Light driven micro-fluid pump

Abstract

The invention relates to a light driven micro-fluid pump. The light driven micro-fluid pump converts between light energy and mechanical energy. The light driven micro-fluid pump comprises an outlet / inlet layer, a pump cavity layer, a micro-wire grid array drive unit and a substrate in sequence from the bottom to top; the outlet / inlet layer is provided with an inlet and an outlet; the pump cavity layer comprises a pump cavity and a deformable vibrating diaphragm; the micro-wire grid array drive unit comprises a micro-wire grid array of which the period is hundreds of nanometers, the micro-wire grid array is composed of grid ridges and grid valleys, and the micro-wire grid array is a shape memory material azobenzene liquid crystal elastomer. The light driven micro-fluid pump periodically changes the irradiation light type and light intensity and is capable of precisely controlling the periodic change of the pump cavity volume of the micro-fluid pump so as to generate continuous differential flow. The light driven micro-fluid pump has advantages of fast respond speed, high working frequency, small energy consumption, large drive quantity and the like; the light driven micro-fluid pump is capable of precisely controlling the flow rate and capable of being used for the cell separation, micro-feeding of fluid, micro-injection of medicine, micro-chemical analysis and the like fields; the apparatus manufacturing can use an MEMS processing technique compatible with an IC manufacturing technique, and the apparatus manufacturing is suitable for batch production.

Description

technical field [0001] The invention relates to a light-mechanical energy conversion micro-drive device, in particular to a light-driven micro-fluid pump. Background technique [0002] Microfluidic systems include microfluidic pumps, microvalves, microsensors, microsprays, and microchannels, among which microfluidic pumps are a key device in microfluidic systems. [0003] According to the different driving methods, microfluidic pumps can be divided into piezoelectric driving type, electrostatic driving type, shape memory alloy driving type, thermal driving type and other types. The above-mentioned driving methods each have different advantages, but also have their own shortcomings. For example, the driving voltage of the piezoelectric-driven micropump is relatively high; the driving force of the electrostatic-driven micropump is small, and the deformation displacement is small; the operating frequency of the heat-driven micropump is low, which limits its output flow and bac...

AI Technical Summary

Problems solved by technology

For example, the driving voltage of the piezoelectric-driven micropump is high; the driving force of the electrostatic-driven micropump is small, and the deformation displacement is small; the operating frequency of the thermal-driven micropump is low, which limits its output flow and back pressure.

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