Self-ionized and inductively-coupled plasma for sputtering and resputtering

Abstract

A magnetron sputter reactor for sputtering deposition materials such as tantalum, tantalum nitride and copper, for example, and its method of use, in which self-ionized plasma (SIP) sputtering and inductively coupled plasma (ICP) sputtering are promoted, either together or alternately, in the same or different chambers. Also, bottom coverage may be thinned or eliminated by ICP resputtering in one chamber and SIP in another. SIP is promoted by a small magnetron having poles of unequal magnetic strength and a high power applied to the target during sputtering. ICP is provided by one or more RF coils which inductively couple RF energy into a plasma. The combined SIP-ICP layers can act as a liner or barrier or seed or nucleation layer for hole. In addition, an RF coil may be sputtered to provide protective material during ICP resputtering. In another chamber an array of auxiliary magnets positioned along sidewalls of a magnetron sputter reactor on a side towards the wafer from the target. The magnetron preferably is a small, strong one having a stronger outer pole of a first magnetic polarity surrounding a weaker outer pole of a second magnetic polarity and rotates about the central axis of the chamber. The auxiliary magnets preferably have the first magnetic polarity to draw the unbalanced magnetic field component toward the wafer. The auxiliary magnets may be either permanent magnets or electromagnets.

Description

RELATED APPLICATIONS [0001] This application is a continuation in part application of pending application Ser. No. 09 / 685,978 filed Oct. 10, 2000, a divisional application of application Ser. No. 09 / 414,614 filed Oct. 8, 1.999 (issued as U.S. Pat. No. 6,398,929); and is a continuation in part of pending application Ser. No. 10 / 202,778, filed Jul. 25, 2002 (which claims priority to provisional application 60 / 316,137 filed Aug. 30, 2001, and 60 / 342,608 filed Dec. 21, 2001); and is a continuation in part application of pending application Ser. No. 09 / 993,543, filed Nov. 14, 2001, which are incorporated by reference in their entireties.FIELD OF THE INVENTION [0002] The invention relates generally to sputtering and resputtering. In particular, the invention relates to the sputter deposition of material and resputtering of deposited material in the formation of semiconductor integrated circuits. BACKGROUND ART [0003] Semiconductor integrated circuits typically include multiple levels of m...

AI Technical Summary

Benefits of technology

[0028] One embodiment of the present invention is directed to sputter depositing a liner material such as tantalum or tantalum nitride, by combining long-throw sputtering, self-ionized plasma (SIP) sputtering, inductively-coupled plasma (ICP) resputtering, and coil sputtering in one chamber. Long-throw sputtering is characterized by a relatively high ratio of the target-to-substrate distance and the substrate diameter. Long-throw SIP sputtering promotes deep hole coating of both the ionized and neutral deposition material components. ICP resputtering can reduce the thickness of layer bottom coverage of deep holes to reduce contact resistance. During ICP resputtering, ICP coil sputtering can deposit a protective layer, particularly on areas such as adjacent the hole openings where thinning by resputtering may not be desired.

[0033] Resputtering in an SIP chamber may be promoted in multiple steps in which, in one embodiment, biasing of the wafer is increased during deposition. Alternatively, power to the target may be decreased during deposition to redistribute deposition to the bottom corners of vias and other holes.

Problems solved by technology

Lining and filling via holes and similar high aspect-ratio structures, such as occur in dual damascene, have presented a continuing challenge as their aspect ratios continue to increase.

Such a wide distribution can be disadvantageous for filling a deep and narrow via hole 122 such as that illustrated in FIG. 2, in which a barrier layer 124 has already been deposited.

Once a void 134 has formed, it is often difficult to reflow it out by heating the metallization to near its melting point.

Even a small void can introduce reliability problems.

If a second metallization deposition step is planned, such as by electroplating, the bridged overhang make subsequent deposition more difficult.

Both long-throw targets and collimators typically reduce the flux of sputter particles reaching the wafer and thus tend to reduce the sputter deposition rate.

Also, the length that long throw sputtering may be increased may be limited.

A yet further problem with both long throw and collimation is that the reduced metal flux can result in a longer deposition period which can not only reduce throughput, but also tends to increase the maximum temperature the wafer experiences during sputtering.

Still further, long throw sputtering can reduce over hangs and provide good coverage in the middle and upper portions of the sidewalls, but the lower sidewall and bottom coverage can be less than satisfactory.

If so, such a film may not promote hole filling, particularly when the liner is being used as the electrode for electroplating.

One of its fundamental problems is the limited number of variables available in optimizing the magnetic field configuration.

The horizontally arranged permanent magnets disclosed by Lai in U.S. Pat. No. 5,593,551 poorly address this effect.

However, CVD copper seed layers have often been observed to be rough.

However, complete fills performed by CVD can suffer from center seams, which may impact device reliability.

Hence, the CVD layer over an IMP layer will also tend to be rough.

Electroplating, however, imposes its own requirements.

Depositing the copper seed layer presents its own difficulties.

An IMP deposited seed layer provides good bottom coverage in high aspect-ratio holes, but its sidewall coverage can be small such that that the resulting thin films can be rough or discontinuous.

A thin CVD deposited seed can also be too rough.

A thicker CVD seed layer, or CVD copper over IMP copper, may require an excessively thick seed layer to achieve the required continuity.

Long throw provides adequate sidewall coverage, but the bottom coverage may not be sufficient.

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