Preparation method of stretchable crystalline semiconductor nanowire based on linear design and guidance of planar nanowire

Abstract

A preparation method of a stretchable crystalline semiconductor nanowire based on linear design and guidance of a planar nanowire comprises the steps that 1, standardized cleaning is conducted on glass, silicon dioxide sheet or a silicon wafer substrate; 2, a photoetching or surface pattern etching technology is utilized to etch a step having a certain depth on the surface of the substrate; 3, the crystal nanowire with the diameter of about 130 + / - 20 nm accurately grows along a guiding channel through a planar nanowire guidance growth method to form a nanowire spring array; 4, a metal film is treatment in a PECVD system by utilizing reductive plasmas including hydrogen and the like to form nano metal catalysis particles in the range from dozens of nanometers to one micrometer; 5, an amorphous semiconductor layer having appropriate thickness deposits in a covering mode to serve as a precursor medium; 6, annealing growth is performed in a vacuum or nonoxidative atmosphere, and an amorphous layer is absorbed and a crystalline nanowire structure deposits in the way at the temperature of 250 DEG C or above.

Description

1. Technical Field [0001] The invention relates to the field of flexible and stretchable electronics and devices, and relates to a method for using a channel to guide the growth of planar nanowires on a substrate, and through a micromachining process, to produce a spring structure crystalline nanowire with flexible and stretchable properties . In particular, it is a method for channel-guided self-positioning self-directed growth, transfer, and electrical integration of planar semiconductor nanowires to prepare spring structure crystalline nanowires. 2. Technical background [0002] With the development of the contemporary electronic display industry, flexible and stretchable electronic devices (especially display devices) are more likely to meet actual application requirements and their own flexible material characteristics. They are playing more and more important roles in modern technology, national economy and daily life. An increasingly important role, in this research field...

AI Technical Summary

Problems solved by technology

[0005] The growth of materials with stretchable crystalline nanowire spring structure is the basis of flexible and stretchable electronic devices, and the existing technology does not have a good way to solve it

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