The application discloses a
closed loop process for synchronously increasing the value of
silicon and
fluorine components in
silicon tetrafluoride, and belongs to the technical field of
fluorine-containing
silicon byproduct
resource utilization. The steps are as follows: 1) mixing
anhydrous alcohol with
triethylamine, and introducing
silicon tetrafluoride gas at 0-30 DEG C to generate
alkyl orthosilicate and
triethylamine monohydrofluoride; 2) distilling the reaction liquid to recover
alcohol, performing vacuum rectification to obtain
alkyl orthosilicate product, and separating to obtain
triethylamine monohydrofluoride; 3) adding triethylamine monohydrofluoride into water, and performing heating
reflux reaction with inorganic alkali or
basic oxide to separate to obtain triethylamine crude product and fluorinated
metal salt; 4) after
dehydration rectification, the triethylamine crude product is recycled to step 1) with recovered
alcohol; and the fluorinated
metal salt is post-treated to obtain high-purity fluorinated
metal salt. The process has low
reaction temperature, high
alkyl orthosilicate yield, recyclable triethylamine, all
fluorine solidified into high-value-added products, no three-waste emissions, and can be continuously industrialized.