Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method

A cryopump and cryopanel technology, applied in the field of cryopump and its regeneration, can solve problems such as pressure drop, and achieve the effect of shortening regeneration time

Inactive Publication Date: 2009-07-01
CANON ANELVA CORP
View PDF3 Cites 29 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

So it takes a considerable amount of time to bring the pressure down while the pumpdown of the cryopump continues with moisture still inside it

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method
  • Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method
  • Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

[0034] refer to Figure 1-3 , a cryopump unit including a cryopump according to an embodiment of the present invention and a regeneration method of the cryopump will be described.

[0035] figure 1 is a view schematically showing the structure of the entire cryopump unit, figure 2 is a flowchart illustrating the regeneration operation, image 3 The pressure change within the pump vessel of the cryopump during regeneration operation is illustrated.

[0036] see figure 1 , a block indicated by reference numeral 10 represents a vacuum processing apparatus that performs vacuuming processing using a cryopump unit including a cryopump according to an embodiment of the present invention. A cryopump unit 11 is provided below the vacuum processing apparatus 10 . The pump container 14 of the cryopump 13 is connected to an exhaust port (not shown) provided ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump vessel has reached a set pressure higher than the water vapor pressure at 0 DEG C, a pressure rise test step of stopping the evacuation and performing a pressure rise test, and an observation step of observing residual water based on the internal pressure of the pump vessel.

Description

technical field [0001] The present invention relates to a cryopump, a cryopump unit, a vacuum processing device including the cryopump unit, and a cryopump regeneration method, and more particularly to a cryopump and a regeneration method thereof suitable for shortening regeneration time. Background technique [0002] Cryopumps are known in which a member (cryopanel) maintaining a low temperature is provided in a pump container, and the water-containing gas is vacuum-expelled by condensing or adsorbing the water-containing gas on the surface of the member (exhaust surface). In this cryopump, regeneration processing for exhausting the gas condensed in the pump to the outside of the pump container to restore the exhaust capability of the cryopump is required. A conventional technique for shortening the time required for cryopump regeneration processing (regeneration time) is described, for example, in Japanese Patent Laid-Open No. 6-346848. [0003] Japanese Patent Laid-Open ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/08
CPCF04B37/085F04B37/08
Inventor 青木一俊冈田隆弘
Owner CANON ANELVA CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap