The invention provides a modified
molecular sieve for efficient adsorption of electronic grade
thionyl fluoride, an adsorption
system and application. The efficient adsorption
system for the electronic-grade
thionyl fluoride comprises adsorption towers which are arranged in series, wherein the upper layer in each adsorption
tower is filled with
silica gel, the middle layer in each adsorption
tower is filled with a mixture of a modified
molecular sieve /
silica gel, the lower layer in each adsorption
tower is filled with a modified
molecular sieve, and the modified molecular
sieve is formed by passivating
silicon hydroxyl on the surface of the molecular
sieve at a high temperature in an NF3
atmosphere so as to reduce
irreversible adsorption loss of SOF2. According to the modified molecular
sieve for high-efficiency adsorption of electronic grade
thionyl fluoride, the adsorption
system and the application, NF3
atmosphere and part of
silicon hydroxyl (Si-OH) on the surface of the molecular sieve are subjected to
passivation reaction at high temperature to form (Si-O-F), so that active sites on the surface are reduced,
irreversible adsorption loss of the
silicon hydroxyl and SOF2 is prevented, and the adsorption efficiency of the electronic grade thionyl fluoride is improved. And further, the yield of SOF2 can be increased by 3-5%.