A substrate
processing apparatus including a frame, a first
SCARA arm having an end
effector and being configured to extend and retract along a first axis, a second
SCARA arm having an end
effector and being configured to extend and retract along a second axis, a drive section including a splitting drive
pulley rotatably mounted to rotate at an axis of rotation of the drive section that is shared by the first and second
SCARA arms, the splitting drive
pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive
pulley is a common pulley splitting one degree of freedom of the drive section between the at least two idler pulleys so as to commonly drive the at least two idler pulleys, wherein at least one band of each respective transmission loop share a common band interface level.