The invention relates to a
light driven micro-fluid pump. The
light driven micro-fluid pump converts between
light energy and
mechanical energy. The
light driven micro-fluid pump comprises an outlet / inlet layer, a pump cavity layer, a micro-
wire grid array drive unit and a substrate in sequence from the bottom to top; the outlet / inlet layer is provided with an inlet and an outlet; the pump cavity layer comprises a pump cavity and a deformable vibrating diaphragm; the micro-
wire grid array drive unit comprises a micro-
wire grid array of which the period is hundreds of nanometers, the micro-wire grid array is composed of grid ridges and grid valleys, and the micro-wire grid array is a shape memory material
azobenzene liquid crystal elastomer. The light driven micro-fluid pump periodically changes the
irradiation light type and
light intensity and is capable of precisely controlling the periodic change of the pump cavity volume of the micro-fluid pump so as to generate continuous differential flow. The light driven micro-fluid pump has advantages of fast respond speed, high working frequency, small
energy consumption, large drive quantity and the like; the light driven micro-fluid pump is capable of precisely controlling the flow rate and capable of being used for the
cell separation, micro-feeding of fluid, micro-injection of
medicine, micro-chemical analysis and the like fields; the apparatus manufacturing can use an MEMS
processing technique compatible with an
IC manufacturing technique, and the apparatus manufacturing is suitable for
batch production.