95results about How to "Control deposition" patented technology

The present invention provides a method and apparatus for preferential PVD conductor fill in an integrated circuit structure. The present invention utilizes a high density plasma for sputter deposition of a conductive layer on a patterned substrate, and a pulsed DC power source capacitively coupled to the substrate to generate an ion current at the surface of the substrate. The ion current prevents sticking of the deposited material to the field areas of the patterned substrate, or etches deposited material from the field areas to eliminate crowning or cusping problems associated with deposition of a conductive material in a trench, hole or via formed on the substrate.

Active multifunctional nanoparticles provide significant enhancement of the efficacy of model therapeutic and gene agents due to increased diffusion and penetration through mucus and biological barriers under the influence of a magnetic field.

The present invention relates to the field of semiconductor processing and provides apparatus and methods that improve chemical vapor deposition (CVD) of semiconductor materials by promoting more efficient thermalization of precursor gases prior to their reaction. In preferred embodiments, the invention comprises heat transfer structures and their arrangement within a CVD reactor so as to promote heat transfer to flowing process gases. In certain preferred embodiments applicable to CVD reactors transparent to radiation from heat lamps, the invention comprises radiation-absorbent surfaces placed to intercept radiation from the heat lamps and to transfer it to flowing process gases.

The present invention relates to nanostructured materials for use in rechargeable energy storage devices such as lithium batteries, particularly rechargeable secondary lithium batteries, or lithium-ion batteries (LIBs). The present invention includes materials, components, and devices, including nanostructured materials for use as battery active materials, and lithium ion battery (LIB) electrodes comprising such nanostructured materials, as well as manufacturing methods related thereto. Exemplary nanostructured materials include silicon-based nanostructures such as silicon nanowires and coated silicon nanowires, nanostructures disposed on substrates comprising active materials or current collectors such as silicon nanowires disposed on graphite particles or copper electrode plates, and LIB anode composites comprising high-capacity active material nanostructures formed on a porous copper and/or graphite powder substrate.

To provide a surface protective film for transpar nt conductive substrates having sufficient transparency and heat resistance, and not demonstrating white turbiness, even when it is placed under a heated environment in a state where the surface protective film is attached on the transparent conductive substrate. A surface protective film for transparent conductive substrates protecting a surface on a side opposite to a conductive thin film or a surface on a side of the conductive thin film of the transparent conductive substrate, wherein an adhesive layer is formed on one side of a base material film, and an antistatic layer is formed on the other side.

The present invention relates to a process for producing perfume-containing microcapsules having both an aqueous inner phase and an oily inner phase, which can be used in home or personal care products, as well as to the process for producing these microcapsules and the consumer products containing them.

An external-pressure column type hollow fibre membrane assembly able to be flushed by gas features that the dedicated glass flushing part is arranged among membran fibres at bottom, and the height/diameter ratio of column, the length/diameter ratio of membrane fibre, and the filling density of membrane assembly are reasonably set up for normalizing the moving tracing of gas and water and the flowing state of two-phase stream and making the membrane assembly work in subcritical throughput region. Its advantages are high membrane throughput and less pollution to membrane.

The invention discloses a surface-enhanced Raman spectroscopy substrate and a preparation method thereof. The surface-enhanced Raman spectroscopy substrate comprises a conducting substrate, a two-dimensional noble metal micro-nano structure array and gold nanostars, wherein each array unit is a starlike noble metal film unit; the size of each starlike noble metal film unit is 150-1000 nm; the distance between every two adjacent starlike noble metal film units is 10-500 nm; the gold nanostars are deposited at tips of all the starlike noble metal film units in the two-dimensional noble metal micro-nano structure array through electrophoresis; the deposition position of each gold nanostar is 1-5 nm away from the tips of the corresponding starlike noble metal film unit. On one hand, the own electric fields of gold nanostar particles are enhanced; on the other hand, the tips of all the starlike noble metal film units in the two-dimensional noble metal micro-nano structure array are further coupled with those of the gold nanostar particles. Therefore, the electric field strength in a nearby area is greatly improved, and the high-sensitivity surface-enhanced Raman spectroscopy substrate is obtained.

A circulating etching method of a silicon nitride hole with high depth-to-width ratio comprises of the steps of 1 adopting a dry-method plasma process and fluorocarbon-based gas to perform silicon nitride thin film etching so as to form the hole and meanwhile generating a polymer depositing on the bottom and the side wall of the hole; 2 feeding oxidizing gas and diluting gas into an etching cavity. The deposition amount of fluorocarbon on the side wall of the deep hole can be controlled, the polymer depositing on the bottom of the deep hole can be removed so as to ensure continuous etching, and the two steps are repeatedly performed till the etching profile of the hole meets the requirement. When the fluorocarbon-based gas in the step 1 is increased and accordingly the fluorocarbon amount is increased, the hole is slightly oblique. When the oxidizing gas in the step 2 is increased, the hole is upright. Different hole etching profiles can be obtained as required by adjusting parameters to be between the two amounts.

A method is described for producing nuclear fuel products, including the steps of receiving metallic or intermetallic uranium-based fuel particle cores, providing at least one physical vapour deposited coating layer surrounding the fuel particle core and embedding the nuclear fuel particles in a matrix so as to form a powder mixture of matrix material and coated fuel particles. The at least one physical vapour deposited coating layer may include inhibitors of inhibiting, stabilizing and/or reducing interaction between metallic and intermetallic uranium-based fuel particles cores and the matrix wherein the fuel particles typically may be embedded. The deposited coating layer may include neutron poisons.

The invention relates to the field of combustion chambers for aviation turbomachines. It relates to a combustion chamber having a chamber end wall that presents a plurality of air and fuel injector devices, each of the devices comprising a bowl and a deflector mounted on a main axis forming a heat shield disposed around the bowl which flares in the gas flow direction and possesses an annular portion, the interface between the bowl and the deflector being situated on this annular portion, at least a portion of said interface being situated towards the end of the annular portion that is downstream in the gas flow direction, such that an annular cavity is defined between the deflector and the downstream annular portion of the interface. First bowl holes are formed in the annular portion to open out in register with the edge of the chamber end wall that is in contact with the deflector in order to sustain a flow of air from upstream to downstream in the annular cavity.

An aerosol transfer device for medical aerosol generators comprises an additional shaped element located in a vertical plane constituting an aerosol storage area. The additional element being designed with a first opening allowing movement of air from outside the storage area into the latter and being located on an upper or lower horizontal surface of the element in order to ensure vertical entry of air into the element, a second opening opposite said first opening allowing the escape of aerosol and a third opening for spraying aerosol into the storage area in the vertical plane of the storage area and in axial alignment with the first opening. The additional element has a minimum height of 6 cm and allows dispersion of the sprayed aerosol throughout the storage area without recycling the aerosol deposited on the walls of the storage area. The storage area is located between the aerosol generator source and the patient interface and allows, by means of a transport area, aerosol transport to the patient. The device does not include any valve on the path the aerosol takes from the storage area to the patient.

The invention provides a carbon material loaded silver-platinum nano-alloy composite material and a preparation method thereof, and the composite material is composed of a carbon carrier and silver-platinum nano-particles, wherein the carbon carrier is selected from one of conductive carbon black, a heteroatom doped carbon material, a carbon nano-tube and graphene; and the atomic ratio of silver to platinum in silver-platinum nanoparticles is 1: 20-1: 3. The preparation method of the composite material comprises the following steps: (1) preparing a precursor solution consisting of silver saltand platinum salt; (2) mixing the precursor solution, a carbon material and a solvent, and performing heating. The preparation method disclosed by the invention is suitable for various carbon materials, strong in applicability, simple and convenient in process, high in repeatability, high in yield, mild in used reaction conditions, environment-friendly and convenient for large-scale industrial production. The prepared composite material has the advantages of high catalytic activity, good stability, low cost and the like, and has potential application values in the fields of chemical catalysis,electrochemical catalysis, photocatalysis and electrochemical sensors.

A spray dryer absorber (8) is operative for removing gaseous pollutants from a hot process gas and comprises a spray dryer chamber (12) and a plurality of dispersers (14, 16, 18, 20) mounted at a roof (22) of the spray dryer chamber (12), each such disperser (14, 16, 18, 20) being operative for dispersing a portion of the hot process gas around a respective atomizer (24). Said plurality of dispersers (14, 16, 18, 20) comprises a central disperser (20), which is located at the centre (C) of the roof (22) of the spray dryer chamber (12), and at least 3 peripheral dispersers (14, 16, 18) surrounding the central disperser (20), each of said peripheral dispersers (14, 16, 18) being located at substantially the same distance (D) from the periphery (P) of the spray dryer chamber (12).

A developing method of the present invention is practicable with a developing unit of the type including a rotatable, nonmagnetic sleeve and a rigid metering member. A two ingredient type developer made up of magnetic carrier grains and toner grains is magnetically deposited on the sleeve. The metering member meters the amount of the developer deposited on the sleeve. The sleeve has surface roughness Rz ranging from 5 μm to 20 μm. The carrier grains each are covered with a coating layer containing at least binder resin and grains. The ratio of the diameter D of the individual grain contained in the coating layer to the thickness h of the binder resin layer lies in the range of 1<D/h<10. The carrier grains have a weight-mean grain size ranging from 20 μm to 60 μm.

The invention provides a composite corrosion inhibitor electrolyte, an application thereof and a magnesium air battery, and belongs to the field of air batteries. In the invention, La<3+> in lanthanumnitrate can react with OH<-> in the solution to generate lanthanum hydroxide to precipitate, and the structure and appearance of a passive film are changed, so that hydrogen evolution is inhibited, the damage effect of nitrate ions on the passive film is weak, and the integrity of the primary passive film is ensured, thereby having a good protection effect on internal battery materials, and inhibiting the hydrogen evolution. CTAB is a cationic surfactant, can significantly reduce the surface tension, change the surface state of metal/electrolyte, gather on the surface of active metal by utilizing the electrostatic adsorption of NH<2+>, reduce the surface energy of the metal and increase the corrosion activation energy, thereby slowing down the corrosion rate, and simultaneously forming alayer of hydrophobic protection film on the surface layer of the metal, thus hindering the charge and ion transfer, hindering the reaction process and reducing the corrosion rate.