98results about How to "Control deposition" patented technology

The present invention provides a method and apparatus for preferential PVD conductor fill in an integrated circuit structure. The present invention utilizes a high density plasma for sputter deposition of a conductive layer on a patterned substrate, and a pulsed DC power source capacitively coupled to the substrate to generate an ion current at the surface of the substrate. The ion current prevents sticking of the deposited material to the field areas of the patterned substrate, or etches deposited material from the field areas to eliminate crowning or cusping problems associated with deposition of a conductive material in a trench, hole or via formed on the substrate.

Active multifunctional nanoparticles provide significant enhancement of the efficacy of model therapeutic and gene agents due to increased diffusion and penetration through mucus and biological barriers under the influence of a magnetic field.

The present invention relates to the field of semiconductor processing and provides apparatus and methods that improve chemical vapor deposition (CVD) of semiconductor materials by promoting more efficient thermalization of precursor gases prior to their reaction. In preferred embodiments, the invention comprises heat transfer structures and their arrangement within a CVD reactor so as to promote heat transfer to flowing process gases. In certain preferred embodiments applicable to CVD reactors transparent to radiation from heat lamps, the invention comprises radiation-absorbent surfaces placed to intercept radiation from the heat lamps and to transfer it to flowing process gases.

The present invention relates to nanostructured materials for use in rechargeable energy storage devices such as lithium batteries, particularly rechargeable secondary lithium batteries, or lithium-ion batteries (LIBs). The present invention includes materials, components, and devices, including nanostructured materials for use as battery active materials, and lithium ion battery (LIB) electrodes comprising such nanostructured materials, as well as manufacturing methods related thereto. Exemplary nanostructured materials include silicon-based nanostructures such as silicon nanowires and coated silicon nanowires, nanostructures disposed on substrates comprising active materials or current collectors such as silicon nanowires disposed on graphite particles or copper electrode plates, and LIB anode composites comprising high-capacity active material nanostructures formed on a porous copper and / or graphite powder substrate.

The invention is directed to efficient methods for depositing highly adherent anti-microbial materials onto a wide range of surfaces. A controlled cathodic arc process is described, which results in enhanced adhesion of silver oxide to polymers and other surfaces, such as surfaces of medical devices. Deposition of anti-microbial materials directly onto the substrates is possible in a cost-effective manner that maintains high anti-microbial activity over several weeks when the coated devices are employed in vivo.

To provide a surface protective film for transpar nt conductive substrates having sufficient transparency and heat resistance, and not demonstrating white turbiness, even when it is placed under a heated environment in a state where the surface protective film is attached on the transparent conductive substrate. A surface protective film for transparent conductive substrates protecting a surface on a side opposite to a conductive thin film or a surface on a side of the conductive thin film of the transparent conductive substrate, wherein an adhesive layer is formed on one side of a base material film, and an antistatic layer is formed on the other side.

The present invention relates to a process for producing perfume-containing microcapsules having both an aqueous inner phase and an oily inner phase, which can be used in home or personal care products, as well as to the process for producing these microcapsules and the consumer products containing them.

An external-pressure column type hollow fibre membrane assembly able to be flushed by gas features that the dedicated glass flushing part is arranged among membran fibres at bottom, and the height / diameter ratio of column, the length / diameter ratio of membrane fibre, and the filling density of membrane assembly are reasonably set up for normalizing the moving tracing of gas and water and the flowing state of two-phase stream and making the membrane assembly work in subcritical throughput region. Its advantages are high membrane throughput and less pollution to membrane.

The invention discloses a surface-enhanced Raman spectroscopy substrate and a preparation method thereof. The surface-enhanced Raman spectroscopy substrate comprises a conducting substrate, a two-dimensional noble metal micro-nano structure array and gold nanostars, wherein each array unit is a starlike noble metal film unit; the size of each starlike noble metal film unit is 150-1000 nm; the distance between every two adjacent starlike noble metal film units is 10-500 nm; the gold nanostars are deposited at tips of all the starlike noble metal film units in the two-dimensional noble metal micro-nano structure array through electrophoresis; the deposition position of each gold nanostar is 1-5 nm away from the tips of the corresponding starlike noble metal film unit. On one hand, the own electric fields of gold nanostar particles are enhanced; on the other hand, the tips of all the starlike noble metal film units in the two-dimensional noble metal micro-nano structure array are further coupled with those of the gold nanostar particles. Therefore, the electric field strength in a nearby area is greatly improved, and the high-sensitivity surface-enhanced Raman spectroscopy substrate is obtained.

Cleaning is carried out by using a sulfuric acid type detergent at a resist stripping and cleaning step (step 5) in a semitranslucent portion forming process and a resist stripping and cleaning step (step 10) in a shielding band forming process, and a sulfuric acid removing step of partially or wholly removing a surface layer portion in a pattern into which a sulfate ion is adsorbed is then carried out to effectively remove the adsorbed sulfate ion.

A combustion chamber having a chamber end wall that presents a plurality of air and fuel injector devices, each of the devices including a bowl and a deflector mounted on a main axis forming a heat shield disposed around the bowl which flares in the gas flow direction and possesses an annular portion, the interface between the bowl and the deflector being situated on this annular portion, at least a portion of the interface being situated towards the end of the annular portion that is downstream in the gas flow direction, such that an annular cavity is defined between the deflector and the downstream annular portion of the interface. First bowl holes are formed in the annular portion to open out facing the edge of the chamber end wall that is in contact with the deflector in order to sustain a flow of air from upstream to downstream in the annular cavity.

A circulating etching method of a silicon nitride hole with high depth-to-width ratio comprises of the steps of 1 adopting a dry-method plasma process and fluorocarbon-based gas to perform silicon nitride thin film etching so as to form the hole and meanwhile generating a polymer depositing on the bottom and the side wall of the hole; 2 feeding oxidizing gas and diluting gas into an etching cavity. The deposition amount of fluorocarbon on the side wall of the deep hole can be controlled, the polymer depositing on the bottom of the deep hole can be removed so as to ensure continuous etching, and the two steps are repeatedly performed till the etching profile of the hole meets the requirement. When the fluorocarbon-based gas in the step 1 is increased and accordingly the fluorocarbon amount is increased, the hole is slightly oblique. When the oxidizing gas in the step 2 is increased, the hole is upright. Different hole etching profiles can be obtained as required by adjusting parameters to be between the two amounts.

A method is described for producing nuclear fuel products, including the steps of receiving metallic or intermetallic uranium-based fuel particle cores, providing at least one physical vapour deposited coating layer surrounding the fuel particle core and embedding the nuclear fuel particles in a matrix so as to form a powder mixture of matrix material and coated fuel particles. The at least one physical vapour deposited coating layer may include inhibitors of inhibiting, stabilizing and / or reducing interaction between metallic and intermetallic uranium-based fuel particles cores and the matrix wherein the fuel particles typically may be embedded. The deposited coating layer may include neutron poisons.

A developing method of the present invention is practicable with a developing unit of the type including a rotatable, nonmagnetic sleeve and a rigid metering member. A two ingredient type developer made up of magnetic carrier grains and toner grains is magnetically deposited on the sleeve. The metering member meters the amount of the developer deposited on the sleeve. The sleeve has surface roughness Rz ranging from 5 μm to 20 μm. The carrier grains each are covered with a coating layer containing at least binder resin and grains. The ratio of the diameter D of the individual grain contained in the coating layer to the thickness h of the binder resin layer lies in the range of 1<D / h<10. The carrier grains have a weight-mean grain size ranging from 20 μm to 60 μm.

The invention relates to the field of combustion chambers for aviation turbomachines. It relates to a combustion chamber having a chamber end wall that presents a plurality of air and fuel injector devices, each of the devices comprising a bowl and a deflector mounted on a main axis forming a heat shield disposed around the bowl which flares in the gas flow direction and possesses an annular portion, the interface between the bowl and the deflector being situated on this annular portion, at least a portion of said interface being situated towards the end of the annular portion that is downstream in the gas flow direction, such that an annular cavity is defined between the deflector and the downstream annular portion of the interface. First bowl holes are formed in the annular portion to open out in register with the edge of the chamber end wall that is in contact with the deflector in order to sustain a flow of air from upstream to downstream in the annular cavity.

An aerosol transfer device for medical aerosol generators comprises an additional shaped element located in a vertical plane constituting an aerosol storage area. The additional element being designed with a first opening allowing movement of air from outside the storage area into the latter and being located on an upper or lower horizontal surface of the element in order to ensure vertical entry of air into the element, a second opening opposite said first opening allowing the escape of aerosol and a third opening for spraying aerosol into the storage area in the vertical plane of the storage area and in axial alignment with the first opening. The additional element has a minimum height of 6 cm and allows dispersion of the sprayed aerosol throughout the storage area without recycling the aerosol deposited on the walls of the storage area. The storage area is located between the aerosol generator source and the patient interface and allows, by means of a transport area, aerosol transport to the patient. The device does not include any valve on the path the aerosol takes from the storage area to the patient.

The invention relates to an oxygen reduction reaction catalyst with graphene as a carrier, and a preparation method thereof. The invention provides a graphene-based composite oxygen reduction reaction catalyst and a preparation method thereof. The catalyst comprises graphene and cobalt hydroxide, and the loading amount of cobalt hydroxide is 3.2-15 microgram / cm2. The preparation method of the graphene-based composite oxygen reduction reaction catalyst comprises: depositing a cobalt hydroxide precipitate on a surface of a graphene membrane by a potentiostatic deposition method so as to obtain the graphene-based composite oxygen reduction reaction catalyst.

The invention discloses a self-forming dynamic membrane biological reaction sewage treatment device comprising a reaction pool, clapboards and a grid well and forming biological reaction areas, biological transition areas and a clean water area. Special biological fillers and a microporous aerator are arranged in each biological reaction area, a self-forming dynamic membrane device is arranged in the grid well, a water discharge pipe is arranged in the clean water area, and a guide plate is arranged below the clean water area. The self-forming dynamic membrane biological reaction sewage treatment device disclosed by the invention has the advantages of simple structure, low floor area, low investment, good treatment effect, low running cost, no needing of operation and management of specially-assigned person and the like, thereby being very suitable for requirements on the current small towns and countries for sewage separating treatment.

Active multifunctional nanoparticles provide significant enhancement of the efficacy of model therapeutic and gene agents due to increased diffusion and penetration through mucus and biological barriers under the influence of a magnetic field.

The invention discloses a method for preparing a solid electrolyte interface film on the surface of a lithium metal, a device for preparing the solid electrolyte interface film by a spray pyrolysis method, comprising a heating table for placing lithium sheets and heating; A nozzle aligned with the heating station; A spray generator and a precursor solution storage tank connected to the nozzle; A stable solid electrolyte membrane was prepared on the surface of lithium slices by spray pyrolysis of a precursor solution containing suitable solute and solvent. Compared with the lithium sheet without modification, the composite lithium metal anode material of the present invention has the characteristics of high coulombic efficiency, high lithium metal utilization ratio, remarkable inhibition ofdendrite growth, and the like, thereby remarkably improving the cycling performance and safety performance of the lithium metal. This technology is simple and easy to operate and is conducive to large-scale production, and has broad application prospects and guiding significance in the next generation of high energy density lithium metal secondary batteries.

The invention belongs to the field of an electrode material and particularly belongs to the field of sodium electricity and potassium electricity. The invention discloses a 3D porous zinc-loaded current collector. The 3D porous zinc-loaded current collector comprises a 3D porous current collector and metal zinc compounded on a framework of the 3D porous current collector, the invention further comprises a preparation method and an application of the 3D porous zinc-loaded current collector, in addition, the invention further provides a sodium negative electrode or a potassium negative electrodeprepared from the 3D porous zinc-loaded current collector. The 3D porous zinc-loaded current collector is advantaged in that the metal zinc is creatively compounded on a pore skeleton of the 3D porous current collector, and the current collector with the structure can effectively maintain the skeleton stability in the sodium or potassium metal deposition process, moreover, the metallic zinc uniformly distributed on the pore skeleton can induce nucleation of metallic sodium or potassium, so the effective specific surface area of the 3D current collector is fully utilized in the sodium or potassium deposition process, and dendritic-crystal-free sodium or potassium deposition and long cycle life are realized.

The invention provides a carbon material loaded silver-platinum nano-alloy composite material and a preparation method thereof, and the composite material is composed of a carbon carrier and silver-platinum nano-particles, wherein the carbon carrier is selected from one of conductive carbon black, a heteroatom doped carbon material, a carbon nano-tube and graphene; and the atomic ratio of silver to platinum in silver-platinum nanoparticles is 1: 20-1: 3. The preparation method of the composite material comprises the following steps: (1) preparing a precursor solution consisting of silver saltand platinum salt; (2) mixing the precursor solution, a carbon material and a solvent, and performing heating. The preparation method disclosed by the invention is suitable for various carbon materials, strong in applicability, simple and convenient in process, high in repeatability, high in yield, mild in used reaction conditions, environment-friendly and convenient for large-scale industrial production. The prepared composite material has the advantages of high catalytic activity, good stability, low cost and the like, and has potential application values in the fields of chemical catalysis,electrochemical catalysis, photocatalysis and electrochemical sensors.

A spray dryer absorber (8) is operative for removing gaseous pollutants from a hot process gas and comprises a spray dryer chamber (12) and a plurality of dispersers (14, 16, 18, 20) mounted at a roof (22) of the spray dryer chamber (12), each such disperser (14, 16, 18, 20) being operative for dispersing a portion of the hot process gas around a respective atomizer (24). Said plurality of dispersers (14, 16, 18, 20) comprises a central disperser (20), which is located at the centre (C) of the roof (22) of the spray dryer chamber (12), and at least 3 peripheral dispersers (14, 16, 18) surrounding the central disperser (20), each of said peripheral dispersers (14, 16, 18) being located at substantially the same distance (D) from the periphery (P) of the spray dryer chamber (12).

The invention discloses a method for preparing a titanium metal coating on a ceramic surface. The method for preparing the titanium metal coating on the ceramic surface comprises the following steps of: firstly, placing ceramic the surface of which is treated into a quartz tube; then placing a mixture of titanium powder and iodine powder into a container, and placing the container into the quartz tube; then placing the quartz tube into a program control furnace, vacuumizing the program control furnace repeatedly, and introducing an inert gas, warming the program control furnace at the warming speed of 15-20 DEG C / min to 1030-1200 DEG C and carrying out heat preservation, and cooling, thereby obtaining the ceramic the surface of which is coated with the metal coating. The coating provided by the invention is high in purity, and has strong bonding force with base body ceramic, is uniform in distribution on the whole ceramic plane, can form a smooth deposition surface easily; and the device is simple, low in cost and simple to operate.

The invention discloses an etching method for a silicon nitride high depth-to-width ratio hole. The method comprises: first of all, placing a semiconductor device of a silicon nitride film, already forming the graph needed by a semiconductor, into en etching cavity; then using a dry-method plasma technology, letting in a high carbon chain molecule fluorocarbon-based gas, an oxidizing gas, a dilution gas and a fluorocarbon-based gas containing hydrogen, adding radio frequency power and exciting plasma; and after a plasma stabilization step, performing etching of the silicon nitride film until the etching morphology, the hole diameter size and the depth of a high depth-to-width ratio hole reach requirements. According to the invention, the silicon nitride film is etched by using the unique fluorocarbon-based gas, through adjusting gas component and power size, the deposition amount of fluorocarbon polymers on the side wall of the deep hole can be controlled, the key dimensions of the hole can be prevented from becoming larger, and polymers already deposited at the bottom of the deep hole can be removed so as to ensure that the etching can be continued, thus the etching morphology of the hole can be adjusted.

A developing method of the present invention is practicable with a developing unit of the type including a rotatable, nonmagnetic sleeve and a rigid metering member. A two ingredient type developer made up of magnetic carrier grains and toner grains is magnetically deposited on the sleeve. The metering member meters the amount of the developer deposited on the sleeve. The sleeve has surface roughness Rz ranging from 5 μm to 20 μm. The carrier grains each are covered with a coating layer containing at least binder resin and grains. The ratio of the diameter D of the individual grain contained in the coating layer to the thickness h of the binder resin layer lies in the range of 1<D / h<10. The carrier grains have a weight-mean grain size ranging from 20 μm to 60 μm.

The present invention relates to nanostructured materials for use in rechargeable energy storage devices such as lithium batteries, particularly rechargeable secondary lithium batteries, or lithium-ion batteries (LIBs). The present invention includes materials, components, and devices, including nanostructured materials for use as battery active materials, and lithium ion battery (LIB) electrodes comprising such nanostructured materials, as well as manufacturing methods related thereto. Exemplary nanostructured materials include silicon-based nanostructures such as silicon nanowires and coated silicon nanowires, nanostructures disposed on substrates comprising active materials or current collectors such as silicon nanowires disposed on graphite particles or copper electrode plates, and LIB anode composites comprising high-capacity active material nanostructures formed on a porous copper and / or graphite powder substrate.

The invention provides a composite corrosion inhibitor electrolyte, an application thereof and a magnesium air battery, and belongs to the field of air batteries. In the invention, La<3+> in lanthanumnitrate can react with OH<-> in the solution to generate lanthanum hydroxide to precipitate, and the structure and appearance of a passive film are changed, so that hydrogen evolution is inhibited, the damage effect of nitrate ions on the passive film is weak, and the integrity of the primary passive film is ensured, thereby having a good protection effect on internal battery materials, and inhibiting the hydrogen evolution. CTAB is a cationic surfactant, can significantly reduce the surface tension, change the surface state of metal / electrolyte, gather on the surface of active metal by utilizing the electrostatic adsorption of NH<2+>, reduce the surface energy of the metal and increase the corrosion activation energy, thereby slowing down the corrosion rate, and simultaneously forming alayer of hydrophobic protection film on the surface layer of the metal, thus hindering the charge and ion transfer, hindering the reaction process and reducing the corrosion rate.

Compounds useful in the treatment of autoimmune disease are described by the following general formula:n=0-2m=0-2m is not necessarily equal to n;where R1, R3═NH2, F, Cl, C1-C4 alkoxy or phenoxy group, but R1 is not necessarily equal to R3; andR2═H, F, Cl, NH2, or NH—R—XH;