The invention belongs to the field of scanning
ion conductance microscopes and scanning
electrochemical cell microscopes, and discloses a scanning imaging
system and method based on optical feedback positioning and
ion conductance technology, the scanning imaging
system comprises an SICM
ion current circuit, an
optical path reflector and an adapter bracket, the adapter bracket is arranged on a motion platform, and a
laser generator is arranged on the upper part of the adapter bracket; the light path reflector is rotationally connected with the adapter bracket, a
prism system and a
CCD camera are sequentially arranged on a reflected light path of the light path reflector, and the
prism system is fixed on the adapter bracket; the lower part of the adapter bracket is provided with a
micromotor, the output end of the
micromotor is connected with a Z-direction piezoelectric
ceramic, the Z-direction piezoelectric
ceramic is connected with a piezoelectric
ceramic controller and is connected with the flexible hinge, the Z-direction piezoelectric ceramic is provided with a probe holder, the SICM probe is arranged on the probe holder, and the probe
electrode is arranged in the SICM probe. According to the invention, the position of the probe can be rapidly and accurately controlled, and the problem of low scanning speed of scanning
ionic conductivity detection equipment is solved.