84results about "Hydrogen fluoride" patented technology

The invention discloses a method for recovering valuable metals and fluorine from waste ternary lithium battery black powder. The method comprises the following steps: sulfating roasting: mixing the waste ternary lithium battery black powder with sulfuric acid, curing, and roasting the black powder; the roasted product is subjected to water leaching, and fluorine in water leaching liquid is complexed through boric acid; acidizing and evaporating the water immersion liquid, and collecting hydrofluoric acid; cooling and crystallizing the evaporation mother liquor and collecting boric acid; boric acid is recycled from crystallization mother liquor; precipitating lithium phosphate in the boron extraction raffinate; carrying out acid leaching on the water leaching residues to recover other valuable metals; and anions are extracted from the pickle liquor to realize element circulation. According to the method, through internal circulation of fluorine, boron, sulfur and other elements in the system, resource recycling of fluorine and high-selectivity and high-recovery-rate separation of lithium and other valuable metals can be achieved, and the method has the remarkable advantages of being high in valuable element recycling efficiency, small in environmental pollution and the like and is suitable for complex ion system application scenes.

The invention belongs to the field of inorganic chemical industry, and particularly relates to a method and a system for efficiently utilizing a phosphate fertilizer byproduct, the method comprises the following steps: carrying out acidolysis on fluosilicic acid with the concentration of more than or equal to 45% wt and concentrated sulfuric acid to generate a mixed solution of silicon tetrafluoride gas and fluorosulfonic acid; the mass ratio of the fluosilicic acid to the concentrated sulfuric acid is controlled to be 1: (4-15); pyrolyzing the obtained fluorosulfonic acid to generate dilute sulphuric acid, hydrogen fluoride and water vapor, forming 98% concentrated sulphuric acid from part of dilute sulphuric acid and fuming sulphuric acid, drying hydrogen fluoride to obtain crude hydrogen fluoride gas, and condensing and rectifying to obtain anhydrous hydrogen fluoride; the rest dilute sulphuric acid is partially compounded and then returned for acidolysis, and the rest dilute sulphuric acid is used for producing white carbon black and flows back to a wet-process phosphoric acid system; and circularly absorbing the obtained silicon tetrafluoride gas by using secondary concentrated fluosilicic acid to obtain fluosilicic acid with the mass concentration of more than or equal to 45%, recycling the fluosilicic acid for acidolysis reaction, and modifying the concentrated by-product silicon dioxide to obtain the high-activity white carbon black. The problems of energy consumption and cost are solved, and efficient circulation and poly-generation of fluorine and silicon resources are achieved in the whole process.

The invention provides novel azeotrope-like compositions and separation processes utilizing the same. An azeotrope-like composition comprising 1,2-difluoroethylene (HFO-1132) and hydrogen fluoride. An azeotrope-like composition comprising 1,1,2-trifluoroethylene (HFO-1123) and hydrogen fluoride. A separation process for a composition comprising at least one member selected from the group consisting of trans-1,2-difluoroethylene (HFO-1132(E)), cis-1,2-difluoroethylene (HFO-1132(Z)), and 1,1,2-trifluoroethylene (HFO-1123) and hydrogen fluoride.

Provided is a fluorine gas production method, which makes it possible to re-use a byproduct hydrogen fluoride, which is a byproduct produced during the production of a fluoride, i.e., a desired component, by reacting a raw material compound with a fluorine gas to fluorinate the raw material compound, as a raw material for the production of a fluorine gas by an electrolysis method. The fluorine gas production method comprises: a fluorination step of producing a reaction mixture comprising a main product fluoride, which is a desired component produced by fluorinating a raw material compound, and a byproduct hydrogen fluoride, which is produced as a byproduct; a separation step of separating the reaction mixture to produce a main product component containing the main product fluoride and a byproduct component containing the byproduct hydrogen fluoride; a purification step of purifying the byproduct component to produce such a recycled hydrogen fluoride component that the concentration of an organic substance contained in the byproduct component is decreased and the concentration of the byproduct hydrogen fluoride is increased; an electrolysis step of carrying out an electrolysis procedure using the recycled hydrogen fluoride component as at least a portion of an electrolyte solution to produce a fluorine gas; and an introduction step of introducing the fluorine gas produced in the electrolysis step into a reaction field for fluorination in the fluorination step.

The application discloses a vulcanization system and method for silicone rubber based on SF6 waste gas plasma reduction treatment. In the system, a mixed gas chamber, a discharge system, a vulcanization system, a separation gas chamber and a collection gas bottle are sequentially connected by gas paths, the separation gas chamber is connected with the mixed gas chamber through a dilution gas chamber, flow meters and electromagnetic valves are arranged between the mixed gas chamber and the discharge system, between the mixed gas chamber and the dilution gas chamber, and between the separation gas chamber and the dilution gas chamber, and an ultraviolet light source is used for providing light for the discharge system and the vulcanization system, wherein a catalyst is arranged in the discharge system, SF6 waste gas, hydrogen and dilution gas can be introduced into the mixed gas chamber. The application can efficiently utilize S elements in SF6 waste gas, degrades SF6 through catalysis, realizes vulcanization treatment of silicone rubber base material in real time by taking S as a vulcanizing agent while depositing S in the form of an element, finally converts S elements in SF6 waste gas into vulcanized silicone rubber in the form of vulcanization crosslinking, and achieves the purpose of resource utilization of S elements in SF6 waste gas.

An apparatus for treating a fluid including an organofluorine compound, the apparatus including: a vessel that contains a liquid with a fluoride bonding agent; a combustion chamber in fluid communication with the vessel via an outlet submerged in the liquid; an inlet configured to introduce the fluid into the combustion chamber; and a flame source configured to produce a flame in the combustion chamber to at least partially break down the organofluorine compound to form a gaseous combustion product bearing fluoride, wherein the gaseous combustion product passes from the outlet of the combustion chamber through the liquid so that the fluoride in the gaseous combustion product is at least partially bound by the fluoride bonding agent.

This invention belongs to the field of chemical technology, and particularly relates to a method for preparing electronic-grade hydrofluoric acid. The method includes: 1) setting up an electrolytic cell, with the cathode region filled with a fluorine-based raw material solution and the anode region filled with an acidic raw material solution, the anode and cathode regions separated by an anion exchange membrane; 2) electrolyzing the electrolytic cell and collecting the gas from the anode region to obtain a mixed raw material gas; 3) sequentially passing the mixed raw material gas through filtration, mixing absorption, and cooling recovery to obtain electronic-grade hydrofluoric acid. This invention achieves the synthesis and preliminary separation of hydrogen fluoride in one step via electrolysis, effectively and stably obtaining high-purity hydrogen fluoride. Post-processing rapidly achieves the preparation of ultra-high-purity electronic-grade hydrofluoric acid, and the preparation process is relatively energy-efficient, safe, and environmentally friendly.

The present application relates to a stainless steel pickling waste mixed acid treatment system and a method for recovering nitric acid and hydrofluoric acid, the stainless steel pickling waste mixed acid treatment system comprising a waste acid storage tank, an electrolytic cell, an air extraction device, a spraying device, a filtering device, a cathode acid storage tank and an anode acid storage tank, wherein the electrolytic cell is provided with a cation membrane, separating the electrolytic cell into a cathode chamber and an anode chamber, the cathode chamber being connected to the cathode acid storage tank through the corresponding air extraction device and spraying device, for guiding the hydrogen fluoride gas volatilized from the cathode chamber into the cathode acid storage tank, the anode chamber being connected to the anode acid storage tank through the corresponding air extraction device and spraying device, for guiding the nitric acid gas volatilized from the anode chamber into the anode acid storage tank, the cathode chamber and the filtering device being connected into a circulating loop, for circulating and filtering the cathode liquid to remove the precipitate in the cathode liquid, the filtering device also being connected to the cathode acid storage tank, and the anode chamber being connected to the anode acid storage tank. The above-mentioned waste mixed acid treatment system can realize the recovery of nitric acid and hydrofluoric acid in the waste mixed acid.

This invention discloses a method for preparing electronic-grade hydrofluoric acid for semiconductors, comprising the following steps: a. Liquid anhydrous hydrogen fluoride raw material is preheated and vaporized. After vaporization, the hydrogen fluoride passes sequentially through a primary sodium fluoride adsorption column and a secondary sodium fluoride adsorption column, causing some sodium fluoride to be converted into sodium hydrogen fluoride. The unadsorbed tail gas is absorbed by sodium hydroxide alkaline solution; b. The sodium fluoride adsorption column undergoes a first-stage heating process to desorb free water and silicon tetrafluoride gas, and is held at this temperature for 1 hour. The desorbed gas enters the tail gas absorption; c. The sodium fluoride adsorption column is further heated for a second-stage desorption of hydrogen fluoride, and held at this temperature for 1 hour, causing sodium hydrogen fluoride to decompose into high-temperature hydrogen fluoride gas; d. The high-temperature hydrogen fluoride gas from step c is absorbed and prepared with ultrapure water to form crude hydrofluoric acid, which is then filtered through a membrane to obtain electronic-grade hydrofluoric acid for semiconductors. This invention features a short production process, low energy consumption, and recyclable adsorption materials. Compared with traditional processes, it has lower production costs, better quality, and significant economic benefits.

The invention provides a phosphorus-fluorine chemical waste residue and wastewater co-treatment and multistage resource recovery method, which comprises the following steps: by taking phosphorus-fluorine chemical waste residues, municipal sludge and bentonite as raw materials, preparing a phosphorus-fluorine chemical waste residue-based functional filler through pretreatment, proportioning granulation and segmented roasting; the phosphorus-fluorine chemical waste residue-based functional filler is used for adsorbing phosphorus-fluorine chemical wastewater subjected to electric flocculation differential pretreatment; carrying out chemical desorption on the saturated filler by adopting an alkaline solution to realize efficient desorption and recovery of phosphorus; and transferring the dephosphorized filler into a closed device, and carrying out high-temperature hydrolysis by introducing saturated water vapor, so as to realize directional desorption and recovery of fluorine. According to the method, a full-chain technical path of treating waste with waste, deep purification, multi-stage recovery and terminal absorption is constructed, cooperative treatment of phosphorus and fluorine chemical solid waste and wastewater and high-value recovery of resources are achieved, and the industrial problems that a traditional method is high in cost and serious in secondary pollution, and resources cannot be recovered are solved.

This invention relates to a method for preparing electronic-grade hydrofluoric acid. The invention utilizes a microchannel reactor for the fluorine oxidation reaction, significantly reducing fluorine consumption and safety hazards during production. Furthermore, the microchannel reactor enhances the gas-liquid two-phase mass transfer during the oxidation reaction, further improving impurity removal and product quality. The addition of multi-effect distillation to the distillation process not only enables secondary heat utilization but also saves on the use of high-temperature heating media at the bottom of the column, effectively reducing energy consumption. In the modified liquid, DMF serves as the solvent, cobalt nitrate provides cobalt ions, and vinylguanidine provides guanidine functional groups and amino groups. Ammonia and propanethiol are used as plasma gases to introduce amino and thiol groups onto the membrane surface. These groups help improve membrane selectivity, effectively separating metal and non-metal ions, as well as acidic impurities in the raw materials.

The present application provides a method for fluorine separation and recovery from phosphate rock enhanced with a microbubble coupled silicon additive, which includes: mixing the phosphate rock, phosphoric acid, and an active silicon additive, and subjecting the mixture to reaction to obtain a slurry; subjecting the slurry to microbubble generation treatment to obtain a microbubble slurry, and subjecting the microbubble slurry to recycling and returning to the reaction, where a released volatile fluoride is recovered; and after completing the reaction, a defluorinated slurry is obtained; and subjecting the obtained defluorinated slurry to acid-decomposition reaction and then solid-liquid separation to obtain phosphoric acid and phosphogypsum. In the method provided by the present application, a synergistic effect of microbubbles and the active silicon additive is used in the phosphoric acid acid-decomposition of phosphate rock, enhancing the fluorine impurities in phosphate rock to convert into volatile fluoride SiF4 and HF, achieving the highly efficient separation and recovery of fluorine, and a recovery rate of fluorine reaches 43.9% or more; moreover, the fluorine impurities are separated from the source in the acid decomposition of phosphate rock, thereby preventing fluorine from entering the subsequent wet phosphoric acid process.

The present disclosure relates to an improved method to produce hydrofluoric acid from an aqueous sulfuric acid–hydrofluoric acid solution. Aspects of the disclosure are directed to a method where forced circulation under pressure is used to generate a hot liquid stream that is vaporized to produce a hydrofluoric acid vapor–water vapor stream comprising essentially only water and HF. Additionally, there may be a liquid recycle.

The invention discloses a device for preparing hydrogen fluoride through complex reaction and application of the device. The device comprises a rapid complexing reactor, a delayed crosslinking reactor, first solid-liquid separation equipment, a dryer and a complex decomposition tower which are connected in sequence, the rapid complexing reactor comprises one or more groups of monomer reactors which are connected into the delayed crosslinking reactor in parallel; each monomer reactor comprises a cylindrical barrel at the upper part and a conical barrel at the lower part; a material mixing component communicated with the fluosilicic acid solution feeding hole and the multi-element complexing solution feeding hole is arranged inside the cylindrical barrel; an outlet of the material mixing component is communicated with a plurality of layers of obliquely downward baffle plates which are positioned below the material mixing component and are distributed in a staggered manner along the height direction, so that the fluosilicic acid solution and the multi-element complexing solution are uniformly mixed by the material mixing component, then enter an area containing the baffle plates and are subjected to rapid complexing reaction in a downward baffling process; a discharge hole is formed in the bottom of the conical barrel and is connected with a delayed cross-linking reactor; the delayed cross-linking reactor is provided with a horizontal spiral propelling type stirring structure.

This invention discloses a method for separating fluorosilicic acid and hydrofluoric acid using an anion exchange membrane, comprising the following steps: adding a flocculant to a fluorosilicic acid-hydrofluoric acid mixture, aging it, then adding a desulfurizing agent to carry out a desulfurization reaction to obtain a mixed solution, adding the mixed solution to the feed side of an anion exchange membrane for membrane separation, and obtaining a hydrofluoric acid solution with a mass concentration of 2-30% on the clear water side after separation. This invention uses a flocculant to rapidly settle solids such as sodium fluorosilicate and potassium fluorosilicate in the fluorosilicic acid-hydrofluoric acid mixture, uses a desulfurizing agent to remove sulfuric acid, and then uses an anion exchange membrane to effectively separate fluorosilicic acid and hydrofluoric acid in the fluorosilicic acid-hydrofluoric acid mixed solution. The hydrofluoric acid separated by membrane separation has high purity and high output value, increases the utilization rate of by-product hydrofluoric acid, and reduces costs.

The invention relates to the technical field of condensers, in particular to a condenser applied to preparation of electronic hydrofluoric acid. Comprising a tank body in which a medium heat exchange system is arranged, and further comprises a top frame and a bottom frame which are arranged in the tank body, a fixed frame is arranged at the top in the tank body, a swing frame is arranged on the fixed frame, a rotating shaft is rotationally connected to the swing frame, the bottom end of the rotating shaft is fixedly connected with the top frame, a center shaft is rotationally connected to the axis position of the rotating shaft, and the center shaft is rotationally connected with the bottom frame; a spiral flow guide blade is installed on the center shaft, a brush strip is arranged on the outer edge of the spiral flow guide blade, the rotating shaft is rotationally sleeved with a reciprocating sleeve, the reciprocating sleeve is rotationally sleeved with a hollow shaft, and a power mechanism is arranged on the fixing frame. The device has the beneficial effects that by constructing a power mechanism which is driven by a single motor and has multiple cooperative transmission paths, multi-dimensional composite motion of reciprocating rotation of the condensation pipe, arc-shaped swinging of the module group, directional rotational flow of the spiral flow guide blade and rotation of the internal flow control blade is realized.

The invention relates to the technical field of preparation of inorganic fluorine-containing special gas, and discloses a preparation method for preparing anhydrous hydrogen fluoride and silicon tetrafluoride based on low-temperature decomposition of fluosilicic acid organic alkali dihydrate, which comprises the following steps: S1, mixing dilute fluosilicic acid and organic alkali for reaction: slowly dropwise adding the organic alkali into hot fluosilicic acid, and after dropwise adding is completed, performing reaction for 2-4 hours; continuously heating and stirring until complete dissolution, reducing the stirring rotating speed in a gradient manner, naturally and slowly cooling and crystallizing, and performing suction filtration and purification to obtain a fluosilicic acid organic alkali dihydrate intermediate; s2, distilling and pyrolyzing the fluosilicic acid organic alkali dihydrate intermediate at the distillation temperature of more than or equal to 140 DEG C, and decomposing to obtain hydrogen fluoride and silicon tetrafluoride; according to the method, the enrichment efficiency of the dilute fluosilicic acid can be effectively improved, the fluosilicic acid organic alkali complex containing crystal water can be decomposed with low energy consumption, and the yield of the obtained product can meet the requirement of industrial production. The method is simple to operate, short in preparation route, stable in reaction process, low in reaction temperature and suitable for industrial production.

The application provides a hydrogen fluoride waste liquid recovery device and method, the recovery device comprises a hydrogen fluoride waste liquid storage unit, a micro-nano bubble generator and a separation unit, the separation unit is an inner-outer layer structure, the outside is a shell, the inside is a separation tank, a gap is left between the two, the upper part of the separation tank is open; the hydrogen fluoride waste liquid storage unit is divided into two branches and connected with the micro-nano bubble generator and the separation tank respectively, the micro-nano bubble generator is connected with the separation tank, and a condensing pipeline is arranged at the top of the shell. The micro-nano bubble generator is used as a functional equipment to generate micro-nano bubbles and use the micro-nano bubbles as a separation medium, then the structure of the separation unit is combined, the characteristics of the micro-nano bubbles are used to enrich the hydrogen fluoride, the bubbles are broken after reaching the surface of the solution, the hydrogen fluoride is evaporated, the hydrogen fluoride solution is obtained through condensation, the recovery rate of the hydrogen fluoride is high, the device structure is simple, the process operation is simple, no chemical reagent needs to be introduced, the follow-up impurity removal process is avoided, the treatment cost is low, and the application range is wide.

A method for producing a hydrogen fluoride adsorbent having a high adsorption capacity of hydrogen fluoride including: an adsorption step of bringing hydrogen fluoride-containing gas that contains hydrogen fluoride and dilution gas for diluting the hydrogen fluoride where a concentration of the hydrogen fluoride is 0.5% by volume or more and 60% by volume or less into contact with a metal fluoride such that the hydrogen fluoride in the hydrogen fluoride-containing gas is adsorbed on the metal fluoride in a proportion of 2% by mass or more and 25% by mass or less; and a desorption step of heating the metal fluoride on which the hydrogen fluoride is adsorbed in the adsorption step in heat treatment atmosphere gas at a temperature of 240° C. or lower such that the adsorbed hydrogen fluoride is desorbed from the metal fluoride.

This invention provides an integrated process for processing ammonium fluorosulfate, a by-product generated in the production of bis(fluorosulfonyl)imides. [Solution] A process for processing ammonium fluorosulfate byproducts includes providing an ammonium fluorosulfate byproduct mainly comprising ammonium fluorosulfate and smaller amounts of fluorosulfonic acid and bis(fluorosulfonyl)imide; mixing the ammonium fluorosulfate byproduct with water; reacting the mixture of ammonium fluorosulfate byproducts and water at a hydrolysis reaction temperature to hydrolyze ammonium fluorosulfate, fluorosulfonic acid and bis(fluorosulfonyl)imide to form ammonium bicarbonate and an aqueous hydrogen fluoride solution; and separating ammonium bicarbonate from the aqueous hydrogen fluoride solution.

The present application relates to a kind of hydrofluoric acid production device.The hydrofluoric acid production device includes reaction kettle, reaction kettle includes kettle body, kettle body is equipped with discharge pipe, stop valve is equipped on discharge pipe, liquid outlet is equipped on discharge pipe, storage tank is equipped on discharge pipe, filter screen is equipped in storage tank, connecting pipe is equipped on storage tank, guide rod is connected in discharge pipe, filter cover, upper guide ring assembly and lower guide ring assembly are sleeved on guide rod, lower reset spring is equipped between lower end of lower guide ring assembly and guide rod, lower guide ring assembly and guide rod are matched by screw guide structure, upper reset spring is equipped between upper guide ring assembly and lower guide ring assembly, sealing ring is equipped on the outer end of filter cover, the lower side surface of upper guide ring and the upper side surface of lower guide ring are equipped with matching upper gear ring and lower gear ring respectively.The present application can separate the generated precipitate during reaction, reduce the influence of precipitate on reaction rate;Without additionally adding filter device, reduce equipment cost.

The invention belongs to the technical field of residual acid treatment, and particularly relates to a method for converting fluorosulfonic acid into hydrofluoric acid through residual acid steam stripping. The invention relates to a continuous chemical production system with multiple reaction kettles connected in series through residual acid steam stripping. The continuous chemical production system comprises a first reaction kettle, a second reaction kettle, a third reaction kettle, a residual acid input pipe, a water supplementing header pipe and a hydrofluoric acid discharging header pipe, the first reaction kettle, the second reaction kettle and the third reaction kettle are sequentially communicated through pipelines; and the output end of the residual acid input pipe is communicated with the first reaction kettle. The method for converting fluorosulfonic acid into hydrofluoric acid through residual acid steam stripping comprises the steps of 1) raw material pretreatment, 2) product separation and purification, 3) hydrofluoric acid gas treatment and the like. By controlling the mass ratio of residual acid to water in the first reaction kettle, the second reaction kettle and the third reaction kettle and controlling the reaction temperature and time, high-efficiency hydrolysis of fluorosulfonic acid can be realized, the content of fluorosulfonic acid in the solution after reaction can be controlled below 0.05%, and the purity of sulfuric acid is effectively improved.

A method for recovering aluminum and fluorine from aluminum electrolytes, belonging to the field of waste resource utilization, includes the following steps: S1. Mixing aluminum electrolyte with alumina, sulfuric acid or sulfate, and calcining to obtain hydrogen fluoride gas and solid 1; S2. Leaching solid 1 with water under certain conditions to obtain solid 2; S3. Adding solid 2 to an alkaline solution, reacting, and filtering to obtain calcium sulfate solid and liquid 3; S4. Adding seed crystals to liquid 3, reacting, and filtering to obtain aluminum hydroxide solid, with the filtrate returned to step S3; S5. Part of the obtained aluminum hydroxide is returned to S4 as seed crystals, and the rest is heated and calcined to obtain alumina product. This method is simple and easy to operate, effectively realizes resource recycling, produces no harmful gases, is environmentally friendly, and achieves a fluorine recovery rate of ≥99% and an aluminum recovery rate of ≥81%.

The application belongs to the technical field of inorganic chemical industry, and discloses a method for producing hydrogen fluoride from fluosilicic acid, which adopts a composite mineral catalyst composed of gamma-Al2O3 and diatomite to catalyze the reaction between fluosilicic acid and sulfuric acid at 120 DEG C to 160 DEG C, wherein the diatomite serves as a porous template for calcium sulfate crystallization, guides the generation of a loose and porous Al2O3-diatomite-calcium sulfate composite solid-phase product, and avoids mass transfer blockage; the gamma-Al2O3 provides acidic sites to accelerate the reaction. The obtained by-product can be directly used as a building material retarder, a soil conditioner or a desulfurizer, so that resource utilization is realized. The method reduces energy consumption and equipment cost, and guarantees continuous and stable operation.

The present invention relates to a process for dehalogenating inorganic non-metal halogenides, characterized by contacting the halocarbon compound with elementary oxygen in the presence of a catalyst, the catalyst being a metal catalyst.

The invention discloses a method for cyclic regeneration of potassium fluosilicate and co-production of white carbon black, and relates to the technical field of inorganic chemical industry, a closed-loop potassium element circulation system is established, potassium fluosilicate is used as a key intermediate, high-efficiency conversion of fluorine-silicon resources is realized, consumption of sylvite is remarkably reduced, and production cost is reduced. Therefore, the problems of one-way material flow, high production cost, difficulty in waste liquid treatment and the like in the traditional process are solved.

The application relates to the chemical technology field and discloses a fluorinated phosphate system hydrogen fluoride, hydrogen chloride and nitrogen separation and recovery device, which comprises a compressor, a filter, an adsorption tower, a nitrogen buffer tank, a condenser, a gas-liquid separation tank and a falling-film absorber; the output end of the compressor is connected with the filter; the output end of the filter is connected with the adsorption tower; the output end of the adsorption tower is connected with the condenser and the nitrogen buffer tank respectively; and the output end of the condenser is connected with the gas-liquid separation tank. The new process adsorption tower is used to separate tail gas, which has important significance in safety, environmental protection and economy, can thoroughly separate hydrogen fluoride, hydrogen chloride, nitrogen and other substances, and can return the hydrogen fluoride and nitrogen to the system for reuse, and can make the hydrogen chloride into liquid hydrogen chloride and high-quality hydrochloric acid for sale. The device can effectively reduce the waste acid production amount and increase the whole process economic benefits while realizing the full and reasonable utilization of resources.

A process includes providing a reactor containing a compound of the formula SiOx, wherein 0 ≤ x ≤ 2, and receiving, at the reactor, fluorinated gas. The process also includes obtaining a gaseous mixture formed at an elevated temperature in the reactor and removing silicon tetrafluoride from the gaseous mixture. An apparatus includes a reactor containing a compound of the formula SiOx, wherein 0 ≤ x ≤ 2, a component for receiving fluorinated gas at the reactor, a heating element for heating the compound of the formula SiOx and the fluorinated gas in the reactor, and a separation component for removing silicon tetrafluoride from a gaseous mixture formed in the reactor. A process of semiconductor manufacturing includes defluorinating exhaust gas using the process. A system for semiconductor manufacturing includes a set of components for carrying out the process.

The application discloses a fluorobenzene synthesis tail gas nitrogen oxide resource recycling system, which comprises a synthesis reaction kettle, wherein the upper opening of the synthesis reaction kettle is sequentially connected with a kettle cover, a deep cooling heat exchanger, a deep cooling tail gas heat exchanger and an activated carbon adsorption tower, and the activated carbon adsorption tower is connected with an exhaust tail gas pipeline through an air draught fan / return cooling fan. The system is simple, clean, environmentally friendly, stable, efficient and high in nitrogen oxide recycling efficiency.

The invention discloses a preparation method of high-purity electronic-grade hydrofluoric acid, and particularly relates to a preparation method of electronic-grade hydrofluoric acid, which comprises the following steps: in the presence of villiaumite, carrying out impurity removal reaction on industrial hydrogen fluoride, and then purifying the obtained mixed solution to obtain the electronic-grade hydrofluoric acid, the villiaumite comprises cobalt trifluoride and barium fluoride. The preparation method is mild in reaction, low in production energy consumption, easy to operate and control and capable of solving the problem of pollution caused by oxidant pulverization. And the adopted villiaumite can be reused after being fluorinated for multiple times, so that the use is safe, and the purification effect is good.