Micro pump using ferrofluid or magneto-rheological fluid
a technology of ferrofluid and magnetorheological fluid, which is applied in the direction of piston pumps, positive displacement liquid engines, liquid fuel engines, etc., can solve the problems of loss of fluid pressure, fatigue at the valve connector end, and gradual wear of valves and moving parts, so as to improve flow and pump efficiency
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first embodiment
[0043] According to the present invention, a micro pump using ferro-fluid / magneto-rheological fluid is fabricated in the microelectromechanical (MEM) process and comprises a plurality of micro pump components assembled together. FIG. 1 is a cross-sectional view of a micro pump according to the present invention. Referring to FIG. 1, a silicon substrate body comprising a first body 10 and a second body 15 is provided such that an accommodating space 20 within the silicon substrate body is formed from recess portions of the first and second bodies 10 and 15. Two openings are formed at the junction gaps between the two bodies 10 and 15 to serve as an entrance 21 and an exit 22 for a working fluid on two corresponding sides of the accommodating space 20. A polydimethylisiloxane (PDMS) membrane 30 is formed in the accommodating space and located above the entrance 21 and the exit 22 to separate the accommodating space 20 into a first space 25 and a second space 26. As a result, the entra...
second embodiment
[0054] Therefore, the movable magnets 56 on the top lid 55 serve as a driving source for the micro pump of the As shown in FIGS. 6A and 6B, the two movable magnets 56 move to the center of the top lid 55 to drive two corresponding ferro-fluid / magneto-rheological fluid units 70 to shift until they approach to each other. The working fluid in the accommodating space is then squeezed by the two ferro-fluid / magneto-rheological fluid units 70, so that output of the working fluid via the exit 62 is greater than input of the working fluid via the entrance 61, and the micro pump performs a pump mode operation. On the other hand, when the movable magnets 56 are driven to repel from each other until they return to two corresponding sides of the top lid 55, the input of the working fluid via the entrance 61 is greater than the output of the working fluid via the exit 62 due to a pressure drop in the accommodating space 65. And the micro pump performs a supply mode operation to complete one pu...
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