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Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method

A cryopump and cryopanel technology, applied in the field of cryopump and its regeneration, can solve problems such as pressure drop, and achieve the effect of shortening regeneration time

Inactive Publication Date: 2009-07-01
CANON ANELVA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

So it takes a considerable amount of time to bring the pressure down while the pumpdown of the cryopump continues with moisture still inside it

Method used

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  • Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method
  • Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method
  • Cryopump, cryopump unit, vacuum processing apparatus including cryopump unit, and cryopump regeneration method

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Embodiment Construction

[0033] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

[0034] refer to Figure 1-3 , a cryopump unit including a cryopump according to an embodiment of the present invention and a regeneration method of the cryopump will be described.

[0035] figure 1 is a view schematically showing the structure of the entire cryopump unit, figure 2 is a flowchart illustrating the regeneration operation, image 3 The pressure change within the pump vessel of the cryopump during regeneration operation is illustrated.

[0036] see figure 1 , a block indicated by reference numeral 10 represents a vacuum processing apparatus that performs vacuuming processing using a cryopump unit including a cryopump according to an embodiment of the present invention. A cryopump unit 11 is provided below the vacuum processing apparatus 10 . The pump container 14 of the cryopump 13 is connected to an exhaust port (not shown) provided ...

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Abstract

A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump vessel has reached a set pressure higher than the water vapor pressure at 0 DEG C, a pressure rise test step of stopping the evacuation and performing a pressure rise test, and an observation step of observing residual water based on the internal pressure of the pump vessel.

Description

technical field [0001] The present invention relates to a cryopump, a cryopump unit, a vacuum processing device including the cryopump unit, and a cryopump regeneration method, and more particularly to a cryopump and a regeneration method thereof suitable for shortening regeneration time. Background technique [0002] Cryopumps are known in which a member (cryopanel) maintaining a low temperature is provided in a pump container, and the water-containing gas is vacuum-expelled by condensing or adsorbing the water-containing gas on the surface of the member (exhaust surface). In this cryopump, regeneration processing for exhausting the gas condensed in the pump to the outside of the pump container to restore the exhaust capability of the cryopump is required. A conventional technique for shortening the time required for cryopump regeneration processing (regeneration time) is described, for example, in Japanese Patent Laid-Open No. 6-346848. [0003] Japanese Patent Laid-Open ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/08
CPCF04B37/085F04B37/08
Inventor 青木一俊冈田隆弘
Owner CANON ANELVA CORP
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