Method for supplying treatment gas, treatment gas supply system, and system for treating object
A technology for processing gases and objects, applied in thin material processing, control/regulation systems, chemical instruments and methods, etc., and can solve problems such as thermal damage to precision instruments
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[0047] Embodiments of the method for supplying processing gas, the system for supplying processing gas, and the system for processing an object to be processed according to the present invention will be described below with reference to the accompanying drawings.
[0048] figure 1 is a schematic structural view showing an example of a system for processing an object to be processed including the system for supplying processing gas and the processing apparatus according to the present invention. figure 2 It is a schematic structural view showing an example of a low differential pressure type mass flow rate control device having a diaphragm used in a processing system for processing gas according to the present invention. Here, as an example, an HF gas which is polymerizable depending on pressure and / or temperature, or whose degree of polymerization changes, is used as the process gas. In addition, as an example, an etching apparatus which performs an etching process on a to-b...
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