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1421results about "Flow control using electric means" patented technology

Cheese filling flow real-time calibration control method and system

The invention relates to the technical field of flow measurement and control, and particularly discloses a cheese filling flow real-time calibration control method and system.The cheese filling flow real-time calibration control method comprises the following steps that working condition information of cheese in a filling pipeline is collected in real time, and the working condition information comprises the temperature, the pressure, an original flow signal, the pump rotating speed and the proportional valve opening degree; dynamically selecting a filtering order according to the signal-to-noise ratio of the original flow signal, and outputting the filtered flow; and based on the acquired working condition information, predicting the dynamic viscosity of the cheese in real time through a neural network, fitting a flow-working condition relation function and calculating a target flow value. The signal-to-noise ratio of an original flow signal is dynamically adapted to optimize filtering processing, signal distortion caused by interference such as temperature drift and mechanical vibration is effectively eliminated, and the flow detection precision is improved; by means of the neural network, the dynamic viscosity of cheese is predicted in real time, the model is dynamically adjusted, the problems that traditional viscosity estimation lags behind, and the batch adaptability is poor are solved, and an accurate basis is provided for flow target value calculation.
Owner:DR CHEESE (ANHUI) FOOD TECH CO LTD

Input / output calibration of pump

A method of calibrating a pump system can include providing a pump, calibrating a pump input with an input device connected to the pump, and calibrating a pump output with an output device connected to the pump. Calibrating the pump input can include selecting a first input signal value, generating a transmitted input signal corresponding to the first input signal value, and setting a nominative pump input value to the first input signal value. Calibrating the pump output can include receiving a received output signal outputted from the pump, and setting a nominative pump output value to the first input signal value.
Owner:BLUE WHITE IND LTD

Seawater cooling control system and method

The invention provides a seawater cooling control system and method which are applied to the technical field of ocean engineering, and the seawater cooling control system comprises a cooling water well, a first temperature sensor, a water level gauge, a water suction pump, a water delivery pump, a monitoring buoy, a second temperature sensor, a flow meter and a controller. The first temperature sensor and the second temperature sensor monitor the temperature in the well and the coral reef area and the water flow speed of the flow velocity metering area respectively, the water level gauge ensures that the water volume in the well is stable, and data are analyzed in real time through the controller to generate a control instruction. The difference value between the environment temperature and the whitening threshold value, the cooling water temperature in the well and the coral reef flow speed serve as input variables, the flow requirement of the water delivery pump is dynamically calculated through a preset rule base, and self-adaptive adjustment is achieved. Through cooperative feedback of the double temperature sensors, it is ensured that the water delivery temperature is strictly controlled within a coral tolerance threshold value, and heat stress whitening is avoided. Layered water taking is combined with a fuzzy control algorithm, energy consumption is reduced compared with a traditional deepwater extraction scheme, and negative effects of shading measures on zooxanthellae are avoided.
Owner:HAINAN RES INST OF ZHEJIANG UNIV

Method and system for controlling opening degree of valve for automatically adjusting pipeline flow

The invention discloses a method and system for controlling the opening degree of a pipeline flow automatic adjusting valve, and relates to the technical field of automatic control. The method comprises the steps that real-time flow data in a pipeline and real-time pressure difference data of upstream and downstream of a valve are obtained; comparing the real-time flow data with a preset target flow to obtain a flow deviation, and generating a feedforward compensation signal by a proportional-integral-differential controller according to the flow deviation and the real-time pressure difference data; the flow deviation is input into a PID controller, and a proportional-integral-differential controller generates a feedback control signal; generating a composite control signal according to a superposition result of the feed-forward compensation signal and the feedback control signal; and the electric actuating mechanism is driven to adjust the opening degree of the valve according to the compound control signal, the actual opening degree of the valve is obtained through the position sensor, and the actual opening degree is fed back to the proportional-integral-differential controller. The invention provides a brand new solution with high robustness, high precision and low maintenance cost for industrial fluid control.
Owner:SANXIA JINSHAJIANG YUNCHUAN HYDROPOWER DEV CO LTD

Flow control method and device of mass flow meter, electronic equipment and storage medium

The invention provides a flow control method and device of a mass flowmeter, electronic equipment and a storage medium, and relates to the technical field of flow control, the method comprises the steps of monitoring a first mass flow of a target fluid at a first moment, and judging whether the first mass flow is smaller than a preset flow threshold or not; under the condition that the first mass flow is smaller than a preset flow threshold value, switching to a small flow control mode; under the small-flow control mode, PID parameters are dynamically optimized based on a set of characteristic data of the target fluid, a set of PID control parameters are obtained, and the set of characteristic data at least comprises viscosity data of the target fluid, temperature data of the target fluid and pressure data of the target fluid; and performing closed-loop control on the flow of the target fluid based on the group of PID control parameters. By implementing the technical scheme provided by the invention, the effect of improving the stability of flow control is achieved.
Owner:BEIJING JINGLIANG TECH CO LTD

Industrial steam flow intelligent adjusting system

The invention relates to the technical field of industrial process automatic control, in particular to an industrial steam flow intelligent adjusting system. According to the method, the continuous change trend of the steam state is subjected to time sequence identification, dynamic classification of the steam state can be realized under multivariate combination, so that a steam state switching path is insighted in advance, an information coupling measurement mechanism between enthalpy change and flow is introduced on the basis, and calculation of mutual information between enthalpy and flow is combined, so that the dynamic classification of the steam state is realized. Abnormal sections with adjustment deviation in actual operation are accurately recognized, the adjustment possibility is further judged according to the deviation quantification result of the target flow and the actual output flow, controllable and uncontrollable sections are effectively divided, and the rollback value domain limitation of the uncontrollable sections is set. Therefore, in the subsequent target value adjusting process, target setting of the remaining sections can be reset in a targeted mode, the priority sequence is constructed according to the adjusting time sequence and the adjusting amplitude, and dynamic sorting output of the adjusting strategy is achieved.
Owner:HUBEI KEFEI CHEMICAL NEW MATERIALS CO LTD

Gate linkage control method and device and parallel water supply and power generation system

A gate linkage control method and device and a parallel water supply and power generation system are provided. The method comprises the following steps of: acquiring current gate opening degree information of the parallel water supply and power generation system and a current water level of a third trunk canal, the current gate opening degree information comprising current first gate opening degree information and current second gate opening degree information; determining a target gate linkage control strategy of the parallel water supply and power generation system according to the current gate opening degree information of the parallel water supply and power generation system and the current water level of the third trunk canal; and controlling a gate opening degree of a target gate according to the target gate linkage control strategy of the parallel water supply and power generation system.
Owner:CHINA THREE GORGES CORPORATION +1

Self-adaptive regulation and control system for river flow

The invention relates to the technical field of river flow regulation and control, and discloses a river flow self-adaptive regulation and control system which comprises a hydrological parameter acquisition module, a water flow characteristic analysis module, a section stability analysis module, a multi-source fusion judgment module, a regulation and control parameter generation module and an additional riverbed coupling analysis and dynamic feedback execution module. The hydrological parameter acquisition module acquires parameters to judge a flow unbalance risk and triggers subsequent analysis; the water flow characteristic analysis module extracts turbulence parameters to evaluate water flow uniformity; the section stability analysis module extracts morphological parameters to predict the erosion and deposition trend; the multi-source fusion judgment module fuses the data to generate a regulation and control signal; the regulation and control parameter generation module generates regulation and control parameters according to the matching strategy; a riverbed coupling analysis module monitors a main stream and riverbed coordination correction fusion index; and the dynamic feedback execution module adjusts the acquisition period and feeds back to form a closed loop. The system realizes the real-time monitoring, risk assessment and self-adaptive regulation and control of the river flow, and improves the scientificity and accuracy of regulation and control.
Owner:JIANGSU SURVEYING & DESIGN INST OF WATER RESOURCES

Gas supply control device

A gas supply control device that supplies a gas to a processing chamber in which a workpiece is processed, includes: a first port connected to a gas source of a purge gas; a second port to which a gas source of a processing gas is connected; a collective pipe in which each of the purge gas and the processing gas supplied from the first port and the second port merges, respectively, and flow; a first flow rate controller provided between the first port and the collective pipe; and a second flow rate controller provided between the second port and the collective pipe. A gas flow path through which the purge gas flows is provided from an output side of the first flow rate controller to an input side of the second flow rate controller.
Owner:HITACHI HIGH TECH CORP

Intelligent water flow regulation and control system based on river ecological environment

The invention relates to the field of river ecological water flow regulation and control, in particular to an intelligent water flow regulation and control system based on a river ecological environment, and the system comprises a data processing module which comprises a data collection unit for collecting sensor data at a river downstream gate; the decision-making module is connected with the data processing module and comprises a data analysis unit which is used for analyzing the standardized data by utilizing a machine learning model so as to output an analysis result; the storage module is respectively connected with the data processing module and the decision making module and is used for respectively storing the sensor data, the standardized data and the analysis result; and the control module is respectively connected with the data processing module, the decision module and the storage module and is used for determining the refresh rate of the sensor data according to the fluctuation amplitude of the water flow at the downstream gate. According to the invention, the accuracy of intelligent regulation and control of the water flow is improved.
Owner:NORTH CHINA UNIV OF WATER RESOURCES & ELECTRIC POWER

Techniques to reduce risk of occlusions in drug delivery systems

Disclosed are techniques to establish a modified pump rate that mitigates the effects of a pump occlusion and enables a recommended dosage of insulin to be output by a pump mechanism over the course of a control cycle. In an example, the pump rate may be reduced by adding a calculated time interval between application of actuation commands to extend the amount of time over which insulin may be output by the pump mechanism.
Owner:INSULET CORP

Sewage treatment aeration air volume control method, device and equipment and storage medium

The invention discloses a sewage treatment aeration air volume control method, device and equipment and a storage medium, and relates to the technical field of sewage treatment.The sewage treatment aeration air volume control method comprises the steps that historical and latest real-time data are obtained and preprocessed to form historical effective sample data and latest real-time sample data, an LSTM network is used for encoding to form a feature encoding vector, and the feature encoding vector is used for encoding the historical effective sample data and the latest real-time sample data; and performing fusion with latest real-time sample data, generating and optimizing by utilizing an Actor-Critic model to form an optimized valve opening adjustment amount and an optimized adjustment dead zone threshold value of each branch, and further determining a valve adjustment action and executing the valve adjustment action through an actuator. The aeration air volume demand of the system is dynamically predicted through the LSTM network and the Actor-Critic model, a control strategy is generated and continuously optimized, meanwhile, a dead zone is determined and adjusted by optimizing an adjustment dead zone threshold value, the dead zone range is continuously and dynamically optimized, the action frequency and mechanical abrasion are reduced, and the operation and maintenance cost can be reduced under long-period use.
Owner:TIANJIN CAPITAL ENVIRONMENTAL PROTECTION GRP CO LTD

Mold cooling water supply, conveying and quantitative control method and system

The invention discloses a mold cooling water supply, conveying and quantitative control method and system. The method comprises the following steps: acquiring an initial monitoring data set; according to the initial monitoring data set, if the partition temperature exceeds a preset threshold value, the flow of the corresponding cooling channel is increased, if the partition temperature is lower than the preset threshold value, the flow is reduced, and an optimized flow distribution scheme is generated; a dynamic adjusting module is adopted to conduct temperature parameter calibration on the optimized flow distribution scheme, if the regional temperature deviation is detected, the cooling medium supply amount is corrected, and a dynamic balance control instruction is generated; humidity and dew point temperature data are obtained from an environment monitoring system, if the difference value between the humidity and the dew point temperature is smaller than a safety threshold value, a condensation prevention mechanism is triggered, and a cooling medium temperature upper limit parameter is adjusted; and executing partition cooling control according to the final regulation and control parameters, and feeding back the operation data to a database for updating a preset threshold value and optimizing algorithm parameters. Intelligent and accurate control over the mold temperature is achieved, and the product quality and the production efficiency are improved.
Owner:ZHUZHOU SIXING MACHINERY

Double-fan parallel operation control system and method based on dynamic flow balance

The invention belongs to the technical field of intelligent control, and provides a double-fan parallel operation control system and method based on dynamic flow balance, and the system comprises a flow guide assembly, an electric control valve, a flow sensor and a control assembly; the flow sensors are used for collecting air flow data at the inlets and outlets of the corresponding fan branches and sending the air flow data to the control assembly; the control assembly is used for inputting the air flow data into the three-dimensional dynamic fluid mechanics model to obtain a flow deviation value between the current air flow and the target air flow, inputting the flow deviation value into the control decision model to obtain a control instruction, and issuing the control instruction to the flow guide assembly and / or the electric adjusting valve. And the flow guide direction of the flow guide assembly and / or the opening degree of the electric control valve are / is controlled. According to the scheme, the three-dimensional dynamic fluid mechanics model and the control decision model can be combined, the accurate control instruction is obtained, and the accuracy, reliability and convenience of the double-fan parallel operation control link are improved.
Owner:KAIDE ELECTRONIC ENG DESIGN CO LTD

Flushing system of intelligent closestool and intelligent closestool

The invention discloses a flushing system of an intelligent closestool and the intelligent closestool. The flushing system comprises a water tank, a first pipeline, an annular flushing support, a detection device and a control panel. The annular flushing support is hollow and connected with the water tank through a first pipeline, the first pipeline is provided with an electric control first valve, and the support is provided with a plurality of downward water outlets. The detection device comprises a sound sensor and an infrared sensor which are arranged on the outer wall of the toilet bowl and the inner side face of the toilet lid respectively. And the control panel is provided with a controller which is electrically connected with the first valve and the detection device. The controller is provided with an excretion recognition module, a user recognition module and an automatic flushing module, the excretion recognition module recognizes excretion and types according to audio data, and the user recognition module detects the state of a user according to infrared rays. The automatic flushing module comprises a flow control unit, and the flow is adjusted according to the excretion type.
Owner:CHAOZHOU RONGDA SANITARY WARE TECH CO LTD

Distributed SCR (Selective Catalytic Reduction) denitration system and precise ammonia spraying control method thereof

The invention discloses a distributed SCR (Selective Catalytic Reduction) denitration system and an accurate ammonia spraying control method thereof, and relates to the field of flue gas removal. According to the method, a first collection point, a second collection point and a third collection point are arranged in the distributed SCR denitration system; a thermocouple array, a differential pressure sensor and a flow velocity sensor are respectively arranged at a top airflow inlet, a middle catalyst channel area and a bottom smoke outlet of the catalyst module, so that a disturbance acquisition system covering multiple areas of the tower body is formed, and gas temperature original data, differential pressure original data and flow velocity fluctuation original data are acquired. Feature extraction and normalization preprocessing are carried out on original disturbance data in a control platform to form a standardized disturbance ammonia spraying vector set, so that layered disturbance field perception and ammonia spraying fine control support are realized on the structural level, ammonia spraying configuration redundancy or insufficiency caused by local information loss is avoided, the ammonia water utilization efficiency of each module is improved, and the system performance is improved. And the ammonia spraying accuracy of the whole tower is improved.
Owner:SHANDONG LAIGANG ENERGY SAVING ENVIRONMENTAL PROTECTION ENG

System and method for controlling a flow regulating valve in a filling machine

A method for controlling a flow regulating valve (6) of a filling machine (1), controlling the flow of pourable food product, envisages: receiving an inlet pressure measurement (PIN) from a pressure sensor (14); receiving an inlet flow measurement (FIN) from a flow meter (16); determining a control signal (Sc) for controlling an operating position of the flow regulating valve (6) by combined contributions (C1, C2) of a flow feedback control module (22), receiving at its input a flow set point (FSP) and the inlet flow measurement (FIN) and generating a first control contribution (C1) indicative of a difference between the inlet flow measurement and the flow set point; and a flow feed-forward control module (20), receiving at its input the inlet pressure measurement (PIN) and the flow set point (FSP) and generating a second control contribution (C2) as a function of the flow set point and inlet pressure measurement, using pre-stored fluid-dynamic maps, which may be a result of a characterization of the flow regulating valve in a test condition. The flow feed-forward control module uses the fluid dynamics maps in a dynamically adaptive manner, depending on different operating conditions of the filling machine and / or the related pourable food product, thereby adapting to the same different operating conditions and / or the pourable food product.
Owner:TETRA LAVAL HOLDINGS & FINANCE SA

Vehicle control system and method based on air flow rate

A vehicle control system and method based on an air flow rate, control introduction of outside air based on an estimated driving current value of a blowing device, obtained through a current model preset based on a calm wind state, and an estimated air flow rate value of an inlet, obtained through an air flow rate model preset based on an outside wind state.
Owner:HYUNDAI MOTOR CO LTD +1

Self-adaptive micro-liquid adding time intelligent optimization method

The invention relates to a self-adaptive micro-liquid adding time intelligent optimization method, and belongs to the technical field of industrial process control. The method comprises the following steps: dynamically switching a rotating speed control mode according to a numerical range of an added target quantity, and calculating and outputting a target rotating speed instruction; pipeline pressure is monitored in real time, the pressure state is judged according to a graded pressure threshold system, a graded regulation and control strategy is executed, and a rotating speed fine adjustment instruction is generated; a time adjustment model is constructed based on the residual addition amount and the estimated actual flow, the addition time is dynamically estimated, and replanning of the target time and the rotating speed is triggered when the parameters are abnormal; and after adding is completed every time, operation data are automatically collected, mismatching items of the control parameters and the working conditions are analyzed and recognized through deviation traceability, and the rotating speed control parameters and the pressure regulation and control parameters are updated in a self-adaptive mode. According to the invention, intelligent optimization of the adding process is realized, and the adding precision and the system adaptability are effectively improved.
Owner:SHANGHAI MANFU MECHANICAL & ELECTRICAL ENG CO LTD

Oxygen injection control system based on dynamic environment variable compensation

The utility model provides an oxygen injection control system based on dynamic environment variable compensation, and aims to solve the non-linear problem of oxygen content control under environment variable disturbance. Comprising a main oxygen spraying pipeline, an oxygen supplementing pipeline connected with the main oxygen spraying pipeline in parallel, a PLC (Programmable Logic Controller) and a PID (Proportion Integration Differentiation) controller which are respectively connected with the main oxygen spraying pipeline and the oxygen supplementing pipeline and are used for controlling the main oxygen spraying pipeline and the oxygen supplementing pipeline, and an oxygen content measuring pipeline which is in communication connection with the PID controller, the oxygen control system selectively controls the main oxygen spraying pipeline and / or the oxygen supplementing pipeline to be opened or closed.
Owner:CHENGDU JIAODA PUER IND CO LTD

Flow fuzzy control method and system applied to flow regulating valve

The present invention relates to the field of valve control technology, and more specifically to a flow fuzzy control method and system for a flow control valve. The method first screens out a matching water flow segment that matches the water flow intensity of the current water use stage; determines the proportional gain action point and time delay of the matching water flow segment; compares the changes in the proportional gain data sequence before the proportional gain action point with the water flow data sequence after the proportional gain action point to determine the gain matching degree; combines the time delay, gain matching degree, and water flow intensity to determine the proportional gain weight of the matching water flow segment; weights the proportional gain coefficient of the current water use stage by the proportional gain weight to determine the proportional gain coefficient of the current water use stage; inputs the proportional gain coefficient and water flow data into a fuzzy controller, and the fuzzy controller adjusts the valve opening of the flow control valve. The present invention improves the control accuracy of the water use system.
Owner:XIAN QINSHEN SPECIAL CONTROL VALVE CO LTD

Double-body valve coordination control system and method for pipe network flow closed-loop regulation

The invention discloses a pipe network flow closed-loop regulation-oriented double-body valve coordination control system and method, and relates to the technical field of data acquisition control. The double-body valve coordination control system and method for pipe network flow closed-loop regulation comprises the following steps that S1, a double-body valve data set is collected to be subjected to segmented scaling normalization processing; s2, fragmented recombination and time sequence consistency screening are carried out, and quality scoring is carried out; s3, a double-body valve adjusting instruction is generated for combined control, and a control strategy state is output; and S4, establishing an associated index for each sampling time slice, and performing integrated version archiving and playback recalculation. The synchronization, stability and traceable operation and maintenance capability of cooperative closed-loop adjustment of the double-body valve are effectively improved, and the problems of asynchronization and mutual interference in cooperative control of the double-body valve are solved.
Owner:HENAN ZHONGYUAN SYST ENG CO LTD

Method for optimizing flow of water, non-transitory computer readable storage medium therefore and pool system

A method for optimizing a flow of water of a swimming pool or spa includes monitoring a parameter associated with performance of a first piece of equipment of the swimming pool or spa, such as but not limited to a heat pump, and relative to a target for the parameter. The method includes activating a bypass valve such that water bypasses the first piece equipment based on the parameter reaching or exceeding the target. The method includes controlling operation of a second piece of equipment of a circulation system responsive to activation of the bypass valve.
Owner:ZODIAC POOL CARE EURO

Mass flow controller and flow control method therefor

A mass flow controller and a flow control method therefor. The method comprises: receiving the value of a set flow point (S110); acquiring a measured value of the gas inlet pressure of a mass flow controller under an actual operation condition (S120); and on the basis of a first preset relational expression between the value of the set flow point that is calibrated when the gas inlet pressure is a standard pressure value and a driving parameter of a regulation valve of the mass flow controller, obtaining a standard value of the driving parameter that corresponds to the value of the set flow point, and on the basis of a comparative relationship between the measured value and the standard pressure value, selectively performing pressure compensation on the standard value of the driving parameter to obtain a selective compensation output value of the driving parameter and accordingly control the regulation valve, so as to adjust the opening degree of the regulation valve to an opening degree corresponding to the selective compensation output value of the driving parameter (S130). By using the method, a mass flow controller exhibits high consistency in response time under different set flow points and different gas inlet pressures, and has a fast response speed, thereby improving the control accuracy of the mass flow controller.
Owner:BEIJING AURASKY ELECTRONICS CO LTD

Time-based control system for inflatable evacuation slide

An inflation control system for an inflatable may comprise a compressed fluid source, a valve module, a temperature sensor, and a controller. The valve module is connected to the compressed fluid source and configured to control a flow of gas to the inflatable. The temperature sensor measures an ambient temperature and outputs the ambient temperature measurement. The controller is operably coupled to the valve module and configured to receive the ambient temperature measurement and determine an open-valve time based on the ambient temperature measurement, the open-valve time being a duration of time the valve module is in an open position.
Owner:GOODRICH CORP

Flood prevention system

Provided herein are embodiments of a flood prevention system. The flood prevention system may include a water line, a sewer line, and at least one floating switch sensor. The water line and sewer line may be connected to a plumbing fixture. The floating switch sensor may be installed within the sewer line and be connected to a solenoid valve.
Owner:GREGGE FORREST LEE

Wine fermentation valve array cleaning liquid flow control method and system

The invention relates to the technical field of cleaning fluid flow control, in particular to a wine fermentation valve array cleaning fluid flow control method and system, and the method comprises the following steps: building a corresponding relation among a cleaning pump operation parameter, a regulating valve opening parameter and a cleaning fluid flow, and calculating a cleaning fluid flow reference value; performing consistency evaluation on the cleaning fluid flow measurement signal, the cleaning fluid flow reference value and the pipeline pressure parameter, and when the deviation between the cleaning fluid flow measurement signal and the cleaning fluid flow reference value exceeds a preset flow deviation threshold value, and the adjusting valve opening parameter or the pipeline pressure parameter exceeds a preset threshold value range, determining the consistency of the cleaning fluid flow measurement signal and the cleaning fluid flow reference value. Determining that the cleaning fluid flow measurement signal is not credible; when it is judged that the cleaning fluid flow measurement signal is not credible, the control mode is switched, and in the switched control mode, cleaning fluid flow control is conducted according to the cleaning fluid flow reference value; and issuing a maintenance alarm. The detection accuracy can be improved.
Owner:SHANGHAI DONGLUO PURIFICATION TECH CO LTD

Intelligent control method and system for valve flow

The invention discloses an intelligent control method and system for valve flow, and relates to the technical field of valve flow control. The intelligent control method for the valve flow comprises the steps that a corresponding current water consumption mode in an industrial scene is obtained, the water consumption mode comprises a plurality of water consumption sub-modes, and each water consumption sub-mode comprises corresponding historical water consumption data; the current water consumption data is compared with historical water consumption data of all water consumption sub-modes in the current water consumption mode, a water consumption sub-mode sequence is determined, and the water consumption sub-mode sequence comprises water consumption sub-modes corresponding to multiple moments in the current water consumption time period; under the condition that it is determined that the current water consumption sub-mode at the current moment in the water consumption sub-mode sequence changes, the water consumption sub-mode sequence is used for determining the parameter adjusting coefficient of the intelligent adjusting valve; and based on the parameter adjustment coefficient, an algorithm coefficient in the target control algorithm is adjusted, so that the valve flow of the intelligent adjustment valve is determined according to the adjusted target control algorithm.
Owner:SHANDONG QIXIN INTELLIGENT CONTROL TECH CO LTD

Real-time monitoring data control method for adsorption separation and adsorption separation device

The invention discloses a real-time monitoring data control method for adsorption separation and an adsorption separation device, and relates to the technical field of adsorption and analysis regulation and control. The method comprises the following steps: setting a first cleanliness threshold value of finished gas and a second cleanliness threshold value of desorption gas; according to the current state of the first cleanliness and the current state of the second cleanliness, the regeneration medium flow of the analysis process is dynamically adjusted; or when the first cleanliness reaches the first cleanliness threshold value and the second cleanliness reaches the second cleanliness threshold value, the current adsorption process is ended, and the working mode is switched; if the second cleanliness does not reach the threshold value, the regeneration medium flow is increased until the switching condition is met. Saturation regulation is carried out by monitoring the dual states of the finished gas and the desorption gas in real time, actual working condition fluctuation can be responded in a self-adaptive mode, the quality stability of the finished gas is guaranteed, meanwhile, the problem that regeneration is insufficient or regeneration media are excessively consumed is solved, and operation energy consumption is remarkably reduced.
Owner:优之源智能科技(深圳)有限公司

Semiconductor manufacturing process high-precision flow control system and control method thereof

The invention provides a high-precision flow control system and a high-precision flow control method aiming at the gas flow control problem of silicon nitride film deposition in a semiconductor manufacturing process. In terms of the system, three gas inlet pipes convey different gases, and the explosion risk is reduced through graded mixing of a three-way pipe; the T-shaped design of the second three-way pipe utilizes gravity to assist mixing; each air inlet pipe is provided with a valve and a sensor to provide comprehensive data support; the mixer is specially designed to fully mix gas; a specific gas flow gradient is matched with a multi-stage mixing process to realize accurate control of a stoichiometric ratio; and high-precision data is provided by a specific angle of the laser detector and an advanced detection technology. The method comprises the steps of gas pipeline distribution conveying and premixing, multi-parameter fusion measurement, self-adaptive control, dynamic calibration, mixer optimization and output and the like. The silicon nitride thin film deposition quality is improved, the system safety and the flow control precision are improved, and the production cost and the safety risk are reduced.
Owner:SHENGYI SEMITECH CO LTD