792 results about "Vacuum ultraviolet" patented technology

In an optical system measuring sample characteristics, by reducing the amount of ambient absorbing gas or gases and moisture present in at least a portion of the illumination and detection paths experienced by vacuum ultraviolet (VUV) radiation used in the measurement process, the attenuation of such wavelength components can be reduced. Such reduction can be accomplished by a process without requiring the evacuation of all gases and moisture from the measurement system. In one embodiment, the reduction can be accomplished by displacing at least some of the absorbing gas(es) and moisture present in at least a portion of the measuring paths so as to reduce the attenuation of VUV radiation. In this manner, the sample does not need to be placed in a vacuum, thereby enhancing system throughput.

A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.

Several methods are disclosed for the generation of coherent short-wavelength electromagnetic radiation through optical nonlinear frequency mixing means. The invention involves several stages of efficient nonlinear frequency conversion to shift the output of high-power infra-red fiber-lasers into the vacuum ultraviolet (VUV). The described laser source architecture is designed around non-critically phase-matched (NCPM) sum-frequency mixing (SFM) interactions in the nonlinear crystal CLBO. The NCPM interaction is an optimum condition for bulk frequency conversion of cw radiation because it allows tight focusing of the input laser radiation without Poynting vector walk-off, thereby increasing the non-linear drive significantly. The sub-200-nm output wave is generated from SFM of a long-wave IR laser field and a short-wave UV laser field. The long-wave laser beam may be derived directly from a rare-earth-doped fiber laser, whereas the short-wavelength UV beam is provided as the fourth frequency harmonic of a second rare-earth-doped fiber laser system.

In a device having an anode electrode, an organic EL layer, and a cathode electrode formed on a substrate in this order from a main surface side of the substrate, and an encapsulating film provided on the substrate so as to cover the emission layer, the encapsulating film includes a laminated film obtained by alternately laminating buffer films serving as flattening films and barrier films having high moisture barrier property, and the flattening film and the barrier film include a silicon oxynitride film. In the manufacturing process of the device, the buffer film including silicon oxynitride is formed by an optical CVD method using vacuum ultraviolet light, and in this process, radical irradiation by remote plasma is performed during the irradiation of the vacuum ultraviolet light.

An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.

Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a differential purging subsystem. The first optical subsystem performs measurements using vacuum ultraviolet light. This system also includes a second optical subsystem, which is disposed within a non-purged environment. The second optical subsystem performs measurements using non-vacuum ultraviolet light. Another system includes two or more optical subsystems configured to perform measurements of a specimen using vacuum ultraviolet light. The system also includes a purging subsystem configured to maintain a purged environment around the two or more optical subsystems. The purging subsystem is also configured to maintain the same level of purging in both optical subsystems. Some systems also include a cleaning subsystem configured to remove contaminants from a portion of a specimen prior to measurements at vacuum ultraviolet wavelengths.

The invention relates to a storage photoionization ion migration mass spectrum, mainly solving the problems of the complex line spectrum measured and weaker signals obtained by adopting radioactive component as ionization source. It includes acceleration grid electrode, ionization light source, sampling mouth, ionization region, drift region and ion collecting plate, and its character: the ionization light source is vacuum ultraviolet lamp, it sets an ion storage region structure between the ionization and drift regions to replace the ion gate. It has ion storing function, largely enhances monitoring sensitivity, clear migration mass spectrum chart of the matter to be measured, reduces influence of noise and enhances collecting efficiency.

The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.

A design and readout of a xenon detection medium based device, which provides improved spectroscopic performance compared to currently commercially available devices. To achieve energy resolution improvement, a method to accurately measure radial spatial position for interacting events within a HPXe cylindrical detector is described using the plan as shown in FIG. 4. This is accomplished by utilization of light generated both at the gamma interaction site and at the collection point near the anode wire of the cylindrical detector. These light flashes are detected by a VUV photon detector. Light transmission is facilitated by incorporating a vacuum ultraviolet (VUV) light transparent window at least one end of the cylindrical ionization detector. With the known electron drift velocity in HPXe, the time between these two photopulses is sufficient to accurately determine the radial coordinate. Consequently, correction by electronic means for the electrostatic pulse dispersion using the expression graphed in FIG. 2 can be achieved in order to approach the true intrinsic energy resolution limit for HPXe.

Various systems for measurement of a specimen are provided. One system includes an optical subsystem configured to perform measurements of a specimen using vacuum ultraviolet light and non-vacuum ultraviolet light. This system also includes a purging subsystem that is configured to maintain a purged environment around the optical subsystem during the measurements. Another system includes a cleaning subsystem configured to remove contaminants from a specimen prior to measurement. In one embodiment, the cleaning subsystem may be a laser-based cleaning subsystem that is configured to remove contaminants from a localized area on the specimen. The system also includes an optical subsystem that is configured to perform measurements of the specimen using vacuum ultraviolet light. The optical subsystem is disposed within a purged environment. In some embodiments, the system may include a differential purging subsystem that is configured to provide the purged environment for the optical subsystem.

Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from 140 to 186 nanometers.

Disclosed are photo or electron beam polymerizable compositions, and preparation thereof and devices containing them. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 157 nm lithographic tools.

There is provided a novel fluorine-containing polymer having an acid-reactive group which has a high transparency against energy rays (radioactive rays) in a vacuum ultraviolet region (157 nm), and further there are provided a material for fluorine-containing base polymer prepared from the polymer and suitable for a photoresist and a chemically amplifying type resist composition obtained therefrom.

The polymer has a number average molecular weight of from 1,000 to 1,000,000 and represented by the formula: —(M1)—(M2)—(A)—, wherein M1 is a structural unit having an acid-labile or acid-degradable functional group, M2 is a structural unit of fluorine-containing acryl ester, A is a structural unit derived from other copolymerizable monomer, the percent by mole ratio M1/M2 is 1 to 99/99 to 1 and the polymer comprises from 1 to 99% by mole of the structural unit M1, from 1 to 99% by mole of the structural unit M2 and from 0 to 98% by mole of the structural unit A1. The material for fluorine-containing base polymer comprises a fluorine-containing polymer having an acid-reactive group such as the above-mentioned polymer and is suitable for a photoresist, and the chemically amplifying type resist composition is obtained from those polymer and material.

A system configured for measurement of a specimen is provided. The system includes an optical subsystem configured to perform measurements of the specimen. The optical subsystem includes a light source that is configured to generate light having a relatively large number of separated spectral peaks with substantially no continuous background. In some embodiments, the light may include vacuum ultraviolet light, extreme ultraviolet light, and/or soft x-rays. A carrier medium is also provided that includes program instructions executable on a computer system to analyze data generated by a detector of an optical subsystem by partitioning the data into individual peaks spaced apart across a wavelength spectrum. Partitioning the data preferably corrects for spectrum shift, drift, stretching, shrinking, or a combination thereof at the detector. The individual peaks correspond to separated spectral peaks in light generated by a light source of the optical subsystem.

The invention provides a light promoting dehalogenation compound medicament/light combined method for removing halogenated organic matters in water, which relates to a method for removing halogenated organic matters in water. The invention overcomes various defects existing in the process of removing halogenated organic matters in water by using the current gas stripping method, activated carbon adsorption method, electrochemical removing method, advanced oxidation method, transition metal catalytic reduction method, vacuum ultraviolet technique or permeable reactive barrier technique. The method of the invention comprises the following steps: adding the light promoting dehalogenation compound medicament into the water containing halogenated organic matters for stirring, and then, carrying out optical radiation. The method of the invention does not need multi-stage removal, does not need expensive oxidants and catalysts, does not generate secondary pollution, does not need expensive vacuum ultraviolet light sources and high-energy radiation sources, can utilize common and cheap ultraviolet pop light sources or even expanding to visible light sources, improves the utilization efficiency of the light energy, can quickly remove the halogenated organic matters, can conveniently design a reactor, meets the requirements of various water bodies, is convenient in management, and can ensure the safety of the water quality.

The invention discloses a device for analyzing gas phase chemical components of cigarette smoke on line, which is characterized in that: a smoke-transmitting quartz capillary is arranged between the sucking barrel of a smoking machine and an on-line analytical mass spectrometer; two openings are formed on the end faces of the sucking barrel; one opening is a smoke analysis sampling opening; the other opening is a smoke importing and exporting opening which is connected with a three-way pipe; the three-way pipe is communicated with a cigarette holder which can continuously switch and a pipeline vacuum extracting opening at the same time; a vacuum ultraviolet ionization area is formed in the on-line analytical mass spectrometer; one port of the smoke-transmitting quartz capillary is connected with the smoke sampling opening on the sucking barrel; and the other port of the smoke-transmitting quartz capillary passes through the cavity wall of the on-line analytical mass spectrometer and enters the vacuum ultraviolet ionization area. By using the device for analyzing the gas phase chemical components of the cigarette smoke on line, the influence of the smoke of a last toke on the analysis result of the gas phase components of the smoke of a next toke can be effectively eliminated in the process of sucking a cigarette toke by toke, and the gas phase components of a single toke of the cigarette smoke can be automatically and continuously analyzed on line.

An ion migration spectroscope based on film sample feed-in consists of film sample feeding in unit, vacuum ultraviolet ray source, ionizing reaction region, ion gate, ion floating region and receiving electrode.