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5518results about "Informatics" patented technology

System and method for lithography simulation

There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of, and system for simulating, verifying, inspecting, characterizing, determining and/or evaluating the lithographic designs, techniques and/or systems, and/or individual functions performed thereby or components used therein. In one embodiment, the present invention is a system and method that accelerates lithography simulation, inspection, characterization and/or evaluation of the optical characteristics and/or properties, as well as the effects and/or interactions of lithographic systems and processing techniques. In this regard, in one embodiment, the present invention employs a lithography simulation system architecture, including application-specific hardware accelerators, and a processing technique to accelerate and facilitate verification, characterization and/or inspection of a mask design, for example, RET design, including detailed simulation and characterization of the entire lithography process to verify that the design achieves and/or provides the desired results on final wafer pattern. The system includes: (1) general purpose-type computing device(s) to perform the case-based logic having branches and inter-dependency in the data handling and (2) accelerator subsystems to perform a majority of the computation intensive tasks.
Owner:ASML NETHERLANDS BV

Method for production of a three-dimensional body

ActiveUS9073265B2Avoiding time-consuming re-calculationsAdditive manufacturing apparatusTemperatue controlMaterials scienceSupply energy
The invention concerns a method for production of a three-dimensional body by successively providing powder layers and fusing together of selected areas of said layers, which areas correspond to successive cross sections of the three-dimensional body, wherein the method comprises the following steps for at least one of said layers: applying the at least one powder layer onto a working area, and fusing together a selected area of the at least one powder layer by supplying energy from a radiation gun to the selected area. The invention is characterized in that it comprises the steps of: establishing an intended beam path that is to be used when fusing together the selected area of the at least one powder layer, calculating a temperature in the at least one powder layer along the intended beam path as a function of a specific energy deposition of an imaginary beam that is assumed to move along the intended beam path, adjusting the specific energy deposition of the imaginary beam along the intended beam path depending on the calculated temperature and on conditions set for the step of fusing together the selected area, and providing, based on the calculations and the adjustments, an operating scheme for the specific energy deposition of the real beam to be used for the intended beam path when fusing together the selected area of the at least one layer.
Owner:ARCAM AB
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