645 results about "Inductively coupled plasma" patented technology

The invention relates to the technical field of cross-modal data fusion analysis of soil component detection and improvement agent preparation, in particular to a preparation method of a soil improvement agent based on component detection, which comprises the following steps: acquiring soil component data through a near infrared spectrometer, a high performance liquid chromatograph and an inductively coupled plasma mass spectrometer; an incremental principal component analysis algorithm is combined with an oscillation suppression function to update a covariance matrix in real time, a dynamic defect factor priority list is generated, a multi-objective optimization model improved based on NSGA-II is guided to integrate the soil pH value, humidity and organic matter content to construct a dose response curved surface, and a Pareto optimal solution set is solved. A sensor array collects environment feedback data, drives a transfer learning algorithm to calibrate parameters, a dynamic incidence matrix attenuation rate and optimal weight adaptive adjustment, iteratively outputs a modifier synergistic effect solution set through a closed-loop control mechanism, and solves the problems of difficult data fusion, principal component weight offset and component synergistic deviation. And the proportioning accuracy and stability are improved.

The invention discloses a laser SLAM mapping positioning method and system in a dynamic environment. The method comprises the steps that point cloud information and IMU measurement data in the dynamic environment are collected; the data preprocessing module carries out pre-integration by using IMU data so as to remove point cloud distortion; the pose estimation module realizes positioning based on error Kalman filtering by using IMU measurement information and point cloud feature matching; the dynamic point filtering module stores the three-dimensional point cloud in a two-dimensional image mode, judges whether the three-dimensional point cloud is a dynamic point or not based on the change condition of the point cloud at the same pixel, and finally carries out clustering elimination to output the point cloud only containing a static scene; and the loopback detection module extracts descriptors based on the static scene point cloud, and corrects the pose deviation through ICP (Inductively Coupled Plasma) matching. According to the method, the problem that dynamic object interference occurs in the mapping positioning scene is effectively solved, the dynamic points do not interfere with positioning, the map does not contain ghosts generated by moving objects, help is provided for follow-up navigation and the like, and the robustness and accuracy of mapping positioning are improved.

The invention discloses a pantograph slide plate point cloud data splicing method and system based on a calibration block and an improved ICP algorithm, and the method specifically comprises the steps: firstly continuously outputting multi-frame slide plate contour data through a laser displacement sensor, and expanding the multi-frame slide plate contour data into three-dimensional point cloud data; processing the sliding plate data by adopting a hybrid filtering denoising algorithm to obtain a sliding plate contour data set, and converting two groups of laser point cloud data acquired by the two laser displacement sensors into the same coordinate system to form complete sliding plate surface point cloud data; thirdly, completing coarse registration on the sliding plate surface point cloud data by adopting a data rapid splicing method based on a calibration block; and finally, an improved ICP (Inductively Coupled Plasma) registration algorithm is adopted to complete rapid fine registration of the point cloud data to obtain complete sliding plate surface point cloud data. The method has high precision and real-time performance, can overcome the interference caused by the influence of the surface texture, color and dynamic measurement environment of the pantograph slide plate, and provides real-time data support for intelligent operation and maintenance of rail transit.

The invention provides a preparation method of a planar gate accumulation layer channel field effect transistor embedded with a 3C / 4H-SiC heterogeneous junction. The preparation method comprises the following steps: growing an (n-) 4H-SiC drift region and an (n) 4H-SiC current expansion layer (CSL) on an (n +) 4H-SiC substrate by adopting a hot wall chemical vapor deposition (HWCVD) technology; forming a (p) 4H-SiC body region and an (n) 4H-SiC layer on the two sides of the CSL by using a mask, inductively coupled plasma (ICP) etching and ion implantation methods; growing a (p) 3C-SiC region on the upper part of the inner side of each (p) 4H-SiC body region by using a mask, ICP (Inductively Coupled Plasma) etching and HWCVD (High Weight Chemical Vapor Deposition); forming (n) 4H-SiC channels on the two sides of the middle part of the CSL by using a mask and HWCVD, and forming a (p) 3C / (n) 4H-SiC heterogeneous junction with a (p) 3C-SiC region at the bottom; respectively forming an (n +) 4H-SiC source region and a (p +) 4H-SiC source region on the outer side of each (n) 4H-SiC channel by utilizing ion implantation; forming an (n +) 3C-SiC region on the outer side of each (p +) 4H-SiC source region by adopting mask, ICP etching and HWCVD, and forming an (n +) 3C / (n) 4H-SiC heterogeneous junction with the (n) 4H-SiC layer below the (p +) 4H-SiC source region; performing high-temperature annealing to eliminate defects and activate impurities; forming an oxide layer and an (n +) poly-Si gate on the top; and respectively evaporating an alloy grid electrode, a source electrode and a drain electrode to prepare the planar gate accumulation layer channel field effect transistor embedded with the 3C / 4H-SiC heterogeneous junction. The leakage current of the transistor is small and is smaller than the on-resistance (Ron, sp), and the reverse recovery time is short.

The invention discloses an individual tree segmentation method based on machine learning, and particularly relates to the field of individual tree segmentation. The method comprises the following steps: respectively acquiring forest point cloud data through a ground scanner and an unmanned aerial vehicle, registering the forest point cloud data into a complete data set, preprocessing the point cloud data, extracting geometric, reflective and spatial distribution multi-dimensional features, and fusing the geometric, reflective and spatial distribution multi-dimensional features into a comprehensive feature vector; training a model by using a machine learning method based on the labeled data, taking the feature vector as input, and outputting whether the point belongs to a tree or not; predicting a point category by using the trained model, performing individual tree instance segmentation by using a connected component clustering and graph segmentation method through CRF post-processing optimization, constructing a 3D model and calculating key parameters; and finally, performing post-processing on a preliminary segmentation result, filtering noise by using connected region analysis, filling the deficiency by using a three-dimensional hole, optimizing a boundary based on graph segmentation, and optimizing a block seam by using an ICP (Inductively Coupled Plasma) algorithm.

The invention relates to the technical field of instruments and meters, in particular to an inductively coupled plasma mass spectrometer system for intelligent data processing and report generation. Comprising a sample introduction unit, a plasma excitation and ionization unit, a mass analyzer and detection unit, a vacuum system unit and an intelligent data processing and report generation unit. Efficient ionization is achieved through a bipolar radio frequency switching and AI optimized reaction gas plasma source, the AI optimization module monitors in real time and dynamically adjusts parameters so that the ionization efficiency can be stabilized at 92% + / -2%, and meanwhile a reaction gas control system can optimize plasma conditions to suppress interference ions. And the mass analyzer and the detection unit realize high-precision ion separation by utilizing AI interference correction and a QMS-TOF double analyzer mode, and an interference elimination module can automatically eliminate polyatomic ion interference, so that the ionization efficiency, the analysis precision and the accuracy are improved, the interference is effectively inhibited, and the analysis capability of the system on a complex sample is enhanced.

The invention discloses a modified metal oxide catalyst and a plasma coupling electro-catalysis ammonia synthesis system based on the catalyst, cobalt oxide is modified by using radio frequency inductively coupled plasma (ICP) under a vacuum condition and an argon atmosphere, and the cobalt oxide catalyst rich in defects is obtained after discharging is finished. The ammonia synthesis system comprises a plasma activated air system and an electrocatalytic ammonia synthesis system; carrying out plasma discharge on air to generate NOX, cooling, and introducing the NOX into the absorption liquid; the absorption liquid is used as catholyte for electrocatalytic ammonia production in an H-shaped pool, and a cobalt oxide catalyst modified by plasma treatment is selected as a cathode. The cobalt oxide is treated by ICP, so that the problems of low conductivity, inert surface and the like of metal oxide are solved, and the performance of the catalyst is improved. The method solves the problems that plasma air discharge products are complex, and the ammonia yield is low due to the fact that N is equivalent to N cannot be efficiently activated through electro-catalysis.

An apparatus for generating plasma inductively in a process chamber leverages a radial coil network. In some embodiments, the radial coil network is a planar structure comprising an inner conductor with an open center where at least one RF power source is electrically connected to the inner conductor at a power node, an outer conductor spaced away from and surrounding the inner conductor where at least one ground is electrically connected to the outer conductor at a ground node, a plurality of branch conductors extending from the inner conductor to the outer conductor where the plurality of branch conductors is distributed uniformly in the radial coil network, and a plurality of capacitors where at least one capacitor of the plurality of capacitors is electrically interposed into each branch conductor of the plurality of branch conductors.

The invention discloses a tunnel back break analysis method based on a dynamic center line and an incremental convex hull, and belongs to the technical field of tunnel engineering detection. According to the system, the problems that a traditional detection method is low in efficiency and large in error are solved by fusing dynamic slice projection, robust registration and intelligent contour generation technologies. The method specifically comprises the following steps: carrying out configurable downsampling (the density is reduced to 0.2%-0.5% at an interval of 50-1000 points) on an original point cloud, constructing a tunnel three-dimensional model (the side length of a grid is less than or equal to 0.1 m) by adopting a dynamic center line extraction algorithm, and carrying out ICP (Inductively Coupled Plasma) registration (error lt; the method comprises the following steps of: synchronously extracting a design / actual measurement section contour by using a combined slicing technology, generating an actual measurement polygon based on an incremental convex hull algorithm (a filtering threshold value is 20 points), and calculating an over-break volume (an error is less than or equal to 1.5%) by using a spatial Boolean operation. A dynamic center line extraction and incremental convex hull algorithm is innovatively introduced, automatic generation of a color gradation analysis atlas (over-excavation RGB (255, 69, 0) and under-excavation RGB (30, 144, 255)) is supported, and full-process closed-loop processing is realized.

The invention discloses a subway protection area intelligent patrol system based on an unmanned aerial vehicle. The system comprises a data acquisition module which collects multi-dimensional area data in real time through a multi-mode sensor; the feature acquisition module is used for generating a dynamic implicit field through a DNIF encoder to automatically extract space-time continuous difference features; the difference acquisition module is used for introducing an improved ICP (Inductively Coupled Plasma) registration algorithm to carry out registration comparison on the point cloud data on the basis of space-time continuous difference characteristics to obtain optimized point cloud data differences, and obtaining a comprehensive difference degree on the basis of the optimized point cloud data differences; and the abnormity patrol module obtains a foreign matter behavior mode around the track through an optimized Kalman filtering model, maps the foreign matter behavior mode and the comprehensive difference degree into a causal graph model to generate an optimal patrol decision, improves the scientificity and timeliness of the decision, and optimizes patrol resource configuration at the same time.

The invention discloses an ultratrace mercury isotope analysis method, and relates to the technical field of environmental analysis. The method comprises the following steps: purging a liquid sample to be detected by nitrogen in a stannous chloride atmosphere, and trapping and concentrating mercury into a gold trapping tube; pyrolyzing the pyrolytic gold trapping tube to release mercury vapor; pyrolytic mercury vapor and thallium isotope internal standard aerosol are mixed to serve as a sample injection sample, and the sample injection sample is introduced into a multi-receiver inductively coupled plasma mass spectrometry; acquiring a mercury instantaneous signal and a thallium isotope signal; and calculating the mercury isotope ratio by adopting least square linear regression fitting in combination with a thallium internal standard ratio correction algorithm. According to the method, the instantaneous mercury isotope signal is generated by online combination of gold trapping and multi-receiver inductively coupled plasma mass spectrometry, the instantaneous signal is strategically collected and processed, the determination concentration of isotope analysis can be greatly reduced, the sensitivity of the method is remarkably improved, and direct determination of mercury isotope composition in a water sample with the concentration of 10 ng L <-1 > is met.

A hybrid inductively coupled plasma mass spectrometer (ICP-MS) system is disclosed for simultaneous elemental and molecular analysis in positive and negative polarities. It includes an ICP torch that generates plasma with a buffer gas, producing both positively and negatively charged ions from a sample. Positioned between the sampler and skimmer, an insert with a defined geometry forms a reaction chamber. Various embodiments feature multiple apertures for pressure control, a rotatable disk for aperture regulation, a slider gate for pressure adjustment, a circular gate with adjustable radial apertures, and an inlet for introducing gases, reagents, dopants, or analytes. These components enable precise pressure modulation, optimizing performance for dual-polarity mass spectrometry. The system enhances analytical flexibility by facilitating controlled ion reactions, improving sensitivity and specificity for both elemental and molecular applications. This innovation expands ICP-MS functionality, supporting diverse scientific and industrial applications requiring high-precision mass analysis.

The invention relates to the field of test and analysis of impurity element content of primary magnesium ingots, in particular to a method for testing impurity element content of primary magnesium ingots by ICP (inductively coupled plasma) spectrometry, which comprises the following steps: firstly adding H2O2 into a magnesium ingot sample to infiltrate the sample, then adding HCl at an interval of less than 1 minute to carry out first reaction, carrying out first heating after the reaction is finished, and then carrying out second heating, cooling to 20-30 DEG C, transferring to a volumetric flask, and fixing the volume by using third-level water to obtain a sample solution; establishing a working curve by using an ICP spectrometer and a standard solution; testing the sample solution; the ratio of the mass of the magnesium ingot sample to the volume of H2O2 to the volume of HCl is 1: (3-10): (30-54), the method fills the standard vacancy of ICP spectrometry analysis of the silicon element in the primary magnesium ingot, a reliable basis is provided for chemical component analysis of the primary magnesium ingot, the test result is surface, and the method for testing the mass fraction of the impurity elements in the primary magnesium ingot provided by the invention has the advantages of high analysis precision, simple operation, high accuracy and high reliability. The analysis period is short, and related chemical varieties are few.

The invention belongs to the technical field of numerical control machining, and particularly relates to an aviation structural part die forging allowance rapid distribution method. The method is based on an ICP (Inductively Coupled Plasma) algorithm, the actual position measurement of a die forging blank corresponding to each contour point in a die forging theoretical contour point set is completed under an initial processing coordinate system, and an actual position point set is formed; and then the initial machining coordinate system attitude is continuously updated in a small step pitch iteration mode, the actual position point set is projected to a new machining coordinate system to calculate the distances of other theoretical outline point sets, calculation is stopped until the change is minimum, and optimal machining coordinate system attitude adjustment is completed.

The invention discloses a method for determining the content of trace holmium, thulium and tungsten in rare earth erbium and a compound thereof, which comprises the following steps: placing a rare earth erbium and compound sample thereof in a beaker, and performing a blank test along with a sample; adding nitric acid, heating at low temperature until the sample is completely dissolved, and cooling; transferring into a volumetric flask, adding a cesium internal standard solution, diluting with water, and uniformly mixing; the holmium, the thulium and the tungsten are measured by using an oxygen mode of an inductively coupled plasma tandem mass spectrometer, and the contents of the holmium, the thulium and the tungsten are calculated according to a working curve method. According to the method, the inductively coupled plasma tandem mass spectrometry technology is used, and mass spectrum interference of an erbium matrix on holmium, thulium and tungsten is effectively eliminated by selecting a proper reaction mode and optimizing the flow of reaction gas.

The invention relates to a hemispherical inductively coupled plasma source with adjustable density distribution, and belongs to the technical field of plasma generating devices. Comprising an upper cover body, a lower cover body, a flange and a coil, the upper cover body, the lower cover body and the flange are sequentially and coaxially arranged from top to bottom, a cavity is formed between the upper cover body and the lower cover body, a connector pipe is arranged on the side face of the flange, the cavity is communicated with the connector pipe, and the coil is arranged on the outer side of the cavity. The method is mainly used in the field of antenna radiation performance regulation and control, and effective regulation and control of antenna radiation characteristics can be realized.

The invention belongs to the technical field of chemical detection, and particularly relates to a method for detecting the content of boron in soil and sediment, which comprises the following detection methods: S1, weighing a sample and putting the sample into a digestion tank; s2, adding a digestion solution into the digestion tank; s3, after uniform stirring, putting the digestion tank into a microwave digestion instrument for microwave digestion; s4, after digestion is completed, closing the microwave digestion instrument, and after the digestion tank is cooled to the room temperature, filtering to remove precipitates; s5, transferring the digestion solution into a volumetric flask, and fixing the volume for subsequent analysis; and S6, analyzing the digestion solution by using ICP-OES / MS (Inductively Coupled Plasma-Optical Emission According to the method for detecting the boron content in the soil and the sediment, ammonium fluoride is used for replacing hydrofluoric acid in boron detection of the soil and the sediment, use of toxic reagents is reduced, mannitol is added, a stable complex is formed by mannitol and boron, and the recovery rate of boron is increased.

The invention relates to the technical field of mass spectrometer sampling, in particular to a sampling device of an inductively coupled plasma mass spectrometer, which comprises a bottom plate, and an inductively coupled plasma mass spectrometer body is fixedly mounted at the top of the bottom plate. During application, the sample introduction mechanism adopts a first motor to drive a turntable to carry a sample during use, power is amplified through transmission of a large belt wheel and a small belt wheel, and a non-contact magnetic coupling drives a pumping spiral driving blade to rotate to generate negative pressure, so that automatic sample extraction, negative pressure control of opening and closing of a plugging plate and accurate control of a sample conveying channel are realized; by means of the design, carrying power is converted into pumping power, the equipment structure is simplified, the number of parts and energy consumption are reduced, the equipment operation and maintenance cost is reduced, an automatic continuous sample injection process replaces traditional single-pipe extraction, the sample injection time is greatly shortened, and the sample treatment efficiency is improved.

The invention discloses an ore gold content detection method and system based on big data, and belongs to the technical field of ore gold content detection.The method comprises the steps that to-be-detected ore is pretreated, a to-be-detected sample solution is obtained, working parameters of an inductively coupled plasma mass spectrometer are initially set, the to-be-detected sample solution is ionized, and the to-be-detected sample solution is obtained; and monitoring the plasma state in real time, completing self-adaptive adjustment of working parameters of the inductively coupled plasma mass spectrometer, accelerating ions to enter the mass spectrometer through an electric field after ionization treatment is completed, completing quantitative analysis of the gold content of a to-be-detected sample solution, and outputting a detection result. According to the invention, the self-adaptive adjustment of the working parameters of the instrument is realized, the problem of gold ionization efficiency difference caused by unstable plasma state is solved, the accuracy and reliability of the detection result are improved, and the efficiency and accuracy of the whole detection process are improved by monitoring the pretreatment process of the to-be-detected ore and judging the dissolution completeness.

The invention provides a method for fully and efficiently dissolving polycrystalline silicon, which comprises the following steps: A) crushing, digesting and cleaning, washing and drying polycrystalline silicon to obtain pretreated polycrystalline silicon; carrying out digestion cleaning on the pretreated polycrystalline silicon by using a first digestion solution; b) mixing the pretreated polycrystalline silicon with a second digestion solution, and heating for digestion; c) continuously heating and digesting the solution until the solution is nearly dry, adding hydrofluoric acid to drive silicon, continuously heating the solution until the solution is nearly dry, and adding nitric acid to drive acid; and D) adding nitric acid, continuously heating the solution until the solution is nearly dry, and adding dilute nitric acid for rinsing to complete the dissolution of the polycrystalline silicon. The method disclosed by the invention is simple to operate, high in dissolving efficiency and suitable for large-scale industrial production; according to the invention, complete dissolution of polycrystalline silicon can be realized, and the accuracy of a test result is ensured. According to the method disclosed by the invention, sufficient dissolution and removal of silicon can be ensured, the on-machine requirement of ICP MS (Inductively Coupled Plasma Mass Spectrometer) is met, and the equipment loss is reduced.

A method and corresponding devices to reduce the presence of unwanted ions within the pseudo-potential well of the RF fields for inductively coupled plasma mass spectrometry is disclosed. This method reduces space-charge effects and leaves more room available for the ions of interest and, hence, leads to increased transmission of the desired ions into the mass analyzer. In the present invention, the space charge is reduced by adding a low-band resolving DC potential, or a fast sweeping resolving DC potential with a notch, or a fast constant resolving DC potential with a notch, or by adding auxiliary quadrupolar or dipolar RF potential to the quadrupole ion guide, such that all the unwanted ions will be outside the stable region and therefore ejected. This reduces the charge density in the ion beam and ameliorate space charge effects.

The invention discloses a method for determining the manganese content of manganese ore, which realizes the accurate determination of the manganese content through the steps of accurate weighing, melting, dissolving, constant volume and the like in combination with an inductively coupled plasma spectrometer. The method comprises the step of performing curve correction by using a verification standard sample to ensure the measurement accuracy. The method has the beneficial effects that instrument analysis is adopted to replace traditional chemical analysis, the detection precision and speed are improved, personal errors are reduced, real-time remote monitoring is realized, skill requirements are reduced, and meanwhile, environmental pollution and occupational disease risks are reduced. The method is suitable for detection of manganese ores with different manganese contents, has the characteristics of high efficiency, accuracy and safety, and provides a new solution for analysis and determination of manganese ores.

The invention belongs to the technical field of geological sample analysis and detection, and particularly discloses a method for measuring the amount of each element of lithium ore in a closed acid-soluble system, and the method comprises the following steps: pretreating the lithium ore; the pretreated lithium ore is weighed and put into a closed sample dissolving device, hydrofluoric acid and purified nitric acid are sequentially added, and the closed sample dissolving device is closed; carrying out heat preservation on the closed sample dissolving device twice to obtain a test solution; and measuring the test solution by using an inductively coupled plasma mass spectrometer to obtain a working curve, and calculating the content of the analysis element in the sample solution by using the working curve. The method for determining the amount of each element in the lithium ore by adopting the closed acid-soluble system has the characteristics of simplicity in operation, high efficiency and good stability, realizes simultaneous determination of the amount of lithium, rubidium, cesium, beryllium, strontium, niobium, tantalum, zirconium, hafnium and rare earth elements in the large-batch lithium ore, and further provides a reference for determination of main trace elements in the lithium ore.

The invention discloses a method for measuring the content of impurity elements in high-purity quartz by ICP-MS (Inductively Coupled Plasma Mass Spectrometry). The method is characterized by comprising the following steps: S1, drying a sample; s2, weighing a sample; s3, primary dissolution with strong acid I; s4, secondary dissolution with strong acid II; s5, cooling and constant volume; and S6, respectively testing and analyzing the standard series working solution, the sample solution and the blank solution on ICP-MS (Inductively Coupled Plasma Mass Spectrometry). According to the method, the influence of impurity elements brought in in the sample treatment process on the determination result is reduced, the harm of precipitation generated by some metal ions and chloride ions on the accuracy of the result is avoided, the inductively coupled plasma mass spectrometer is adopted for analysis in the later period, the detection limit is greatly reduced, and the accuracy of the result is improved. Therefore, the purposes of reducing the lower limit of impurity element content measurement and increasing the upper limit of the silicon dioxide content range (the applicable silicon dioxide content range of the method can be higher than 99.99%) are achieved.

The invention provides a method for measuring and analyzing the transformation rate and the acidification rate of lithium ore. The rapid and accurate determination of the transformation rate and the acidification rate is realized through the steps of preparing a lithium element standard solution, detecting the content of total lithium and soluble lithium in a baking material produced in a transformation baking process, the content of lithium element in a clinker produced in an acidification baking process and the content of soluble lithium in filter residues by using an inductively coupled plasma mass spectrometer, and the like. The transformation roasting effect and the acidification roasting effect are regularly detected, the lithium extraction effect in the production process is analyzed according to the comparison result between the measured transformation rate and acidification rate and the threshold value / multiple continuous measurement values, and the working procedure influencing the lithium element extraction yield or the working procedure possibly enabling the lithium element extraction yield to have the gliding trend in early warning in the production process is pointed out; and the operation condition of the production process can be adjusted and optimized by technicians in a targeted manner through timely feedback of abnormity or early warning.

An inductively-coupled plasma (ICP) generation system may include a dielectric tube, a first inductive coil structure to enclose the dielectric tube, an RF power supply, a first main capacitor between a positive output terminal of the RF power supply and one end of the first inductive coil structure, and a second main capacitor between a negative output terminal of the RF power supply and an opposite end of the first inductive coil structure. The first inductive coil structure may include inductive coils connected in series to each other and placed at different layers, the inductive coils having at least one turn at each layer, and auxiliary capacitors, which are respectively provided between adjacent ones of the inductive coils to distribute a voltage applied to the inductive coils.

The invention provides a method for depositing silicon nitride on the side wall of a groove structure, and belongs to the technical field of semiconductor manufacturing. The method comprises the following steps of: depositing carbon-containing barrier layers on the top, the side wall and the bottom of a groove structure by utilizing inductively coupled plasma enhanced chemical vapor deposition, and then carrying out directional etching on the side wall of the groove by utilizing ammonia plasma bombardment, so that the carbon-containing barrier layers on the side wall of the groove are accurately removed, and the barrier layers in the top and bottom areas are kept complete; and finally, using inductively coupled plasma to enhance atomic layer deposition, and selectively depositing a silicon nitride film in the side wall area of the groove. The method does not need to depend on traditional photoetching and etching steps, non-target area deposition is avoided, the technological process is simplified, the deposition precision and the critical dimension control capability are improved, and the method has the dual control effects of precise directional etching and selective deposition.

The invention discloses an ICP-MS (Inductively Coupled Plasma Mass Spectrometry) detection method for phosphorus in trichlorosilane, and belongs to the field of analysis of high-purity electronic chemicals. According to the invention, a low-temperature matrix digestion technology is adopted to quantitatively form a SiFcomplex and inhibit silicon volatilization loss; according to the matrix matching calibration system, a calibration curve is constructed by adopting a weighted least square method, so that matrix interference is effectively corrected; a detection technology screening strategy is carried out by combining a cascade strategy of high-resolution inductively coupled plasma mass spectrometry, so that the interference of a complex matrix is successfully avoided. Experiments show that when the method is used for detecting phosphorus, the linear correlation coefficient R is greater than 0.999, the detection limit is as low as 0.02 ng / g, and the method accords with ISO 17025 and semiconductor-grade material quality control standards, and is suitable for accurate quantitative analysis of ng / g-grade phosphorus elements in high-purity trichlorosilane.

The invention discloses a method for detecting the content of trace metal ions in a diazo naphthoquinone photosensitizer. The method comprises the following steps: sample pretreatment: weighing diazonaphthoquinone photosensitizer powder in a clean room, putting the diazonaphthoquinone photosensitizer powder into a cleaned and dried wide-mouth PFA bottle, adding an organic reagent, and carrying out ultrasonic treatment until a solid is completely dissolved; the method comprises the following steps: testing: adding a metal standard substance into an organic solvent to prepare three standard solutions with different concentrations; debugging an instrument, determining target metal in the standard solution in a Cool mode, a No Gas mode and a He mode by using an inductively coupled plasma mass spectrometer to obtain a signal intensity value (CPS value) corresponding to each metal ion concentration in the standard solution, and establishing a standard curve; and measuring the sample in which the photosensitizer is dissolved by using the same steps to obtain the content of metal ions in the sample. According to the method, appropriate detection conditions are optimized for different elements to be detected in the diazo naphthoquinone photosensitizer, polyatomic ion interference and matrix effect in a sample are mainly reduced, the content of 16 metal ions can be accurately detected at the same time, and the test efficiency is high.