The invention relates to a 
light driven micro-fluid pump. The 
light driven micro-fluid pump converts between 
light energy and 
mechanical energy. The 
light driven micro-fluid pump comprises an outlet / inlet layer, a pump cavity layer, a micro-
wire grid array drive unit and a substrate in sequence from the bottom to top; the outlet / inlet layer is provided with an inlet and an outlet; the pump cavity layer comprises a pump cavity and a deformable vibrating diaphragm; the micro-
wire grid array drive unit comprises a micro-
wire grid array of which the period is hundreds of nanometers, the micro-wire grid array is composed of grid ridges and grid valleys, and the micro-wire grid array is a shape memory material 
azobenzene liquid crystal elastomer. The light driven micro-fluid pump periodically changes the 
irradiation light type and 
light intensity and is capable of precisely controlling the periodic change of the pump cavity volume of the micro-fluid pump so as to generate continuous differential flow. The light driven micro-fluid pump has advantages of fast respond speed, high working frequency, small 
energy consumption, large drive quantity and the like; the light driven micro-fluid pump is capable of precisely controlling the flow rate and capable of being used for the 
cell separation, micro-feeding of fluid, micro-injection of 
medicine, micro-chemical analysis and the like fields; the apparatus manufacturing can use an MEMS 
processing technique compatible with an 
IC manufacturing technique, and the apparatus manufacturing is suitable for 
batch production.