606 results about "Ion current" patented technology

The present invention provides a method and apparatus for preferential PVD conductor fill in an integrated circuit structure. The present invention utilizes a high density plasma for sputter deposition of a conductive layer on a patterned substrate, and a pulsed DC power source capacitively coupled to the substrate to generate an ion current at the surface of the substrate. The ion current prevents sticking of the deposited material to the field areas of the patterned substrate, or etches deposited material from the field areas to eliminate crowning or cusping problems associated with deposition of a conductive material in a trench, hole or via formed on the substrate.

An inductively-coupled plasma etch apparatus and a feedback control method thereof are provided. A voltage/current measuring device is connected to an electrostatic chuck of the plasma etching apparatus, so as to measure the RF current, voltage and the phase angle between them on the electrostatic chuck. The ion current and the RF bias voltage are obtained by calculation of the RF current, voltage and the phase angle. Finally, using the obtained ion current and the RF bias voltage to feedback control the RF power generator in order to achieve the desired plasma status.

An automated electrospray ionization (ESI) device and related methods to optimize electrospray interface conditions for mass spectrometric analysis. The optimization process can be performed with calibration or optimization solutions that produce expected ESI parameters such as an ESI signal or an ion current. The ESI device may include an input/output (I/O) controller that is coupled to an electrospray assembly including an XYZ stage for positioning an electrospray emitter relative to a mass spectrometer orifice. The I/O controller may be connected to a power supply for applying an adjustable electrospray ionization voltage, and an adjustable flow regulator that alters the flow of solution by modifying applied voltage and/or pressure. A central processing unit instructs the I/O controller to control selectively the electrospray assembly based on the resultant signals from the mass spectrometer or the ion currents within the mass spectrometer in accordance with a predetermined optimization algorithm. The resulting ESI signal or ion currents are monitored and provide feedback to the I/O controller which can automatically instruct selected system components to make adjustments as needed to attain optimal settings that produce expected ESI signals or ion currents in the mass spectrometer for selected solutions.

A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

The present invention pertains to various embodiments for managing ion current balance by independently controlling positive ion current and negative ion current generated during static neutralization. In another embodiment, E-Field compensation may be provided. These embodiments disclose both method and apparatus implementations.

Correlation ion mobility spectrometry (CIMS) uses gating modulation and correlation signal processing to improve IMS instrument performance. Closely spaced ion peaks can be resolved by adding discriminating codes to the gate and matched filtering for the received ion current signal, thereby improving sensitivity and resolution of an ion mobility spectrometer. CIMS can be used to improve the signal-to-noise ratio even for transient chemical samples. CIMS is especially advantageous for small geometry IMS drift tubes that can otherwise have poor resolution due to their small size.

A novel method and mass spectrometer apparatus is introduced to spatially and temporally resolve images of one or more ion exit patterns of a multipole instrument. In particular, the methods and structures of the present invention measures the ion current as a function of time and spatial displacement in the beam cross-section of a quadrupole mass filter via an arrayed detector. The linearity of the detected quadrupole ion current in combination with it reproducible spatial-temporal structure enables the deconvolution of the contributions of signals from individual ion species in complex mixtures where both sensitivity and mass resolving power are essential.

The present invention generally provides methods and apparatus for controlling ion dosage in real time during plasma processes. In one embodiment, ion dosages may be controlled using in-situ measurement of the plasma from a mass distribution sensor combined with in-situ measurement from an RF probe.

An ion current detection device of an internal combustion engine includes a detection voltage generation device which applies a voltage to an ignition plug to generate an ion current in a cylinder of the engine. A current to voltage conversion circuit detects and converts the generated ion current to a voltage signal. A bandpass filter extracts an ac component within a specified frequency range from the voltage signal produced by the current to voltage conversion circuit. An ion current threshold detection portion produces an ion current detection signal when the detected ion current exceeds a predetermined threshold current. A filter characteristic control circuit controls the characteristic of the bandpass filter to suppress the sensitivity of the filter for a predetermined period of time right after the ion current detection signal is detected and, after the predetermined period of time, increase the sensitivity of the filter for detection of the ac signal with the specific frequency.

A system and method for operating an engine having ionization signal sensing include detecting plug fouling and controlling the engine using progressively more aggressive control strategies if the fouling condition persists. A first control strategy may be used when the number of engine starts or running time are below corresponding thresholds and a second strategy otherwise. The first strategy may employ progressively more aggressive control procedures to eliminate spark plug deposits that may include repetitive sparking, exhaust cycle sparking, increasing engine loading, advancing spark timing, increasing air/fuel ratio, and increasing idle speed, for example. The second strategy may include similar corrective actions employed in a different order and/or to a lesser degree in an attempt to eliminate plug fouling without any noticeable change in engine operation or performance as perceived by the vehicle operator. The control strategies may be applied to individual cylinders, cylinder banks, or all cylinders.

The invention relates to measuring the mobility spectra of ions with ion mobility spectrometers (IMS). The invention provides an analog modulation of the ion current of an IMS ion source with a continuous modulation function, the instantaneous frequency of which temporally varies across a large frequency range, and a generation of the mobility spectrum from the measured ion current by a correlation analysis with the modulation pattern. The modulation can, for example, be produced by the gating grid, which is usually present. The analog modulation removes many of the difficulties which occur with square-wave modulation and leads to a surprisingly stable evaluation which is relatively insensitive to noisy signals and produces a high mobility resolution at very low noise.

An ion energy analyzer is described for use in diagnosing the ion energy distribution (IED) of ions incident on a radio frequency (RF) biased substrate immersed in plasma. The ion energy analyzer comprises an entrance grid exposed to the plasma, an electron rejection grid disposed proximate to the entrance grid, and an ion current collector disposed proximate to the electron rejection grid. The ion current collector is coupled to an ion selection voltage source configured to positively bias the ion current collector by an ion selection voltage, and the electron rejection grid is coupled to an electron rejection voltage source configured to negatively bias the electron rejection grid by an electron rejection voltage. Furthermore, an ion current meter is coupled to the ion current collector to measure the ion current.

An ion implantation system having a dose cup located near a final energy bend of a scanned or ribbon-like ion beam of a serial ion implanter for providing an accurate ion current measurement associated with the dose of a workpiece or wafer. The system comprises an ion implanter having an ion beam source for producing a ribbon-like ion beam. The system further comprises an AEF system configured to filter an energy of the ribbon-like ion beam by bending the beam at a final energy bend. The AEF system further comprises an AEF dose cup associated with the AEF system and configured to measure ion beam current, the cup located substantially immediately following the final energy bend. An end station downstream of the AEF system is defined by a chamber wherein a workpiece is secured in place for movement relative to the ribbon-like ion beam for implantation of ions therein. The AEF dose cup is beneficially located up stream of the end station near the final energy bend mitigating pressure variations due to outgassing from implantation operations at the workpiece. Thus, the system provides accurate ion current measurement before such gases can produce substantial quantities of neutral particles in the ion beam, generally without the need for pressure compensation. Such dosimetry measurements may also be used to affect scan velocity to ensure uniform closed loop dose control in the presence of beam current changes from the ion source and outgassing from the workpiece.

A system and method for controlling operation of a multiple cylinder internal combustion engine having fuel injectors and an ionization current sensor include a high-voltage power supply connectable to, and supplying substantially the same nominal boosted voltage relative to nominal battery voltage to, the fuel injectors and ionization sensor during at least a portion of the engine operation.

A capacitive sensing system (2, 2′, 2″) is used to measure a timevarying ion current through a channel (50), such as an ion channel or protein pore. Such a capacitive system (2, 2′, 2″) does not suffer problems of electrode corrosion and, when used with methods to control a build up of ion concentration, allows the use of measurement volumes (10, 20) around the channel (50) with dimensions on a scale of nanometers.

An ion mobility spectrometer includes a housing with a flow channel, an air pump to force air through the flow channel, a heater at an inlet end of the flow channel, and an ionization source that ionizes the air after it is heated. The heated, ionized air passes through an electric field produced by a field source and a plurality of sensor elements located within in the wall of the flow channel in the measurement region of the electric field. The sensor elements include a plurality of sensor electrodes in one wall of the flow channel. Ion currents to the sensor electrodes are measured by an integrated high-sensitivity readout circuit array, permitting the sensor electrodes to be quite small. The sensor electrodes may be arranged in one-dimensional or two-dimensional arrays.