The invention relates to the technical field of detection devices, and discloses an efficient, accurate and rapid defect detection method and equipment, the equipment comprises a main base, the bottom of the main base is fixedly connected with a footstand, the top of the main base is fixedly connected with an upper shell, and the inner wall of the side surface of the upper shell is fixedly connected with a display; a visible window is formed in the side face of the upper shell, a bin body door is formed in the inner wall of the side face of the upper shell, the conveying device is arranged, a mechanical arm automatically conveys a
silicon carbide substrate slice to the position below the image collecting device,
automation of the working process is achieved, and the working efficiency is improved; through the arrangement of the
image acquisition module, the defect
feature extraction module, the defect classification module and the report output module, after
image acquisition is completed, the image passes through the
image acquisition module, the defect
feature extraction module, the defect classification module and the report output module and is finally displayed in a display in a report form, so that the
automation of equipment is realized, and the efficiency is improved. And the working efficiency of equipment is improved.