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153results about How to "Reduce layer thickness" patented technology

Self-ionized and inductively-coupled plasma for sputtering and resputtering

A magnetron sputter reactor for sputtering deposition materials such as tantalum, tantalum nitride and copper, for example, and its method of use, in which self-ionized plasma (SIP) sputtering and inductively coupled plasma (ICP) sputtering are promoted, either together or alternately, in the same or different chambers. Also, bottom coverage may be thinned or eliminated by ICP resputtering in one chamber and SIP in another. SIP is promoted by a small magnetron having poles of unequal magnetic strength and a high power applied to the target during sputtering. ICP is provided by one or more RF coils which inductively couple RF energy into a plasma. The combined SIP-ICP layers can act as a liner or barrier or seed or nucleation layer for hole. In addition, an RF coil may be sputtered to provide protective material during ICP resputtering. In another chamber an array of auxiliary magnets positioned along sidewalls of a magnetron sputter reactor on a side towards the wafer from the target. The magnetron preferably is a small, strong one having a stronger outer pole of a first magnetic polarity surrounding a weaker outer pole of a second magnetic polarity and rotates about the central axis of the chamber. The auxiliary magnets preferably have the first magnetic polarity to draw the unbalanced magnetic field component toward the wafer. The auxiliary magnets may be either permanent magnets or electromagnets.
Owner:APPLIED MATERIALS INC

Method for connecting aluminum alloy and steel by laser filler wire

InactiveCN101941119AAchieve fusion-braze connectionPrecise control of heat inputLaser beam welding apparatusLap jointLaser beams
The invention relates to a method for connecting an aluminum alloy and steel by a laser filler wire, which is suitable for the field of dissimilar material connection and particularly suitable for the connection between dissimilar materials of which fusion points and thermal physical properties differ from each other greatly. The method comprises the following steps of: assembling a lap joint in which an aluminum plate is arranged on a steel plate, wherein a laser beam, a wire feeding nozzle and a protective gas nozzle are fixed in the same plane, the laser beam is vertically incident, and a laser focus, a wire dropping point of a welding wire and a protective gas feeding point are guaranteed to be consistent during welding; and melting the fed aluminum welding wire by using the laser to ensure that the molten aluminum welding wire is in fusion connection with the aluminum plate, simultaneously a micro fusion layer is formed on one side of the steel plate and then a fusion-braze welding connection is formed, thus the lap joint between dissimilar metals such as the aluminum alloy and the steel is realized. The method improves the connection efficiency between the dissimilar metals such as the aluminum alloy and the steel, and the tensile strength of the joint is over 149.6N/mm. The method solves the problems of long preparation time, low automation degree and poor reproducibility of welding results in the process of connecting pre-coated layers of the dissimilar materials such as welded-aluminum and the steel.
Owner:BEIJING UNIV OF TECH
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