182 results about "Micropump" patented technology

The utility model discloses a piezoelectric micropump, heat dissipation circulation system and electronic equipment, and relates to piezoelectric equipment technical field, the piezoelectric micropump comprises a pump body assembly and a driving assembly, the pump body assembly forms a plurality of one-way channels at intervals; the driving assembly comprises a first driving assembly and a second driving assembly, the first driving assembly and the second driving assembly are arranged on the two opposite sides of the pump body assembly correspondingly, and the first driving assembly and the second driving assembly define at least one first pump cavity and at least one second pump cavity correspondingly; the first pump cavity and the second pump cavity correspondingly communicate with two adjacent one-way channels and are arranged in series through the one-way channels to form a one-way flow channel, and a water inlet and a water outlet are formed in the two ends, corresponding to the one-way flow channel, of the first driving assembly and / or the second driving assembly; and under the driving of the driving assembly, the pressure intensity change in the first pump cavity is opposite to the pressure intensity change in the second pump cavity. The piezoelectric micropump provided by the utility model has the advantages of smaller volume and higher back pressure and flow.

The invention discloses a self-closed-loop microsystem air cooling heat dissipation structure based on a micropump. The self-closed-loop microsystem air cooling heat dissipation structure comprises a microchannel radiator, the micropump, a fan combination, a temperature measurement optical fiber, a control module, cooling liquid and the like. According to the invention, a heat dissipation mode of combining liquid cooling internal circulation with air cooling external circulation is adopted, the air cooling heat dissipation problem of the high-heat-flux power chip is converted into a conventional air cooling heat dissipation problem, and the air cooling heat dissipation problem of the high-heat-flux power chip in the current engineering is solved; liquid cooling internal circulation is physically isolated from the external environment, so that the risk that impurities block a flow channel in secondary heat exchange equipment is avoided, and the reliability of the equipment is improved; the micro-channel radiator adopts a three-dimensional flow channel, the size is greatly reduced, and the tree-shaped distribution network and the micro-channel heat sink are combined, so that the heat exchange capacity is improved; and a self-adaptive temperature control measure based on temperature feedback is adopted, so that the power chip works in a proper temperature range, the performance and reliability of equipment are improved, and the service life of the equipment is prolonged.

The invention provides a control method and system for preventing large-range fluctuation of pressure of a micro pump station. Belongs to the technical field of micro pump station control. The method comprises the following steps: acquiring real-time operation data of the micro pump station, performing pump station operation state analysis on the real-time operation data, constructing a micro pump station operation state model, performing pump station system dynamic characteristic analysis based on the micro pump station operation state model, and obtaining a micro pump station pressure fluctuation influence factor analysis result. By constructing a micro pump station operation state model and a pressure fluctuation influence factor analysis result, operation characteristics and pressure fluctuation reasons of the pump station can be comprehensively and deeply known, and a solid foundation is provided for subsequent control strategy formulation.

The invention discloses a liquid cooling heat dissipation system for electronic equipment, the electronic equipment comprises a shell and a heating component, the shell is internally provided with an accommodating cavity, the heating component is arranged in the accommodating cavity, and the liquid cooling heat dissipation system comprises a first liquid cooling plate arranged in the accommodating cavity and connected with the heating component; the first liquid cooling plate is provided with a first liquid inlet, a first liquid outlet and a first cavity communicated with the first liquid inlet and the first liquid outlet; the refrigeration module is arranged in the accommodating cavity and is far away from the heating component, and the refrigeration module is provided with a second liquid inlet, a second liquid outlet and a second cavity communicated with the second liquid inlet and the second liquid outlet; the micropump is provided with a liquid inlet end and a liquid outlet end which are communicated with each other, the liquid inlet end of the micropump is communicated with the first liquid inlet, and the liquid outlet end of the micropump is communicated with the second liquid inlet; the first liquid outlet is communicated with the second liquid outlet, so that the first cavity and the second cavity form a fluid channel, and a liquid cooling working medium is arranged in the fluid channel.

The invention discloses a piezoelectric micropump, electronic equipment and a driving assembly. The piezoelectric micropump comprises a driving assembly and a first pump body assembly, the driving assembly comprises a vibrating plate, a piezoelectric plate and a vibrating diaphragm plate, the vibrating plate is provided with a first side face and a second side face which are oppositely arranged in the thickness direction of the vibrating plate, one part of the vibrating diaphragm plate is connected with the first side face, and the other part of the vibrating diaphragm plate and the first side face are arranged in a spaced mode to form a first pump cavity; the piezoelectric plate is connected with the first side face in an attached mode and located in the first pump cavity, or the piezoelectric plate is connected with the second side face in an attached mode. A through hole is formed in the vibrating diaphragm plate, and the through hole is configured to allow fluid to pass through; the first pump body assembly is connected to the first side face of the vibration plate. The first pump body assembly is configured to be capable of conveying fluid towards the first pump cavity and outwards conveying fluid from the first pump cavity.

The invention relates to the technical field of medical diagnosis, and discloses an integrated nucleic acid detection method and device based on a micro-fluidic chip, the integrated nucleic acid detection device comprises a micro-fluidic chip module, a liquid control module, a temperature control module, an optical detection module and a data processing module, and the multiple modules work cooperatively to realize full-process automatic detection of a sample from splitting decomposition to detection; the micro-fluidic chip module comprises a sample treatment area, a nucleic acid extraction and purification area, a nucleic acid amplification area, a nucleic acid detection area and a waste liquid collection area which are connected through a micro-channel, and a valve is arranged at a key node. Through a fluid control mode combining centrifugal force and air pressure driving and valve combination of non-complex micro-pump micro-valves such as the dissolvable membrane valve, the temperature sensitive valve and the capillary force flow limiting valve, full-flow fluid sequential control can be achieved without integrating a plurality of micro-pump micro-valves; the problems of complex structure, high manufacturing difficulty and high cost caused by integration of multiple micro-pumps and micro-valves of the conventional pressure-driven micro-fluidic chip are solved.

The invention relates to the technical field of temperature adjustment, and provides an intelligent dynamic temperature control method and device for a liquid cooling heat dissipation module, electronic equipment and a medium. Real-time heterogeneous data fusion is carried out on a multi-source sensor network to generate a global thermal field dynamic matrix, and joint prediction processing is carried out through a TCN-BiGRU network according to the global thermal field dynamic matrix and equipment working condition parameters to obtain thermal load probability distribution data. Performing multi-target topological optimization according to the equipment flow constraint condition and the thermal load probability distribution data to obtain a cooling control vector, and performing variable gain feed-forward compensation on the cooling control vector according to the piezoelectric micropump characteristic data to generate driving voltage waveform data. According to the invention, through the multi-source sensor network, the depth sequential network, topological optimization and accurate driving of the piezoelectric micropump, more accurate, efficient and reliable liquid cooling heat dissipation control is realized.

The micropump comprises a silicon wafer, a first sealing piece and a second sealing piece, the silicon wafer is provided with a first face and a second face which are opposite to each other, a first groove used for forming a pump cavity is etched in the first face, and a plurality of grooves which meet the equal-width condition and are used for forming a moving body, an annular rib and a first valve body of an outlet valve are etched in the second face. The annular rib surrounds the moving body and is connected to a pump membrane around the moving body, and the first valve body is connected to a valve membrane of the outlet valve. The first sealing piece is fixed to the first face of the silicon wafer and covers the first groove to form a pump cavity. The second sealing sheet is fixed on the second surface of the silicon wafer. The second sealing sheet is provided with a connecting port used for connecting a driver at a position corresponding to the moving body. According to the micropump, through reasonable structural design, better etching uniformity can be obtained within shorter etching process time, the process cost is reduced, meanwhile, the product yield is improved, the situation that normal use in a low-temperature environment is affected due to the fact that much liquid is accumulated on the outlet valve is avoided, and the service life is prolonged.

A method is disclosed of fabricating a MEMS device that includes one or more wafers configured as pump or valve. The pump or valve includes an inlet port to receive fluid and an outlet port to release the fluid within the pump or valve. The method comprises growing silicon dioxide on a silicon layer of the one or more wafers to form a silicon dioxide layer on the silicon layer, depositing silicon nitride on the silicon dioxide layer of the one or more wafers to form a silicon nitride layer on the silicon dioxide layer, spinning a front side to create a pattern thereon defining an area for the pump or valve, dry etching the one or more wafers at the area for the pump or valve to remove the silicon dioxide and silicon nitride layers to define an opening for the pump or valve.

The utility model discloses a kind of general carriers suitable for a variety of special-shaped PCB mounting, belong to PCB mounting carrier technical field, including shell, the inside fixed connection of shell has carrier plate, by the carrier plate in shell forms storage space, phase-change medium is placed in the storage space;Through the solid-liquid phase change characteristic of phase-change medium, temperature control is carried out with heating coil, can make supporting component with PCB shape dynamic adjustment deployment position and height, after melting, phase-change medium allows supporting component free displacement, after cooling solidification forms stable support structure, can perfectly adapt to different curvature, concave-convex structure special-shaped PCB, solve the problem that magnetic attraction is not stable, easily affect production, the control mechanism set with heating and cooling two modes, phase-change medium can be quickly melted by heating coil, then cooling water circulation is driven by miniature pump body, can be quickly completed medium solidification, simple and convenient to use, and adjustment speed is fast.

A magnetic fluid micropump includes an annular flow channel, a fixed magnetic assembly and a driving magnetic assembly. A magnetic fluid is provided inside the annular flow channel. The fixed magnetic assembly is arranged outside the annular flow channel in a stationary manner so that a part of the magnetic fluid is attracted and fixated in the annular flow channel to form a magnetic fluid valve. An inlet tube and an outlet tube that are in communication with the annular flow channel are respectively provided on both sides of the fixed magnetic assembly along a path of the annular flow channel. The driving magnetic assembly is arranged outside the annular flow channel and configured to move along the path of the annular flow channel, so that another part of the magnetic fluid moves along the annular flow channel to form a magnetic fluid piston.

The invention discloses a multi-cavity micro-fluidic chip level instant-preparation infusion device, and belongs to the technical field of medical infusion. The micro-fluidic chip comprises a micro-fluidic chip main body, a driving assembly, a temperature control assembly and a connecting assembly, a cover plate of the micro-fluidic chip main body is hermetically attached to a chip substrate, the chip substrate is provided with independent liquid storage chambers, a micro-mixing flow channel and a liquid outlet chamber, each liquid storage chamber is communicated with the micro-mixing flow channel through the micro-flow channel, and the top of each liquid storage chamber is provided with a liquid inlet interface and a sealing plug; a micropump of the driving assembly provides driving force for the liquid storage chamber, and the control module regulates and controls the micropump and the control valve; a heating piece of the temperature control assembly is attached to the top of the chip substrate, and a temperature sensor is embedded into the chip substrate and is close to the liquid storage chamber; a liquid outlet connector of the connecting assembly is arranged on the cover plate, communicated with the liquid outlet cavity and used for being in butt joint with an external liquid conveying pipeline. Accurate proportioning, instant mixing and sterile infusion of multi-component medicine are achieved, and the infusion device is small in size, easy and convenient to operate and suitable for clinical first aid, precise medical treatment and other scenes.

The embodiment of the invention discloses a temperature control device and electronic equipment, and belongs to the technical field of temperature control. The temperature control device is used for controlling the temperature of electronic equipment with a first heat source area and a second heat source area. The temperature control device comprises a control module, a temperature detection module, a refrigeration sheet, a first micropump and a first flow channel, the first micropump is arranged on the first flow channel, the first flow channel extends to pass through the first heat source area and / or the second heat source area, and the first flow channel extends to pass through the refrigeration sheet; the temperature detection module is electrically connected with the control module and used for detecting the first temperature of the first heat source area and / or the second temperature of the second heat source area. The control module is electrically connected with the first micropump and the refrigeration sheet and used for controlling the working states of the first micropump and the refrigeration sheet according to at least one of the working mode of the equipment, the first temperature and the second temperature. According to the embodiment of the invention, the temperature control effect of the electronic equipment can be improved.

A MEMS device for a device for delivering medicament to a user, the MEMS device comprising: a first port and a second port to enable medicament to flow through the MEMS device; first and second wafers that define a cavity therebetween that communicates with the first and second ports, thereby creating a fluid path for a flow of the medicament from the first port to the second port, the first wafer configured as a membrane adapted to deform, the cavity including a first chamber that communicates with the second port; a first valve section including a first valve seat around the first port; and a first piezoelectric actuator layered on the first wafer and configured to cause the membrane to deform and close off the first valve seat, thereby preventing fluid flow through the first port.

An assembly (17) for directing a fluid flow of a dielectric oil (57) through a server (13) includes shrouds (27) and a manifold (25) including ducts (75), a recess (83), cavities (91), and channels (99). Each shroud (27) houses a radiator (43) that is connected to a conduit of a heat exchange loop. The manifold (25) is removably coupled to the shrouds (27). The ducts (75) fluidly connect to the shrouds (27) and are formed along an upper surface of the manifold (25). The recess (83) receives a lower end of a server (13). The cavities (91) are formed within the recess (83), and each cavity houses one or more micropumps (29) that circulate the dielectric oil (57) through the server (13). The channels (99) fluidly connect the micropumps (29) and the ducts (75) such that the dielectric oil (57) is transferred from the ducts (75) to the micropumps (29) through the channels (99).

The application discloses a piezoelectric micro-pump with double piezoelectric driving gas wheel type valve and a pumping method. The piezoelectric micro-pump comprises a pump body shell, a sandwich piezoelectric vibrator and two gas wheel type valves. The sandwich piezoelectric vibrator is fixed in the pump flow chamber of the pump body shell, and the pump flow chamber is divided into an air inlet cavity and an air outlet cavity. The pump body shell is provided with a series flow channel structure communicating the air inlet cavity and the air outlet cavity. The gas wheel type valve comprises a blocking layer, a diaphragm layer, a movable layer and a flow layer which are sequentially stacked along the air passing direction. A first flow hole is formed in the flow structure of the middle part of the flow layer; and a response hole is formed in the limiting structure of the middle part of the blocking layer. The application forms a rapid pressure feedback path through the response hole, realizes the rapid closing response of the valve piece, and makes the wheel type valve meet the response speed requirement of the gas pump. Meanwhile, the double piezoelectric driving elements in the sandwich piezoelectric vibrator help to improve the amplitude and reduce the input voltage.

The application relates to a sweat collection microfluidic patch based on a micropump and a preparation method thereof, the sweat collection microfluidic patch comprising a micropump, a sweat absorption layer, a sweat microfluidic layer and a sealing layer, the sweat absorption layer, the sweat microfluidic layer and the sealing layer being stacked in sequence from bottom to top; wherein the sweat absorption layer is provided with a liquid inlet, the sweat microfluidic layer is provided with a liquid inlet area, the micropump transports sweat from the liquid inlet of the sweat absorption layer to the liquid inlet area of the sweat microfluidic layer; a plurality of collection areas are further arranged on the sweat microfluidic layer, the collection areas are connected through gradient burst valves, and one of the plurality of collection areas is connected with the liquid inlet area. The microfluidic module combined with the micropump can provide long-time time-series collection of sweat by using the programmable and accurate and stable active suction of the micropump.

The invention discloses a piezoelectric micropump and electronic equipment. The piezoelectric micropump comprises a shell, a driving assembly, an adapter and a follow-up diaphragm, wherein the shell is provided with a containing cavity communicated with the outside; the driving assembly is arranged in the accommodating cavity, and the driving assembly can vibrate in a power-on state; the adapter comprises a first adapter part and a second adapter part, and the first adapter part is elastically connected with the second adapter part; the first switching part is connected with the driving assembly, and the second switching part is connected with the shell; the follow-up diaphragm is arranged in the containing cavity, the follow-up diaphragm is connected with the driving assembly, a pump cavity is defined between the follow-up diaphragm and the driving assembly, and the follow-up diaphragm is provided with a jet hole communicating with the pump cavity and the containing cavity; the follow-up diaphragm can vibrate along with the driving assembly so that fluid from the outside can be conveyed into the pump cavity through the jet flow hole, and airflow can be conveyed to the outside from the pump cavity through the jet flow hole.

The invention discloses a dynamic transmission method for finite element magnetic field data and finite volume flow field data, which takes a magnetofluid pump driving process as an object and comprises the following steps of: constructing a geometric model of a magnetofluid pump; carrying out finite element calculation on the magnetofluid micropump through Maxwell software; magnetic field data in the Maxwell software and flow field data in the Fluent software are transmitted; magnetic field source item force is added to the Fluent flow control equation; converting a coordinate system to describe a circular motion traveling wave magnetic field; a space-time function is defined, and dynamic updating of the magnetic field position is achieved; updating and interpolating the magnetic field data, and processing the position change of the dynamic magnetic field; data of a fixed magnetic field and data of a moving magnetic field are stored in different UDMs respectively, and independent control over magnetic field behaviors is achieved. The magnetic field result of the finite element method and the flow field result of the finite volume method are coupled, data transmission of finite element magnetic field data-finite volume flow field data is achieved, and dynamic magnetic field control in the flow field of the finite volume method is also achieved.

Microdosing system (100, 300) for dosing a quantity of fluid to be dispensed, comprising: a micropump (101) having an inlet (102) and an outlet (103) and designed to draw in the fluid (104, 105, 109) to be discharged through the inlet (102) and to discharge at least part of the fluid (104, 105, 109) from the outlet (103), a first flow sensor (106a, 106b) arranged on the inlet or outlet side, which has an opening (107a, 107b) and a flow meter (108a, 108b), wherein the flow meter (108a, 108b) is configured to determine the flow rate of the fluid (104, 105) passing through this opening (107a, 107b), and means (113, 313) for calibrating and / or interfering detection of the microdosing system (100, 300), wherein the means (113, 313) for calibrating and / or detecting disturbances of the microdosing system (100, 300) comprise a control device (302) configured to detect an actual sensor signal of the first flow sensor (106a, 106b) when the micropump (101) is inactive, and to correct subsequent sensor signals of the first flow sensor (106a, 106b) based on this in order to counteract sensor drift of the first flow sensor (106a, 106b) and to calibrate the microdosing system (100, 300).

The invention provides a battery thermal management method based on microfluidics and a battery, the battery comprises a battery main body and an embedded flow channel structure, and a battery management system comprises a controller, temperature sensors arranged at a plurality of first preset positions of the battery main body and micropumps arranged at a plurality of second preset positions in the flow channel structure, the method comprises the steps that a controller obtains battery cell collection temperature values, uploaded by a temperature sensor, of all first preset positions; the controller determines a thermal load result based on the acquired battery core acquisition temperature value of each first preset position and the acquired current value and the acquired voltage value of the battery; the controller sends a flow adjusting instruction to the target micropump based on the thermal load result so as to control the cooling liquid to be quantitatively and directionally transmitted in the flow channel structure, and the temperature of the battery is reduced to the target temperature. And different battery areas are independently adjusted through a micro-fluidic cooling structure embedded in the battery, so that accurate heat management of distribution according to needs is realized.

The invention discloses a piezoelectric micropump based on MEMS technology and a preparation method thereof, the main body structure of the pump comprises a third structure layer, a second structure layer, a first structure layer and a piezoelectric excitation unit which are stacked in sequence, a piezoelectric excitation power supply comprises a bottom electrode, a piezoelectric film and a top electrode which are stacked in sequence, the second structure layer is internally provided with a cavity, and the first structure layer and the top electrode are stacked in sequence. The first structural layer in the longitudinal projection area range of the port, close to the first structural layer, of the cavity is a vibrating diaphragm, and a first channel communicated with the cavity is formed in the position, close to the third structural layer, of the side wall of the second structural layer. The preparation method comprises the following steps: preparing tablets; growing and patterning a piezoelectric layer; patterning the bottom silicon; according to the embodiment of the invention, the piezoelectric driving structure and the flow channel structure are all processed, manufactured and integrally formed through a semiconductor material and a process by utilizing an MEMS (Micro Electro Mechanical System) process, the traditional bonding is replaced, and the problems of untight connection, air leakage and the like caused by assembly are avoided.

The invention discloses a heat exchange module and electronic equipment, and relates to the technical field of heat exchange.The heat exchange module comprises a shell, a working medium and a micropump, a flow channel is formed in the shell, the visible light transmittance of at least part of the area of the shell is larger than or equal to a threshold value, the flow channel is filled with the working medium, and the working medium comprises a first medium and a second medium; a liquid-liquid interface exists between the first medium and the second medium, the first medium comprises a main solvent and a surfactant, a defoaming agent and a thermochromic medium which are dissolved or dispersed in the main solvent, the mass fraction of the first medium in the working medium is 80%-90%, and the micropump is arranged in the shell, communicates with the flow channel and is used for driving the working medium in the flow channel to flow. Therefore, the liquid-liquid interface moves relative to the flow channel. The heat exchange module has the good heat dissipation performance, the working medium has the diversified flow visualization effect, and the display effect and the science and technology feeling of a product can be improved.

The utility model discloses a peristaltic pump, which belongs to the technical field of microfluid accurate transportation, aims to solve the problems of low precision and flow pulse of the existing mechanical peristaltic micropump, and comprises a micro-fluidic chip, a clamp component and a driving mechanism, wherein the clamp assembly and the driving mechanism are both connected with the shell, and the micro-fluidic chip is fixed on the outer side of the driving mechanism through the clamp assembly; a flow channel is arranged on one side, wound on the driving mechanism, of the micro-fluidic chip, and the driving mechanism is in fluctuating contact with the flow channel during pumping and is used for extruding fluid in the flow channel in a fluctuating manner; an air cavity is formed in the tail end of the flow channel, microfluid can be stored and released in real time, and pulse fluctuation of the fluid is compensated. According to the utility model, flow fluctuation real-time compensation can be carried out on fluid in the flow channel, the flow pulse error of peristaltic fluid is effectively reduced, the device has the advantages of no pulse, high precision, continuous pumping of microfluid and the like, and stable driving and control of the microfluid are met.

The present application relates to deep-sea pressure maintaining sampling technical field, disclose a kind of whole sea depth macroorganism active pressure maintaining sampling system and method, system includes sampling cylinder main body structure and active pressure compensation structure;Active pressure compensation structure includes: drive mechanism, reciprocating booster unit includes double-acting booster cylinder, variable diameter piston is arranged in booster cylinder, the diameter of high-pressure end of variable diameter piston is less than the diameter of low-pressure end, the inside of cylinder is divided into high-pressure chamber, low-pressure chamber and liquid exchange chamber, low-pressure chamber is communicated with sampling cylinder main body structure by a high-pressure water injection path, high-pressure chamber is also communicated with the outlet of liquid injection micropump by a water supplement pipeline, each control port of hydraulic control reversing valve is communicated with the outlet of liquid injection micropump, low-pressure chamber, liquid exchange chamber and high-pressure chamber by hydraulic pipeline one-to-one correspondence, compensator is communicated with the oil inlet of liquid injection micropump, liquid exchange chamber and the oil return port of hydraulic control reversing valve, realize single power source, infinite stroke's continuous, accurate pressure compensation, especially suitable for whole sea depth, large capacity macroorganism pressure maintaining sampling.

The embodiment of the invention discloses a visual nanoneedle transfection micro-fluidic chip, a preparation method and a cell transfection method.The micro-fluidic chip comprises a patterned glass nanoneedle substrate and a transparent PDMS micro-channel layer, the transparent PDMS micro-channel layer is bonded to the patterned glass nanoneedle substrate, and the transparent PDMS micro-channel layer is bonded to the patterned glass nanoneedle substrate. The patterned glass nanoneedle substrate and the transparent PDMS micro-channel layer jointly form a light-transmitting structure and are compatible with a fluorescent inverted microscope; wherein the surface of the patterned glass nanoneedle substrate is provided with a nanoneedle array of which the pinpoint height range is 700-1000nm and the pinpoint diameter range is 50-200nm; the transparent PDMS micro-channel is a micro-channel prepared from a high-transparency PDMS material, and the micro-channel comprises a channel main body, a channel inlet formed in one end of the channel main body and a channel outlet formed in the other end of the channel main body; wherein the height range of a flow channel in the flow channel main body is 10-25 microns, the width range of the flow channel is 10-100 microns, and a flow channel inlet is used for being connected with an external micro-flow pump.

The utility model discloses a liquid cooling radiator and an electronic device comprising the liquid cooling radiator, the liquid cooling radiator comprises at least one liquid cooling plate, at least one micropump and a vapor chamber, and the vapor chamber is connected with each liquid cooling plate, so that one side of each liquid cooling plate and one side of the vapor chamber are coplanar and respectively form a fluid channel; each micropump is provided with a water inlet and a water outlet, each fluid channel is correspondingly connected with one micropump, a first interface end of each fluid channel is communicated with the water inlet of the corresponding micropump, and a second interface end of each fluid channel is communicated with the water outlet of the corresponding micropump. A fluid channel capable of containing a liquid cooling working medium is formed through connection of a temperature uniforming plate and a liquid cooling plate, the liquid cooling working medium in the fluid channel circularly flows through driving of a micropump, and the circularly flowing liquid cooling working medium is in direct contact with the temperature uniforming plate, so that the liquid cooling working medium is not prone to falling off. Therefore, the heat conduction path of the vapor chamber-liquid cooling working medium-liquid cooling plate can fully take away heat, and efficient heat dissipation of the electronic equipment is realized.

Operating fluid flows in a gas circulating subsystem that comprises a room temperature part (211), an inbound line (203), and an outbound line (204) Respective cryogenically cooled sections of said inbound line (203) and said outbound line (204) are cooled below 100 K. Operating fluid is fed in an inbound direction from the room temperature part (211) towards a cold part (201, 2102, 2103) of a cold source. Operating fluid is also drawn in an outbound direction from a cold part (202, 2102, 2103) of the cold source towards said room temperature part (211). One or more mechanical micropumps (401, 503, 1001, 1002, 1601, 1602, 1802, 1902, 1903) are used in the respective cryogenically cooled section of the inbound line (203) and / or the outbound line (204) to affect the flow of operating fluid in the inbound and / or outbound direction, respectively.

The present disclosure relates to a micropump device for creating a net fluid flow along a flow direction. The device includes a fluid channel and a plurality of piezoelectric transducers arranged adjacent to the fluid channel. The piezoelectric transducers are organized into a set of at least three groups. The groups are consecutively arranged along the flow direction, and each group includes at least one piezoelectric transducer. A controller of the device is configured to actuate the piezoelectric transducers using at least three periodic electrical control signals. Each electrical control signal is associated with one group of the set. The controller is configured to consecutively delay the at least three electrical control signals, in accordance with the consecutively arranged groups of the set, to create the net flow of fluid along the flow direction.

The invention relates to the technical field of piezoelectric micropump devices, and discloses a piezoelectric micropump device based on an MEMS technology, which comprises a pump body, a pump cavity arranged in the pump body, a one-way valve arranged on one side in the pump cavity, an outlet valve arranged on the other side in the pump cavity, and a PZT film actuating structure arranged in the inner cavity of the pump cavity. According to the piezoelectric micropump device based on the MEMS technology, the pump cavity, the inlet flow channel, the outlet flow channel and the valve structure are integrally formed on the pump body through the MEMS micromachining technology, sealing packaging is achieved through the bonding or bonding technology by combining the upper diaphragm and the lower diaphragm, the integration degree and the structural stability of the device are improved, the one-way valve is arranged at the inlet end, and the one-way valve is arranged at the outlet end; a valve column can move up and down, the valve column is lifted to open an inlet channel when the pressure in a pump cavity is reduced, the valve column is pressed to close the inlet channel when the pressure is increased, and an outlet valve is arranged at an outlet end, is of a flexible diaphragm type structure and deforms downwards to open an outlet channel when the pressure in the pump cavity is increased.