The invention discloses a vaporizing device for preparing electronic grade
thionyl fluoride, which comprises a vaporizing tank, a
thionyl fluoride liquid inlet, a
thionyl fluoride gas outlet and a plurality of steam pipes, and also comprises an isolation
material distribution structure, the isolation
material distribution structure comprises a middle mounting plate, the lower end of the middle mounting plate is connected with a plurality of
material distribution pipes, the outer sides of the middle parts of the material distribution pipes are provided with lower material distribution assemblies, and the lower material distribution assemblies are connected with the steam pipes; the bottom of the material distribution
pipe is connected to a lower suction
pipe; the lower suction
pipe extends into the thionyl fluoride liquid at the bottom of the
vaporization tank; the segmented
vaporization structure comprises a plurality of containing cavities formed in the middle mounting plate, inlet holes in the bottoms of the interiors of the containing cavities are communicated with the material distribution pipes, the steam pipes are inserted into the upper portions of the containing cavities, an inner inclined hole is formed in the middle of each steam pipe, each inner inclined hole inclines outwards to form an outer guide plate, and an inner guide
assembly is arranged at the position, corresponding to the corresponding inner inclined hole, of the inner side of each outer guide plate; according to the thionyl fluoride
vaporization device, liquid generated during vaporization can be prevented from converging into thionyl fluoride, and the influence on the purity of thionyl fluoride is avoided.