The present application relates to the technical field of
chemical distribution module, and particularly relates to a high-
viscosity liquid circulating supply device, which comprises a cabinet body, an
external liquid supply
pipe is arranged outside the cabinet body; an
external liquid storage unit is connected with a
raw material barrel outside the cabinet body through the liquid supply
pipe; and a three-in-one function module is vertically integrated in the cabinet body, which comprises a multi-stage filtering
system, a pneumatic
diaphragm pump group and a
nitrogen covering
pressure control unit. The three-in-one module of filtering, pump group and
nitrogen control is vertically integrated in the cabinet body by adopting the
external liquid storage unit connected with the standard
raw material barrel, so that the problem of large area occupied by the traditional internal
storage tank device in the clean room is solved, the space occupation is reduced, the liquid multi-parameters are monitored in real time through a five-dimensional
sensing system, the pump frequency / pressure / valve sequence is dynamically adjusted by a PLC, the whole module data is integrated through a unified communication protocol, the flow fluctuation is realized by closed-
loop control, the
nitrogen pressure is stable, the
data integration efficiency is improved, and the risk of manual operation failure is eliminated.