A preparation method of a stretchable
crystalline semiconductor nanowire based on linear design and guidance of a planar
nanowire comprises the steps that 1, standardized cleaning is conducted on glass,
silicon dioxide sheet or a
silicon wafer substrate; 2, a photoetching or
surface pattern etching technology is utilized to etch a step having a certain depth on the surface of the substrate; 3, the
crystal nanowire with the
diameter of about 130 + / - 20 nm accurately grows along a guiding channel through a planar nanowire guidance growth method to form a nanowire spring array; 4, a
metal film is treatment in a PECVD
system by utilizing reductive plasmas including
hydrogen and the like to form nano
metal catalysis particles in the range from dozens of nanometers to one
micrometer; 5, an amorphous
semiconductor layer having appropriate thickness deposits in a covering mode to serve as a precursor medium; 6, annealing growth is performed in a vacuum or nonoxidative
atmosphere, and an amorphous layer is absorbed and a crystalline nanowire structure deposits in the way at the temperature of 250 DEG C or above.