30 results about "Cryopump" patented technology

A cryopump or a "cryogenic pump" is a vacuum pump that traps gases and vapours by condensing them on a cold surface, but are only effective on some gases. The effectiveness depends on the freezing and boiling points of the gas relative to the cryopump's temperature. They are sometimes used to block particular contaminants, for example in front of a diffusion pump to trap backstreaming oil, or in front of a McLeod gauge to keep out water. In this function, they are called a cryotrap, waterpump or cold trap, even though the physical mechanism is the same as for a cryopump.