection method and device, electronic equipment and a storage medium, and relates to the technical field of ion sources, and the method comprises the steps: receiving an ion beam emitted by an ion source, and obtaining a first current signal and a second current signal based on the ion beam measurement; the first current signal is measured by moving the Faraday cup along a horizontal axis, and the second current signal is measured by the Faraday cup under at least one bias voltage; performing inversion according to the first current signal and a space response function of the Faraday cup to obtain beam density distribution of the ion source; and / or, according to the second current signal and the spatial response function, performing inversion to obtain ion energy distribution of the ion source; the spatial response function is used for representing the probability that the ion beam is collected after entering the Faraday cup; and carrying out on-line detection on the ion source based on the beam density distribution and / or the ion energy distribution. The embodiment of the invention is suitable for carrying out online detection on the large-size ion source, the detection mode is simple, and the cost is relatively low.
Owner:ZHONGSHAN IBD TECH CO LTD +1

Novel organic material for aqueous ammonium ion battery as well as preparation method and application of novel organic material

The invention discloses a novel organic material for an aqueous ammonium ion battery as well as a preparation method and application of the novel organic material, and belongs to the technical field of novel organic energy storage materials. According to the preparation method, the novel organic material PHAT-HKH is prepared by carrying out dehydration condensation reaction on cyclohexanehexone hydrate and 2, 4, 6-tri (1, 2-phenylenediamine)-1, 3, 5-triazine. The PHAT-HKH material prepared by the invention is rich in pyridine nitrogen, so that the oxidation-reduction activity of the material is improved. Meanwhile, a constructed hydrogen bond network enhances the structural stability of the material, and the ammonium ion energy storage performance of the material is improved under a synergistic mechanism.
Owner:LIAONING UNIVERSITY

Method, system, device and medium for calculating health of sodium-ion energy storage battery

This invention relates to the field of energy storage battery technology, specifically to a method, system, device, and medium for calculating the health status of a sodium-ion energy storage battery. The method includes: calculating several current states of charge (SOCs) of the energy storage battery at different times using the ampere-hour integral method; fitting the current SOCs and current terminal voltage to obtain a first correspondence; performing a Taylor expansion on the first correspondence to obtain the first coefficients of the nth-order Taylor expansion, forming a first coefficient matrix; pre-setting preset coefficients corresponding to different health statuses of the energy storage battery, forming a preset coefficient matrix; and comparing the first coefficient matrix with the preset coefficient matrix to obtain the health status corresponding to the preset coefficients that match the first coefficient matrix, which is the current health status of the energy storage battery. This invention effectively reduces the error in calculating the health status of energy storage batteries. When applied to sodium-ion energy storage batteries, it does not require a full charge-discharge cycle, making it more suitable for the application scenarios of sodium-ion energy storage batteries.
Owner:ENERGY STORAGE RES INST OF CHINA SOUTHERN POWER GRID PEAK-FREQUENCY MODULATION POWER GENERATION CO LTD

Surface in-situ treatment method of tungsten first wall, tungsten first wall and fusion device

The invention discloses a surface in-situ treatment method for a tungsten first wall of a fusion device, which comprises the following steps: heating the tungsten first wall to a preset temperature interval, and the preset temperature interval is [700 DEG C, 1300 DEG C]; and on the basis of a preset irradiation mode, helium injected in advance is processed, helium plasma is generated, the incident ion energy of the helium plasma reaching the first wall of tungsten is controlled to be within a preset energy interval, and the preset energy interval is [20 eV, 100 eV]. And according to the helium plasma, the first tungsten wall in the preset temperature interval is subjected to irradiation treatment till the accumulated helium ion fluffy quantity of the first tungsten wall meets a preset condition, a tungsten fluff layer and helium bubbles are generated on the first tungsten wall in situ, and the preset condition is that the accumulated helium ion fluffy quantity is larger than the accumulated helium ion fluffy quantity. In this way, the tungsten fluff layer can prevent helium plasma from being polluted by tungsten ions by reducing the net sputtering yield of tungsten. And the helium bubbles can inhibit recrystallization nucleation and grain growth at high temperature.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Shielded apparatus for ion energy analysis of plasma processes

An apparatus for obtaining ion energy distribution measurements in a plasma processing system comprising a substrate, an ion energy sensor and associated control circuitry disposed in the substrate, and a conductive enclosure disposed in the substrate and surrounding the ion energy sensor and control circuitry such that the substrate at least partially surrounds the conductive enclosure.
Owner:APPLIED MATERIALS INC

In-situ surface treatment method of tungsten first wall, tungsten first wall and fusion device

The application discloses a surface in-situ processing method of a tungsten first wall of a fusion device, comprising: heating the tungsten first wall to a preset temperature interval, wherein the preset temperature interval is [700 DEG C, 1300 DEG C]. Based on a preset irradiation mode, pre-injected helium gas is processed to generate a helium plasma and control incident ion energy of the helium plasma reaching the tungsten first wall to be in a preset energy interval, wherein the preset energy interval is [20 eV, 100 eV]. According to the helium plasma, the tungsten first wall in the preset temperature interval is irradiated and processed until a cumulative helium ion fluence of the tungsten first wall meets a preset condition, so as to in-situ generate a tungsten villus layer and a helium bubble on the tungsten first wall, wherein the preset condition is that the cumulative helium ion fluence is greater than 1.0 x 10 22 He / m 2. In this way, the tungsten villus layer can reduce the net sputtering yield of tungsten and avoid contamination of the helium plasma by tungsten ions. The helium bubble can inhibit recrystallization nucleation and grain growth at high temperature.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Simulation method and system for sputtering monocrystalline silicon target material based on focused ion beam

The invention provides a simulation method and system for sputtering a monocrystalline silicon target material based on a focused ion beam, and relates to the technical field of semiconductor material micro-nano machining, the method comprises the following steps: defining sputtering parameters including incident ion parameters, target material parameters and target material depth, and selecting an SRIM / TRIM calculation method; on the basis of the sputtering parameters, calculating an ion beam sputtering target material to generate distribution data; based on the distribution data, through integrated analysis of an integrated parameter optimization module and a damage evaluation model, the processing efficiency and the damage depth when the focused ion beam is used for processing the monocrystalline silicon target material are dynamically balanced; wherein the damage evaluation model selects sputtering parameters with the minimum defect influence and the etching efficiency higher than a preset threshold value by comparing defect density distribution, energy loss distribution and phonon energy loss distribution. Through a simulation framework based on the Monte Carlo method, collaborative optimization of parameters such as ion energy and target material thickness is realized, and the dynamic relationship between the sputtering yield and the damage depth is quantitatively analyzed.
Owner:QILU UNIVERSITY OF TECHNOLOGY (SHANDONG ACADEMY OF SCIENCES)

Organic sacrificial salt, positive pole piece, alkali metal ion energy storage device and pre-metallization method

The invention provides an organic sacrificial salt, a positive pole piece, an alkali metal ion energy storage device and a pre-metallization method, and relates to the technical field of alkali metal ion energy storage devices. The low-decomposition-voltage organic sacrificial salt disclosed by the invention has a structure as shown in a formula I: R-CH2-COOM formula I, in the formula (I), R is selected from any one of-N (CH3) 2,-NHCH3,-NH2,-OCH3,-OPh and-Ph; m is selected from any one of Li, Na or K. A specific electron-donating group in the structure of the organic sacrificial salt can endow the organic sacrificial salt with a relatively high HOMO energy level through a hyperconjugation effect, so that the oxidation potential of the organic sacrificial salt is effectively reduced; when the organic sacrificial salt is used as a positive pole piece additive in the alkali metal ion energy storage device, the capacity retention ratio of the alkali metal ion energy storage device comprising the organic sacrificial salt can be remarkably improved by pre-metallization, and the degradation of an electrolyte solvent and an electrode structure is inhibited; and the alkali metal ion energy storage device with excellent cycling stability and rate capability is obtained.
Owner:TIANJIN POLYTECHNIC UNIV

Method for prediction of ion energy distribution in plasma process

PCT designated stageWO2026177782A1Hidden layerData set
A method includes receiving a training data set, which includes one or more operating parameters of a plasma processing system and ion energy distribution function (IEDF) features corresponding to the one or more operating parameters. The one or more operating parameters include at least one process setpoint from a process recipe, at least one measured operating parameter, or at least one simulated operating parameter. The IEDF features include at least one measured IEDF feature or at least one simulated IEDF feature. The method further includes training an artificial neural network (ANN) using the one or more operating parameters as input, and the IEDF features as output. The ANN includes an input layer including one or more input nodes corresponding to the one or more operating parameters, a single hidden layer including one or more hidden nodes, and an output layer including output nodes corresponding to the IEDF features.
Owner:TOKYO ELECTRON LTD +1