122 results about "Ion energy" patented technology

The invention belongs to the technical field of energy storage system state monitoring, and provides a lithium ion energy storage system abnormal state identification method and system based on impedance spectrum analysis, and the method comprises the steps: carrying out the decoupling of voltage response data and current response data through employing an excitation-response decoupling algorithm under a dynamic working condition, and obtaining an impedance spectrum; obtaining a voltage response component and a current response component; obtaining the total impedance spectrum of the lithium ion energy storage system under the current working condition; constructing a system-level impedance cloud picture; calculating a difference value between the current impedance spectrum and the weighted moving average baseline spectrum based on the system-level impedance cloud atlas to obtain an enhanced difference cloud atlas; and performing non-uniform segmentation and feature extraction on the enhanced difference cloud picture by using a visual Transform model oriented to electrochemical prior to obtain a multi-dimensional abnormal probability vector, and obtaining an abnormal state type of the lithium ion energy storage system based on the multi-dimensional abnormal probability vector. According to the technical scheme, the accuracy, timeliness and reliability of abnormal state recognition of the energy storage system are remarkably improved.

The invention discloses lithium ion energy storage battery over-temperature protection and multi-dimensional safety management and control integrated equipment, and belongs to the technical field of battery over-temperature protection. And the multiple sets of buffering mechanisms are arranged, and the multiple sets of buffering mechanisms are all arranged in the protection outer box. According to the lithium ion energy storage battery over-temperature protection and multi-dimensional safety management and control integrated equipment, through the use of the high-temperature pressure relief mechanism, when the battery is in thermal runaway and the internal pressure is suddenly increased, a pure mechanical pressure relief sealing structure is burst open, the response speed is far higher than that of an electric control system needing to be recognized by a sensor, and a high-pressure jet flow generates negative pressure when passing through a throat; the fire extinguishing dry powder is automatically sucked out from the dry powder cavity, no external instruction or power is needed in the process, seamless connection of pressure relief, namely fire extinguishing is achieved, the dry powder is violently mixed with the high-temperature jet flow in the pressure relief channel, a large amount of heat can be instantly absorbed, the temperature of the jet flow can be reduced, open fire can be directly extinguished, and fire is effectively prevented from spreading in the box.

The invention relates to the technical field of energy storage fire fighting, in particular to an intelligent lithium ion energy storage cabinet fire fighting system and a multistage early warning method, and the system comprises a thermoelectric anomaly identification module, a risk concentration area verification module, a fire extinguishing path selection module, a target action triggering module and a region state judgment module. According to the method, consistency retrieval is carried out on signal direction changes of a battery core heat release position, a connection bar contact point position and an energy storage cabinet top detector position, abnormal area judgment is completed in combination with coordinate numbers, peripheral numbers are extracted, direction consistency is compared, an aggregation number range is constructed, nozzle path numbers are matched, and paths meeting requirements are screened; a control signal is sent to extract a feedback state comparison instruction and action response, and the closed state is checked in combination with the continuous change trend of a temperature gas signal, so that the abnormal source position judgment is reliable, the number screening is complete, the path coverage matching is sufficient, the action response checking is in place, and the fire-fighting task closed state information is complete.

The application provides an organic small-molecule electrolyte additive and application, and relates to the technical field of batteries. The organic small molecule is a carbon-containing three-membered ring alcohol small molecule, specifically, cyclopropanol, and the content of the electrolyte additive is 1%-10% v / v. Due to the metastable three-membered ring structure in the molecular structure of cyclopropanol, the ring-opening reaction is easily generated in the charging and discharging process, the electrode / electrolyte interface structure is reshaped, and the electrochemical performance is improved. Compared with conventional isopropyl alcohol, the cyclopropanol of the application can achieve the effect that excellent electrochemical performance can be presented only by adding a small amount of additive. The cyclopropanol has water solubility and organic co-solubility, and can form a uniform solution, and can be used in monovalent to multivalent ion energy storage systems of lithium, sodium, potassium, zinc, calcium, magnesium, cadmium, tin, aluminum, iron and the like, and will not have a negative impact on the solubility of the electrolyte, maintaining the high ionic conductivity of the electrolyte, which is simple, low in cost and good in application prospect.

The application discloses a multi-frequency harmonic injection system and method of a radio frequency power supply, comprising: a signal generating device configured to generate a target fundamental frequency component and at least one target harmonic component synchronized with the target fundamental frequency component, and output a multi-frequency radio frequency signal containing the target fundamental frequency component and the target harmonic component; a sampling device configured to sample the multi-frequency radio frequency signal to obtain a sampling signal; a signal processing device configured to separate an actual fundamental frequency component and an actual harmonic component from the sampling signal; and a control device configured to adjust the amplitude ratio and / or the phase between the target fundamental frequency component and the target harmonic component according to the amplitude and the phase of the actual fundamental frequency component and the actual harmonic component. The application realizes precise adjustment of plasma ion energy, waveform stability, process uniformity and reliability improvement through multi-frequency harmonic synchronous generation, real-time closed-loop regulation and decoupling control of ion energy-flux.

The invention discloses a hybrid energy storage cooperative control method and system for stabilizing new energy fluctuation, and belongs to the technical field of energy storage control, and the method comprises the steps: collecting new energy output data and electric load data on a power supply bus in real time, and calculating a stabilizing error; decomposing the stabilizing error into a high-frequency power instruction, an intermediate-frequency power instruction and a low-frequency power instruction by adopting a variable filtering time constant method; the high-frequency power instruction is sent to a bidirectional converter of a super capacitor, the intermediate-frequency power instruction is sent to a bidirectional converter of lithium ion energy storage, and the low-frequency power instruction is sent to a heat pump electricity storage system; energy storage states of the three hybrid energy storage systems are obtained, and a filtering time constant of a coupling control layer is periodically updated according to a preset safety threshold; through operation strategies of the system super capacitor, the lithium ion energy storage system and the heat pump power storage system, fluctuation stabilization of photovoltaic, wind power and other new energy power stations in different time scales is achieved, and stable output of energy and safe and reliable operation of a power grid are guaranteed.

A method for plasma processing a substrate includes: sustaining a plasma in a plasma processing chamber, the plasma processing chamber including a first electrode and a second electrode, where sustaining the plasma includes: coupling a source signal to the first electrode; and applying a bias signal to the second electrode, the bias signal having a spike waveform including a plurality of bias pulses, each of the bias pulses including a DC base voltage for a base duration and a triangular voltage spike having a rise time from the base voltage to a peak voltage and a fall time from the peak voltage to the base voltage, a sum of the rise time, the fall time, and the base duration including a pulse period, the applying including: independently adjusting the rise time and fall time to obtain a narrow energy spread of a mode at a high modal energy in an ion energy distribution function (IEDF) of an ion flux incident on the substrate, the narrow energy spread including a first width of the high energy mode of the IEDF that is smaller than a second width of the high energy mode of the IEDF obtainable using a rectangular pulse waveform.

Embodiments of the present disclosure include apparatus and methods for controlling plasma uniformity by controlling plasma density in a bulk plasma across the center and peripheral edge regions of a substrate. Plasma uniformity can be controlled by using an RF tuning circuit coupled to one of multiple electrodes positioned relative to the substrate during plasma processing. Adjusting at least one electrical characteristic of the RF tuning circuit can control the effect of the generated RF fundamental frequency and associated RF harmonic frequencies on plasma processing results. Beneficially, one or more of the tuning circuits and methods of using the tuning circuits can be used to control reactive neutral species concentration, ion energy and angular distribution, ion directionality and directional uniformity, providing individual adjustment knobs for individually controlling ion flux and reactive neutral species uniformity across the surface of the substrate.

The application discloses an online proton imaging ion spectrometer diagnosis system, relates to the fields of plasma physics and nuclear detection, and comprises an online proton imaging module, an online Thomson ion spectrometer module and a shielding aiming module; the shielding aiming module comprises a shielding cavity and an aiming laser pen; the online proton imaging module comprises a metal filter, a first scintillator and two proton imaging acquisition assemblies; the proton imaging acquisition assembly comprises a first optical fiber panel attached to the first scintillator and a first CMOS sensor attached to the first optical fiber panel; the online Thomson ion spectrometer module comprises an ion beam deflection mechanism and an ion spectrum diagnosis acquisition assembly; the ion spectrum diagnosis acquisition assembly comprises a light-proof aluminum film, a second scintillator, a second optical fiber panel and a second CMOS sensor which are sequentially and superposedly arranged. The application reduces the size of the whole system, can simultaneously carry out online proton imaging and ion energy spectrum diagnosis, and can effectively prevent radiation damage to the CMOS chip.

The invention relates to the technical field of energy storage and power supply, in particular to an intelligent power supply method and device for a sodium ion energy storage system. The method comprises the following steps: acquiring real-time operation data of the sodium ion energy storage system; performing battery pack state extraction on the real-time operation data to obtain a battery state data set; obtaining battery pack structure data; analyzing the diffusion rate and porosity of the battery pack structure data, and calculating the maximum diffusion rate of sodium ions according to the charge state and the electrode fractal structure characteristic data; pulse charging of the sodium ion energy storage system is dynamically adjusted through the maximum diffusion rate and the voltage fluctuation rate of sodium ions, and pulse charging control parameters are obtained; the power supply precision, the response speed and the operation efficiency of the sodium ion energy storage system are improved by utilizing the technologies of battery state multi-dimensional data extraction, electrode fractal structure analysis, diffusion rate dynamic calculation, self-adaptive pulse charging control and the like.

The invention relates to the technical field of plasma detection, in particular to a dual-channel ion energy probe based on a magnetic deflection effect. The invention provides a dual-channel ion energy probe based on a magnetic deflection effect. The dual-channel ion energy probe comprises an upper permanent magnet plate, a lower permanent magnet plate, a dual-channel collimator and a dual-channel probe, the dual-channel collimator penetrates into the shell and comprises a scanning channel and a reference channel, the scanning channel and the reference channel are connected with voltages of different values, the dual-channel collimator is used for enabling ions to enter the shell along the channel direction, and the upper permanent magnet plate and the lower permanent magnet plate are respectively fixed at the upper end and the lower end of the shell to form a uniform magnetic field. The dual-channel probe is arranged in the shell and comprises a scanning collection probe coplanar with the scanning channel and a reference collection probe coplanar with the reference channel, and the scanning collection probe and the reference collection probe are connected with voltages of different values respectively. According to the scheme, the ion current probe with a high signal-to-noise ratio can be provided.

The utility model discloses a negative ion energy-saving lamp, which relates to the technical field of energy-saving lamps and is characterized by comprising a lamp holder and a negative ion lamp tube fixedly mounted at the bottom of the lamp holder, a radiating and cooling mechanism is arranged on the lamp holder and comprises an air box fixedly mounted on the outer circular surface of the lamp holder, and a refrigerating sheet is fixedly mounted on the inner wall of the air box. The radiating and cooling mechanism is arranged, the semiconductor chilling plate is used for actively cooling airflow, the directional cold air circulating system driven by the micro air pump is combined, the annular cold air outlets of the inner and outer air rings uniformly cover the inner and outer surfaces of the lamp tube, and the problems of lamp tube aging, deformation and element damage caused by local heat accumulation are solved; the surrounding type three-dimensional cooling air channel formed by flow division of the flow guide pipe covers a core heating area, the dynamic adjustable airflow intensity is combined, the heat dissipation efficiency and energy efficiency are remarkably improved, potential safety hazards caused by insufficient heat dissipation of a traditional lamp are avoided, energy consumption is reduced, and the service life is prolonged.

The invention provides a rapid charging and discharging method and system based on a sodium ion energy storage system, and relates to the technical field of energy storage, and the method comprises the steps: determining the instantaneous heat loss of an energy storage module in a scheduling switching process according to the transient change characteristic and current abrupt change component of the electrode heat behavior of the energy storage module in the scheduling switching process; the instantaneous output power of the energy storage modules in the scheduling switching process is extracted, the distribution state of the thermal load between the energy storage modules is analyzed according to the instantaneous output power and the internal resistance change rate in the scheduling switching process, and then the thermal load balance index of the sodium ion energy storage system in the charging and discharging process is determined; and constructing a thermal cost regulation and control model suitable for the rapid charging and discharging process based on the instantaneous thermal loss and the thermal load balancing index, and adjusting thermal compensation power during scheduling switching in the rapid charging and discharging process through the thermal cost regulation and control model. According to the invention, the dynamic adjustment of the thermal compensation power during the scheduling switching of the energy storage module can be realized, so that the stability of the sodium ion energy storage system in the rapid charging and discharging process is improved.

Embodiments provided herein generally include apparatus, plasma processing systems and methods for generation of a waveform for plasma processing of a substrate in a processing chamber. Embodiments of the disclosure include an apparatus and method for generating a pseudo-staircase waveform that includes coupling, during a first phase of generating a waveform, a first voltage supply to an output node; coupling, during a second phase of generating the waveform, a first capacitor between the output node and an electrical ground node; and coupling during a third phase of generating the waveform, the first capacitor and a second capacitor in a series path between the output node and the electrical ground node.

The embodiment of the invention discloses an ion source online detection method and device, electronic equipment and a storage medium, and relates to the technical field of ion sources, and the method comprises the steps: receiving an ion beam emitted by an ion source, and obtaining a first current signal and a second current signal based on the ion beam measurement; the first current signal is measured by moving the Faraday cup along a horizontal axis, and the second current signal is measured by the Faraday cup under at least one bias voltage; performing inversion according to the first current signal and a space response function of the Faraday cup to obtain beam density distribution of the ion source; and / or, according to the second current signal and the spatial response function, performing inversion to obtain ion energy distribution of the ion source; the spatial response function is used for representing the probability that the ion beam is collected after entering the Faraday cup; and carrying out on-line detection on the ion source based on the beam density distribution and / or the ion energy distribution. The embodiment of the invention is suitable for carrying out online detection on the large-size ion source, the detection mode is simple, and the cost is relatively low.

This invention relates to the field of energy storage battery technology, specifically to a method, system, device, and medium for calculating the health status of a sodium-ion energy storage battery. The method includes: calculating several current states of charge (SOCs) of the energy storage battery at different times using the ampere-hour integral method; fitting the current SOCs and current terminal voltage to obtain a first correspondence; performing a Taylor expansion on the first correspondence to obtain the first coefficients of the nth-order Taylor expansion, forming a first coefficient matrix; pre-setting preset coefficients corresponding to different health statuses of the energy storage battery, forming a preset coefficient matrix; and comparing the first coefficient matrix with the preset coefficient matrix to obtain the health status corresponding to the preset coefficients that match the first coefficient matrix, which is the current health status of the energy storage battery. This invention effectively reduces the error in calculating the health status of energy storage batteries. When applied to sodium-ion energy storage batteries, it does not require a full charge-discharge cycle, making it more suitable for the application scenarios of sodium-ion energy storage batteries.

The invention discloses a surface in-situ treatment method for a tungsten first wall of a fusion device, which comprises the following steps: heating the tungsten first wall to a preset temperature interval, and the preset temperature interval is [700 DEG C, 1300 DEG C]; and on the basis of a preset irradiation mode, helium injected in advance is processed, helium plasma is generated, the incident ion energy of the helium plasma reaching the first wall of tungsten is controlled to be within a preset energy interval, and the preset energy interval is [20 eV, 100 eV]. And according to the helium plasma, the first tungsten wall in the preset temperature interval is subjected to irradiation treatment till the accumulated helium ion fluffy quantity of the first tungsten wall meets a preset condition, a tungsten fluff layer and helium bubbles are generated on the first tungsten wall in situ, and the preset condition is that the accumulated helium ion fluffy quantity is larger than the accumulated helium ion fluffy quantity. In this way, the tungsten fluff layer can prevent helium plasma from being polluted by tungsten ions by reducing the net sputtering yield of tungsten. And the helium bubbles can inhibit recrystallization nucleation and grain growth at high temperature.

An apparatus for obtaining ion energy distribution measurements in a plasma processing system comprising a substrate, an ion energy sensor and associated control circuitry disposed in the substrate, and a conductive enclosure disposed in the substrate and surrounding the ion energy sensor and control circuitry such that the substrate at least partially surrounds the conductive enclosure.

The application discloses a surface in-situ processing method of a tungsten first wall of a fusion device, comprising: heating the tungsten first wall to a preset temperature interval, wherein the preset temperature interval is [700 DEG C, 1300 DEG C]. Based on a preset irradiation mode, pre-injected helium gas is processed to generate a helium plasma and control incident ion energy of the helium plasma reaching the tungsten first wall to be in a preset energy interval, wherein the preset energy interval is [20 eV, 100 eV]. According to the helium plasma, the tungsten first wall in the preset temperature interval is irradiated and processed until a cumulative helium ion fluence of the tungsten first wall meets a preset condition, so as to in-situ generate a tungsten villus layer and a helium bubble on the tungsten first wall, wherein the preset condition is that the cumulative helium ion fluence is greater than 1.0 x 10 22 He / m 2. In this way, the tungsten villus layer can reduce the net sputtering yield of tungsten and avoid contamination of the helium plasma by tungsten ions. The helium bubble can inhibit recrystallization nucleation and grain growth at high temperature.

The invention provides an organic sacrificial salt, a positive pole piece, an alkali metal ion energy storage device and a pre-metallization method, and relates to the technical field of alkali metal ion energy storage devices. The low-decomposition-voltage organic sacrificial salt disclosed by the invention has a structure as shown in a formula I: R-CH2-COOM formula I, in the formula (I), R is selected from any one of-N (CH3) 2,-NHCH3,-NH2,-OCH3,-OPh and-Ph; m is selected from any one of Li, Na or K. A specific electron-donating group in the structure of the organic sacrificial salt can endow the organic sacrificial salt with a relatively high HOMO energy level through a hyperconjugation effect, so that the oxidation potential of the organic sacrificial salt is effectively reduced; when the organic sacrificial salt is used as a positive pole piece additive in the alkali metal ion energy storage device, the capacity retention ratio of the alkali metal ion energy storage device comprising the organic sacrificial salt can be remarkably improved by pre-metallization, and the degradation of an electrolyte solvent and an electrode structure is inhibited; and the alkali metal ion energy storage device with excellent cycling stability and rate capability is obtained.

A method includes receiving a training data set, which includes one or more operating parameters of a plasma processing system and ion energy distribution function (IEDF) features corresponding to the one or more operating parameters. The one or more operating parameters include at least one process setpoint from a process recipe, at least one measured operating parameter, or at least one simulated operating parameter. The IEDF features include at least one measured IEDF feature or at least one simulated IEDF feature. The method further includes training an artificial neural network (ANN) using the one or more operating parameters as input, and the IEDF features as output. The ANN includes an input layer including one or more input nodes corresponding to the one or more operating parameters, a single hidden layer including one or more hidden nodes, and an output layer including output nodes corresponding to the IEDF features.

The invention discloses a numerical simulation method for two-dimensional Ar-He mixed gas capacitive coupling plasma discharge, and belongs to the technical field of plasma numerical simulation. According to the method, a particle grid method and a Monte Carlo collision method are combined, a gas environment and a two-dimensional grid are initialized, and loop execution is carried out at each time step; an area weight method is used for distributing charges and electric field interpolation, an SOR method is used for solving a Poisson equation, a leapfrog method is used for updating particle motion, a boundary effect and a specific collision event are processed, after a system is stable, statistics is carried out on energy distribution of ions reaching an electrode, and whether the energy distribution is unimodal distribution is judged. And outputting key data of ion energy, ion flux, plasma uniformity and surface topography control for guiding process optimization based on the distribution. According to the method, the defect that a one-dimensional model ignores the radial effect is overcome, the cooperative discharge mechanism of the Ar-He mixed gas is accurately simulated, high-precision key data are provided for semiconductor plasma process optimization, and the method has important practical value.

An ion implanter, including an ion source and extraction system, arranged to generate an ion beam at a first ion energy, and a linear accelerator, arranged to accelerate the ion beam to a second ion energy, wherein the linear accelerator comprises a plurality of acceleration stages coupled to receive a plurality of RF signals from a plurality of power assemblies, respectively. The linear accelerator may be configured wherein at least one stage of the plurality of acceleration stages is coupled to: reversibly connect to a first power assembly, comprising a resonator that contains a resonator enclosure, the first power assembly generating a first RF signal at a first frequency; to disconnect from the first power assembly; and to connect to a second power assembly, generating a second RF signal at a second frequency, greater than the first frequency, while not changing the resonator enclosure.

This invention discloses an organic ammonium ion battery, realizing a novel organic non-metallic ion energy storage system. This invention synthesizes a series of ammonium ion-rich (NH4) batteries. + Prussian white material (NH4) x Ni y Mn 1‑y HCF, where x = 0.5–1.911, y = 0–1.0, with the optimal values ​​being x = 1.911 and y = 0.019. This invention synthesizes a class of organic ammonium ion electrolytes for the first time by dissolving bis(trifluoromethanesulfonyl)imide ammonium (NH4TFSI) in an organic solvent. The Prussian white material prepared by this invention exhibits excellent ammonium storage performance. Using the above Prussian white material as the positive electrode and an aromatic compound as the negative electrode, organic ammonium ion batteries (OAIBs) are assembled. OAIBs exhibit excellent NH4 storage performance. + High performance and a wide electrochemical window (0–2.4 V). OAIBs also offer advantages such as low cost, high safety, and no pollution.

The invention discloses a waveform-controllable plasma processing method and system, and belongs to the technical field of semiconductor manufacturing processes. Providing a programmable control radio frequency power waveform to a bottom electrode in the plasma cavity as a bias voltage, wherein the programmable control radio frequency power waveform comprises a pulse waveform and a slope waveform; plasma control variables are measured through a sensor arranged at the output end of the plasma cavity; and dynamically adjusting a control signal of a power supply generating the bias voltage based on the detection data of the control variable, and adjusting the radio frequency power waveform to control ion energy distribution and compensate for the charge accumulation effect in real time. According to the invention, independent and accurate control of ion energy and ion flux is realized, and the problems of non-uniform process and device damage caused by wide ion energy distribution, double peaks and charge accumulation in traditional radio frequency bias are solved.

The invention provides a method for improving helium ion irradiation resistance of the surface of a body-centered cubic iron material, which comprises the following steps of: (1) surface pretreatment: polishing the surface to be processed by adopting 180-800 # abrasive paper in sequence, so that the surface is bright and flat; and (2) laser surface remelting: carrying out laser surface remelting treatment on the polished pure iron sample by adopting pulse laser. And (3) high-temperature helium ion irradiation: performing high-temperature helium ion irradiation on the prepared sample. The irradiation conditions are as follows: the helium ion type is He < 2 + >, the temperature is 750 DEG C, the incident ion energy is 300 keV, the ion fluence is 1 * 10 < 17 > cm <-2 > and the like. According to the method, laser remelting is carried out on the surface of the body-centered cubic iron material, a large number of dislocation and fine crystal grains are obtained on the near surface layer, growth and aggregation of helium bubbles are inhibited in the high-temperature helium ion irradiation process, and therefore the brittle fracture and failure risks caused by helium bubble coarsening are reduced, and the irradiation resistance of the body-centered cubic iron material is improved.

This application discloses a physical vapor deposition (PVD) apparatus, a PVD method, and a synchronous linkage controller, belonging to the field of PVD technology. The system includes: a cavity, a chuck, a magnetron, a drive unit, a pulse control power supply, and a synchronous linkage controller. The PVD apparatus includes a target placement area for mounting the target material. The chuck is located inside the cavity; the target placement area is located at the top of the cavity; the pulse control power supply is connected to the target material; the magnetron is connected to the drive unit; both the pulse control power supply and the drive unit are connected to the synchronous linkage controller; the synchronous linkage controller controls the pulse control power supply to output pulses with discharge parameters corresponding to the current position of the magnetron. This application can independently control the discharge parameters of the pulses used by the pulse control power supply when the magnetron moves to different positions on the target material, to meet the different plasma density and ion energy requirements of different positions on the wafer.

A substrate processing method for forming a carbon-containing film that is inhibited from film peeling due to thermal treatment is provided. The substrate processing method includes: preparing a substrate having a foundation film; forming a carbon-containing film having a film density of 2 g / cm3 or greater on the foundation film by forming a plasma of a processing gas containing a carbon-containing gas; and subjecting the substrate on which the carbon-containing film is formed to thermal treatment. In the forming of the carbon-containing film, for a first time from a start of the forming of the carbon-containing film, an ion energy higher than the ion energy during a second time from an end of first time is supplied to the substrate.

The invention discloses an argon ion beam etching method for an REBCO superconducting thick film micro-bridge structure, and belongs to the technical field of high-temperature superconducting. The method comprises the following steps: firstly, spin-coating AZ series photoresist with the thickness of about 3-6 microns on the surface of a silver layer, and optimizing exposure and development conditions to obtain a stable graphical mask; the sample is placed in an argon ion beam etching system, a vertical incidence mode is adopted, the ion energy is controlled to be 400-500 eV, the ion beam current is 90 ma, the neutralizing current is 1-1.3 times that of the ion beam current, the argon pressure is 1.8 * 10 <-2 >-2.2 * 10 <-2 >, and the sample is subjected to water cooling at the temperature of 10 DEG C and rotated. Etching of the silver layer and the thick REBCO layer is completed at the speed of about 1 micron of the REBCO layer per hour, and finally the micro-bridge structure with the clear pattern edge and the no-damage film layer is formed. The method has the advantages of large etching depth, high pattern fidelity, small influence on superconducting performance and the like, and is suitable for electrical transport performance test and device application.