An object of the invention is to calibrate an upper
pyrometer for indirectly measuring a substrate temperature at the time of epitaxial growth in a comparatively short time and with accuracy to thereby improve the quality of an epitaxial substrate. After calibrating an upper
pyrometer by a
thermocouple mounted to a temperature calibrating
susceptor, a measured value of a lower
pyrometer is adjusted to a calibrated value of the upper pyrometer. Then, a correlation line between substrate temperature indirectly measured by the upper pyrometer at the time of epitaxial growth onto a sample substrate and
haze of a sample substrate measured immediately after epitaxial growth is set to indirectly measure a substrate temperature by the upper pyrometer at the time of epitaxial growth onto a
mass-production substrate. Moreover, substrate temperature at the time of epitaxial growth onto the
mass-production substrate is estimated by applying the
haze of the
mass-production substrate measured immediately after epitaxial growth to the correlation line and then a measured temperature of the upper pyrometer is adjusted to the estimated temperature.