The invention belongs to the field of
chemical engineering, and particularly relates to a preparation method of an electronic-grade
ammonium fluoride solution. The method comprises the following steps: taking a
solid-state
ammonia source and
hydrogen fluoride as a
solid-phase
raw material and a gas-phase
raw material respectively, putting the
solid-state
ammonia source into a reaction container, taking
inert gas as carrier gas, mixing the carrier gas with
hydrogen fluoride gas to form reaction gas, and heating the reaction gas; introducing the reaction gas into the reaction container to be in contact with a solid
ammonia source to carry out temperature-controlled solid-gas
contact reaction; in the reaction process, the temperature of the reaction container is monitored, introduction of
hydrogen fluoride is stopped and the carrier gas is continuously introduced after the reaction container starts to be cooled, and after continuous cooling, the reaction container is stopped and a solid-phase product is recovered; and preparing the recovered solid-phase product into an electronic-grade
ammonium fluoride solution with a
target concentration according to requirements. The novel solid-gas contact
thermal reaction method is adopted, the preparation difficulty and equipment requirements of the electronic-grade
ammonium fluoride solution are effectively reduced, operation is convenient, meanwhile, the safety of the preparation process is higher, and the
utilization rate of raw materials is higher.