137results about How to "Precise control of flow rate" patented technology

The invention discloses a high-precision micro-injection pump and application of the high-precision micro-injection pump and relates to the technical field of medical instruments. The high-precision micro-injection pump solves the problems that an existing micro-injection pump is poor in adaptability and the stability is poor when syringes are clamped. The high-precision micro-injection pump comprises a shell, a display input module, a stepping motor pushing mechanism and a master control module and is characterized in that the shell is provided with a syringe tube handle clamping groove and a syringe tube bracket used for supporting a syringe tube in an attached mode, the shell is further provided with an elastic clamping mechanism, and the elastic clamping mechanism is matched with the syringe tube bracket and used for clamping and fixing the syringe tube; the elastic clamping mechanism comprises a first L-shaped support and a second L-shaped support which are arranged side by side; a displacement sensor for detecting the distance between the first L-shaped support and the second L-shaped support is arranged between the first L-shaped support and the second L-shaped support. According to the specifications of syringes, different specifications of syringe tube brackets, first clamping pieces and second clamping pieces are selected and matched, the sectional area of the syringe tube is calculated by the displacement sensor according to the distance between two different containing marks, the high-precision micro-injection pump is suitable for various specifications of syringes, the stability is good when the syringes are clamped and fixed, and the flow speed of fed medicine of the syringes can be accurately controlled.

This invention provides a method for supplying a treatment gas, comprising the step of producing a treatment gas polymerizable depending upon the temperature and the step of supplying the produced treatment gas to a treating apparatus (4) for treating an object (W) with the produced treatment gas in a predetermined manner in a reduced pressure atmosphere. In supplying the treatment gas to the treating apparatus (4), the flow rate of the treatment gas is regulated with a mass flow rate control unit (34) of a low differential pressure type which comprises a diaphragm (80) and has a proper operation range of a supply pressure below the atmospheric pressure. The above constitution can regulate the supply amount (actual flow rate) of the treatment gas polymerizable depending upon the temperature, for example, HF gas in an accurate and stable manner.

The invention discloses a multi-bed reaction device for preparing hydrogen by sodium borohydride alcoholysis. The multi-bed reaction device comprises a sodium borohydride storage tank, a flow controller, a sprayer, a catalyst reaction bed, a heat exchanger and a product recovery tank; the sodium borohydride storage tank is used for storing an alkaline sodium borohydride methanol solution; the flow controller is used for adjusting the flow velocity and flow rate of the solution; the sprayer is arranged at the top of the hydrogen production reaction tank; the catalytic reaction bed comprises at least two layers of catalyst reaction beds; the heat exchanger is used for regulating and controlling the temperature of the reaction tank. The product recovery tank is placed at the bottom of the reaction tank to collect the reactants sodium tetramethylborate for following recovery and reuse. The multi-bed reaction device is capable of improving the utilization rate of the reactants and realizing the precise control over hydrogen production quantity. The contact of the reactants with the catalyst is expanded, the liquid-solid separation is more thorough, the influence of concentration difference gradient is eliminated, furthermore the catalyst utilization rate is improved, and the cost of precious metal is reduced.