9 results about "Probe calibration" patented technology

The application provides a probe calibration device, and relates to the technical field of probe measurement, which comprises a measuring scale, wherein a scale mark with linearly increasing values is arranged on the measuring scale along a first direction; a probe channel for accommodating a probe to be measured is arranged on the measuring scale, and the probe channel is parallel to the first direction; a clamping mark comprises a sliding part, a blocking part and an indicating part; the sliding part is slidably arranged on the measuring scale, and the sliding direction is parallel to the first direction; the blocking part is fixedly connected with the sliding part, and the blocking part is used for abutting against the end of the probe to be measured; the indicating part is fixedly connected with the sliding part, and the indicating part is used for indicating the scale mark; and a locking mechanism is arranged between the clamping mark and the measuring scale, and is used for locking the relative position of the clamping mark and the measuring scale. The error existing in the probe calibration in the related art is effectively reduced.

The application provides an ultrasonic probe calibration system, device and method, the system comprises: a reflection device, a collector, a processor, an excitation module and a positioning system, the processor is connected with the excitation module, the collector and the positioning system, and the positioning system and the excitation module are used to be connected with an ultrasonic probe;The processor is adapted to obtain the second position information of the ultrasonic probe based on the received first electric signal, the second electric signal and the synchronization signal, and then obtain the relative position relationship between the ultrasonic probe and the positioning system according to the first position information and the second position information of the ultrasonic probe.The operation mode of the scheme provided by the application is simpler, the stability is better, the ultrasonic imaging device is not needed, the ultrasonic image is not needed to be debugged, it is more suitable for large-scale production, and the cost is low.

The application discloses a kind of robot scanning sensor array joint calibration method, steps are as follows: build including robot, end sensor array (at least including camera and probe), laser tracker and calibration feature standard piece calibration system;Control robot drives sensor array to switch multiple calibration postures, three-dimensional pose of end target ball is measured under each posture with laser tracker, camera acquires standard piece point cloud, probe touches calibration feature point;With laser tracker measurement value as true value, combined with robot kinematics model, coordinate transformation chain is constructed, and the transformation relationship of target ball and flange, robot base coordinate system and laser tracker coordinate system is solved;Again according to transformation relationship, camera and probe calibration are completed by point cloud feature point coordinates, probe measurement data respectively.The method does not need point cloud overlap matching, gets rid of overlap rate limit, and improves camera calibration accuracy under complex working condition.

The application discloses a kind of based on Hough circle detection's ultrasonic probe calibration method and device, belong to ultrasonic image technical field.Its method includes, using ultrasonic probe scanning positioning ball, obtains two-dimensional ultrasonic image and detects two-dimensional ultrasonic image based on Hough circle, obtains the coordinate of positioning ball heart under two-dimensional ultrasonic image coordinate system;Based on electromagnetic tracker, the position coordinates of positioning ball under world coordinate system are acquired;Using the coordinate of positioning ball heart under two-dimensional ultrasonic image coordinate system, and the position coordinates under world coordinate system, constructs two-dimensional ultrasonic image coordinate system and world coordinate system conversion relationship model;According to two-dimensional ultrasonic image coordinate system and world coordinate system conversion relationship model, the conversion relationship between two-dimensional ultrasonic image coordinate system and ultrasonic probe coordinate system is solved, and the calibration of ultrasonic probe is completed.The application can realize high-precision ultrasonic probe calibration by the above method and related detection device.

This application relates to the field of semiconductor inspection technology, specifically to semiconductor wafer inspection methods and systems. In application, this application achieves fully automated execution of the entire process, including automated probe calibration, automated vector network calibration, automated vision calibration, and automated teaching, ultimately enabling automated inspection of each chip on the wafer to be inspected. Through parameter configuration, multi-dimensional calibration, vision teaching, and automated inspection, the entire wafer inspection process is automated. First, chip and probe parameters are set, then probe horizontal calibration, vector network system error calibration, and vision positioning calibration are performed sequentially. Next, chip model features are created, and pin-punch teaching positions are marked to achieve automatic chip location, precise pin punching, and power-on circuit detection. The entire execution process eliminates multi-dimensional errors such as probe posture, signal transmission, and spatial positioning, ensuring the authenticity and reliability of inspection data, improving the accuracy, efficiency, and consistency of wafer inspection, and adapting to the high-precision inspection needs of large-scale semiconductor wafers.

An ultrasonic scanning device for a reactor pressure vessel, comprising a positioning unit and an ultrasonic scanning unit (3). The positioning unit comprises a guide rail (20). The ultrasonic scanning unit (3) comprises a first base (30) and three ultrasonic scanning assemblies (31, 32, 33) integrated on the first base. The three ultrasonic scanning assemblies (31, 32, 33) respectively perform ultrasonic scanning at three positions: a nozzle safe-end weld (121), the nozzle side of a nozzle-to-shell connecting weld (122), and an inner radius region (123). The first base (30) is connected to the guide rail (20) and is movable back and forth relative to the guide rail (20) in the direction of extension of the guide rail (20). The guide rail (20) is rotatable about the central axis of the direction of extension thereof. The three ultrasonic scanning assemblies (31, 32, 33) move back and forth together with the first base (30) along the guide rail (20) to reach corresponding working positions, and rotate circumferentially along with the guide rail (20) to perform comprehensive scanning at the corresponding working positions, thereby improving the level of integration of the device. In addition, a calibration specimen (40) is disposed on a first positioning assembly (21), such that ultrasonic probe calibration for the three ultrasonic scanning assemblies (31, 32, 33) can all be performed underwater without the need for above-water calibration, thereby improving work efficiency.

The present application relates to a kind of multi-parallel pulse large current device vacuum area current measurement probe calibration device and calibration method, mainly for solving the scale factor conversion method complex in existing offline calibration method, or the existing online calibration generates low pulse current amplitude, output signal signal-to-noise ratio is extremely low, it is difficult to realize signal interpretation and other technical problems.The multi-parallel pulse large current device vacuum area current measurement probe calibration device of the present application, including shell and the energy storage capacitor and gas switch being set in shell, two current measurement devices for calibrating disc cone magnetic insulation transmission line and differential ring on insulating stack respectively, and charging assembly for charging energy storage capacitor, calibration device is connected in the load side of multi-layer insulating stack-disc cone magnetic insulation transmission line by feeding tool and backflow tool;Solved the technical problem of uneven or multi-point feeding structure complexity from the outside single point of disc cone magnetic insulation transmission line.

The application discloses a kind of phased array ultrasonic detection probe calibration devices, it is related to pipeline detection equipment calibration technical field.The calibration device includes bearing seat, is set on contrast test block;Bearing seat is opened with installation through-hole;Magnetic attraction wheel, rotatably installed in the lower side of bearing seat;Probe fixing base, slidingly set in installation through-hole, for fixing detection probe;Compression assembly, is set in the opening of installation through-hole;Always have the tendency of pushing probe fixing base in the direction close to contrast test block;First mounting arm, is set in the side wall of bearing seat;Encoder assembly, rotatably installed in first mounting arm, for detecting the displacement information of bearing seat;Encoder assembly includes the encoding wheel of axis along first direction extension;First elastic piece, two ends are respectively connected with first mounting arm and encoder assembly;First elastic piece always has the tendency of making encoding wheel move in the direction close to the side wall of contrast test block.The calibration device is used to improve the consistency and accuracy of detection probe calibration.