400 results about "Micropump" patented technology

The invention provides a swing vibrator type piezoelectric micropump and a driving and manufacturing method thereof. The piezoelectric micropump comprises a supporting structure, a first through-flow layer, a second through-flow layer and an actuator, wherein the first through-flow layer and the second through-flow layer are arranged at the two ends of the supporting structure, and the actuator is arranged in the supporting structure. The actuator comprises two actuating units which are arranged in parallel. The actuation unit includes a substrate and a vibration element. The vibration element is fixed on the substrate; the two actuating units are of the parallel and opposite cantilever structures on the opposite sides, center stress similar to that of a conventional annular actuator structure cannot be generated in the swing gas pumping process of the two actuating units, and the service life of the piezoelectric micropump can be prolonged. Meanwhile, when different excitation signals are input into the two actuating units, the two actuating units can generate asynchronous vibration, so that reverse airflow with certain continuity is generated in the piezoelectric micropump, the effect of regularly self-cleaning the air inlet is achieved, and long-time continuous work of the piezoelectric micropump in a complex environment is achieved.

The invention discloses an acoustically enhanced driven parallel piezoelectric micropump and a driving method thereof. The input layer, the supporting structure and the output layer are sequentially arranged in a stacked mode. The device is characterized by further comprising a plurality of actuators arranged in the supporting structure. The actuators are arranged in a linear array or a matrix. And an input cavity which is connected into a whole is formed between each actuator and the input layer. And a plurality of mutually independent output cavities are formed between each actuator and the output layer. The actuator is used for pumping fluid through self vibration. The input layer is provided with a plurality of inflow structures staggered with the through-flow structures on the actuator. The output layer is provided with a plurality of outflow structures aligned with the through-flow structures on the actuator. The multiple pump flow units are connected in parallel, acoustic vibration is coupled with mechanical vibration, the multiple flow inlet structures are arranged at the multiple antinode points of acoustic resonance, flowing of fluid is further enhanced, and the air pumping efficiency is improved.

The micropump comprises a pump body, an actuator, a first base plate, a second base plate, a first sealing gasket and a second sealing gasket, the first sealing gasket is used for achieving sealing between an inlet and a liquid inlet flow channel, the second sealing gasket is used for achieving sealing between an outlet and a liquid outlet flow channel, and the first sealing gasket and the second sealing gasket are independent sealing pieces; the sealing gasket has no fixed connection relation with a sealed structure, only the first sealing gasket and the second sealing gasket deform when thermal expansion and cold contraction occur due to the influence of the environment temperature, the connection relation between the first sealing gasket and the sealed structure and the connection relation between the second sealing gasket and the sealed structure are not affected, and the sealing reliability is improved; the first sealing gasket and the second sealing gasket can generate compression deformation during compression sealing, when the environment temperature is reduced, the shrinkage amount of the first sealing gasket and the second sealing gasket is reduced, when the environment temperature is increased, the first sealing gasket and the second sealing gasket expand, the sealing gasket can be more tightly attached to a sealed structure, and the sealing effect is better.

The invention belongs to the technical field of industrial cooling, and particularly relates to a microflow cold liquid temperature control cooling system, method and device, and the system comprises a main control board which is internally provided with a main control module; the micro liquid pump is in signal connection with the main control module; and the cold liquid pipelines are arranged at two ends of the micro liquid pump. According to the system, method and device, liquid is driven to flow through the micro pump, at the moment, the liquid can absorb and dissipate heat more efficiently due to the characteristics of high heat capacity and heat conductivity, heat can be conducted and dissipated from a heating source quickly and effectively through effective cooperation of the metal heat conduction block, the heat conduction copper pipe, the heat dissipation fins and other components, and the heat dissipation efficiency is improved. Intelligent control over the system is achieved through the main control module, the flow speed of cooling liquid can be automatically adjusted according to actual temperature changes so that the optimal heat dissipation effect can be achieved, and the system state can be monitored in real time and stable operation can be ensured by adding assemblies such as a miniature temperature sensor, a pressure sensor and a flow sensor.

The utility model provides a medical pipeline arrangement device. The medical pipeline arrangement device comprises a fixing mechanism and a connecting mechanism. The fixing mechanism comprises connecting blocks and fixing buckles, the connecting blocks are distributed at equal intervals and arranged in a strip shape, and the fixing buckles are fixedly connected to one sides of the connecting blocks; the connecting mechanism comprises a fixing plate, one side of the fixing plate is fixedly connected with a first limiting plate and a second limiting plate, a screw penetrates through one side of the first limiting plate, and one end of the screw penetrates through the connecting block; the connecting blocks are arranged to be matched with the fixing buckles to fix the extension pipes of the micropump, the extension pipes are arranged through the multiple sets of connecting blocks, the extension pipes are prevented from being wound, and medicine in the extension pipes can be conveniently identified and distinguished through the transparent identification plate matched with color paper; the screw is arranged to drive a single connecting block to move, other connecting blocks can freely slide, the distance between the connecting blocks can be conveniently adjusted according to requirements, and winding caused by too small distance between extension pipes is prevented.

The utility model discloses a piezoelectric micropump, heat dissipation circulation system and electronic equipment, and relates to piezoelectric equipment technical field, the piezoelectric micropump comprises a pump body assembly and a driving assembly, the pump body assembly forms a plurality of one-way channels at intervals; the driving assembly comprises a first driving assembly and a second driving assembly, the first driving assembly and the second driving assembly are arranged on the two opposite sides of the pump body assembly correspondingly, and the first driving assembly and the second driving assembly define at least one first pump cavity and at least one second pump cavity correspondingly; the first pump cavity and the second pump cavity correspondingly communicate with two adjacent one-way channels and are arranged in series through the one-way channels to form a one-way flow channel, and a water inlet and a water outlet are formed in the two ends, corresponding to the one-way flow channel, of the first driving assembly and / or the second driving assembly; and under the driving of the driving assembly, the pressure intensity change in the first pump cavity is opposite to the pressure intensity change in the second pump cavity. The piezoelectric micropump provided by the utility model has the advantages of smaller volume and higher back pressure and flow.

The utility model provides a piezoelectric micro pump which comprises a pump body. The pump body is provided with a square cavity. The vibration isolation piece is horizontally arranged in the middle of the square cavity, the square cavity is divided into an upper cavity body and a lower cavity body which are independent, two holes are formed in the end walls of the upper cavity body and the lower cavity body in a penetrating mode respectively, and one hole is formed in the middle of the end wall of each cavity body; the one-way valve is arranged on one hole of the cavity; the actuator is attached to one face of the vibration isolation piece, and electric connection is formed on the attached face; and the deformation sheet is arranged on the other surface of the vibration isolation sheet. Compared with the prior art, the square cavity can provide a larger braking area for the actuator, so that the vibration amplitude is increased, the formed gas pressure is increased, and larger fluid pressure and flow are brought.

The invention discloses a self-closed-loop microsystem air cooling heat dissipation structure based on a micropump. The self-closed-loop microsystem air cooling heat dissipation structure comprises a microchannel radiator, the micropump, a fan combination, a temperature measurement optical fiber, a control module, cooling liquid and the like. According to the invention, a heat dissipation mode of combining liquid cooling internal circulation with air cooling external circulation is adopted, the air cooling heat dissipation problem of the high-heat-flux power chip is converted into a conventional air cooling heat dissipation problem, and the air cooling heat dissipation problem of the high-heat-flux power chip in the current engineering is solved; liquid cooling internal circulation is physically isolated from the external environment, so that the risk that impurities block a flow channel in secondary heat exchange equipment is avoided, and the reliability of the equipment is improved; the micro-channel radiator adopts a three-dimensional flow channel, the size is greatly reduced, and the tree-shaped distribution network and the micro-channel heat sink are combined, so that the heat exchange capacity is improved; and a self-adaptive temperature control measure based on temperature feedback is adopted, so that the power chip works in a proper temperature range, the performance and reliability of equipment are improved, and the service life of the equipment is prolonged.

The invention provides a control method and system for preventing large-range fluctuation of pressure of a micro pump station. Belongs to the technical field of micro pump station control. The method comprises the following steps: acquiring real-time operation data of the micro pump station, performing pump station operation state analysis on the real-time operation data, constructing a micro pump station operation state model, performing pump station system dynamic characteristic analysis based on the micro pump station operation state model, and obtaining a micro pump station pressure fluctuation influence factor analysis result. By constructing a micro pump station operation state model and a pressure fluctuation influence factor analysis result, operation characteristics and pressure fluctuation reasons of the pump station can be comprehensively and deeply known, and a solid foundation is provided for subsequent control strategy formulation.

The invention discloses a liquid cooling heat dissipation system for electronic equipment, the electronic equipment comprises a shell and a heating component, the shell is internally provided with an accommodating cavity, the heating component is arranged in the accommodating cavity, and the liquid cooling heat dissipation system comprises a first liquid cooling plate arranged in the accommodating cavity and connected with the heating component; the first liquid cooling plate is provided with a first liquid inlet, a first liquid outlet and a first cavity communicated with the first liquid inlet and the first liquid outlet; the refrigeration module is arranged in the accommodating cavity and is far away from the heating component, and the refrigeration module is provided with a second liquid inlet, a second liquid outlet and a second cavity communicated with the second liquid inlet and the second liquid outlet; the micropump is provided with a liquid inlet end and a liquid outlet end which are communicated with each other, the liquid inlet end of the micropump is communicated with the first liquid inlet, and the liquid outlet end of the micropump is communicated with the second liquid inlet; the first liquid outlet is communicated with the second liquid outlet, so that the first cavity and the second cavity form a fluid channel, and a liquid cooling working medium is arranged in the fluid channel.

The invention discloses a robot-assisted subretinal injection system which comprises a machine table, a controller is installed on the machine table, one side of the machine table is connected with a mechanical arm through a rotating assembly so that the mechanical arm can rotate horizontally, the end of the mechanical arm is rotationally connected with an angle adjusting seat, and the angle adjusting seat is movably connected with an injection platform. A clamp capable of sliding along the injection platform is arranged on the front side of the injection platform, a driving assembly is arranged in the clamp and used for pushing an injector out of the front end of the clamp or retracting the injector into the clamp, and a thrust linear motor is further arranged on the front side of the injection platform. A pressing plate used for being connected with the tail end of a push rod on the injector is installed on a main shaft of the thrust linear motor, an injection micropump is arranged on the machine table, and the injection micropump is connected with the injector through a pipeline. The problem that in the moving process of an existing eye subretina injection device, the needle point of an injector is exposed to the outer side, and potential safety hazards exist can be solved.

an integrated, modular system for automated aqueous droplet generation with high monodispersity. The system includes dynamic feedback control of droplet size and input pressure. Input pressure is generated by two piezoelectric micropumps. Droplet sizes are determined via light intensity measurement in an LED-photodiode setup. The system includes a wireless communication and has a low enough power consumption for battery-powered operation.

The utility model discloses a medicine fermentation device for biosynthesis, which is characterized in that a stirring shaft is of a hollow pipe structure, a stirring blade is of a jacket structure communicated with the inside of the stirring shaft, and a plurality of exhaust gaps are formed in the stirring blade; a rotary sealing joint is arranged at the lower end of the stirring shaft and is hermetically communicated with an air pump through an air guide pipe; wherein liquid stored in the buffering agent storage box and liquid stored in the weak base storage box are fed into the tank body through a micropump and a guide pipe respectively. According to the utility model, aeration and the stirrer are integrated together, specifically, the air pump is used for providing air for the stirring shaft, the stirring motor is used for driving the stirring shaft to rotate at the same time, and in the process that the stirring shaft drives the stirring blades to rotate, the air in the stirring blades is dispersed into the fermentation liquid through the exhaust gaps; through the hidden design of the aeration structure, the complexity of the aeration equipment is reduced, and subsequent cleaning is facilitated.

The invention discloses a piezoelectric micropump, electronic equipment and a driving assembly. The piezoelectric micropump comprises a driving assembly and a first pump body assembly, the driving assembly comprises a vibrating plate, a piezoelectric plate and a vibrating diaphragm plate, the vibrating plate is provided with a first side face and a second side face which are oppositely arranged in the thickness direction of the vibrating plate, one part of the vibrating diaphragm plate is connected with the first side face, and the other part of the vibrating diaphragm plate and the first side face are arranged in a spaced mode to form a first pump cavity; the piezoelectric plate is connected with the first side face in an attached mode and located in the first pump cavity, or the piezoelectric plate is connected with the second side face in an attached mode. A through hole is formed in the vibrating diaphragm plate, and the through hole is configured to allow fluid to pass through; the first pump body assembly is connected to the first side face of the vibration plate. The first pump body assembly is configured to be capable of conveying fluid towards the first pump cavity and outwards conveying fluid from the first pump cavity.

The invention relates to the technical field of medical diagnosis, and discloses an integrated nucleic acid detection method and device based on a micro-fluidic chip, the integrated nucleic acid detection device comprises a micro-fluidic chip module, a liquid control module, a temperature control module, an optical detection module and a data processing module, and the multiple modules work cooperatively to realize full-process automatic detection of a sample from splitting decomposition to detection; the micro-fluidic chip module comprises a sample treatment area, a nucleic acid extraction and purification area, a nucleic acid amplification area, a nucleic acid detection area and a waste liquid collection area which are connected through a micro-channel, and a valve is arranged at a key node. Through a fluid control mode combining centrifugal force and air pressure driving and valve combination of non-complex micro-pump micro-valves such as the dissolvable membrane valve, the temperature sensitive valve and the capillary force flow limiting valve, full-flow fluid sequential control can be achieved without integrating a plurality of micro-pump micro-valves; the problems of complex structure, high manufacturing difficulty and high cost caused by integration of multiple micro-pumps and micro-valves of the conventional pressure-driven micro-fluidic chip are solved.

The invention relates to the technical field of temperature adjustment, and provides an intelligent dynamic temperature control method and device for a liquid cooling heat dissipation module, electronic equipment and a medium. Real-time heterogeneous data fusion is carried out on a multi-source sensor network to generate a global thermal field dynamic matrix, and joint prediction processing is carried out through a TCN-BiGRU network according to the global thermal field dynamic matrix and equipment working condition parameters to obtain thermal load probability distribution data. Performing multi-target topological optimization according to the equipment flow constraint condition and the thermal load probability distribution data to obtain a cooling control vector, and performing variable gain feed-forward compensation on the cooling control vector according to the piezoelectric micropump characteristic data to generate driving voltage waveform data. According to the invention, through the multi-source sensor network, the depth sequential network, topological optimization and accurate driving of the piezoelectric micropump, more accurate, efficient and reliable liquid cooling heat dissipation control is realized.

The invention discloses a two-way micropump driven by a double-layer nickel-titanium-based shape memory alloy film, and relates to the technical field of microfluid transmission and control and micromachinery. The invention aims to solve the problem that an existing micropump cannot realize alternate conveying and bidirectional conveying of two different liquids or the same liquid. The device comprises a left cover plate, a gasket, a right cover plate, a first shape memory alloy diaphragm, a pressing block, a second shape memory alloy diaphragm and four copper foil sheets, and the first shape memory alloy diaphragm and the second shape memory alloy diaphragm are oppositely arranged between the right cover plate and the left cover plate in parallel. The gasket is arranged on the outer edge between the first shape memory alloy diaphragm and the second shape memory alloy diaphragm, and the pressing block is arranged in the middle between the first shape memory alloy diaphragm and the second shape memory alloy diaphragm. The outer sides of the edges of the upper portions and the lower portions of the first shape memory alloy membrane and the second shape memory alloy membrane are each provided with a copper foil piece. The invention is used for liquid delivery of the micro-flow control system.

The invention relates to the field of water quality sampling, and discloses an intelligent multi-mode automatic water quality sampling device and a control method, a mechanical arm, a servo positioning device, an electromagnetic valve, a micro pump, a cleaning device and a bar code recognition module are used for carrying out sampling, the bar code recognition module is used for recognizing bar codes on a sampling container, a sampling mode is determined according to a recognition result, and the sampling mode is controlled. The sampling position and the sampling capacity are determined according to the sampling mode, and the position of a mechanical arm is adjusted through a servo positioning device according to the sampling position; the mechanical arm carries out sampling at the sampling position within preset sampling time; collecting a water sample by using a sampling container according to the sampling capacity; after sampling, obtaining the water quality index data of the current sample; and inputting the water quality index data into a pre-trained machine learning model, and determining a water quality pollution index according to an output result of the machine learning model. Therefore, the purpose of efficient, accurate and traceable water quality sampling is achieved.

The present invention discloses a high-precision chip-type micropump wearable precision syringe, which specifically relates to the technical field of medical devices. The present invention evacuates a hydraulic liquid supply tank to a vacuum to form a negative pressure, and then the needle tip of a liquid-filled injection needle pierces a heparin cap, so that the drug driving liquid is pressed into the hydraulic liquid supply tank and squeezes the piston of the pushing unit to move to one side. The volume of the hydraulic liquid supply tank increases, and the drug driving liquid enters the micropump unit through the micropump liquid inlet hole. Since the micropump unit swings to a fixed value each time, the drug driving liquid is accurately driven and controlled, and the injection volume is accurately controlled. The piston member in the cartridge bottle is pushed forward to quantitatively push the injection liquid, and the liquid drives the liquid, so that the infusion is accurate and reliable; the implanted spring pushes the indwelling needle catheter seat to be clamped into the convex ring cavity. Afterwards, the stainless steel needle is withdrawn, leaving only the soft indwelling needle catheter in the blood vessel. Injection is performed through the indwelling needle catheter without waiting for too long, thereby reducing the discomfort and pain caused to the patient.

The present invention provides an oscillating oscillator piezoelectric micropump and a driving and manufacturing method thereof; the piezoelectric micropump comprises a supporting structure, a first flow layer and a second flow layer arranged at both ends of the supporting structure, and an actuator arranged in the supporting structure. The actuator comprises two actuating units arranged in parallel. The actuating unit comprises a substrate and a vibration element. The vibration element is fixed on the substrate; the two actuating units in the present invention are in a cantilever structure arranged in parallel and on opposite sides, and the central stress similar to that of a conventional annular actuator structure will not be generated during the oscillating pumping process, which helps to extend the service life of the piezoelectric micropump. At the same time, when different excitation signals are input to the two actuating units, the two actuating units can be made to vibrate asynchronously, thereby generating a reverse airflow with a certain degree of continuity in the piezoelectric micropump, thereby playing a role in periodic self-cleaning of the air inlet, and realizing long-term continuous operation of the piezoelectric micropump in a complex environment.

The invention discloses a thermal vacuum and thermal cycle test system for a space micropump, and aims to solve the problems that a medium leaks in a high and low temperature test process of an existing test system, the space micropump cannot operate normally after air enters a test loop, and even the test cannot be carried out. The device comprises a thermal circulation assembly, a transfer injection tank, a connecting piece, a first hand valve, a first pressure gauge, a vacuum pump, a second hand valve, a second pressure gauge, a pressure reducer and an air source, the thermal circulation assembly is connected with the first hand valve and the second hand valve through the connecting piece, the first hand valve is connected with the first pressure gauge through a connecting pipeline, and the first pressure gauge is connected with the vacuum pump through a pipeline; the second hand valve is connected with a long guide pipe connector of the transfer injection tank through a pipeline, a short guide pipe connector of the transfer injection tank is connected with a second pressure gauge through a pipeline, and the second pressure gauge is connected to a pressure reducer which is connected with an air source. The sealing device is simple in structure, easy to machine and high in sealing reliability. The device is used for high and low temperature test performance testing of the space micropump and the pump valve assembly.

The utility model relates to the technical field of lentiviral vector preparation, in particular to a lentiviral vector supernate suction device which comprises a base, a stand column fixedly arranged on the left side of the upper end face of the base, a liquid storage bottle arranged on the base on the left side of the stand column, a supporting plate fixedly arranged on the upper side of the left end face of the stand column, and a suction micropump installed on the supporting plate through bolts. By means of the design, the problems that in the prior art, when lentiviral vector supernate is sucked, repeated operation is needed, time consumption is long, operation is troublesome, efficiency is low, pollution is likely to be introduced, sucking accuracy and repeatability are poor, and the influence on experimental results is large are solved. According to the utility model, through the combination of the suction micropump and the liquid suction mechanism, supernate can be continuously sucked for transferring and dropping operation, so that the tedious steps of repeated suction, transferring and discharging in the original operation mode are avoided, the operation time is shortened, and the preparation efficiency of the lentiviral vector is improved.

The invention discloses a portable painless injection device with double piezoelectric micropumps, and belongs to the technical field of medical instruments, the portable painless injection device comprises a medicine storage assembly, a piezoelectric liquid pump, an injection microneedle, an annular elastic binding belt and a piezoelectric air pump, and a pump body is provided with a heating device; the injection micro-needle is composed of a hollow micro-needle head in a square array and a micro-needle base integrally connected with the hollow micro-needle head; the left side and the right side of the pump body are connected with an annular elastic binding belt, a flexible pressurizing air bag is arranged in the pump body, the flexible pressurizing air bag is inflated through the piezoelectric air pump, then the contact pressure between the injection microneedle and the epidermis is changed, and the heating device adjusts the temperature to control expression and release of a biological agent.

The invention relates to the technical field of microfluidics, and discloses a multi-channel electroosmosis micropump based on a liquid metal electrode technology, the multi-channel electroosmosis micropump based on the liquid metal electrode technology comprises a flexible base, the flexible base is provided with two groups of electrode channels, the two groups of electrode channels are both internally provided with liquid metal, and the flexible base is provided with a flexible electrode. A liquid metal positive electrode and a liquid metal negative electrode are formed, the flexible base is provided with a fluid inlet, a fluid outlet and a plurality of first fluid channels, the first fluid channels are communicated with the fluid inlet in parallel, and the first fluid channels are communicated with the fluid outlet in parallel. According to the invention, the problem that the size of the electro-osmosis micropump integrated by multiple fluid channels is relatively large in the prior art can be solved.

The micropump comprises a silicon wafer, a first sealing piece and a second sealing piece, the silicon wafer is provided with a first face and a second face which are opposite to each other, a first groove used for forming a pump cavity is etched in the first face, and a plurality of grooves which meet the equal-width condition and are used for forming a moving body, an annular rib and a first valve body of an outlet valve are etched in the second face. The annular rib surrounds the moving body and is connected to a pump membrane around the moving body, and the first valve body is connected to a valve membrane of the outlet valve. The first sealing piece is fixed to the first face of the silicon wafer and covers the first groove to form a pump cavity. The second sealing sheet is fixed on the second surface of the silicon wafer. The second sealing sheet is provided with a connecting port used for connecting a driver at a position corresponding to the moving body. According to the micropump, through reasonable structural design, better etching uniformity can be obtained within shorter etching process time, the process cost is reduced, meanwhile, the product yield is improved, the situation that normal use in a low-temperature environment is affected due to the fact that much liquid is accumulated on the outlet valve is avoided, and the service life is prolonged.

The invention relates to the field of electric vehicle charging piles, in particular to an outdoor electric vehicle charging pile. Comprising a charging pile shell, an opening and closing assembly is installed on the outer wall of the charging pile shell, and a charging terminal for outdoor charging is arranged on the inner wall of the bottom; an auxiliary plate is pushed to move in the direction close to the charging terminal, so that adsorption mud rubber plates abut against the outer wall of the charging terminal and extrude a fourth compression spring, numerical monitoring is conducted through a pressure sensor, and then a rotating column drives the multiple sets of adsorption mud rubber plates to be replaced to conduct impurity adsorption on the charging terminal; a micro pump sprays an ethanol solution to soften and clean impurities, and primary buffering can be carried out through the elasticity of a fourth compression spring when a concave-convex structure is met; the problem of damage to the structure is avoided while the compatible protection effect is improved, and the working effect of the electric vehicle charging pile is improved while the outdoor use effect is improved.

The utility model relates to a driving circuit assembly for a piezoelectric micropump, which belongs to the technical field of fluid transmission device driving, solves the problems of large occupied space, low integration level and insufficient reliability in the prior art, and comprises an electrode plate, a driving circuit and a driving circuit, a through conductive through hole is formed in the valve body shell, and the conductive through hole is electrically connected with the electrode plate; the circuit substrate is provided with a power supply element, and the power supply element corresponds to the conductive through hole and is electrically connected with the conductive through hole; wherein the valve body shell and the circuit substrate have the same peripheral shape and size.

The invention relates to the technical field of chip packaging heat dissipation, in particular to a micro pump which comprises a pump body, a cavity is formed in the pump body, a notch is further formed in the inner wall of the cavity of the pump body, and a piezoelectric component is arranged in the notch. After the piezoelectric component is electrified, the piezoelectric component has a first state in which the piezoelectric component extends towards the outside of the cavity along the notch to enlarge the volume of the cavity and a second state in which the piezoelectric component extends towards the inside of the cavity to shrink the volume of the cavity; when the piezoelectric component is switched between the first state and the second state, the pressure in the cavity is changed and extrudes the liquid inlet and outlet switch to make corresponding switching actions, so that liquid flows into or flows out of the cavity, the switching between the liquid inlet state and the liquid outlet state is realized, and the circulating flow of the liquid is ingeniously realized; therefore, the volume of the micro pump can be made to be very small, and the micro pump can be integrated on a chip.

A method is disclosed of fabricating a MEMS device that includes one or more wafers configured as pump or valve. The pump or valve includes an inlet port to receive fluid and an outlet port to release the fluid within the pump or valve. The method comprises growing silicon dioxide on a silicon layer of the one or more wafers to form a silicon dioxide layer on the silicon layer, depositing silicon nitride on the silicon dioxide layer of the one or more wafers to form a silicon nitride layer on the silicon dioxide layer, spinning a front side to create a pattern thereon defining an area for the pump or valve, dry etching the one or more wafers at the area for the pump or valve to remove the silicon dioxide and silicon nitride layers to define an opening for the pump or valve.

The invention provides a shielding case, a circuit board assembly and electronic equipment. The shielding case comprises a first packaging piece, a second packaging piece, a supporting piece and a piezoelectric micropump, the supporting piece is arranged in a containing cavity formed by the first packaging piece and the second packaging piece and forms a flow channel, the flow channel is filled with a heat-conducting medium, and the piezoelectric micropump is communicated with the flow channel and used for driving the heat-conducting medium to flow along the flow channel; wherein at least one of the first packaging sheet and the second packaging sheet comprises an electromagnetic shielding material, and the shielding cover is used for covering an electronic component on a circuit board and plays roles in electromagnetic shielding and heat dissipation of the electronic component. According to the shielding case provided by the embodiment of the invention, a liquid-cooled structure is adopted, the heat-conducting medium in the flow channel is driven by the piezoelectric micropump to circularly flow, heat generated when electronic components in the electronic equipment work can be quickly absorbed, the temperature of the electronic components is effectively reduced, and the system is smooth and not blocked while high-performance operation of the electronic equipment is ensured.