The present application relates to fluorinated fine separation technical field, specifically to a kind of multistage rectification and adsorption combined purification of
thionyl fluoride method and
system.The method includes: by raw gas heat exchange into first rectification column and is preliminarily separated, after eliminating low-boiling impurities, it is sent into second rectification column and is further purified, after rectification, high-purity gas is converted into liquid crude product by condensation, then it is carried out by mixed adsorbent
fixed bed and is deeply removed
impurity, and finally the purity of
thionyl fluoride product is higher than 99.999%.The
system includes raw gas feeding unit, two-stage rectification column, condenser, adsorption device and product tank, module is sequentially connected and has
temperature and pressure control and anticorrosion structure, suitable for continuous high-purity
thionyl fluoride industrialized purification production.