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P-type graphene/N-type germanium nanocone array schottky junction infrared photoelectric detector and preparation method thereof

The invention discloses a P-type graphene/N-type germanium nanocone array schottky junction infrared photoelectric detector and a preparation method thereof. The preparation method is characterized by comprising the following steps of forming an insulating layer on the front face of an N-type germanium basal layer in an evaporation manner by taking the N-type germanium basal layer as a base region of the photoelectric detector; arranging an N-type germanium nanocone array on the upper surface of the N-type germanium basal layer; transferring P-type graphene to the N-type germanium nanocone array covered with the insulating layer; coating the P-type graphene with indium tin oxide (ITO) nano-particles in a spin manner to realize a P-type graphene/N-type germanium nanocone array schottky junction-based photodiode. According to the infrared photoelectric detector disclosed by the invention, by utilizing the structure of the germanium nanocone array and the characteristic of the surface plasma resonance of the ITO nano-particles, the ability of absorbing light is enhanced, and the ability of responding to light is improved; the preparation method disclosed by the invention is simple, is suitable for mass production, and can be used for preparing the infrared photoelectric detector which has high light absorption ability and is high in photoelectric conversion efficiency, and a foundation is laid for applying the germanium nanocone array structure to the photoelectric detector.
Owner:HEFEI UNIV OF TECH
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